• Title/Summary/Keyword: Standard Processing

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GPU Based Feature Profile Simulation for Deep Contact Hole Etching in Fluorocarbon Plasma

  • Im, Yeon-Ho;Chang, Won-Seok;Choi, Kwang-Sung;Yu, Dong-Hun;Cho, Deog-Gyun;Yook, Yeong-Geun;Chun, Poo-Reum;Lee, Se-A;Kim, Jin-Tae;Kwon, Deuk-Chul;Yoon, Jung-Sik;Kim3, Dae-Woong;You, Shin-Jae
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.80-81
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    • 2012
  • Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.

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A Study of Detainees' Perceptions of the Detention Facilities of the Police Station and their Operation (경찰서 유치장 시설 및 운영에 관한 유치인의 인식연구)

  • Jung, Woo-Yeoul;Park, Dong-Kyun;Kim, Do-Kyun
    • Korean Security Journal
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    • no.13
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    • pp.423-449
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    • 2007
  • This research is to investigate the detention facilities of police stations and their real operations through the perceptions of detainees at police station cells and to present the policy suggestions for them. To fulfill the research, a questionnaire was made out on the basis of 'the Regulation on Detention and Escort for Suspects'. 'the Regulation on a Standard Plan for Detention Facilities' and 'the Regulation on the Lowest Standard to Treat Detainees' ; and detainees at 23 police station cells under the jurisdiction of Kyungbuk Local Police Agency were asked to answer it. Policy suggestions following from the result of the investigation of detainees' perceptions of the detention facilities of the police stations are as follows; Firstly, the structure of police station cells should be arranged in straight lines in order to take their human rights into consideration and more detention facilities are needed to be built in order to separate male, female, handicapped and juvenile inmates. Secondly, shower rooms and washrooms outside the cells should always be open to detainees whenever they need to be used. Thirdly, any detention facilities deficient in fire fighting equipment should have exit doors installed as soon as possible in case of an emergency and provide sufficient fire extinguishers considering the number of detainees and the size of the facilities. Fourthly, the detention facilities should have sufficient windows for ventilation and take necessary measures to obtain natural lighting instead of electric lighting. Fifthly, air conditioners should be equipped properly taking account of the number of detainees and the dimensions of the facilities. Policy suggestions according to the result of the investigation of detainees' perceptions of the operation of detention facilities of police stations are as follows; Firstly, the problem of operating the detention facilities must deal with worn-out facilities and measures to secure the budget should be taken as soon as possible. Secondly, considering that most detained suspects have difficulties in livelihood, daily necessaries must be issued to them. Thirdly, personal belongings deposited by inmates must be properly managed with the same documentation throughout the police station detention facilities. The number of female guards to take exclusive charge of the physical checkups and processing of female detainees should be increased. Also the facilities for handicapped detainees must be expanded, improved and managed properly. Fourthly, except for handcuffs and ropes to bind detainees in the detention facilities, helmets to prevent self-harm must be withdrawn. The budget to improve the quality of meal issued by the government must be urgently secured and the price of private food sent to detainees must be readjusted to be in line with the consumer price. Health and medical care and sanitation for detainees must be substantial, and also sunbathing and outdoor exercises should be allowed to detainees.

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Heavy Metals of Landfilled Biomass and Their Environmental Standard, Including CCA-treated Wood for Eco-housing Materials (방부처리 목재를 포함한 토양매립 바이오메스의 중금속 함량과 안전성 문제)

