• 대한전자공학회논문지SD
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• 제38권10호
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• pp.678-686
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• 2001

CaAs metal semiconductor field effect transistor (MESFET) 소자의 전달컨덕턴스 분산 (transconductance dispersion) 현상과 게이트 누설 전류의 원인을 capacitance deep level transient spectroscopy (DLTS) 측정을 이용하여 해석하였다. DLTS 스펙트럼에서는 활성화 에너지가 각각 0.65×0.07 eV와 0.88 × 0.04 eV인 두개의 표면 결함과 0.84 × 0.01 eV의 활성화 에너지를 갖는 EL2를 관찰하였다. 전달컨덕턴스 분산 측정 결과, 전달컨덕턴스는 5.5 Hz ∼ 300 Hz의 주파수 영역에서 감소하였다. 전달컨덕턴스 분산을 온도의 함수로 측정한 결과, 온도가 증가할수록 전이 주파수는 증가하였고 전이 주파수의 온도 의존성으로부터 0.66 ∼ 0.02 eV의 활성화 에너지를 구할 수 있었다. 게이트 누설 전류 측정에서는 0.15 V 이하의 게이트 전압에서 순 방향과 역 방향 게이트 전압이 일치하는 오믹 전류-전압 특성을 나타내었고 게이트 누설 전류의 온도 의존성으로부터 구한 활성화 에너지는 0.63 ∼ 0.01 eV로 계산되었다. 서로 다른 방법으로 구한 활성화 에너지의 비교로부터 표면 결함 H1이 주파수에 따라서 감소하는 전달컨덕턴스 분산 및 게이트 누설 전류의 원인임을 알 수 있었다.

• 한국지하수토양환경학회지:지하수토양환경
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• 제20권1호
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• pp.41-55
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• 2015

Monitoring of $CO_2$ release through the ground surface is essential to confirm the safety of carbon storage projects. We conducted a feasibility study of the multi-channel surface-soil $CO_2$-concentration monitoring (SCM) system as a soil $CO_2$ monitoring tool with a small scale injection test. The background concentrations showed the distinct diurnal variation. The negative relation of $CO_2$ with temperature and the low $CO_2$ concentrations during the day imply that surface-soil $CO_2$ depends on photosynthesis and respiration. After 4.2 kg of $CO_2$ injection (1 m depth for 29 minutes), surface-soil $CO_2$ concentrations increased in the all five chambers, which were located less than 2.8 m of distance from each other. The $CO_2$ concentrations seem to be recovered to the background around 4 hours after the injection ended. To determine the leakage, the data from Chamber 2 and 5 with low increase rates were used for statistical analyses. Coefficient of variation for 30 minutes ($CV_{30min}$.) is efficient to determine a leakage signal, with reflecting the fast change in $CO_2$ concentrations. Consequently, SCM and $CV_{30min}$ could be applied for an efficient monitoring tool to detect $CO_2$ release through the ground surface. Also, this study provides ideas for establishing action steps after leakage detection.

• 터널과지하공간
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• 제28권4호
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• pp.372-386
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• 2018

뒷채움한 작업장의 공기질은 채움재의 양생기간 및 이후에 걸쳐 현저히 악화된다. 복합탄산염 기반의 채움재로 뒷채움한 채굴적으로부터 장기간에 걸친 NH3 및 CO2의 유출은 작업공간 내부에서 뿐만 아니라 지표상에서도 관찰된다. 가행광산에서는 가스의 유출은 작업환경을 급격히 악화시키므로 오염된 공간을 희석 시키기 위한 충분한 양의 통기량의 공급, 그리고 유해 가스 유출과 확산을 제어하기 위한 통기방안의 연구가 필요하다. 본 연구는 채움공간내 가스제어를 위한 압력균형 통기기술의 적용성 연구를 목적으로 한다.

