• 제목/요약/키워드: Spin coating process

검색결과 284건 처리시간 0.029초

그래핀 트랜스퍼 프린팅 공정을 이용한 그래핀/은 나노와이어 하이브리드 전극 제작 (Fabrication of Graphene/Silver Nanowire Hybrid Electrodes via Transfer Printing of Graphene)

  • 하본희;조성진
    • 한국전기전자재료학회논문지
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    • 제30권9호
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    • pp.572-576
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    • 2017
  • A hybrid transparent electrode was fabricated with graphene and silver nanowires (Ag NWs). Three different processes were used to fabricate the hybrid electrode. Measurements of the sheet resistances, transmittances, and surface roughnesses of the hybrid electrodes were used to identify the optimal fabrication process. The surface roughness of the hybrid electrodes with Ag NWs embedded in a transparent polymer matrix was significantly lower than that of the other hybrid electrodes. A hybrid electrode fabricated by transferring graphene onto Ag NWs after spin-coating the Ag NWs onto the substrate showed the lowest sheet resistance. The transmittance of the hybrid electrodes was comparable to that of Ag NW electrodes.

솔-젤법과 스핀 코팅에 의해 제조된 $Sm^{2+}$가 도핑된 $10Al_2O_3-90SiO_2$ 박막의 구조 및 광학적 특성 ((Morphology and Optical Properties of $Sm^{2+}$-doped $10Al_2O_3-90SiO_2$ Thin Films Prepared by Sol-Gel Process and Spin Coating Technique))

  • 장기완;김상수;김일곤;조은진;정용화;박성태;이용일;김창대;서효진
    • 한국광학회:학술대회논문집
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    • 한국광학회 2002년도 하계학술발표회
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    • pp.134-135
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    • 2002
  • Sm$^{2+}$가 도핑된 불화물 결정은 실온에서 영구적 스펙트럼 홀 생성이 나타나며, 이러한 실온에서의 영구적 스펙트럼 홀 생성은 새로운 광 메모리의 개발에 매우 중요하므로 많은 관심을 받고 있다. 본 연구에서는 Sm$^{2+}$가 도핑된 10Al$_2$O$_3$.90SiO$_2$ 박막을 제조하여 SEM 및 발광 스펙트럼(Photo-Luminescence; PL)을 측정함으로서 제조된 박막의 구조적, 광학적 특성을 조사하였다. (중략)

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The Optimization of LCD Color Filter Coating Method

  • 조문철;배동호
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 추계학술대회 논문집
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    • pp.177-177
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    • 2009
  • We examine the process to enhance the productivity of the thin-film transistor-addressed liquid-crystal display (TFT LCD) panels with the objective of optimizing the relation between the Type of color PR dispense nozzle and the amount of dispensing of color PR consumption, directly affecting a spectroscopic analysis. Most manufacturers of the panels have been utilizing a spin-type coater. We show that we successfully optimize the spectral values by controlling the color PR dispense type(Static dispense or Dynamic dispense) and the amount of color PR. From this study, we accomplished to decrease 43% in color PR consumption and to decrease 30% in color PR Stained, to decrease 30% rework rate.

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용액공정을 이용한 zinc tin oxide 박막 트렌지스터와 회로제작에 관한 연구 (Zinc tin oxide thin film transistors and simple circuits using a solution process)

  • 허재상;김영훈;박성규
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2011년도 제42회 하계학술대회
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    • pp.1477-1478
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    • 2011
  • Solution processed zinc tin oxide (ZTO) thin films were studied using a spin coating for the fabrication of thin film transistors and simple circuits. The solution processed thin film transistors (W/L = 100/10 ${\mu}m$) have the average saturation mobility of 1.9 $cm^2$/Vs, threshold voltage of 20 V, and subthreshold slope of 0.5 V/decade. The dc characteristics of an inverter with $W_{load}=100\;{\mu}m$ and $W_{drive}=10\;{\mu}m$, measured under votage supply of $V_{DD}$ = +50 V. The inverter beta ratio is 20 ($R=(W_{drived}/L_{drive})/(W_{load}/L_{load})=20$) and $gain_{max}$ is 2. The characteristics of an oscillator were measured under voltage supply of $V_{DD}$ = +60 V.

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1,4-Diketo-3,6-Diphenyl-Pyrrolo-[3,4c]-Pyrrole(DPP)계 유기안료의 합성 및 흡수스펙트라 (Synthesis and Absorption Spectra of 1,4-Diketo-3,6-Diphenyl-Pyrrolo-[3,4c]-Pyrrole)

  • 김성훈
    • 한국인쇄학회지
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    • 제14권1호
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    • pp.1-15
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    • 1996
  • In this paper, the preparation of lead zirconium titanate(PZT) thin film by sol-gel processing was descried. Thin film coated with thickness of 4${\mu}{\textrm}{m}$ on the stainless steel substrates using the multiple spin-coating process. The crystalline phases of PZT powder and film were investigated by X-ray diffraction pattern and PZT thin film has perovskite structure over 600 C annealing temperature. Corona charging characteristics of the ferroelectric PZT thin film at 600 C were investigated by electrophotographic measurement. A difference in the charging characteristics between positive and negative corona charging was found. The charge acceptance depended in the polarity of corona and the poling of film. According to the D-E hysteresis measurment, PZT thin film can be poled by corona charging without use of top electrode. The remnant polarization in the PZT thin film is generally in the order of 48$\mu$C/$\textrm{cm}^2$. From this results, the ferroelectric PZT thin film will be possible to apply for the add-on type imaging formation.