  • Lim, Kie-Pyo;Lee, Jong-Tak;Bum, Jung-Won
    • Journal of the Korean Wood Science and Technology
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    • v.34 no.4
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    • pp.37-45
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    • 2006
  • Recently, wood-framed houses has been built in the Korea for pension. Wood is good material for human healthy, while the construction lumbers are treated with preservative such as CCA (chromated copper arsenate), which contain some toxic elements for human body. However, if the waste woody biomass treated with various heavy metals, which has been collected from house construction or demolition, was fired in the field, and incinerated or landfilled after mass collection, such components will result in the toxic air pollutants in the burning or land fills, and spreaded into other areas. So the careful selection of wood and chemicals are required in advance for house construction, in particular, for environment-friendly housings. Therefore, this study was carried out to determine the content of toxic heavy metals in woody materials such as domestic hinoki and imported hemlock treated with CCA for housing materials, and the post-treated wood components such as organic fertilizer, sludge, dry-distilled charcoal and carbonized charcoal, to be returned finally into soil. The results are as follows. 1) The chemical analysis of toxic trace elements in various solid biomass required accurate control and management of laboratory environment, and reagents and water used, because of the error of data due to various foreign substances added in various processing and transporting steps. So a systematic analyzers was necessary to monitor the toxic pollutants of construction materials. 2) In particular, the biomass treated with industrial biological or thermal conditions such as sludge or charcoals was not fully dissolvable after third addition of $HNO_3$ and HF. 3) The natural woody materials such as organic fertilizer, sludge. and charcoals without any treatment of preservatives or heavy metal components were nontoxic in landfill because of the standard of organic fertilizers, even after thermal or biological treatments. 4) The CC A-treated wood for making the construction wood durable should not be landfilled, because of its higher contents of toxic metals than the criterion of organic fertilizer for agriculture or of natural environment. So the demolished waste should be treated separately from municipal wastes.

Balance of Power and the Relative Military Capacity - Empirical Analysis and Implication to North East Asia - (세력균형(power balance)에서의 군사력 수준과 동북아시아에 주는 함의)

  • Kim, Myung-soo
    • Strategy21
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    • s.38
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    • pp.112-162
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    • 2015
  • This study began to confirm or review the balance of power theory by applying scientific methods through experiential cases. Though there are several kinds of national power, this study supposes military power as a crucial power when it comes to war and peace. This research covered balance and imbalance through comparing relative military power between nations or nations' group. Comparison of relative military power can be achieved by statistically processing the values of which has been converted into the standard variables in same domain, then calculating the values of nation's power which has been synthesized different experiential factors. In addition, the criteria of experiential experiment is highly dedicated to European countries, USA, Japan prior to 1st and 2nd World War, as well as USA, Soviet Union and North East Asia during Cold War era. In addition, the balance of power theory has been redefined to review the action of the state upon the changes of power as mentioned in the theory. To begin with, the redefined theory states that relative level of military power between nations defines the consistency of peace and balance of power. If military power is enough to be on the range of level required to keep the power in equilibrium, peace and balance can be achieved. The opposite would unbalance the military power, causing conflicts. While the relative military level between nations change, nations seek to establish 'nations group' via military cooperation such as alliance, which also shift relative military power between nations group as well. Thus, in order to achieve balance of power, a nation seeks to strengthen its military power(self-help), while pursuing military cooperation(or alliance). This changes relative military power between nations group also. In other words, if there exists balance of power between nations, there is balance of power between nations group as well. In this theory, WWI and II broke out due to the imbalance of military force between nations and nations group, and reviewed that due to the balance of military force during the Cold War, peace was maintained. WWI was resulted from imbalance of military cooperation between two powerful states group and WWII was occurred because of the imbalance among the states. Peace was maintained from cooperation of military power and balance among the states during the Cold War. Imbalance among continental states is more threatening than maritime states and balance of power made by army force and naval force also is feasible. Also the outcomes of two variables are found military power balanced ratio of military power for balance is 67% when variable ratio of balance is 100% and standard value for balance is 0.86. Military power exists in a form of range. The range is what unstabilized the international system causing nations to supplement their military powers. These results made possible the calculation and comparison between state's military power. How balance of power inflicted war and peace has been studied through scientific reviews. Military conflict is highly possible upon already unbalanced military powers of North East Asian countries, if the US draws its power back to America. China and Japan are constantly building up their military force. On the other hand, Korean military force is inferior so in accordance to change of international situation state's survival could be threatened and it is difficult to achieve drastic increase in military force like Germany did. Especially constructing naval force demands lots of time; however but has benefit that naval force can overcome imbalance between continental states and maritime states.

