• 제목/요약/키워드: Stick-Slip Behavior

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CMP에서의 스틱-슬립 마찰특성에 관한 연구 (A Study on the Characteristics of Stick-slip Friction in CMP)

  • 이현섭;박범영;서헌덕;박기현;정해도
    • 한국전기전자재료학회논문지
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    • 제18권4호
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    • pp.313-320
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    • 2005
  • Stick-slip friction is one of the material removal mechanisms in tribology. It occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction monitoring of chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. In this paper, an attempt to show the similarity between stick-slip friction and the friction of CMP was conducted. The prepared hard pa(IC1000/Suba400 stacked/sup TM/) and soft pad(Suba400/sup TM/) were tested with SiO₂ slurry. The friction force was measured by piezoelectric sensor. According to this experiment, it was shown that as the head and table velocity became faster, the stick-slip time shortened because of the change of real contact area. And, the gradient of stick-slip period as a function of head and table speed in soft pad was more precipitous than that of hard one. From these results, it seems that the fluctuating friction force in CMP is stick-slip friction caused by viscoelastic behavior of the pad and the change of real contact area.

유압 텔레스코픽 붐의 스틱-슬립에 대한 거동해석 (Behavior analysis on stick-slip of hydraulic telescopic boom)

  • 백일현;정재연;김신
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2002년도 제35회 춘계학술대회
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    • pp.296-303
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    • 2002
  • Tribology, in other words, interacting surfaces in relative motion, is essential in life. The relative motion on surfaces may cause some problems with heat, vibration, noise, and so on. Unwanted vibrations by friction, which may arise during the operation of machines, are costly in terms of reduction of performance and service life. All these phenomena inolve stick-slip. The telescopic boom operations involves stick-slip oscillations like slideways. Unwanted stick-slip oscillations on telescopic boom operations cannot achieve smooth sliding and many developers of that machine makes a lot of effort to remove or reduce it. So this paper presents stick-slip oscillation with pressure of the hydraulic cylinder which drives booms, and attempts a theoretical approach for the numerical analysis for its stick-slip condition.

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마찰력 규명을 통한 상한절환 오차 모델링 (Quadrant Protrusion error Modeling Through the Identification of Friction)

  • 김민석
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 1999년도 추계학술대회 논문집 - 한국공작기계학회
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    • pp.371-376
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    • 1999
  • Stick-slip friction is present to some degree in almost all actuators and mechanisms and is often responsible for performance limitations. Simulation of stick-slip friction is difficult because of strongly nonlinear behavior in the vicinity of zero velocity. A straightforward method for representing and simulating friction effects is presented. True zero velocity sticking is represented without equation reformulation or the introduction of numerical stiffness problems. Stick-slip motion is investigated experimentally, and the fundamental characteristics of the stick-slip motion are clarified. Based on these experimental results, the characteristics of static in the period of stick and kinetic friction in the period of slip are studied concretely so as to clarify the stick-slip process.

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프레팅 조건 하에서 스틱-슬립 현상이 마찰력에 미치는 영향 (Influence of Stick-Slip Behavior on the Friction Force under Fretting Conditions)

  • 이영제;정성훈;용석주
    • Tribology and Lubricants
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    • 제21권1호
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    • pp.16-20
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    • 2005
  • Friction and wear characteristics between two steel surfaces under fretting condition are investigated experimentally. The fretting damage caused by low-amplitude oscillatory sliding can be classified into three regimes of gross-slip, mixed-slip and partial-slip due to stick-slip phenomenon. One of the most important characteristics of fretting wear is the transition from gross-slip to mixed-slip. This study was focused on getting the degree of stick-slip out of the friction transition under fretting condition. Fretting wear is divided into three conditions of gross-slip/mixed-slip/partial-slip. The criteria for the division are friction and displacement amplitude, wear scar morphology and dissipated energy. In this test, friction force and displacement were measured for detecting the transition from mixed-slip to gross-slip and qualitatively predicting the degree of the wear.

Stick-Slip 마찰이 있는 비선형 진동 시스템의 규명에 관한 연구 (A Study on the Identification of Nonlinear Vibration System with Stick Slip Friction)

  • 허인호;이병림;이재응
    • 소음진동
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    • 제10권3호
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    • pp.451-456
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    • 2000
  • In this paper a discrete time model for the identification of nonlinear vibration system with stick-slip friction is proposed. The proposed model can handle the highly nonlinear behavior of the friction such as stick-slip phenomenon and Stribeck effect. The basic idea of the proposed model is as follows : If the nonlinearity of the system can be predicted as a simple function then this nonlinear function term cab be directly used in the discrete time model. By doing this the number of nonlinear terms in the model can be much less than those of NARMAX model which is widely used nonlinear discrete model. The simulation result shows that the proposed model can estimate the response of the nonlinear vibration system with stick-slip friction very well with less computational effort.

