• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.17 no.3
• /
• pp.272-277
• /
• 2004

The primary aim of this study is to investigate new semi-abrasive free slurry including acid colloidal silica and hydrogen peroxide for copper chemical-mechanical planarization (CMP). In general, slurry for copper CMP consists of colloidal silica as an abrasive, organic acid as a complex-forming agent, hydrogen peroxide as an oxidizing agent, a film forming agent, a pH control agent and several additives. We developed new semi-abrasive free slurry (SAFS) including below 0.5％ acid colloidal silica. We evaluated additives as stabilizers for hydrogen peroxide as well as accelerators in tantalum nitride CMP process. We also estimated dispersion stability and Zeta potential of the acid colloidal silica with additives. The extent of enhancement in tantalum nitride CMP was verified through anelectrochemical test. This approach may be useful for the application of single and first step copper CMP slurry with one package system.

• Environmental Engineering Research
• /
• v.20 no.3
• /
• pp.277-284
• /
• 2015

Experiments for highly concentrated contaminants in pig waste slurry were carried out for the feasibility test of a pilot-scale innovative process scheme of engaging autothermal thermophilic aerobic digestion (ATAD) and expended granular sludge bed (EGSB) followed by sequencing batch reactor (SBR) system. Contaminants in pig waste slurry such as organic substance, total nitrogen (TN), ammonia nitrogen and total phosphorus (TP) contents were successfully reduced in the system. Total volatile solids (TVS) and chemical oxygen demands (COD) for organic matter in the feed were 32.92 g/L and 42.55 g/L respectively, and they were reduced by about 98.7% and 99.2%, respectively in the system. The overall removal efficiencies for TN and ammonium nitrogen were found to be 98.1 and 98.5%, respectively. The overall removal efficiency for total phosphorus was also found to be 92.5%. Faecal coliform density was reduced to <$1.2{\times}10^4CFU/g$ total solids. Biogas and $CH_4$ were produced in the range of 0.39-0.85 and $0.25-0.62m^3/kg$ [VS removed], respectively. The biogas produced in the system comprised of $295{\pm}26ppm$ (v/v) [$H_2S$].

• Journal of Korean Society for Atmospheric Environment
• /
• v.12 no.4
• /
• pp.449-457
• /
• 1996

The main purpose of this study was to investigate sulfur dioxide removal performance of flue gas desulfurization system utilizing a Spray Absorption/Drying Reactor. In this system, the size of droplets was considered the most significant factor and tested using a PDA system. Lime slurry flow rate, operating temperature, calcium/sulfur (Ca/S) ratio and applied air pressure were selected as major operation variables and tested/analyzed in terms of system performance. The results are as follows. 1. The $SO_2$ removal efficiencies were 49%, 74%, 85% for Ca$(OH)_2$ slurry flow rate of 10, 20, 30 ml/min, which implies that the increase of slurry flow rate improves removal efficiency. The optimum slurry flow rate in this study was, however, considered 20 ml/min because of constraints of system troubles and absorbent utilization. 2. As Ca/S ratio increased, $SO_2$ removal efficiency was observed to increase. 3. As air pressure, at the atomizing nozzole, increased from 3 to 5 $kg/cm^2, SO_2$ removal efficiency increased from 74% to 80%, because of droplet size reduction due to pressure increase during atomizing process and the increase of surface area, helping mass transfer between gas and liquid phase.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
• /
• v.15 no.5
• /
• pp.352-359
• /
• 2003

The present study has been conducted for manufacturing MPCM (microencapsulated phase change material) slurry with in-situ polymerization and proving their applicabilities for tooling system. The surface of MPCM is composed of melamine, while tetradecane, paraffin wax, is centered in the MPCM. The produced capsules are observed by the optical microscope and SEM for superficial shapes. Their thermal properties are measured by DSC. Their size distributions are observed by FA particle analyzer. A narrow size distribution from 1 to 10 ${\mu}{\textrm}{m}$ with 5 ${\mu}{\textrm}{m}$ of average diameter was observed. Melting temperature was 6.7$^{\circ}C$. The durability of MPCM was tested with various types of pump such as centrifugal, peristaltic, and mono pumps. During 10000 cycles the fraction of broken capsules was smaller than 6% for the centrifugal and peristaltic pumps, while bigger value of 8% for the mono pump. A cooling system, which adopted MPCM slurry as a media for transporting cold thermal energy, was designed to investigate the performance of the MPCM. The discharging times of 10 and 20 wt% MPCM slurry were lasted up to 105 and 285 minutes longer, respectively, than the water cooling system.

