• 제목/요약/키워드: Standard Profile

검색결과 630건 처리시간 0.031초

고종횡비 실리콘 트랜치 건식식각 공정에 관한 연구 (Profile control of high aspect ratio silicon trench etch using SF6/O2/BHr plasma chemistry)

  • 함동은;신수범;안진호
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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    • pp.69-69
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    • 2003
  • 최근 trench capacitor, isolation trench, micro-electromechanical system(MEMS), micro-opto-electromechanical system(MOEMS)등의 다양한 기술에 적용될 고종횡비(HAR) 실리콘 식각기술연구가 진행되어 지고 있다. 이는 기존의 습식식각시 발생하는 결정방향에 따른 식각률의 차이에 관한 문제와 standard reactive ion etching(RIE) 에서의 낮은 종횡비와 식각률에 기인한 문제점들을 개선하기 위해 고밀도 플라즈마를 이용한 건식식각 장비를 사용하여 고종횡비(depth/width), 높은 식각률을 가지는 이방성 트랜치 구조를 얻는 것이다. 초기에는 주로 HBr chemistry를 이용한 연구가 진행되었는데 이는 식각률이 낮고 많은양의 식각부산물이 챔버와 시편에 재증착되는 문제가 발생하였다. 또한 SF6 chemistry의 사용을 통해 식각률의 향상은 가져왔지만 화학적 식각에 기인한 local bowing과 같은 이방성 식각의 문제점들로 인해 최근까지 CHF3, C2F6, C4F8, CF4등의 첨가가스를 이용하여 측벽에 Polymer layer의 식각보호막을 형성시켜 이방성 구조를 얻는 multi_step 공정이 일반화 되었다. 이에 본 연구에서는 SF6 chemistry와 소량의 02/HBr의 첨가가스를 이용한 single_step 공정을 통해 공정의 간소화 및 식각 프로파일을 개선하여 최적의 HAR 실리콘 식각공정 조건을 확보하고자 하였다.

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다공 동축 버너를 이용한 순산소 연소 시스템에 관한 연구-PDF 연소 모델을 이용한 수치해석 (A Study on Oxy-Fuel Combustion System with Multi-Jet Burner-Numerical Simulation with PDF Combustion Model)

  • 김현준;최원영;배수호;홍정구;신현동
    • 대한기계학회논문집B
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    • 제32권7호
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    • pp.504-512
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    • 2008
  • The characteristics of nonpremixed oxy-fuel flame in a multi-jet burner were experimentally and numerically investigated. The overall flow rate of fuel and oxygen was fixed, and the oxygen feeding ratio (OFR) was varied by 0.25, 0.5, and 0.75. The results of numerical simulation were compared with the measured results which are temperature profile and direct flame observation. The probability density function (PDF) model was applied accounting to the description between turbulence and chemistry, and standard ${\kappa}-{\varepsilon}$ model was used for turbulent flow field. Equilibrium assumption is very reasonable due to fast chemistry of the oxy-fuel combustion. Thus, the equilibrium calculation based on Gibbs free energy minimization was guaranteed to generate the solution of the oxy-fuel combustion. The result was obtained by numerical simulation. The predicted radial temperature profiles were in good agreement with the measured results. The flame length was shorten and was intensified with the decrease of OFR because the mixture of fuel and oxidizer are fast mixed and burnt. The maximum temperature became lower as the OFR increased, as a consequence of large flame surface area.

NIR의 도입에 따른 항만국통제 대응방안 (A Study on the Preparedness of Port State Control for the Enforcement of NIR)

  • 김주형
    • 한국항해항만학회:학술대회논문집
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    • 한국항해항만학회 2014년도 춘계학술대회
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    • pp.63-64
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    • 2014
  • 2014년 1월부터 아 태지역 Tokyo-MOU에서는 새로운 점검체제인 NIR를 도입하여 항만국통제(PSC)를 시행하고 있다. NIR의 가장 큰 특징은 기존 TF방식과 달리 회사의 안전관리수준까지 평가하여 선박의 위험도 수준을 고위험, 표준위험, 저위험 선박 등 3단계로 분류하고 그 수준에 따라 PSC 점검주기를 달리하는 것이다. 특히, 국제안전경영(ISM)코드의 안전관리체제(SMS)와 관련된 결함과 6개이상의 결함수, 출항정지이력 등은 선박의 위험도수준 평가에 큰 영향을 미치게 되었다.

