• 제목/요약/키워드: Substitute gas

검색결과 146건 처리시간 0.027초

반도체·디스플레이 탄소중립을 위한 PECVD 챔버세정용 NF3대체가스 개발연구 (Research Progress on NF3 Substitute Gas of PECVD Chamber Cleaning Process for Carbon Neutrality)

  • 조세윤;홍상진
    • 반도체디스플레이기술학회지
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    • 제22권4호
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    • pp.72-75
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    • 2023
  • Carbon neutrality has been emerged as important mission for all the manufacturing industry to reduce energy usage and carbon emission equivalent. Korean semiconductor and display manufacturing industries are also in huge interest by minimize the energy usage as well as to find a less global warming product gases in both etch and cleaning. In addition, Korean government is also investing long term research and development plan for the safe environment in various ways. In this paper, we revisit previous research activities on carbon emission equivalent and current research activities performed in semiconductor process diagnosis research center at Myongji University with respect to the reduction of NF3 usage for the PECVD chamber cleaning, and we present the analytical result of the exhaust gas with residual gas analysis in both 6 inches and 12 inches PECVD equipment. The presented result can be a reference study of the development of new substitution gas in near future to compare the cleaning rate of the silicon oxide deposition chamber.

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Numerical analysis on the welding residual stress and fracture toughness of the heavy thick steel welded joints by welding processes

  • Bang, HanSur;Bang, HeeSeon
    • Journal of Welding and Joining
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    • 제33권2호
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    • pp.32-39
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    • 2015
  • This study examined the welding residual stress and fracture toughness of 78mm thick steel electro gas welding (EGW) and flux cored arc welding (FCAW) welded joints by numerical analyses of the thermal elasto-plastic behavior and fracture toughness(KIC). The residual stress, fracture toughness characteristics and production mechanism on the welded joints were clarified. Moreover, the effects of the welding process (EGW and FCAW) on the welding residual stresses and fracture toughness of welded joints were evaluated. The results showed that the new welding process (EGW) appears to be an effective substitute for the existing welding process (FCAW) in a thick steel plate with high strength.

LPG 연료기관의 성능특성에 관한 연구 (A Study on Performance Characteristics in a LPG Fueled Engine)

  • 조기현;백태실;백이;이정택
    • Journal of Advanced Marine Engineering and Technology
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    • 제25권6호
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    • pp.1203-1210
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    • 2001
  • This study was carried out to develop an engine for off-road vehicles especially for farm tractors using the liquefied petroleum gas (LPG) which is known as a source of energy having good potential of substitute fuel for diesel engine because of its economical advantage and low pollutant materials after combustion. The study was focused on develop an engine of high in specific power output, low in specific fuel consumption and emission of pollutants. A series of teat was dope on the engine - various laboratory tests to analyze performance of the engine and actual field tests with the engine installed on a farm tractor as a power source.

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ANALYSIS OF THE FIXED BED REACTOR FOR DME SYNTHESIS

  • Song, Dae-Sung;Ahn, Sung-Joon;Cho, Won-Jun;Park, Dal-Keun;Yoon, En-Sup
    • 한국가스학회:학술대회논문집
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    • 한국가스학회 2007년도 춘계학술발표회 논문집
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    • pp.27-32
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    • 2007
  • Dimethyl Ether (DME, $CH_3OCH_3$) is the simplest ether and is considered as one of the leading candidates in the quest for a substitute fur petroleum-based fuels. In this work, we analyzed the one-step synthesis of DME in a shell and tube type fixed bed reactor and carried out a simulation with a one-dimensional, steady state model of a heterogeneous catalyst bed, while taking into consideration the heat and mass transfer between the catalyst pellets and reactants gas and the effectiveness factor of the catalysts, together with the reactor cooling through the reactor tube wall. The reactor simulation was carried out under steady state condition and we compared the simulation results with the experimental data obtained from operations of a pilot-scale reactor and found good agreement between them.

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고주파 유도가열된 조선용 강판의 기계적 특성 연구 (A Study on the Mechanical Properties of Heated Plates by Induction Heating System)

  • 현충민;이명수;조시훈;장태원
    • Journal of Welding and Joining
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    • 제32권1호
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    • pp.47-52
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    • 2014
  • Due to of high intensity, lower noise and easy controllability of the heat, induction heating system became well known. Induction heating method has been suggested as substitute for the gas heat source and adopted in the automation of curved hull forming system. In this study, an investigation was accomplished to find the effects on the change of material properties when the induction heating was applied on the mild steel plate. Plates were heated using weaving method to get sufficiently heat affected zone and then cooled with water or in the air. The mechanical properties of the heated plate were evaluated. As results, the tensile test, impact test and microstructures satisfied the class rule.

