• 제목/요약/키워드: Spin on-Glass

검색결과 208건 처리시간 0.026초

비소 고상확산방법을 이용한 MOSFET SOI FinFET 소자 제작 (Fabrication of SOI FinFET devices using Aresnic solid-phase-diffusion)

  • 조원주;구현모;이우현;구상모;정홍배
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.133-134
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    • 2006
  • A simple doping method to fabricate a very thin channel body of the n-type fin field-effect-transistor (FinFET) with a 20 nm gate length by solid-phase-diffusion (SPD) process is presented. Using As-doped spin-on-glass as a diffusion source of arsenic and the rapid thermal annealing, the n-type source-drain extensions with a three-dimensional structure of the FinFET devices were doped. The junction properties of arsenic doped regions were investigated by using the $n^+$-p junction diodes which showed excellent electrical characteristics. Single channel and multi-channel n-type FinFET devices with a gate length of 20-100 nm was fabricated by As-SPD and revealed superior device scalability.

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Preparation and Characterization of White Phosphorescence Polymer Light Emitting Diodes Using PFO:Ir(ppy)3:MDMO-PPV Emission Layer

  • Park, Byung-Min;Chang, Ho-Jung
    • 마이크로전자및패키징학회지
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    • 제18권4호
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    • pp.79-83
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    • 2011
  • White phosphorescence polymer light emitting diodes (WPhPLEDs) with a glass/ITO/PEDOT:PSS/PFO:$Ir(ppy)_3$:MDMO-PPV/TPBI/LiF/Al structure were fabricated to investigate the effects of $Ir(ppy)_3$ doping concentrations on the optical and electrical properties of the devices. PFO, $Ir(ppy)_3$ and MDMO-PPV conjugated polymers as host and guest materials in the emission layer were spin coated at various concentrations of $Ir(ppy)_3$ ranging from 0.0 to 20.0 vol.%. As the concentration of $Ir(ppy)_3$ increased from 5.0 to 20.0 vol.%, the luminance and current efficiency values of the devices decreased clearly, which are attributable to the quenching effect at a high doping concentration. The maximum luminance and current density were 2850 $cd/m^2$ and 741 $mA/cm^2$, respectively for a WPhPLED with an $Ir(ppy)_3$ concentration of 5.0 vol.%. The CIE color coordinates were about x=0.33 and y=0.34 at 11V, showing a good white color.

Single Crystal Growth and Magnetic Properties of Mn-doped Bi2Se3 and Sb2Se3

  • Choi, Jeong-Yong;Lee, Hee-Woong;Kim, Bong-Seo;Choi, Sung-Youl;Choi, Ji-Youn;Cho, Sung-Lae
    • Journal of Magnetics
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    • 제9권4호
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    • pp.125-127
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    • 2004
  • We have grown Mn-doped $Bi_2Se_3$ and $Sb_2Se_3$ single crystals using the temperature gradient solidification method. We report on the structural and magnetic propertis of Mn-doped $Bi_2Se_3$ and $Sb_2Se_3$ compound semi-conductors. The lattice constants of several percent Mn-doped $Bi_2Se_3$ and $Sb_2Se_3$ were slightly smaller than those of the un-doped samples due to the smaller Mn atomic radius ($1.40 {\AA}$) than those of Bi ($1.60 {\AA}$) and Sb ($1.45 {\AA}$). Mn-doped $Bi_2Se_3$ and $Sb_2Se_3$ showed spin glass and paramagnetic properties, respectively.

Characteristics of GMR-SV Sensor for Measurement of Mineral Contents in Edible Water

  • Kim, Da-Woon;Lee, Ju-Hee;Kim, Min-Ji;Lee, Sang-Suk
    • Journal of Magnetics
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    • 제14권2호
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    • pp.80-85
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    • 2009
  • The mineral dissolution sensor system using GMR-SV and glass/Mg(200 nm) was prepared and characterized. The magnetic field sensitivity of GMR-SV to microscopic magnetic variation was about 0.8%/Oe. The change that occurs when Mg-film dissolves in water, the solubility of water, which is one of the basic properties of mineral water, was sensed by measuring the subtle variation of an electric current. In the case of edible water with Mg mineral added, bubbles were generated on the surface of the Mg film in the first 45 minutes, and the number of drops that were dissolved more rapidly than with the tap and DI waters later reduced to zero. For the edible water samples that each had different mineral Mg concentrations, the Mg solubility speed significantly differed. After injecting Mg film into the edible water, the magnetoresistance of the output GMR-SV signal decreased from a maximum of $45.4\;{\Omega}$ to a minimum of $43.6\;{\Omega}$. The measurement time was within 1 min, giving the rate of change ${\Delta}R/{\Delta}t=0.18\;{\Omega}/s$. This measurement system can be applied to develop a mineral Mg solubility GMR-SV sensor that can be used to sense the change from edible water to reduced alkali.