Analysis of Prevalence and Survival pattern of Staphylococcus aureus from Dried Seasoned Fishes (조미건어포의 Staphylococcus aureus 오염도 및 생존패턴 분석)

  • Cho, Joon-Il;Lee, Soon-Ho;Choi, Jun-Hyuk;Choi, Eun-Jung;Hwang, In-Gyun
    • Journal of Food Hygiene and Safety
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    • v.26 no.4
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    • pp.366-369
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    • 2011
  • In this study, the contamination levels of total aerobic bacteria, E. coli, total coliform and S. aureus of seasoned dried fishes (SDF) in Korea were investigated. A total of 81 SDF samples were purchased randomly from 28 stores. Contamination range of total aerobic bacteria, total coliform and S. aureus were 150~1,700,000, 10~31,000 and 10~220 CFU/g, respectively. E. coli was detected in only one samples in the qualitative test. We have analyzed quantitatively Staphylococcal enterotoxins (SE-type A, C and D) produced by S. aureus contaminated in SDF using a TECRA kit and standard curve. The curve equation was Y = 0.1499 * X + 0.1183 and maximum amount of SEs in SDF was 0.71 ng/ml. Reduction speed of S. aureus in SDF stored at $37^{\circ}C$ was the highest among the samples stored for 8 days at different temperature of 7, 18 and $37^{\circ}C$. On the basis of the results, SDF in Korea can be contaminated by a variety of pathogenic bacteria. Therefore, precautionary measures are necessary for consumer protection, including the improvement of sanitary conditions in the processing plants in Korea.

Corporate Bond Rating Using Various Multiclass Support Vector Machines (다양한 다분류 SVM을 적용한 기업채권평가)

  • Ahn, Hyun-Chul;Kim, Kyoung-Jae
    • Asia pacific journal of information systems
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    • v.19 no.2
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    • pp.157-178
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    • 2009
  • Corporate credit rating is a very important factor in the market for corporate debt. Information concerning corporate operations is often disseminated to market participants through the changes in credit ratings that are published by professional rating agencies, such as Standard and Poor's (S&P) and Moody's Investor Service. Since these agencies generally require a large fee for the service, and the periodically provided ratings sometimes do not reflect the default risk of the company at the time, it may be advantageous for bond-market participants to be able to classify credit ratings before the agencies actually publish them. As a result, it is very important for companies (especially, financial companies) to develop a proper model of credit rating. From a technical perspective, the credit rating constitutes a typical, multiclass, classification problem because rating agencies generally have ten or more categories of ratings. For example, S&P's ratings range from AAA for the highest-quality bonds to D for the lowest-quality bonds. The professional rating agencies emphasize the importance of analysts' subjective judgments in the determination of credit ratings. However, in practice, a mathematical model that uses the financial variables of companies plays an important role in determining credit ratings, since it is convenient to apply and cost efficient. These financial variables include the ratios that represent a company's leverage status, liquidity status, and profitability status. Several statistical and artificial intelligence (AI) techniques have been applied as tools for predicting credit ratings. Among them, artificial neural networks are most prevalent in the area of finance because of their broad applicability to many business problems and their preeminent ability to adapt. However, artificial neural networks also have many defects, including the difficulty in determining the values of the control parameters and the number of processing elements in the layer as well as the risk of over-fitting. Of late, because of their robustness and high accuracy, support vector machines (SVMs) have become popular as a solution for problems with generating accurate prediction. An SVM's solution may be globally optimal because SVMs seek to minimize structural risk. On the other hand, artificial neural network models may tend to find locally optimal solutions because they seek to minimize empirical risk. In addition, no parameters need to be tuned in SVMs, barring the upper bound for non-separable cases in linear SVMs. Since SVMs were originally devised for binary classification, however they are not intrinsically geared for multiclass classifications as in credit ratings. Thus, researchers have tried to extend the original SVM to multiclass classification. Hitherto, a variety of techniques to extend standard SVMs to multiclass SVMs (MSVMs) has been proposed in the literature Only a few types of MSVM are, however, tested using prior studies that apply MSVMs to credit ratings studies. In this study, we examined six different techniques of MSVMs: (1) One-Against-One, (2) One-Against-AIL (3) DAGSVM, (4) ECOC, (5) Method of Weston and Watkins, and (6) Method of Crammer and Singer. In addition, we examined the prediction accuracy of some modified version of conventional MSVM techniques. To find the most appropriate technique of MSVMs for corporate bond rating, we applied all the techniques of MSVMs to a real-world case of credit rating in Korea. The best application is in corporate bond rating, which is the most frequently studied area of credit rating for specific debt issues or other financial obligations. For our study the research data were collected from National Information and Credit Evaluation, Inc., a major bond-rating company in Korea. The data set is comprised of the bond-ratings for the year 2002 and various financial variables for 1,295 companies from the manufacturing industry in Korea. We compared the results of these techniques with one another, and with those of traditional methods for credit ratings, such as multiple discriminant analysis (MDA), multinomial logistic regression (MLOGIT), and artificial neural networks (ANNs). As a result, we found that DAGSVM with an ordered list was the best approach for the prediction of bond rating. In addition, we found that the modified version of ECOC approach can yield higher prediction accuracy for the cases showing clear patterns.