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침투에 대한 불포화 사면의 신뢰성 해석 (Reliability-Based Analysis of Slope Stability Due to Infiltration)

  • 조성은;이종욱;김기영;전제성
    • 한국지반공학회:학술대회논문집
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    • 한국지반공학회 2005년도 지반공학 공동 학술발표회
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    • pp.649-654
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    • 2005
  • Shallow slope failures in residual soil during periods of prolonged infiltration are common over the world. One of the key factors that dominate slope stability is hydrological response associated with infiltration. Hence, the soil-water profile during rainfall infiltration into unsaturated soil must me examined to evaluate slope stability. However, the hydraulic response of unsaturated soil is complicated by inherent uncertainties of the soil hydraulic properties. This study presents a methodology for assessing the effects of parameter uncertainty of hydraulic properties on the response of a analytical infiltration model using first-order reliability method. The unsaturated soil properties are considered as uncertain variables with means, standard deviations, and marginal probability distributions. Sensitivities of the probabilistic outcome to the basic uncertainties in the input random variables are provided through importance factors.

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불규칙성 박판제품의 프로그래시브 다이설계를 위한 자동화된 CAD시스템 (An automated process planning 8 die design using expert system for blanking or piercing of irregular shaped sheet metal products)

  • 김재훈;김철;최재찬;김병민
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1995년도 추계학술대회 논문집
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    • pp.214-218
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    • 1995
  • Much labor, an exceedingly long lead time, and the skills of experienced engineers are required for press tool design. To reduce such problems, several CAD systems for blanking or piercing have been developed. This paper describes a computer-aided design for blanking or piercing of irregularly shaped sheet metal products. An approach to the system is based on knowledge base rules. The process planning & die design system is designed by considering several factors, such as complexity of blank geometry, punch profile, and availability of press equipment and standard parts. Therefore, after checking a production feasibility for irregular shaped sheet metal products, this system which is implemented strip layout module can carry out a process planning and generate the strip layout in graphic forms. Also this system implemented die layout module can carry out a die design for each process which is obtained form the result of an automated process planning and generate parts and assembly drawing of a die set.

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Ag 파우더 특성에 따른 터치 패널용 그라비어 오프셋 인쇄의 전도성 페이스트의 제조 및 물성 연구 (A Study on the Characteristics and Property of Gravure Off-set Printing Conductive Paste for Touch Panel by Ag Powder Characteristic)

  • 송재형;장아람;김성빈;남수용
    • 한국인쇄학회지
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    • 제29권2호
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    • pp.45-58
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    • 2011
  • Gravure off-set printing recently is used in electronics display market. This method has advantages of mass production and high printing speed. It is also fine pattern can be implemented. We have manufactured low-curable conductive Ag pastes for gravure off-set printing. When printing, the pastes be used different silver powder shape because of the printing characteristics. The pastes were prepared with silver powder by silver powder shape and size, epoxy resin, solvent and homogenized on a standard three-roll mill. And the pastes exhibited a shear-thinning flow at viscosity profile. Moreover the adhesive strength and resistivity of silver film had a good characteristics. With the manufactured paste in this study, touch panel had is manufactured and it had $4{\times}10-5{\Omega}.cm$.

봄철 강릉지역에서 발생하는 강풍에 대한 연구 (Severe Downslope Windstorms of Gangneung in the Springtime)

  • 장욱;전혜영
    • 대기
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    • 제18권3호
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    • pp.207-224
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    • 2008
  • Severe downslope windstorms observed at Gangneung, Korea in the springtime during the last 30 years are studied to understand their generation mechanisms. 92 severe wind cases are selected for which the maximum instantaneous wind speeds exceed two standard deviation of total mean plus ($18.7ms^{-1}$). They are categorized into the three mechanisms (hydraulic jump, partial reflection, and critical-level reflection) proposed in previous studies based on the flow condition, which is calculated using the wind and temperature profile observed at one upstream rawinsonde station, Osan. Among the three, partial reflection is found to be the most frequent mechanism for the last 30 years (1976 - 2005). To understand the role of inversion in generating severe downslope windstorms, horizontal velocity perturbation was calculated analytically for the atmosphere with an inversion layer. It turned out that the intensity of downslope wind was increased by inversion layer of specific heights, which are well matched with the observations. For better understanding the generation mechanisms, two-dimensional numerical simulations are conducted for the 92 severe wind cases using the ARPS model. In most simulations, surface wind speed exceeds the value of the severe-wind criterion, and each simulated case can be explained by its own generation mechanism. However, in most simulations, the simulated surface wind speed is larger than the observed, due to ignoring the flow-splitting effect in the two-dimensional framework.