졸겔법에 의한 보론 포스파이드의 박막 증착 및 특성에 관한 연구 (Properties of Sol-Gel derived $B_{13}P_2$ Thin Films)

  • 김지원;정예초;전호승;임종현;김철주
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.165-166
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    • 2006
  • Boron phosphide thin films were prepared on the glass substrate from boron and phosphorous alkoxide precursors by sol-gel processing. Boron phosphide sol with equivalent ratio $(CH_3O_3)B$ : $C_{18}H_{15}P$ = 13 : 2 was selected. Films spin-coated at 4000 rpm for 30 s were coated uniformly. Decomposition and crystallization behavior were examined using DSC/TGA and XRD. The films were sintered at 250, 300 and $400^{\circ}C$. It was determined that crystal structure has a rhombohedral phase. The microstructure of thin film was observed using SEM. Thin films approximately showed a visible ray transmittance of 85 %.

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P-I-N 역구조 페로브스카이트 태양전지 응용을 위한 Nickel oxide 홀전달층의 열처리 온도 연구 (Annealing Temperature of Nickel Oxide Hole Transport Layer for p-i-n Inverted Perovskite Solar Cells)

  • 김기성;김미정;김효정;양정엽
    • Current Photovoltaic Research
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    • 제11권4호
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    • pp.103-107
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    • 2023
  • A Nickel oxide (NiOx) thin films were prepared via sol-gel process on a transparent conductive oxide glass substrate. The NiOx thin films were spin-coated in ambient air and subsequently annealed for 30 minutes at temperatures ranging from 150℃ to 450℃. The structural and optical characteristics of the NiOx thin films annealed at various temperatures were measured using X-ray diffraction, field emission scanning electron microscopy, and ultraviolet-visible spectroscopy. After optimizing the NiOx coating conditions, perovskite solar cells were fabricated with p-i-n inverted structure, and its photovoltaic performance was evaluated. NiOx thin films annealed at 350℃ exhibited the most favorable characteristics as a hole transport layer, resulting in the highest power conversion efficiency of 17.88 % when fabricating inverted perovskite solar cells using this film.

P3HT:PCBM 활성층을 갖는 유기 박막태양전지의 후속 열처리 효과 (The Post Annealing Effect of Organic Thin Film Solar Cells with P3HT:PCBM Active Layer)

  • 장성규;공수철;장호정
    • 마이크로전자및패키징학회지
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    • 제17권2호
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    • pp.63-67
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    • 2010
  • 본 연구에서는 P3HT와 PCBM 물질을 전자도너와 억셉터 광활성층 물질로 사용하여 벌크이종접합 구조를 갖는 Glass/ITO/PEDOT:PSS/P3HT-PCBM/Al 구조의 유기박막태양전지를 제작하였다. P3HT와 PCBM은 각각 0.5 wt%의 농도로 톨루엔 용액에 용해하였다. 광활성층 농도를 최적화하기 위하여 P3HT:PCBM= 3:4, 4:4, 4:3 wt%의 농도비로 소자를 제작하고, 농도비에 따른 전기적 특성을 조사하였다. 또한 활성층의 후속열처리 온도가 소자의 전기적 특성에 미치는 영향을 조사하였다. P3HT와 PCBM의 농도비가 4:4 wt%의 비율에서 가장 우수한 전기적 특성을 나타내었으며, 이때 단락전류밀도 ($J_{SC}$), 개방전압 ($V_{OC}$), 및 충실인자 (FF)는 4.7 $mA/cm^2$, 0.48 V 및 43.1%를 각각 나타내었다. 또한 전력변환효율(PCE)은 0.97%의 값을 얻었다. 최적화된 농도비를 갖는 태양전지 소자에 대해 $150^{\circ}C$에서 5분, 10분, 15분, 20분간 후속 열처리를 실시한 결과 P3HT 전자도너의 흡광계수가 증가하는 경향을 보였다. 후속 열처리 조건이 $150^{\circ}C$에서 15분인 경우 전기적 특성이 열처리 하지 않은 소자에 비해 특성이 개선되었다. 즉, 이때의 전기적 특성은 $J_{SC},\;V_{OC}$, FF, PCE의 값이 각각 7.8 $mA/cm^2$, 0.55 V, 47%, 2.0%를 나타내었다.

