• 열처리공학회지
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• 제22권5호
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• pp.307-311
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• 2009

In this study, TiCrN films were deposited on STS 316 Land Si (100) wafer by inductively coupled plasma (ICP) assisted D.C. magnetron sputtering. The effect R.F. power for ICP discharge on the mechanical properties of TiCrN films was investigated. XRD, XPS and FE-SEM were used for the structure analysis. Also the Micro-Knoop hardness tester and profilometer were used for measuring hardness of coatings and film stress respectively. As increasing the R.F. power for ICP discharge, thickness of coating was decreased from 1633 nm to 1288 nm but hardness was increased about $Hk_{5g}$ 4200 at 400 W. All of the XRD patterns showed (111), (200) and (220) peaks of TiCrN films. Surface morphology was studied using the profilometer. FE-SEM was used to know morphology and cross-section of the films. Structure of the films was changed dense as increased ICP power.

• 대한금속재료학회지
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• 제50권5호
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• pp.395-400
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• 2012

In this study, we have investigated the surface morphology of hydroxyapatite (HA) coated Ti alloy surface using pulsed laser plating. The HA (tooth ash) films were grown by pulsed KrF excimer laser, film surfaces were analyzed for topology, chemical composition, crystal structure and electrochemical behavior. The Ti-6Al-4V alloy showed ${\alpha}$ and ${\beta}$ phase, Cp-Ti showed ${\alpha}$ phase and the HA coated surface showed HA and Ti alloy peaks. The HA coating layer was formed with $1-2{\mu}m$ droplets and grain-like particles, particles which were smaller than the HA target particle, and the composition of the HA coatings were composed of Ca and P. From the electrochemical test, the pitting potential (1580 mV) of HA coated Ti-6Al-4V alloy was higher than those of Cp-Ti (1060 mV) and HA coated Cp-Ti (1350 mV). The HA coated samples showed a lower current density than non-HA coated samples, whereas, the polarization resistance of HA coated samples showed a high value compared to non-HA coated samples.

• 접착 및 계면
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• 제21권4호
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• pp.143-155
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• 2020

Sol-Gel 공정을 통해서 제조되는 유-무기 하이브리드 화합물들은 방청 코팅, 방빙 코팅(Anticing), 자가 세정 코팅, 반사 방지 코팅 등과 같은 기능성 코팅 재료로 널리 사용되어져 왔다. 특히 소수성 코팅 표면을 제조하기 위해서는 코팅표면의 표면에너지가 낮고 코팅 표면의 조도를 제어가 요구된다. 표면에너지와 표면 조도를 조절하는 전형적인 공정은 in-situ fabrication 공정, 'Pre-fluorinating/Post-roughening', 'Pre-roughening/ Post-fluorinating이다. 본 연구에서는 in-situ fabrication 공정인 Particle-Binder 공정을 이용해서 소수성 코팅표면을 제조하였다. 3관능기 유기실란화합물과 불소 함유 유기실란 화합물과의 가수분해 및 축합반응을 통해 제조된 불소함유 유-무기 하이브리드를 바인더로 사용하여서 무기물 나노입자와 혼합하여 소수성 코팅액을 제조하고 유리 기재 위에 스핀코팅 후 열건조하여서 코팅막을 제조하였다. 바인더인 유-무기 하이브리드 화합물의 불소 함유 실란화합물의 첨가량, 첨가순서, 무기물 나노입자 첨가량에 따른 코팅막의 물성 변화를 조사하였다. 분석결과 불소 함량이 10 wt%인 유-무기 하이브리드 화합물(GPTi-HF10)을 바인더로 사용하여서 제조된 코팅막이 가장 소수성이 우수하였으며 수접촉각은 (107.52 ± 1.6°), 이 바인더와 무기물 나노입자의 무게비가 1:3인 경우(GPTi-HF10-MS 3.0)에 가장 높은 수접촉각(130.84±1.99°)을 나타내었다.