• Asian-Australasian Journal of Animal Sciences
• /
• v.12 no.5
• /
• pp.766-771
• /
• 1999

The first paper of this series compared the effects of rates and frequencies of application of dairy slurry on herbage yields and stand persistence of orchardgrass (Dactylis glomerata L.), reed canarygrass (Phalaris arundinacea L.), and alfalfa (Medicago sativa L.)-grass mixtures managed as a 4-cutting system. This paper compares the effects of rates and frequencies of application of dairy slurry on herbage yield and stand persistence of alfalfa, orchardgrass, tall fescue (Festuca arundinacea Schreb.), and alfalfa-orchardgrass mixture managed as a 5-cutting system. The results presented here are part of a larger study having a primary objective of comparing alfalfa, various grasses, and alfalfa-grass mixtures for utilizing nutrients from dairy slurry applied to established stands. A randomized complete block design with treatments in a split plot arrangement with four replicates was used. The main plots consisted of 9 fertility treatments: 7 slurry rate and frequency of application treatments, one inorganic fertilizer treatment, and an unfertilized control. The sub-plots were the forage species. Manure used for the study was composed from stored solids scraped from the alleyways of a free-stall dairy barn. Water was added to from a slurry having about 8 % solids. Slurry was pumped from the liquid spreader tank into 10.4 L garden watering cans for manual application to the plots. Herbage yields of alfalfa, tall fescue, and alfalfa-orchardgrass were generally not affected by slurry application rates and were not significantly different from the inorganic fertilizer treatment. Tall fescue significantly outyielded all other forage species at all manure and the inorganic fertilizer treatments in the second year when rainfall during the growing season was unusually high. Grasses generally had a greater response to manure applications than alfalfa and alfalfa-orchardgrass. Increasing rates of manure did not increase herbage yields of alfalfa and alfalfa-orchardgrass. Herbage yields within each species were not affected by frequency of application of the same total rate. Stand ratings of alfalfa, orcahrdgrass and alfalfa-orchardgrass were significantly lower for the very high manure application rate compared to the control treatment. Based upon the results of this study, multiple annual applications of slurry manure can be made onto these species at rates up to $1,700kg\;total\;N\;ha^{-1}\;yr^{-1}$ without detrimental effects on herbage yield and stand persistence.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
• /
• 2001.10a
• /
• pp.160-163
• /
• 2001

In order to develop a nodule conveying system through a flexible pipe out of the deep-seabed manganese nodule miner, an experimental study of the solid-water slurry flow in vertical pipe is performed as the first stage of total experiments. Hydraulic characteristics of the pipe slurry flow such as slip velocity, transport concentration and pressure gradient are investigated for the size of particle, load ratio, and flow rate of water. The higher the load ratio is, the larger the transport concentration and pressure gradient become. The bigger the size of particles is, the larger the pressure gradient becomes. The effectiveness of the flow rate to hydraulic performance is also investigated. This results are to be used for designing crusher and pump, and operating the conveying device.

• Proceedings of the SAREK Conference
• /
• 2006.06a
• /
• pp.111-115
• /
• 2006

To clarify the hydraulic and thermal characteristics of ice slurry which made from 6.5% ethylene glycol-water solution flow in the double tube and plate type heat exchanger, experimental studies were performed. The mass flux and Ice fraction of ice slurry were varied from 800 to $3,500 kg/m^2s$(or 7 to 17 kg/min) and from 0 to 25%, respectively. During the experiment, it was found that the measured pressure drop and heat transfer rate increase with the mass flux and ice fraction; however the effect of ice fraction appears not to be significant at high mass flux region. At the region of low mass flux, a sharp increase in the pressure drop and heat transfer rate were observed depends on mass flux.

• Journal of Animal Environmental Science
• /
• v.6 no.3
• /
• pp.169-174
• /
• 2000

TAO system was applied to treatment of piiggery slurry. In the experiments, the volume of influx was differentiated in four types. The features of operation, evaporation rate, and efficiency of successive treatment were drawn. The results are; 1. During the operation, the inside temperature was maintained at over $60^{\circ}C$ with the highest $70.2^{\circ}C$. 2. The evaporation rate of influx volume was 31.4%. And the evaporation volume of per square meter was $108{\;}\ell/\textrm{m}^2$; slightly different from $120{\;}\ell/\textrm{m}^2$ of batch type. 3. The VFAs was decreased by 95% (from $1,538lmg/{\ell}$ in influx to $72.9mg/{\ell}$ in Efflux). Thus, successive operation of TAO system is considered to be possible.

• Proceedings of the Korean Society of Marine Engineers Conference
• /
• 2011.06a
• /
• pp.202-202
• /
• 2011

Thermal energy storage(TES) cooling system using cheaper electricity of off-peak time has been applied to relief a significant portion of the peak demand of electricity during the daytime in summer. Slurry ice type thermal energy storage cooling system is one kind of more efficient ice-thermal energy storage cooling system than Ice-on-Coil type or Encapsulated type TES cooling system, even though, which are more popular TES system. This study is experimented to observe flow pattern and formation of slurry ice in reversing flow to improve efficiency of heat transfer between fluid and freezing tube.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2001.05b
• /
• pp.34-37
• /
• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the inter-metal dielectrics (IMD) layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}m$ POU (point of use) filter, which is depth-type filter and has 80% filtering efficiency for the $1.0{\mu}m$ size particle. In this paper, we studied the relationship between defect generation and pad count to understand the exact efficiency of the slurry filtration, and to find out the appropriate pad usage. Our preliminary results showed that it is impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the flow rate of slurry to overcome depth type filters weak-point, and to install the high spray of de-ionized Water (DIW) with high pressure.