• 제목/요약/키워드: Surface process

검색결과 12,951건 처리시간 0.038초

GaN 증착용 사파이어 웨이퍼의 표면가공에 따른 압흔 특성 (Surface Lapping Process and Vickers Indentation of Sapphire Wafer for GaN Epitaxy)

  • 신귀수;황성원;김근주
    • 대한기계학회논문집A
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    • 제29권4호
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    • pp.632-638
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    • 2005
  • The surface lapping process on sapphire wafer was carried out for the epitaxial process of thin film growth of GaN semiconducting material. The planarization of the wafers was investigated by the introduction of the dummy wafers. The diamond lapping process causes the surface deformation of dislocation and micro-cracks. The material deformation due to the mechanical stress was analyzed by the X-ray diffraction and the Vickers indentation. The fracture toughness was increased with the increased annealing temperature indicating the recrystallization at the surface of the sapphire wafer The sudden increase at the temperature of $1200^{\circ}C$ was correlated with the surface phase transition of sapphire from a $-A1_{2}O_{3}\;to\;{\beta}-A1_{2}O_{3}$.

티타늄합금의 와이어 방전가공시 방전가공 조건의 영향 (Effect of EDM Conditions when wire-EDM for Titanium Alloy)

  • 김종업;왕덕현;이윤경;김원일
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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    • pp.281-286
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    • 2001
  • Titanium alloy conducted in this experimental study has superior corrosive resistant and is mainly used in aerospace, automotive and petro-chemical industries. It is also treated with important materials of domestic goods due to improvement of the standard of living. In this study specimens were processed in the wire EDM after annealing, solution treatment and aging. Results were obtained through repeated experments of main rough process and finish process with the change of process parameters. Processing characteristics such as surface hardness, surfaces roughness, shape of processed surface and components were measured. The results confirmed that the above mentioned elements were improved in accordance with the number of process. Therefore, the optimal wire EDM condition in accord with processing characteristics is proposed in this experiment.

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레이저 표면경화공정에서 신경회로망을 이용한 경화층깊이 추정 (Estimation of Hardened Depth in Laser Surface Hardening Processes Using Neural Networks)

  • 박영준;조형석;한유희
    • 대한기계학회논문집
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    • 제19권8호
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    • pp.1907-1914
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    • 1995
  • An on-line measurement of the workpiece hardened depth in laser surface hardening processes is very much difficult to achieve, since the hardening process occurs in depth wise direction. In this paper, the hardened depth is estimated using a multilayered neural network. Input data of the neural network are the surface temperatures at arbitrary chosen five surface points, laser power and traveling speed of laser beam torch. To simulate the actual hardening process, a finite difference method(FDM) is used to model the process. Since this model yields the calculation results of the temperature distribution around the workpiece volume in the vicinity of the laser torch, this model is used to obtain the network's training data and laser to evaluate the performance of the neural network estimator. The simulation results show that the proposed scheme can be used to estimate the hardened depth with reasonable accuracy.

고장력강 SNCM8재의 표면처리에 따른 피로강도 변화 (A Study on Fatigue Strength Influence of Surface Treatment on High Strength Steel SNCM8)

  • 강신현;차정환;배성인
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1996년도 춘계학술대회 논문집
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    • pp.697-703
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    • 1996
  • Fatigue strength of high strengthsteels are variable with many different surface treatment. It is well known that residual compressive stress retard fatigue crack growth rate(or arrest crack). High strngth steels are manufactured by following process. Heat treatment, shot peening and chromium plating process. High strength steel(HRC40 or above) which are subjected to fatigue load and dynamic load, chromium plated parts shall be peened in accordance with requirements and baked after plating. The purpose of this paper is to compare and discuss the influence of surface treatment and hydrogen embrittlement on fatigue strength of high strength steel. Therefore, fatigue test was performed to investigate influence of surface treatment. The results shows that shot peening is very effect method in creasing fatigue life and after plating, baking process is essential to prevent hydogen failure. In this paper, the experimental investigation is made to clarify the influence of shot peening conditions and baking process on fatigue strength of high strength steel.

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Co-Cr alloy의 전해연마에 따른 부식의 영향 (Effect of Electropolishing Process on Corrosion Resistance of Co-Cr Alloy)

  • 박제민;김완철
    • 한국표면공학회지
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    • 제43권4호
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    • pp.199-204
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    • 2010
  • The Co-Cr alloys have clinical histories as dental and orthopaedic implants, and recently as cardiovascular stent applications because they exhibit a high elastic modulus and radiopacity. In order to improve their mechanical and corrosion resistance, electropolishing is employed as the final process. Electropolishing, an anodic dissolution process in the transpassive state, is sensitively affected by process conditions such as current density, machining time, and electrode gap. In this study, the effect of the electropolishing conditions on surface roughness and corrosion resistance is investigated for Co-Cr alloys (L605). The most smooth surface is obtained when electropolishing is performed at 15-20 V for 15-30 sec with a electrode gap of 3.5 mm. It is found out that electropolishing reduces corrosion rate about one-tenth as much.