• 한국산학기술학회논문지
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• 제18권10호
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• pp.771-776
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• 2017

모바일 디스플레이 및 태양전지의 커버글라스에는 반사방지 코팅 및 셀프클리닝과 같은 기능성 코팅이 필요하다. 최근 들어 나방 눈 또는 연꽃 잎과 같은 자연의 기능성 표면을 모사하여 공학적으로 응용하고자하는 많은 연구가 수행되었다. 특히 실리카 나노입자를 이용한 반사방지 기능성 코팅은 빛의 투과를 증가시키며, $TiO_2$ 광촉매 코팅은 셀프클리닝 기능성 필름에 적용되어왔다. 본 연구에서는 $SiO_2/TiO_2$ 나노입자의 박막 코팅에 의한 투명 발수 반사방지 코팅을 sol-gel 공정과 dip-coating 공정으로 글라스 기판 위에 제조하였다. 기능성 코팅의 표면형상 의존성을 원자힘현미경, 접촉각 측정 및 UV-visible 분광광도계 분석으로 조사하였다. 그 결과 $TiO_2$ 나노입자의 코팅은 가시광선 영역에서 투과율을 저하시키지 않고 기판인 슬라이드 글라스와 비슷한 수준의 높은 평균 광 투과율을 나타내었다. 또한 7nm $SiO_2$/7nm $TiO_2$ 나노입자의 이중층 기능성 코팅은 접촉각 $110^{\circ}$의 투명 발수 표면 특성을 나타내었으며, 가시광선 영역에서 기판인 슬라이드 글라스 보다 2.3% 높은 평균 투과율의 향상을 나타내었다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.216-216
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• 1999

The usage of a stationary plasma thruster (SPT) ion source, invented previously for space application in Russia, in experiments with surface modifications and film deposition systems is reported here. Plasma in the SPT is formed and accelerated in electric discharge taking place in the crossed axial electric and radial magnetic fields. Brief description of the construction of specific model of SPT used in the experiments is presented. With gas flow rate 39ml/min, ion current distributions at several distances from the source are obtained. These was equal to 1~3 mA/$\textrm{cm}^2$ within an ion beam ejection angle of $\pm$20$^{\circ}$with discharge voltage 160V for Ar as a working gas. Such an extremely high ion current density allows us to obtain the Ti metal films with deposition rate of $\AA$/sec by sputtering of Ti target. It is shown a possibility of using of reactive gases in SPT (O2 and N2) along with high purity inert gases used for cathode to prevent the latter contamination. It is shown the SPT can be operated at the discharge and accelerating boltages up to 600V. The results of presented experiments show high promises of the SPT in sputtering and surface modification systems for deposition of oxide thin films on Si or polymer substrates for semiconductor devices, optical coatings and metal corrosion barrier layers. Also, we have been tried to establish in application of the modeling expertise gained in electric and ionic propulsion to permit numerical simulation of additional processing systems. In this mechanism, it will be compared with conventional DC sputtering for film microstructure, chemical composition and crystallographic considerations.

• 한국광학회지
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• 제16권5호
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• pp.476-478
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• 2005

전자선 증착기를 이용하여 $1.3{\mu}m$ 중심 파장의 파브리-페로 에탈론을 $Al_{2}O_3$와 a-Si 박막 쌍으로 증착하였다. 제작된 에탈론의 투과율 및 반사율 스펙트럼을 측정하여, 공진 파장에서 투과 반치폭이 ${\sim}12.1\;nm$이며 피네세(finesse) 값은 53임을 알았다. $Al_{2}O_3$ 단일박막의 광학 상수는 타원분광기법으로 측정하였다. $Al_{2}O_3$와 a-Si 박막 에탈론의 측정을 통하여 a-Si 박막의 굴절률은 각각 실수부 3.120, 허수부 0.002로 측정하였다. 이러한 박막 쌍은 $1.3{\mu}m$ 파장 표면방출레이저의 출력 반사경으로 사용 가능하다.

• 한국표면공학회지
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• 제34권5호
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• pp.414-420
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• 2001