Liver Splitting Using 2 Points for Liver Graft Volumetry (간 이식편의 체적 예측을 위한 2점 이용 간 분리)

  • Seo, Jeong-Joo;Park, Jong-Won
    • The KIPS Transactions:PartB
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    • v.19B no.2
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    • pp.123-126
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    • 2012
  • This paper proposed a method to separate a liver into left and right liver lobes for simple and exact volumetry of the river graft at abdominal MDCT(Multi-Detector Computed Tomography) image before the living donor liver transplantation. A medical team can evaluate an accurate river graft with minimized interaction between the team and a system using this algorithm for ensuring donor's and recipient's safe. On the image of segmented liver, 2 points(PMHV: a point in Middle Hepatic Vein and PPV: a point at the beginning of right branch of Portal Vein) are selected to separate a liver into left and right liver lobes. Middle hepatic vein is automatically segmented using PMHV, and the cutting line is decided on the basis of segmented Middle Hepatic Vein. A liver is separated on connecting the cutting line and PPV. The volume and ratio of the river graft are estimated. The volume estimated using 2 points are compared with a manual volume that diagnostic radiologist processed and estimated and the weight measured during surgery to support proof of exact volume. The mean ${\pm}$ standard deviation of the differences between the actual weights and the estimated volumes was $162.38cm^3{\pm}124.39$ in the case of manual segmentation and $107.69cm^3{\pm}97.24$ in the case of 2 points method. The correlation coefficient between the actual weight and the manually estimated volume is 0.79, and the correlation coefficient between the actual weight and the volume estimated using 2 points is 0.87. After selection the 2 points, the time involved in separation a liver into left and right river lobe and volumetry of them is measured for confirmation that the algorithm can be used on real time during surgery. The mean ${\pm}$ standard deviation of the process time is $57.28sec{\pm}32.81$ per 1 data set ($149.17pages{\pm}55.92$).

Adequate Standard Pot and Number of Plants Per Tree of Raising Seeding Pot on the Foxtail Millet Transplanting Culture in the Southern Province (남부지방 조 이식재배시 육묘폿트의 적정규격 및 주당본수)

  • Kim, Yong-Soon;Kim, Dong-Kwan;Choi, Jin-Gyung;Park, Heung-Gyu;Kim, Myeong-Seok;Shin, Hae-Ryoung;Choi, Gyung-Ju;Yun, Jong-Tag
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.60 no.1
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    • pp.23-28
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    • 2015
  • This study was performed to investigate the adequate standard pot and number of plants per tree of raising seeding pot on the foxtail millet transplanting culture in the southern province. Due to the various application of wellbeing-health food recently, for upbringing of the foxtail millet, millet and sorghum in minor cereals, R & D and policy support is being promoted actively. The foxtail millet growing season is so short from 90 to 130 days, and it is large variations for a growth temperature. The main results are as follows. When it comes to foxtail millet transplantation, seedling quality of 406 holes, 200 holes and 162 holes of raising seeding pot type were not all significant, and field rooting percentage is accounted for all 94 to 95%. Yield of a foxtail millet was exposed in 406holes 305 kg/10a>162holes 303 kg> 200holes 302 kg order, and it was no significance between test processing. When it's the raising seeding transplanting culture, in case of pot culture, 406holes pot culture were reduced the bed soil cost 63%, pot 50%, working hours 18% for 200holes pot. Transplanting seedling quality per a foxtail millet transplanting culture method, dry weight was high inclination as transplanting number of plant is less, and field rooting percentage displayed more than all 95%. Yield appeared to 2 plants seedling transplanting 315kg/10a> 3 plants seedling transplanting 304kg>1 plant seedling transplanting 256kg order. The projected cost per the pot-sort on the raising seeding transplanting culture of foxtail millet, the seedling transplanting culture of 406holes was reduced 40% percentages compared to 200holes as 76,230won/10a. As a result, 406holes pot and 2plants seedling transplanting culture, labor-saving culture was possible.

