• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.276-276
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• 2014

High-performance, fully-transparent, and top-gated oxide thin-film transistor (TFT) was successfully fabricated with Ta2O5 high-k gate dielectric on a glass substrate. Through a self-passivation with the gate dielectric and top electrode, the top-gated oxide TFT was not affected from H2O and O2 causing the electrical instability. Heat-treated InSnO (ITO) was used as the top and source/drain electrode with a low resistance and a transparent property in visible region. A InGaZnO (IGZO) thin-film was used as a active channel with a broad optical bandgap of 3.72 eV and transparent property. In addition, using a X-ray diffraction, amorphous phase of IGZO thin-film was observed until it was heat-treated at 500 oC. The fabricated device was demonstrated that an applied electric field efficiently controlled electron transfer in the IGZO active channel using the Ta2O5 gate dielectric. With the transparent ITO electrodes and IGZO active channel, the fabricated oxide TFT on a glass substrate showed optical transparency and high carrier mobility. These results expected that the top-gated oxide TFT with the high-k gate dielectric accelerates the realization of presence of fully-transparent electronics.

• Journal of Korean Society of Environmental Engineers
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• v.27 no.6
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• pp.651-656
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• 2005

Toluene, which is emitted from textile process, is considered as an important hazardous air pollutant. In this study, the catalytic activity of transition metal oxides(Cu, Mn, V, Cr, Co, Ni, Ce, Sn, Fe, Sr, Cs, Mo, La, W, Zn)/${\gamma}-Al_2O_3$ catalysts was investigated to carry out the complete oxidation of toluene. The metal catalysts were characterized by XRD-ray diffraction), FE-SEM(Field Emission Scanning Electron Micrograph), BET(Brunauer Emmett Teller) method and TPR(Temperature Programmed Reduction). Among the catalysts, Cu/${\gamma}-Al_2O_3$ was highly promising catalyst for the oxidation of toluene. From the BET results, it seems that the catalytic activity is not correlated to the specific surface area. XRD results indicated that most of catalysts exist as amorphous phase. From the FE-SEM results, it was observed that copper on ${\gamma}-Al_2O_3$ surface was well dispersed among catalysts. The catalytic activity for the toluene oxidation could be explained with that metal oxide catalyst was dispersed well over supports and was attributed to reduction activity in surface of catalysts.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.3
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• pp.228-233
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• 2007

Core technologies for integrating hydrogen gas sensor were investigated. In this study, the thermally isolated micro-hot-plate with areas of $100{\times}100-260{\times}260{\mu}m^2$ was fabricated by utilizing surface micromachining technique that provides better manufacturing yield than bulk micromachining counterpart. The optimum design of the sensor was peformed by analyzing the thermal profile of the structure obtained from a ANSYS simulator. The 400-nm-thick polysilicon films doped with phosphorus, the 300-nm-thick aluminum films, and the 200-nm-thick $SnO_2$(or ZnO)films were used as the micro-heater material, the temperature sensor material, and the gas sensitive material, respectively. The experimental results show that the developed gas sensors can detect $H_2$ concentration as low as 1 ppm.

• Journal of the Korean institute of surface engineering
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• v.24 no.1
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• pp.25-30
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• 1991

The evaporation characteristics of Ag, Al, Au, Cr. Cu, In, Mg, Mn, Pb, Pd, Si, SiO, Sn, Ti and Zn with the various resistive heating sources have been studied. The employed sources are refractory metal (Mo, Ta and W) boats, W-wire, ceramic (usually Al2O3)-coated and -barriered refractory metal boats, and special boats such as baffled boats and intermetallic boats (nitride compound and graphite). We investigated the melting mode, evaporation rate at a specific power, and lifetime of the sources. A special boat holder is also discussed which is needed to cool the sources at a large heat capacity.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.439-440
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• 2008

