Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1998.11a
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- Pages.335-338
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- 1998
$Sr_2(Nb,Ta)_2O_7$ Thin Films for Ferroelectric Gate Field Effect Transistor.
Ferroelectric Gate Field Effect Transistor용 $Sr_2(Nb,Ta)_2O_7$ 박막
Abstract
Ferroelectric Sr
Keywords
- ferroelectric;
- thin film;
- ferroefectric gate random across memory;
- $Sr_2(Nb,Ta)_2O_7$;
- chemical solution deposition;
- MFMIS