Development of Evaluation Index for Infection Control and Prevention at Dental Hospital and Its Validity Verification (치과의료기관 감염관리 평가지표 개발 및 타당성 검증)

  • Bae, Sung-Suk;Lee, Myung-Sun
    • Journal of dental hygiene science
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    • v.13 no.3
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    • pp.254-263
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    • 2013
  • This study is to develop an evaluation index for infection control and to verify its validity by examining each set of weighted data collected from 121 infection control personnel at dental hospitals who agreed to the preliminary survey and advisory. The study was conducted from 14th December, 2010 to 31st January, 2011, and PASW Statistics 18.0 and AMOS 5.0 had been used for the statistical data analysis. As a result of the study, five evaluation factors with 21 sub-indicators have been identified at structural level, eight evaluation factors with 32 sub-indicators at processing level, and one evaluation fact with five sub-indicators at resulting level, total 14 evaluation factors with 58 sub-indicators throughout all levels. The path analysis added on the result that 'standard precautions ($x_1$)', 'infection control support system ($x_2$)', 'internal and external characteristics ($x_3$)' are exogenous variables that affect on other variables, and 'standard infection control ($y_1$)','Organization equipment management handwashing ($y_2$)', 'environmental infection control ($y_3$), 'personal protective equipment ($y_4$)', 'waste and laundry management ($y_5$)' are endogenous variables that are infulenced by others. The standardized metrics are more needed than anything else when examining on infection control. This study attempts to develop proper dental infection control metrics adequately adjusted for domestic circumstances, and therefore to contribute to effective systematic management and decision-making in infection control.

Digital Hologram Compression Technique By Hybrid Video Coding (하이브리드 비디오 코팅에 의한 디지털 홀로그램 압축기술)

  • Seo, Young-Ho;Choi, Hyun-Jun;Kang, Hoon-Jong;Lee, Seung-Hyun;Kim, Dong-Wook
    • Journal of the Institute of Electronics Engineers of Korea SP
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    • v.42 no.5 s.305
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    • pp.29-40
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    • 2005
  • According as base of digital hologram has been magnified, discussion of compression technology is expected as a international standard which defines the compression technique of 3D image and video has been progressed in form of 3DAV which is a part of MPEG. As we can identify in case of 3DAV, the coding technique has high possibility to be formed into the hybrid type which is a merged, refined, or mixid with the various previous technique. Therefore, we wish to present the relationship between various image/video coding techniques and digital hologram In this paper, we propose an efficient coding method of digital hologram using standard compression tools for video and image. At first, we convert fringe patterns into video data using a principle of CGH(Computer Generated Hologram), and then encode it. In this research, we propose a compression algorithm is made up of various method such as pre-processing for transform, local segmentation with global information of object image, frequency transform for coding, scanning to make fringe to video stream, classification of coefficients, and hybrid video coding. Finally the proposed hybrid compression algorithm is all of these methods. The tool for still image coding is JPEG2000, and the toots for video coding include various international compression algorithm such as MPEG-2, MPEG-4, and H.264 and various lossless compression algorithm. The proposed algorithm illustrated that it have better properties for reconstruction than the previous researches on far greater compression rate above from four times to eight times as much. Therefore we expect that the proposed technique for digital hologram coding is to be a good preceding research.