Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2009.06a
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- Pages.203-204
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- 2009
Properties of IZTO Thin Film prepared by the Hetero-Target sputtering system
상온에서 증착한 IZTO 박막의 기판 종류에 따른 특성
- Kim, Dae-Hyun (Kyungwon University) ;
- Rim, You-Seong (Kyungwon University) ;
- Kim, Sang-Mo (Kyungwon University) ;
- Keum, Min-Jong (Kyungwon University) ;
- Kim, Kyung-Hwan (Kyungwon University)
- Published : 2009.06.18
Abstract
The Indium Zinc Tin Oxide (IZTO) thin films for flexible display electrode were deposited on poly carbonate (PC) and polyethersulfone(PES) and glass substrates at room temperature by facing targets sputtering (FTS). Two different kinds of targets were installed on FTS system. One is ITO (