Recent Advances in Titania-based Composites for Photocatalytic Degradation of Indoor Volatile Organic Compounds

  • Raza, Nadeem;Kim, Ki-Hyun;Agbe, Henry;Kailasa, Suresh Kumar;Szulejko, Jan E.;Brown, Richard J.C.
    • Asian Journal of Atmospheric Environment
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    • 제11권4호
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    • pp.217-234
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    • 2017
  • Indoor air pollutants can cause severe health problems, specifically in terms of toxicological impacts on human. Every day, a complex mixture of many air pollutants is emitted from various sources and subject to atmospheric processes that can create varied classes of pollutants such as carboxylic acids, aldehydes, ketones, peroxyacetyl nitrate, and hydrocarbons. To adhere to indoor air quality standards, a number of techniques such as photocatalytic oxidation of various volatile organic compounds (VOCs) have been employed. Among these techniques, titania ($TiO_2$) based photocatalytic reactions have proven to be the best benchmark standard approach in the field of environmental applications. Over the last 45 years, $TiO_2$-based photocatalytic reactions have been explored for the degradation of various pollutants. This review discusses the indoor air quality profile, types of indoor pollutants, available indoor air cleaning approaches, and performance of $TiO_2$-based catalysts. Finally, we have presented the perspectives on the progress of $TiO_2$ induced photocatalysis for the purification of indoor air.

Numerical simulation for unsteady flow over marine current turbine rotors

  • Hassanzadeh, A. Reza;Yaakob, Omar bin;Ahmed, Yasser M.;Ismail, M. Arif
    • Wind and Structures
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    • 제23권4호
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    • pp.301-311
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    • 2016
  • The numerous benefits of Savonius turbine such as simple in structure, has appropriate self-start ability, relatively low operating velocity, water acceptance from any direction and low environmental impact have generated interests among researchers. However, it suffers from a lower efficiency compared to other types of water turbine. To improve its performance, parameters such flow pattern, pressure and velocity in different conditions must be analyzed. For this purpose, a detailed description on the flow field of various types of Savonius rotors is required. This article presents a numerical study on a nonlinear two-dimensional flow over a classic Savonius type rotor and a Benesh type rotor. In this experiment, sliding mesh was used for solving the motion of the bucket. The unsteady Reynolds averaged Navier-Stokes equations were solved for velocity and pressure coupling by using the SIMPLE (Semi-Implicit Method for Pressure linked Equations) algorithm. Other than that, the turbulence model using $k-{\varepsilon}$ standard obtained good results. This simulation demonstrated the method of the flow field characteristics, the behavior of velocity vectors and pressure distribution contours in and around the areas of the bucket.

고속도로 터널에 대한 전단면 발파 설계방안 연구 (Design guide for full-face blasting in highway tunnel)

  • 이상돈;최해문;이현구;류창하
    • 한국지반공학회:학술대회논문집
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    • 한국지반공학회 2004년도 춘계학술발표회
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    • pp.930-937
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    • 2004
  • In tunnel blasting, rock damage and overbreak at excavation limits are strongly related to stability of the tunnel and cost for rock support, and also affect to maintenance after tunnel construction. In this study, many field tests and measurements have been carried out in highway tunnels so that discordance between blast design and practical production blasting could be settled and actual methods of over break control could be proposed through the understanding of the problems in existing blasting patterns. Test blasting in tunnel was carried out many times in two tunnel sites. Also, long hole blasting longer than existing blasting pattern was executed for good grade of rock mass whose RMR value is more than 60. Using the results of test blasting, new standard blasting patterns for two lane tunnel were proposed. As a result of profile measurement after blasting, drilling is a major factor of overbreak. And then the methods for minimizing overbreak were adapted in new blasting patterns.

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