Indium Zinc Tin Oxide (IZTO) thin films for transparent thin film transistor (TTFT) were deposited on glass substrate at room temperature by facing targets sputtering (FTS). The FTS system was designed to array two targets facing each other and forms the high- density plasma between. Two different kinds of targets were installed on FTS system. One is ITO ($In_2O_3$ 90wt.%, $SnO_2$ 10wt.%), the other is IZO($In_2O_3$ 90wt%, ZnO 10wt%). The conductive and optical properties of IZTO thin film is determined depending on variation of DC power and working pressure. Therefore, IZTO thin films were prepared with different DC power and working pressure. As-deposited IZTO thin films were investigated by a UV/VIS spectrometer, an X-ray diffractometer (XRD), a scanning electron microscopy (SEM), a Hall Effect measurement system. As a result, all IZTO thin films deposited on glass substrate showed over 80% of transmittance in visible range (400~800 nm) at $O_2$ gas flow rate. We could obtain IZTO thin films with the lowest resistivity $5.67\times10^{-4}$ [$\Omega{\cdot}cm$] at $O_2$ gas flow rate 0.4 [sccm).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.203-204
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• 2009

The Indium Zinc Tin Oxide (IZTO) thin films for flexible display electrode were deposited on poly carbonate (PC) and polyethersulfone(PES) and glass substrates at room temperature by facing targets sputtering (FTS). Two different kinds of targets were installed on FTS system. One is ITO ($In_2O_3$ 90 wt.%, $SnO_2$ 10 wt.%), the other is IZO ($In_2O_3$ 90 wt.%, ZnO 10 wt.%). As-deposited IZTO thin films were investigated by a UV/VIS spectrometer, an X-ray diffractometer (XRD), an atomic force microscope (AFM) and a Hall Effect measurement system. As a result, we could prepare the IZTO thin films with the resistivity of under $10^{-4}\;[{\Omega}{\cdot}cm]$ and IZTO thin films deposited on glass substrate showed an average transmittance over 80% in visible range (400~800 nm) in all IZTO thin films except in IZTO thin film deposited at $O_2$ gas flow rate of 0.1[sccm].

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.10-10
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• 2010

가시광역에서 80% 이상의 높은 투과율과 전기전도성을 동시에 갖는 투명전도성 산화물(TCO) 박막은 LCD, PDP, OLED, 태양전지 등의 다양한 분야에 투명전극재료로서 사용되고 있다. 이들 TCO 박막은 Magnetron sputtering, Chemical vapor deposition, Pulse laser deposition, Ink jet등과 같은 다양한 방법으로 증착할 수 있지만, 대면적의 기판에 균일한 박막형성 및 박막과 기판의 높은 부착력등 양산성의 관점에서 우월성을 가지고 있기 때문에 생산라인에서는 DC magnetron sputtering법이 주로 사용되고 있다. 이 경우, 산화물 박막의 미세구조, 내부응력, 광학적 및 전기적 특성은 스퍼터링 과정에서 발생하는 고에너지 입자들의 기판입사 충격에 크게 의존하기 때문에 고품질의 TCO박막을 제작하기 위해서는 증착공정인자들의 제어는 매우 중요한 것으로 알려져 있다. 대표적 TCO박막재료로서 $In_2O_3$계, ZnO계 및 $SnO_2$계를 들 수 있으며, 이들 중에서 Sn을 $In_2O_3$에 치환고용시킨 ITO박막의 경우, 전기적 및 광학적 특성이 상대적으로 우수하기 때문에 실용화 TCO박막으로서 가장 널리 사용되고 있다. 한편, Flexible display의 경우, 유연성의 폴리머기판위에 증착되는 TCO박막에 대하여 요구되는 특성으로는 높은 투과율 및 낮은 비저항은 물론, 박막표면의 평활도 (낮은 표면조도), bending에 대한 높은 기계적 특성 (낮은 내부응력), 수분침투에 대한 높은 barrier특성 및 저온공정 등을 들 수 있다. 그러나 높은 전기전도도를 가지는 ITO박막을 제작하기 위해서는 $200^{\circ}C$ 이상의 증착온도가 필요하며, 이때 얻어진 다결정의 ITO박막은 높은 표면조도 및 bending시에 낮은 기계적 내구성이 문제점으로 지적되고 있다. 한편, 기판가열 없이 증착한 비정질 ITO박막은 낮은 표면조도, 높은 엣칭속도 및 양호한 식각특성을 나타내지만, 상대적으로 높은 비저항 및 기판과의 낮은 부착력 등이 지적되고 있다. 따라서 본 강연에서는 비정질 ITO박막의 결정화 온도 (약 $160^{\circ}C$) 이상에서도 비정질 구조를 유지하기 때문에 낮은 표면조도와 높은 엣칭속도를 가지면서 상대적으로 전기적 특성과 기계적 내구성이 개선된 새로운 고온형 비정질 TCO박막에 대한 최근의 연구성과를 소개하고자 한다.