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Ferroelectric Gate Field Effect Transistor용 $Sr_2(Nb,Ta)_2O_7$박막 ($Sr_2(Nb,Ta)_2O_7$ Thin Films for Ferroelectric Gate Field Effect Transistor.)

  • 김창영;우동찬;이희영;이원재
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1998년도 추계학술대회 논문집
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    • pp.335-338
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    • 1998
  • Ferroelectric Sr$_2$(Nb,Ta)$_2$O$_{7}$ (SNTO) thin films were prepared by chemical solution deposition processes. SNTO thin films were spin-coated on Pt/Ti/SiO$_2$/(100)Si substrates. After multiple coating, dried thin films were heat-treated for decomposition of residual organics and crystallization. B site-rich impurity phase, i.e. [Sr(Nb,Ta)$_2$O$_{6}$], was found after annealing, where its appearance was dependent on process temperature indicating the possible reaction with substrate. Dielectric and other relevant electrical properties were measured and the results showed a little possibility in ferroelectric gate random access memory devices.s.s.

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금속유기물증착법에 의한 $La_2Ti_2O_{7}$ 박막의 제조 (Fabrication of $La_2Ti_2O_{7}$ Film by Metalorganic Deposition)

  • 조경호;우동찬;박철우;이희영;남효덕
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1995년도 추계학술대회 논문집
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    • pp.122-125
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    • 1995
  • Using metalorganic deposition technique, $La_2Ti_2O_{7}$ precursor solution was deposited on platinium coated SiO$_2$/SI(100) substrates by spin-coating process. Crystalline and crack-free films of ∼0.2$\mu\textrm{m}$ thickness were successfully fabricated on the above substrate from four different types of $La_2Ti_2O_{7}$ precursor solutions by proper heat treatment in the temperature range of $700^{\circ}C$$1200^{\circ}C$. Microstructure and X-ray diffraction analysis of $La_2Ti_2O_{7}$ thin film showed that the crystallization temperature and the preferred orientation of $La_2Ti_2O_{7}$ thin film were strongly dependent on the precursor used.

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Fabrication and Characterization of Ferroelectric $(Bi,Sm)_4Ti_3O_{12}$ Thin Films Prepared by Chemical Solution Deposition

  • Kang, Dong-Kyun
    • 한국반도체및디스플레이장비학회:학술대회논문집
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    • 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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    • pp.170-173
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    • 2006
  • Ferroelectric $Bi_{3.35}Sm_{0.65}Ti_3O_{12}(BST)$ thin films were deposited on $Pt(111)/Ti/SiO_2/Si(100)$ substrates by a sol-gel spin-coating process. In this experiments, $Bi(TMHD)_3$, $Sm_5(O^iPr)_{13}$, $Ti(O^iPr)_4$ were used as precursors, which were dissolved in 2-methoxyethanol. Thereafter, the thin films with the thickness, of 240nm were annealed from 600 to $720^{\circ}C$ in oxygen atmosphere for 1 hr, and post-annealed in oxygen atmosphere for 1 hr after deposition of Pt electrode to enhance the electrical properties. The remanent polarization and coercive voltage of the BST thin films annealed at $720^{\circ}C$ were $19.48\;{\mu}C/cm^2$ and 3.40 V, respectively, and a fatigue-free characteristics. As a result, Sm-substituted bismuth titanate films with good ferroelectric properties and excellent fatigue resistance are useful candidates for ferroelectric memory applications.

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Capacitance-Voltage Characteristics of MIS Capacitors Using Polymeric Insulators

  • Park, Jae-Hoon;Choi, Jong-Sun
    • Journal of Information Display
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    • 제9권2호
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    • pp.1-4
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    • 2008
  • In this study, we investigate the capacitance-voltage (C-V) characteristics of metal-insulator-semiconductor (MIS) capacitors consisting of pentacene, as an organic semiconductor, and polymeric insulators such as poly(4-vinylphenol) (PVP) orpolystyrene (PS) prepared by spin-coating process, to analyze the interfacial characteristics between pentacene and polymeric insulators. Compared with the device with PS, the MIS capacitor with PVP exhibited a pronounced shift in the flat-band voltage according to the bias sweep direction. This hysteric feature in the C-V characteristics is thought to be attributed to the trapped charges at the interface between pentacene and PVP owing to the hydrophilicity of PVP. From the experimental results, we can conclude that surface polarity of polymeric insulator has a critical effect on the interfacial properties, thereby affecting the bias stability of organic thin-film transistors.

졸-겔법에 의한 강유전성 PZT박막의 제작 (The Fabrication of Ferroelectric PZT thin films by Sol-Gel Processing)

  • 이병수;이덕출
    • 전기학회논문지P
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    • 제51권2호
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    • pp.77-81
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    • 2002
  • In this study, PZT thin films were fabricated using sol-gel processing onto Si/$SiO_2$/Ti/Pt substrates. PZT sol with different Zr/Ti ratio(20/80, 30/70, 40/60, 52/48) were prepared, respectively. The films were fabricated by using the spin-coating method on substrates. The films were heat treated at $450^{\circ}C$, $650^{\circ}C$ by rapid thermal annealing(RTA). The preferred orientation of the PZT thin films were observed by X-ray diffraction(XRD), and Scanning electron microscopy(SEM). All of the resulting PZT thin films were crystallized with perovskite phase. The fine crystallinity of the films were fabricated. Also, we found that the ferroelectric properties from the dielectric constant of the PZT thin films were over 600 degrees, P-E hysteresis constant. And the leakage current densities of films were lower than $10^{-8}A/cm^2$. It is concluded that the PZT thin films by sol-gel process to be convinced of application for ferroelectric memory device.