• JSTS:Journal of Semiconductor Technology and Science
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• 제14권5호
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• pp.601-608
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• 2014

In this paper, we have characterized the electrical properties related to gate leakage current in AlGaN/GaN MISHFETs with varying the thickness (0 to 10 nm) of $Al_2O_3$ gate insulator which also serves as a surface protection layer during high-temperature RTP. The sheet resistance of the unprotected TLM pattern after RTP was rapidly increased to $1323{\Omega}/{\square}$ from the value of $400{\Omega}/{\square}$ of the as-grown sample due to thermal damage during high temperature RTP. On the other hand, the sheet resistances of the TLM pattern protected with thin $Al_2O_3$ layer (when its thickness is larger than 5 nm) were slightly decreased after high-temperature RTP since the deposited $Al_2O_3$ layer effectively neutralizes the acceptor-like states on the surface of AlGaN layer which in turn increases the 2DEG density. AlGaN/GaN MISHFET with 8 nm-thick $Al_2O_3$ gate insulator exhibited extremely low gate leakage current of $10^{-9}A/mm$, which led to superior device performances such as a very low subthreshold swing (SS) of 80 mV/dec and high $I_{on}/I_{off}$ ratio of ${\sim}10^{10}$. The PF emission and FN tunneling models were used to characterize the gate leakage currents of the devices. The device with 5 nm-thick $Al_2O_3$ layer exhibited both PF emission and FN tunneling at relatively lower gate voltages compared to that with 8 nm-thick $Al_2O_3$ layer due to thinner $Al_2O_3$ layer, as expected. The device with 10 nm-thick $Al_2O_3$ layer, however, showed very high gate leakage current of $5.5{\times}10^{-4}A/mm$ due to poly-crystallization of the $Al_2O_3$ layer during the high-temperature RTP, which led to very poor performances.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2003년도 추계학술발표회초록집
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• pp.119-119
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• 2003

Plasma polymerized organic thin films were deposited on Si(100) glass and Copper substrates at 25 ∼ 100 $^{\circ}C$ using cyclohexane and ethylcyclohexane precursors by PECVD method. In order to compare physical and electrochemical properties of the as-grown thin films, the effects of the RF plasma power in the range of 20∼50 W and deposition temperature on both corrosion protection efficiency and physical properties were studied. We found that the corrosion protection efficiency (P$\_$k/), which is one of the important factors for corrosion protection in the interlayer dielectrics of microelectronic devices application, was increased with increasing RF power. The highest P$\_$k/ value of plasma polymerized ethylcyclohexane film (92.1% at 50 W) was higher than that of the plasma polymerized cyclohexane film (85.26% at 50 W), indicating inhibition of oxygen reduction. Impedance analyzer was utilized for the determination of I-V curve for leakage current density and C-V for dielectric constants. To obtain C-V curve, we used a MIM structure of metal(Al)-insulator(plasma polymerized thin film)-metal(Pt) structure. Al as the electrode was evaporated on the ethylcyclohexane films that grew on Pt coated silicon substrates, and the dielectric constants of the as-grown films were then calculated from C-V data measured at 1㎒. From the electrical property measurements such as I-V ana C-V characteristics, the minimum dielectric constant and the best leakage current of ethylcyclohexane thin films were obtained to be about 3.11 and 5 ${\times}$ 10$\^$-12/ A/$\textrm{cm}^2$ and cyclohexane thin films were obtained to be about 2.3 and 8 ${\times}$ 10$\^$-12/ A/$\textrm{cm}^2$.

• 한국정밀공학회지
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• 제22권3호
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• pp.29-37
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• 2005

In this study, the control of the free surface deformation of a magnetic fluid for the change in electromagnetic force is discussed. The free surface of magnetic fluid is formed by the balance of surface force, gravity, pressure difference, magnetic normal pressure and magnetic body force. Magnetic fluid in characteristics of fluid adjusted to the opposite direction of the gravity direction. Thus, the device of a magnetic fluid proposed the complete zero-leakage sealing, oscillator for surface control, boundary layer control, MHD, flow control, flow using magnetic levitation system and surface actuator. This study show the deformation of surface rise due to the intensity of the magnetic field and possibility of two-dimensional control of magnetic fluid through the feedback data of hall sensor.

• International Journal of Fluid Machinery and Systems
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• 제2권3호
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• pp.223-231
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• 2009

Experimental investigations were conducted for the internal flows of the axial flow stator and diagonal flow rotor. Corner separation near the hub surface and the suction surface of stator blade are mainly focused on. For the design flow rate, the values of the axial velocity and the total pressure at stator outlet decrease between near the suction surface and near the hub surface by the influence of corner wall. For the flow rate of 80-90% of the design flow rate, the corner separation of the stator between the suction surface and the hub surface is observed, which becomes widely spread for 80% of the design flow rate. At rotor outlet for 81% of the design flow rate, the low axial velocity region grows between near the suction surface of rotor and the casing surface because of the tip leakage flow of the rotor.

