• Journal of KSNVE
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• v.5 no.4
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• pp.483-492
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• 1995

For evaluation of rotational accuracy performance of high speed machine tool spindle system, the characteristics of main spindle and tool motion behavior are presented by means of three point accuracy testing method. The results of experiments and analyses are as follows: (1) The high speed spindle rotational accuracy can be evaluated by the combination of the spindle and tool motion behavior. (2) The spindle motion behavior increases up to more that 4 times the tool motion behavior. (3) For the influence of oil viscosity on spindle and tool taper application, 32 cSt of oil viscosity showed the most satisfactory result for rotational accuracy. (4) In order to improve the rotational accuracy of high speed machine tool spindle system, it is needed to reduce the combination error. This can be achieved by improving the working accuracy and supplying the proper lubrication with contact area at the spindle and tool.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.11
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• pp.2723-2729
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• 1993

Moire principles are applied to the measurement of the spindle radial error motion. As opposed to conventional techniques, no master cylinder or ball is needed in the measurement so that the offset and out-of-roundness errors of the master can be inherently eliminated. Two periodic circular gratings are used, one is made on the spindle and the other is held stationary on the reference frame. When the two gratings are seen superimposed during spindle rotation, an interference fringe pattern is observed from which the information on the eccentricity between the two gratings can be extracted with high precision. The optical design and fringe analysis techniques of a prototype measurement system are described in detail with exemplary measurement results.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.1005-1008
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• 1995

The spindle is a very important part of machine tool. The evaluation of spindle motion is required for improving the performance of machine tools. The evaluation tools have been developed for precison spindle by the reversal technique, and 3D error map motion of spindle is proposed. This technique makes us understand the total movement of spindle more easily. The proposed technique has been successfully applied to practical machine tools, giving high potentials for the spindle performance measurement.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.472-477
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• 2003

Spindle state monitoring is getting more and more important according to the technology trend of spindle that is accurate and automated. Spindle state monitoring is to measure the state of rotation vibrations. The spindle rotation error motion detected by sensing device includes rotation object's unbalance, external forced vibrations, shape error of spindle, as well as measuring error of monitoring device. In this paper, we have inspected the runout characteristics. Also, we introduce the way to exclude the runout element that appear while you monitor a spindle state.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.04a
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• pp.637-642
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• 1995

For measuring the error motion of ultra-precision spindle, eliminating the geometric errors is a must. Unless it is achieved, geometric errors will be dominant in data. Here, the roundness error and alignment error between spindle and sensor are to be removed. That's because typical error range of such spindle is muchless than geometric one. A capacitive transducer of cylidricalshape was developed, which takes full advantage of the spatial-averaging effect by using large area compared tpo the geometric error. This idea was first proposed by Chapman and here it is modified for better performance with nomical gap of 50 .mu. m and with newly designed guards which encompass the respective sensor to rectify the electrical field distribution in good shape. The measurement system is made to get the orbit of Ultra-Precision Air Spindle which is supposed to have its runout under 1 .mu. m. The Calibration data of this sensor is presented and the spindle orbit from 2000rpm to 5500rpm is showed. It is quite reasonable to use this sensor in the range of 60 .mu. m with an accuracy of several tens of nm.

• Journal of the Semiconductor & Display Technology
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• v.6 no.4
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• pp.23-27
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• 2007

Rotary stages in semiconductor, display industry and many other fields require challenging accuracy to perform their functions properly. Especially, Axis of rotation error on rotary system is significant; such as the spindle error motion of the aligner, wire bonder and inspector machine which result in the poor quality products. To evaluate and improve the performance of such precision rotary stage, undesired movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed. In this paper, we have measured the three translations and two tilt motions of the worm gear type spindle with high precision capacitive sensors. To obtain the radial error motion, we have used Donaldson's reversal technique. And the axial components of the spindle tilt error motion can be obtained accurately from the axial direction outputs of sensors by Estler face motion reversal technique. Further more we have designed and developed the sensor mounting jig with standard cylinder for reversal method.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.1
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• pp.78-84
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• 2014

The rotation of a spindle unit must be accurate for high-quality machining and to improve the quality of the machine tools.Therefore, the proper measurement of the rotation accuracy and ensuring a proper analysis are very important. Separate processes are necessary because spindle errors and roundness errors associated with the test balls can both factor into the measured rotation error values. We used three methods to discern test ball errors and analyzed which could be deemed as the most proper technique in a test of the rotation accuracy of the main spindle of a machine tool.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.2
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• pp.84-91
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• 2007

The radial error motion of a machine tool cutter/spindle system is critical to the dimensional accuracy of the parts to be machined. This paper presents an investigation into spindle run-out effects on cutting mark and surface roughness. We experimented the effects of spindle run-out on surface roughness in flat-end milling by cutting AL 7075 workpiece in various cutting conditions. In order to analyze the effects of run-out on the surface roughness, the spindle's radial error motions was measured by mounting a sphere target onto the spindle as a reference. From the experimental results, it was found that spindle un-out makes a directive effects on surface roughness in flat-end milling.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.108-114
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• 2007

A new cutting force estimating approach and machining state monitoring examples are presented which uses a cylindrical displacement sensor built into the spindle. To identify the tool-spindle system dynamics with frequency up to 2 kHz, a home-built electro-magnetic exciter is used. The result is used to build an algorithm to extract the dynamic cutting force signal from the spindle error motion; because the built-in spindle sensor signal contains both spindle-tool dynamics and tool-workpiece interactions. This sensor is very sensitive and can measure broadband signal without affecting the system dynamics. The main characteristic is that it is designed so that the measurement is irrelevant to the geometric errors by covering the entire circumferential area between the target and sensor. It is also very simple to be installed. Usually the spindle front cover part is copied and replaced with a new one with this sensor added. It gives valuable information about the operating condition of the spindle at any time. It can be used to monitor cutting force and chatter vibration, to predict roughness and to compensate the form error by overriding spindle speed or feed rate. This approach is particularly useful in monitoring a high speed machining process.

• Tribology and Lubricants
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• v.24 no.1
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• pp.34-43
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• 2008

In this paper, an actively controlled aerostatic bearing is studied to overcome the defects of air bearing such as low stiffness and damping coefficients. The actively controlled aerostatic bearing is composed of aerostatic bearings, non-contact type of displacement sensors, piezoelectric actuators and controllers. The cylindrical capacitance sensor (CCS) is used as the displacement sensor. The reason for using CCS instead of the commercial gap sensor is that it can give us the pure error motion of the spindle because it removes the roundness error or the geometric errors in the spindle. The controller is designed by the state space equation and quadratic optimal control theory. The characteristic data of the actively controlled aerostatic bearing system in the frequency domain are presented and the stiffness and damping coefficients of the bearing are mentioned. This paper shows the possibility to reduce the motion error up to 6000 rpm.