Surface Passivation Method for GaN UV Photodetectors Using Oxygen Annealing Treatment

  • Lee, Chang-Ju;Park, Hongsik
    • 센서학회지
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    • 제25권4호
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    • pp.252-256
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    • 2016
  • Epitaxially grown GaN layers have a high surface state density, which typically results in a surface leakage current and a photoresponse in undesirable wavelengths in GaN optoelectronic devices. Surface passivation is, therefore, an important process necessary to prevent performance degradation of GaN UV photodetectors. In this study, we propose oxygen-enhanced thermal treatment as a simple surface passivation process without capping layers. The GaN UV photodetector fabricated using a thermal annealing process exhibits improved electrical and photoresponsive characteristics such as a reduced dark current and an enhanced photoresponsive current and UV-to-visible rejection ratio. The results of this study show that the proposed surface passivation method would be useful to enhance the reliability of GaN-based optoelectronic devices.

광반도체용 사파이어웨이퍼 기계연마특성 연구 (A Study on the Micro-lapping process of Sapphire Wafers for optoelectronic devices)

  • 황성원;신귀수;김근주;서남섭
    • 한국정밀공학회지
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    • 제21권2호
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    • pp.218-223
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    • 2004
  • The sapphire wafers for blue light emitting devices were manufactured by the implementation of the surface machining technology based on micro-tribology. This process has been performed by Micro-lapping process. The sapphire crystalline wafers were characterized by double crystal X-ray diffraction. The sample quality of crystalline sapphire wafer at surface has a full width at half maximum of 250 arcsec. This value at the surface sapphire wafer surfaces indicated 0.12${mu}m$ sizes. Surfaces of sapphire wafers were mechanically affected by residual stress and surface default. As a result, the value of surface roughness of sapphire wafers measured by AFM(Atom Force Microscope) was 2.1nm.

Al합금 PCD 선산가공에서 회귀분석에 의한 표면거칠기 예측 (Prediction of Surface Roughness on the PCD Tool Turned Aluminum Alloys by using Regression Analysis)

  • 이선우;이동주
    • 한국기계가공학회지
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    • 제11권3호
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    • pp.41-47
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    • 2012
  • Surface roughness is widely used as an index for processing degree of accuracy. Recently, regression analysis to predict the machining results are actively used to characterize a cutting operations. In the past, diamond machining had been used for ultra precision cutting operation, but now industrial diamond tools like PCD(Polycrystaline Diamond) has been widely used in ultraprecision machining of nonferrous metals. In this study, the authors focus on the effect of PCD tool property on the surface roughness of different types of aluminum alloy after cutting process by CNC operated lathe. Based on the regression analysis approach on a surface roughness data obtained by experiment, predictive analysis of surface roughness is effective to achieve better surface quality.

Al5083 PCD 선삭가공에서 회귀분석에 의한 표면거칠기 예측 (A Prediction of Surface Roughness on the PCD Tool Turned Al5083 by using Regression Analysis)

  • 이선우;이동주
    • 한국기계가공학회지
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    • 제11권6호
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    • pp.69-74
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    • 2012
  • Surface roughness is widely used as an index for processing degree of accuracy. Recently, regression analysis to predict the machining results are actively used to characterize a cutting operations. In the past, diamond machining had been used for ultra precision cutting operation, but now industrial diamond tools like PCD(Polycrystalline Diamond) have been widely used in ultraprecision machining of nonferrous metals. In this study, the authors focus on the effect of PCD tool property on the surface roughness of Al5083 aluminum alloy after cutting process by CNC operated lathe. Based on the regression analysis approach on a surface roughness data obtained by experiment, predictive analysis of surface roughness is effective to achieve better surface quality.

숫돌 마멸량에 따른 연삭가공물의 표면특성 (The Surface Characteristics of Workpiece by Wear of Wheel)

  • 하만경;곽재섭;곽태경
    • 동력기계공학회지
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    • 제6권1호
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    • pp.50-54
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    • 2002
  • The surface roughness is one of important parameters to obtain the high quality of products in grinding process. In precision components, it's level must be limited to a certain range. This study evaluated experimentally grinding characteristics of workpieces in the surface grinding process. The grinding forces were obtained to compare with the grindability of workpieces such as STD11, STS304 and STB2. The surface roughnesses on various workpieces were measured according to increasing the feed and the depth of cut. In addition, the wear amount of wheels according to the number of grinding were obtained. Also the grinding wheel and the ground surface were observed with a microscopic instrument.

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