• Restorative Dentistry and Endodontics
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• 제21권1호
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• pp.321-338
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• 1996

The purpose of this study was to evaluate the effect of moistening and air-drying of acid conditioned dentin and enamel on the marginal microleakage. In this study, Class V cavity were prepared on both buccal and lingual surface of sixty extracted human premolars with cementum margin. These specimens were randomly devided into three groups and three dentin adhesives(Scotchbond Multi-Purpose, All bond 2, Prisma Universal Bond 3) were applied to each group. The specimens in each group were subdevided into four groups (Wet/primed, Dry/primed, Wet/not primed, Dry/not primed) and the etched dentin and enamel surface were treated these four surface treatments prior to the placement of a bonding agent or adhesive. Wet/primed group was simply blot-dried with a damp facial tissue before primer placement ; Dry/primed group was air dried for 30 seconds before the placement of a primer ; Wet/not primed group and Dry/not primed group were not primed after blot dried and air dried for 30 seconds each group. The bonding agent and composite resin were applied for each group. All specimens were exposed to 500 cycle of thermal stress. Specimens were placed in a silver nitrate solution and then sectioned buccolingually through the center of the restoration. The dye penetrations of the specimens were observed with a stereo microscope. The statistical test were applied to the results using a one way analysis variance (ANOVA) and Duncan's multiple range test. The aspects of silver ion penetration into the resin/dentin interface were examined under scanning electron microscopy. The results were as follows. 1. In all groups, the enamel margin showed significantly lower leakage value than the cementum margin (p<0.05). 2. Regardless of various surface treatment and dentin adhesives, there was no significant difference at the enamel margins (p>0.05). 3. At the dentin margins, the leakage values of Dry/not primed group showed significantly higher than that of the other groups (p<0.05). The leakage values of Wet/primed group showed significantly lower than that of the other groups, but, there was no significant difference between Wet group and Dry group. 4. There was no significantly difference between the dentin adhesives regarding the surface treatments in all groups(p>0.05). 5. On the backscatterd scanning electron microscopy observation, the penetration of the silver ion occured at the bonding resin/dentin interface. In the Wet/primed group, resindentin hybrid zone and resin penetration into the dentin was observed. The resin tags were compactively formed to a thickness of $3\sim4{\mu}m$ at the upper part of dentinal tubules. In the Dry/primed group, the thickness of the hybrid zone and the diameter, depth of the resin tags diminished. In the Non-primed groups, the hybrid zone was not identified and few resin tag was observed. There was the gap formation in the resin/dentin interface.

• 센서학회지
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• 제25권4호
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• pp.252-256
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• 2016

Epitaxially grown GaN layers have a high surface state density, which typically results in a surface leakage current and a photoresponse in undesirable wavelengths in GaN optoelectronic devices. Surface passivation is, therefore, an important process necessary to prevent performance degradation of GaN UV photodetectors. In this study, we propose oxygen-enhanced thermal treatment as a simple surface passivation process without capping layers. The GaN UV photodetector fabricated using a thermal annealing process exhibits improved electrical and photoresponsive characteristics such as a reduced dark current and an enhanced photoresponsive current and UV-to-visible rejection ratio. The results of this study show that the proposed surface passivation method would be useful to enhance the reliability of GaN-based optoelectronic devices.

• 대한치과보존학회:학술대회논문집
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• 대한치과보존학회 2003년도 제120회 추계학술대회 제 5차 한ㆍ일 치과보존학회 공동학술대회
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• pp.572-572
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• 2003

There were attempts to reduce the micro leakage and surface roughness of resin composite. One of them is surface sealing. The purpose of this study was to compare the effect of materials, specifically developed for surface sealing, on microleakage and surface roughness in Class V composite restorations. Twenty five standardized Class V cavity preparations were made on the facial surface of extracted human premolars and were randomly assigned to 5 groups. The teeth were restored with Z-250 resin composite after applying Single Bond adhesive system.(중략)