이온빔 조사각도에 따른 네마틱 액정의 액정 배향 특성 (LC Orientation Characteristics of NLC on Polyimide Surface According to Ion-beam Irradiation Angles)

  • 이강민;오병윤;박홍규;임지훈;이원규;나현재;김병용;한정민;이상극;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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    • pp.329-329
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    • 2008
  • To date, rubbing has been widely used to align LC molecules uniformly. Although rubbing can be simple, it has fundamental problems such as the generation of defects by dust and static electricity, and difficulty in achieving a uniform LC alignment on a large substrate. Therefore, noncontact alignment has been investigated. Ion beam induced alignment method, which provides controllability, nonstop process, and high resolution display. In this study, we investigated liquid crystal (LC) alignment with ion beam (IB) that non contact alignment technique on polyimide and electro-optical characteristics of twisted nematic (TN)-liquid crystal display (LCD) on the poly imide under various ion beam angles. In this experiment, Polyimide layer was coated on glass by spin-coating and Voltage-transmittance(VT) and response time characteristics of the TN cell were measured by a LCD evaluation system. The good characteristics of the nematic liquid crystal (NLC) alignment with the ion beam exposure poly imide surface was observed. The tilt angle of NLC on the PI surface with ion beam exposure can be measured under $1^{\circ}4 for all of irradiation angles. In addition, it can be achieved the good ED properties, and residual DC property of the ion beam aligned TN cell on polyimide surface.

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이온빔 조사각도에 따른 액정의 프리틸트각과 전기 광학적 특성 (Pretilt angle and EO Characteristics of Liquid Crystal via Ion-beam Irradiation Angles)

  • 이강민;이원규;오병윤;김병용;한진우;전지연;한정민;이상극;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 춘계학술대회 및 기술 세미나 논문집 디스플레이 광소자
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    • pp.44-44
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    • 2008
  • To date, rubbing has been widely used to align LC molecules uniformly. Although rubbing can be simple, it has fundamental problems such as the generation of defects by dust and static electricity, and difficulty in achieving a uniform LC alignment on a large substrate. Therefore, non contact alignment has been investigated. Ion beam induced alignment method, which provides controllability, nonstop process, and high resolution display. In this study, we investigated liquid crystal (LC) alignment with ion beam (IB) that non contact alignment technique on polyimide and electro-optical characteristics of twisted nematic (TN)-liquid crystal display (LCD) on the polyimide under various ion beam angles. In this experiment, Polyimide layer was coated on glass by spin-coating and Voltage-transmittance(VT) and response time characteristics of the TN cell were measured by a LCD evaluation system. The good characteristics of the nematic liquid crystal (NLC) alignment with the ion beam exposure polyimide surface was observed. The tilt angle of NLC on the PI surface with ion beam exposure can be measured under $1^{\circ}$ for all of irradiation angles. In addition, it can be achieved the good EO properties, and residual DC property of the ion beam aligned TN cell on polyimide surface.

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전사 공정을 이용한 산화막 정렬 패턴 제작과 액정 배향 특성 연구 (Parallel pattern fabrication on metal oxide film using transferring process for liquid crystal alignment)

  • 오병윤
    • 전기전자학회논문지
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    • 제23권2호
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    • pp.594-598
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    • 2019
  • HfZnO 박막 위 패턴 전사 기법을 이용하여 기존의 러빙법을 대체하는 배향 공정에 대하여 연구하였다. 정렬 패턴은 레이저 간섭 리소그래피를 이용하여 실리콘 웨이퍼 위에 제작하였다. 졸겔 공정을 이용하여 HfZnO 용액을 제작하였고, 유리기판 위에 스핀코팅하였다. 미리 제작한 정렬패턴을 스핀코팅된 HfZnO 위에 올려놓고, $100^{\circ}C$에서 30분간 소성하였다. HfZnO 박막에 평행한 그루브가 형성되었음을 atomic force microscopy 와 scanning electron microscopy로부터 확인할 수 있었다. HfZnO 박막을 이용하여 액정 셀을 제작하였으며, POM 분석으로부터 액정이 균일하게 정렬되었음을 확인할 수 있었다. 액정은 $0.25^{\circ}$의 프리틸트 각을 가졌으며, 수평배향 특성을 보여주었다. 액정 분자는 평행한 그루브에 의한 HfZnO 박막 표면 이방성에 의하여 균일하게 정렬되었음을 확인할 수 있었다.