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마찰 저감을 위한 비극성 첨가제에 따른 acrylonitrile butadiene styrene계 플라스틱의 stick-slip 이음 저감 연구 (Study on the reduction of stick-slip noise in acrylonitrile butadiene styrene-based plastics using non-polar additives to reduce friction)

  • 여상준;정예원;최성욱;김효준;박건욱;손민영
    • 한국음향학회지
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    • 제43권1호
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    • pp.49-59
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    • 2024
  • 최근 환경규제가 강화되고 고유가 문제로 인하여 전기차 시장이 점차 커지고 있으며 또한 내연기관 자동차에서도 엔진의 Noise, Vibration, Harshness(NVH) 관련 소음이 저감되고 외부에서 유입되는 소음의 차폐 기술이 발전됨에 따라 Buzz, Squeak, Rattle(BSR) 이음의 민감도가 증가하는 추세이다. 본 연구에서는 자동차의 Panoramic Curved Display(PCD)에서 발생하는 Stick-slip 이음과 고분자 플라스틱의 표면에너지 및 극성 성분과의 상관관계에 대하여 분석하였다. 극성 고분자 소재인 Acrylonitrile Butadiene Styrene(ABS)와 PolyCarbonate-Acrylonitrile Butadiene Styrene(PC-ABS)를 대상으로 컴파운드 소재를 제작하여 평가하였다. 결과적으로 고분자 플라스틱의 극성성분이 3.86 mN/m 이상일 때 Stick-slip 거동이 발생하였으며, 시간에 따른 마찰 거동에서 absolute transition slope가 증가할수록 Stick-slip의 이음 가능성이 증가하고 마찰계수의 값 차이가 클수록 Stick-slip 이음의 세기가 증가하였다.

다수의 연마입자를 고려한 CMP 공정의 Stick-Slip 고찰 (Stick-slip in Chemical Mechanical Polishing Using Multi-Particle Simulation Models)

  • 정소영;성인하
    • Tribology and Lubricants
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    • 제34권6호
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    • pp.279-283
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    • 2018
  • In this study, we investigate the behavior of abrasive particles and change of the stick-slip pattern according to chemical mechanical polishing (CMP) process parameters when a large number of abrasive particles are fixed on a pad. The CMP process is simulated using the finite element method. In the simulation, the abrasive grains are composed of those used in the actual CMP process. Considering the cohesion of the abrasive grains with the start of the CMP process, abrasive particles with various sizes are fixed onto the pad at different intervals so that stick-slip could occur. In this analysis, we determine that when the abrasive particle size is relatively large, the stick-slip period does not change as the pressure increases while the moving speed is constant. However, if the size of the abrasive grains is relatively small, the amount of deformation of the grains increases due to the elasticity of the pad. Therefore, the stick-slip pattern may not be observed. As the number of abrasive particles increases, the stick-slip period and displacement decrease. This is consistent with the decrease in the von Mises yield stress value on the surface of the wafer as the number of abrasive grains increases. We determine that when the number of the abrasive grains increases, the polishing rate, and characteristics are improved, and scratches are reduced. Moreover, we establish that the period of stick-slip increases and the change of the stick-slip size was not large when the abrasive particle size was relatively small.

회전익 항공기 전륜착륙장치 단속거동 현상 개선연구 (An Improvement Study on Stick-Slip Behavior of Nose Landing Gear for Rotary Wing Aircraft)

  • 최재형;장민욱;이윤우;윤종진
    • 한국항공운항학회지
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    • 제25권3호
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    • pp.61-67
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    • 2017
  • The Nose Landing Gear(NLG) of Rotary Wing Aircraft is an essential equipment in Landing System for pilot to perform a flight mission. It supports the fuselage at ground and absorbs the impact from the ground when landing, thereby, these functions sustain operational capability for pilot and crew. However, the A aircraft caused stick-slip behavior when it was stationed on the ground. Therefore, this paper summarizes pilot comment in operation which are classified by cause of occurrence and the troubleshooting process about each comment. It also describes design improvements which was derived from troubleshooting and suggests verification results of flight test.

Fretting Wear Mechanisms of Zircaloy-4 and Inconel 600 Contact in Air

  • Kim, Tae-Hyung;Kim, Seock-Sam
    • Journal of Mechanical Science and Technology
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    • 제15권9호
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    • pp.1274-1280
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    • 2001
  • The fretting wear behavior of the contact between Zircaloy-4 tube and Inconel 600, which are used as the fuel rod cladding and grid, respectively, in PWR nuclear power plants was investigated in air. In the study, number of cycles, slip amplitude and normal load were selected as the main factors of fretting wear. The results indicated that wear increased with load, slip amplitude and number of cycles but was affected mainly by the slip amplitude. SEM micrographs revealed the characteristics of fretting wear features on the surface of the specimens such as stick, partial slip and gross slip which depended on the slip amplitude. It was found that fretting wear was caused by the crack generation along the stick-slip boundaries due to the accumulation of plastic flow at small slip amplitudes and by abrasive wear in the entire contact area at high slip amplitudes.

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자기장에 따른 자기유변탄성체의 스틱 슬립 현상 연구 (Stick-slip Characteristics of Magnetorheological Elastomer under Magnetic Fields)

  • 연성룡;이광희;김철현;이철희;최종명
    • Tribology and Lubricants
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    • 제31권1호
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    • pp.6-12
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    • 2015
  • This paper investigates the stick-slip characteristic of magnetorheological elastomer (MRE) between an aluminum plate and the surface of the MRE. MRE is a smart material and it can change its mechanical behavior with the interior iron particles under the influence of an applied magnetic field. Stick-slip is a movement of two surfaces relative to each other that proceeds as a series of jerks caused by alternate sticking from friction and sliding when the friction is overcome by an applied force. This special tribology phenomenon can lead to unnecessary wear, vibration, noise, and reduced service life of work piece. The stick-slip phenomenon is avoided as far as possible in the field of mechanical engineering. As this phenomenon is a function of material property, applied load, and velocity, it can be controlled using the characteristics of MRE. MRE as a soft smart material, whose mechanical properties such as modulus and stiffness can be changed via the strength of an external magnetic field, has been widely studied as a prospective replacement for general rubber in the mechanical domain. In this study, friction force is measured under different loads, speed, and magnetic field strength. From the test results, it is confirmed that the stick-slip phenomenon can be minimized under optimum conditions and can be applied in various mechanical components.