폐자기를 사용한 인조석재의 품질평가 (Quality Property of the Artificial Stone Using the Waste Porcelain)

  • 유용진;이상수;송하영
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2015년도 춘계 학술논문 발표대회
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    • pp.171-172
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    • 2015
  • Recently, it is the global warming phenomenon because of the greenhouse gas exhaustion caused by and the environment problem is serious. And it is the situation where the problem of the exhaustion of resource because of the indiscriminate picking of the that is the raw material of the cement, limestone and natural aggregate are emphasized. In addition, thus the cement reduction amount of use and substitute material research is the urgent actual condition with the gas emission, which here it is generated in conducting compression molding in the building stone manufacturing process performance degradation phenomenon and fire resistance, and problem of the durability. Therefore, in this research, the waste porcelain is applied to the artificial stone and the durability property of the artificial stone according to it tries to be investigated.

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폐자기를 사용한 마그네시아 인산염 세라믹(MPC) 인조석재의 내마모특성 (Abrasion Resistance Property of the Magnesia Phosphate Ceramics(MPC) Artificial Stone Using the Waste Porcelain)

  • 유용진;이상수;송하영
    • 한국건축시공학회:학술대회논문집
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    • 한국건축시공학회 2014년도 추계 학술논문 발표대회
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    • pp.51-52
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    • 2014
  • Recently, it is the global warming phenomenon because of the greenhouse gas exhaustion caused by and the environment problem is serious. And it is the situation where the problem of the exhaustion of resource because of the indiscriminate picking of the that is the raw material of the cement, limestone and natural aggregate are emphasized. In addition, thus the cement reduction amount of use and substitute material research is the urgent actual condition with the gas emission, which here it is generated in conducting compression molding in the building stone manufacturing process performance degradation phenomenon and fire resistance, and problem of the durability. Therefore, in this research, because of being the magnesia phosphate ceramics, the waste porcelain is applied and the anti-wearing character of the artificial stone according to it tries to be investigated.

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EGR Cooler 대체용 Vortex Tube의 에너지 분리 현상에 관한 실험적 연구 (Experimental Study on the Energy Separation of the Vortex Tube for EGR Cooler)

  • 김창수;박성영
    • 한국산학기술학회논문지
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    • 제11권1호
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    • pp.55-60
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    • 2010
  • 고압의 가스를 이용하여 고온 가스와 저온 가스를 분리하거나 입자상 물질의 분리에 사용 할 수 있는 장치인 볼텍스 튜브의 에너지 분리 특성을 적용하여 자동차의 EGR Cooler 대체장치의 기본 설계 자료를 구축하기 위하여 실험을 수행하였다. 설계를 위한 기초 자료를 확보하기 위하여, 볼텍스 튜브의 입구 압력, 저온출구 및 고온출구압력 변화에 따른 에너지 분리 특성을 분석하였다. 공급압력이 상승할수록 에너지 분리 효과가 상승하였으며, 최고온도는 저온유량비가 약 0.85 에서, 최저온도는 저온유량비가 약 0.35 에서 발생하였다. 볼텍스 튜브의 고온측 출구온도는 고온측 및 저온측 출구압력에 영향을 받으며, 저온측 출구온도는 출구압력 변화에 독립적인 온도변화 특성을 나타내었다. 본 연구의 결과는 자동차의 EGR Cooler 대체장치의 기본 설계 자료로 응용될 수 있을 것이다.

인공적혈구의 제조 및 이용 (Synthesis and Use of Artificial Red Cells)

  • 하종식;조응행;김구자
    • The Korean Journal of Physiology
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    • 제24권1호
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    • pp.15-26
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    • 1990
  • Hemoglobin was purified from the outdated human red blood cells. Phospholipids were purified from egg yolk and stored in chloroform. The artificial red blood cells (hemosome) were prepared by encapsulation of hemoglobin with phospholipid mutilayer using rotary vacuum evaporator. The shape and size of hemosomes were measured by phase contrast microscope and image analyzer. The function of hemosomes was tested by measuring oxygen dissociation curve using blood gas analyzer. In order to test whether hemosomes are useful as blood substitute they were infused into rats of which one third of total blood were drawn. The results obtained are summarized at followings. 1) Hemosomes were spherical shape and their mean diameter was 0.7 um. 2) Oxygen dissociation curve of hemosomes showed the same figure as that of normal red blood cells. 3) All rats given 1/3 transfusion with hemosomes survived until sacrificed whereas three of four rats given 1/3 transfusion with saline died within 1 hour and the rest of them died within 24 hours.

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유동층 반응기에서 함티탄자철광의 선택염소화 반응 (Selective Chlorination of Iron from Titaniferrous Magnetite in a Fluidized Bed Reactor)

  • 이상순;이철태
    • 공업화학
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    • 제3권3호
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    • pp.451-463
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    • 1992
  • 유동층 반응기에서 함티탄자철광의 염소화 반응에 의해 함티탄자철광중의 철분만을 선택적으로 분리할 수 있는 염소화 조건과 아울러 rutile 대용품의 제조 가능성을 조사하였다. 염소화 반응의 적정조건은 반응온도 $950^{\circ}C$, 반응시간 2시간, 함티탄자철광에 대한 환원제 petroleum coke의 무게비 0.12 그리고 염소가스의 유속은 5cm/sec이었다. 이 반응조건하에서 얻어진 반응잔사는 $TiO_2$함량 70%이며 X-선 회전분석 결과 rutile로 확인되는 rutile 대용품이었다.

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