A 30-kV plasma immersion ion implantation setup (P $I^3$) has been equipped with a self-developed 6'-magnetron to perform hard coatings with enhanced adhesion by P $I^3$D(P $I^3$ assisted deposition) process. Using ICP source with immersed Ti antenna and reactive magnetron sputtering of Ti target in $N_2$/Ar ambient gas mixture, the TiN films were prepared on Si substrates at different pulse bias and ion-to-atom arrival ratio ( $J_{i}$ $J_{Me}$ ). Prior to TiN film formation the nitrogen implantation was performed followed by deposition of Ti buffer layer under A $r^{+}$ irradiation. Films grown at $J_{i}$ $J_{Me}$ =0.003 and $V_{pulse}$=-20kV showed columnar grain morphology and (200) preferred orientation while those prepared at $J_{i}$ $J_{Me}$ =0.08 and $V_{pulse}$=-5 kV had dense and eqiaxed structure with (111) and (220) main peaks. X-ray diffraction patterns revealed some amount of $Ti_{x}$ $N_{y}$ in the films. The maximum microhardness of $H_{v}$ =35 GN/ $M^2$ was at the pulse bias of -5 kV. The P $I^3$D technique was applied to enhance wear properties of commercial tools of HSS (SKH51) and WC-Co alloy (P30). The specimens were 25-kV PII nitrogen implanted to the dose 4.10$^{17}$ c $m^{-2}$ and then coated with 4-$\mu\textrm{m}$ TiN film on $Ti_{x}$ $N_{y}$ buffer layer. Wear resistance was compared by measuring weight loss under sliding test (6-mm $Al_2$ $O_3$ counter ball, 500-gf applied load). After 30000 cycles at 500 rpm the untreated P30 specimen lost 3.10$^{-4}$ g, and HSS specimens lost 9.10$^{-4}$ g after 40000 cycles while quite zero losses were demonstrated by TiN coated specimens.s.

• Bulletin of the Korean Chemical Society
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• 제29권5호
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• pp.1038-1042
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• 2008

Mono and multilayer TiO2(Fe, $PEG_{600}$) films were deposited by the dip-coating on $SiO_2$/glass substrate using sol-gel method. In an attempt to improve the antibacterial properties of doped $TiO_2$ films, the influence of the iron oxides and polyethilenglycol ($PEG_{600}$) on the morphological, optical, surface chemical composition and biological properties of nanostructured layers was studied. Complementary measurements were performed including Spectroscopic Ellipsometry (SE), Scanning Electron Microscopy (SEM) coupled with the fractal analysis, X-Ray Photoelectron Spectroscopy (XPS) and antibacterial tests. It was found that different concentrations of Fe and $PEG_{600}$ added to coating solution strongly influence the porosity and morphology at nanometric scale related to fractal behaviour and the elemental and chemical states of the surfaces as well. The thermal treatment under oxidative atmosphere leads to films densification and oxides phase stabilization. The antibacterial activity of coatings against Escherichia Coli bacteria was examined by specific antibacterial tests.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.156.1-156.1
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• 2016

Nickel sulfide (NiS) is one of the most promising candidates as an electrode material for supercapacitors due to its good capacitive properties, high electrical conductivity and low cost. In addition to the development of the new electrode materials, nanostructuring the electrode surface is one of the main issues in enhancing the capacitive performance of the supercapacitors because the increased surface area can improve the charge transfer and energy storage processes occurring at the electrode surface. However, most nanofabrication techniques require complicated and delicate nanoprocesses, and hence are not suitable for practical use. In this work, we developed a simple method to fabricate nanostructured NiS electrodes by depositing NiS onto $TiO_2$ nanoparticles. First, $TiO_2$ nanoparticles were spin-coated on a fluorine-doped tin oxide (FTO) substrate, and then NiS layers were deposited onto the $TiO_2$ nanoparticles by consecutive dip-coatings in the solutions containing nickel and sulfur precursors. This nanostructured NiS electrode showed significantly improved capacitive properties compared to the electrode of NiS films deposited without $TiO_2$ nanoparticles. The asymmetric full-cell supercapacitor with this nanostructured NiS electrode and activated carbon electrode was also fabricated and investigated.

• 한국세라믹학회지
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• 제47권1호
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• pp.61-65
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• 2010

Ultrathin atomic layer deposition (ALD) coatings were found to enhance the performance of lithium-ion batteries (LIBs). Previous studies have demonstrated that $LiCoO_2$ cathode powders coated with metal oxides with thicknesses of $\sim100-1000{\AA}$ grown using wet chemical techniques improved LIB performance. In this study, $LiCoO_2$ powders were coated with conformal $Al_2O_3$ ALD films with thicknesses of only $\sim3-4{\AA}$ established using 2 ALD cycles. The coated $LiCoO_2$ powders exhibited a capacity retention of 89% after 120 charge-discharge cycles in the 3.3~4.5 V (vs. $Li/Li^+$) range. In contrast, the bare $LiCoO_2$ powders displayed only a 45% capacity retention. This dramatic improvement may result from the ultrathin $Al_2O_3$ ALD film acting to minimize Co dissolution or to reduce surface electrolyte reactions.