• Clean Technology
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• v.20 no.2
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• pp.108-115
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• 2014

Various metal chlorides and acid catalysts in ionic liquid solvent were investigated to directly convert cellulose into 5-hydroxymethylfurfural (5-HMF). Metal chlorides containing Sn(II), Zn(II), Al(III), Fe(III), Cu(II), and Cr(III) were used and acidic ionic liquid immobilized on silica gel as an acid catalyst and commercial acid catalysts (sulfuric acid, chloric acid, Amberlyst-15,DOWEX50x8) were used for comparison studies. The acid strength and amount of acid catalysts were probed with Hammett indicator. The selectivity and yield of 5-HMF were determined with reaction temperature, reaction time and catalyst ratio. A catalyst containing $CrCl_3-6H_2O$ and $SiO_2-[ASBI]HSO_4$ showed the highest selectivity and it was found that this catalyst had higher activity than commercial solid acid catalysts such as Amberlyst-15 and DOWEX50x8. The selectivity of 5-HMF appeared to be mainly dependent on the acid strength and catalyst ratio, it was found that levulinic acid was produced from 5-HMF by rehydration.

• Journal of Sensor Science and Technology
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• v.27 no.4
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• pp.221-226
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• 2018

Misfueling accidents significantly damage the engines of both gasoline and diesel vehicles, and should be avoided by rapid and accurate fuel discrimination. Gasoline fuel contains bioethanol. Thus, the detection of ethanol vapor produced by gasoline can be used to distinguish between gasoline and diesel. In the present study, Pt-doped $SnO_2$ hollow nanospheres, Mg-doped $In_2O_3$ hollow microspheres, and Pt-doped ZnO nanostructures have been used as gas sensors to discriminate between gasoline and diesel fuels. All three sensors are able to detect and discriminate between gases evaporating from gasoline and diesel. Among the sensors, the Mg-doped $In_2O_3$ hollow microspheres show a significant gas response (resistance ratio = 4.97) quickly (~3 s) after exposure to gasoline-evaporated gas at $225^{\circ}C$, but did not show any substantial response to diesel-evaporated gas. This demonstrates that gasoline and diesel fuels can be discriminated using small and cost-effective oxide semiconductor gas sensors.

• Journal of Powder Materials
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• v.25 no.4
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• pp.309-315
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• 2018

In the present work, we synthesize nano-sized ZnO, $SnO_2$, and $TiO_2$ powders by hydrothermal reaction using metal chlorides. We also examine the energy-storage characteristics of the resulting materials to evaluate the potential application of these powders to dye-sensitized solar cells. The control of processing parameters such as pressure, temperature, and the concentration of aqueous solution results in the formation of a variety of powder morphologies with different sizes. Nano-rod, nano-flower, and spherical powders are easily formed with the present method. Heat treatment after the hydrothermal reaction usually increases the size of the powder. At temperatures above $1000^{\circ}C$, a complete collapse of the shape occurs. With regard to the capacity of DSSC materials, the hydrothermally synthesized $TiO_2$ results in the highest current density of $9.1mA/cm^2$ among the examined oxides. This is attributed to the fine particle size and morphology with large specific surface area.