• 반도체디스플레이기술학회지
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• 제20권2호
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• pp.19-24
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• 2021

As the size of semiconductor devices decreases, the etching pattern becomes very narrow and a deep high aspect ratio process becomes important. The cryogenic etching process enables high aspect ratio etching by suppressing the chemical reaction of reactive ions on the sidewall while maintaining the process temperature of -100℃. ESC is an important part for temperature control in cryogenic etching equipment. Through the cooling path inside the ESC, liquid nitrogen is used as cooling water to create a cryogenic environment. And since the ESC directly contacts the wafer, it affects the temperature uniformity of the wafer. The temperature uniformity of the wafer is closely related to the yield. In this study, the cooling path was designed and analyzed so that the wafer could have a uniform temperature distribution. The optimal cooling path conditions were obtained through the analysis of the shape of the cooling path and the change in the speed of the coolant. Through this study, by designing ESC with optimal temperature uniformity, it can be expected to maximize wafer yield in mass production and further contribute to miniaturization and high performance of semiconductor devices.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
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• pp.319-320
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• 2012

Large aperture optical modulator called optical shutter is a key component to realize time-of-flight (TOF) based three dimensional (3D) imaging systems [1-2]. The transmission type electro-absorption modulator (EAM) is a prime candidate for 3D imaging systems due to its advantages such as small size, high modulation performance [3], and ease of forming two dimensional (2D) array over large area [4]. In order to use the EAM for 3D imaging systems, it is crucial to remove GaAs substrate over large area so as to obtain high uniformity modulation performance at 850 nm. In this study, we propose and experimentally demonstrate techniques for backside etching of GaAs substrate over a large area having high uniformity. Various methods such as lapping and polishing, dry etching for anisotropic etching, and wet etching ([20%] C6H8O7 : H2O2 = 5:1) for high selectivity backside etching [5] are employed. A high transmittance of 80% over the large aperture area ($5{\times}5mm^2$) can be obtained with good uniformity through optimized backside etching method. These results reveal that the proposed methods for backside etching can etch the substrate over a large area with high uniformity, and the EAM fabricated by using backside etching method is an excellent candidate as optical shutter for 3D imaging systems.

• 한국전기전자재료학회논문지
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• 제11권3호
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• pp.195-202
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• 1998

The LPCVD system of batch type for the massproduction of semiconductor fabrication has a problem of phosphorous concentration uniformity in the boat. In this paper we study an improvement of the uniformity for phosphorous concentration and sheet resistance. These property was improved by using the nitrogen process and modified long nozzle for gas injection tube in the doped polysilicon deposition system. The phosphorous concentration and its uniformity for polysilicon film are measured by XRF(X-ray Fluorescence) for the conventional process condition and nitrogen process. In conventional process condition, the phosphorous concentration, it uniformity and sheet resistance for polysilicon film are in the range of 3.8~5.4$\times$10\ulcorner atoms/㎤, 17.3% and 59~$\Omega$/ , respectively. For the case of nitrogen process the corresponding measurements exhibited between 4.3~5.3$\times$10\ulcorner atoms/㎤, 10.6% and 58~81$\Omega$/ . We find that in the nitrogen process the uniformity of phosphorous concentration improved compared with conventional process condition, however, the sheet resistance in the up zone of the boat increased about 12 $\Omega$/ . In modified long nozzle, the phosphorous concentration, its uniformity and sheet resistance for polysilicon films are in the range of 4.5~5.1$\times$10\ulcorner atoms/㎤, 5.3% and 60~65$\Omega$/ respectively. Annealing after $N_2$process gives the increment of grain size and the decrement of roughness. Modification of nozzle gives the increment of injection amount of PH$_3$. Both of these suggestion result in the stable phosphorous concentration and sheet resistance. The results obtained in this study are also applicable to process control of batch type system for memory device fabrication.

• 한국지반환경공학회 논문집
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• 제14권5호
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• pp.41-47
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• 2013

일반적으로 입도분포가 양호하며 조밀한 흙은 공학적 성질이 우수하다. 불포화토의 공학적 성질, 즉 전단강도, 압축성, 투수성 등의 거동은 흙의 함수특성곡선과 밀접한 관계가 있다. 따라서 사질토의 입도분포 및 다짐상태와 관련있는 균등계수와 공극율이 그 흙의 함수특성곡선에 미치는 영향을 연구하는 것은 중요하다. 본 연구에서는 6개의 사질토 시료에 대하여 템페셀을 사용하여 함수특성곡선시험을 하였다. 시험결과를 Fredlund and Xing 모델식으로 최적화하여 모델식의 매개변수를 구하였고, 시료의 균등계수와 공극율이 매개변수에 미치는 영향을 조사하였다. 시료의 잔류흡수력은 시료의 공극율이 작을수록, 그리고 균등계수가 클수록 증가하였으며, 함수특성곡선의 최대경사는 시료의 균등계수와 상관없이 공극율이 작을수록 완만해짐을 알 수 있었다.

• Macromolecular Research
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• 제12권2호
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• pp.233-239
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• 2004

We prepared thermally robust fully crosslinked poly(methyl methacrylate-co-divinyl benzene) ［poly(MMA-co-DVB)］microspheres successfully by precipitation polymerization in the absence of a stabilizing agent. The DVB concentration plays a pivotal role not only in the formation of the individually stable microspheres but also in the polymerization characteristics, including the particle size, the uniformity of size, the polymerization yield, and the thermal properties. The number-average diameter of the microspheres increased linearly, from 0.72 to 2.15 $\mu\textrm{m}$, and the particle size distribution became narrower, by elevating the uniformity from 1.35 to 1.12, as the DVB concentration increased from 20 to 75 mol%. In addition, the yield of the polymerization increased, from 73.4 to 98.6%, as the DVB concentration increased. Since the prepared particles possess fully crosslinked microstructures, no glass transition temperatures were observed, but all the samples prepared with DVB concentrations ranging from 20 to 75 mol% possess enhanced thermal properties. Based on the DSC and TGA data, the thermal stability of the mesospheres prepared by the precipitation polymerization is significantly improved as a result of crosslinking with DVB.

• 한국전기전자재료학회논문지
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• 제17권2호
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• pp.138-143
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• 2004

CMP (Chemical Mechanical Polishing) technology for global planarization of multilevel interconnection structure has been widely studied for the next generation devices. Among the consumables for CMP process, especially, slurry and their chemical compositions play a very important role in the removal rates and within-wafer non-uniformity (WIWNU) for global planarization ability of CMP process. However, CMP slurries contain abrasive particles exceeding 1 ${\mu}{\textrm}{m}$ size, which can cause micro-scratch on the wafer surface after CMP process. Such a large size particle in these slurries may be caused by particle agglomeration in slurry supply-line. In this work, to investigate the effects of agglomeration on the performance of oxide CMP slurry, we have studied an aging effect of silica slurry as a function of particle size distribution and aging time during one month. We Prepared and compared the self-developed silica slurry by adding of alumina powders. Also, we have investigated the oxide CMP characteristics. As an experimental result, we could be obtained the relatively stable slurry characteristics comparable to aging effect of original silica slurry. Consequently, we can expect the saving of high-cost slurry.

• Plant Biotechnology Reports
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• 제2권1호
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• pp.33-39
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• 2008

In this paper, we would like to show unexpected morphogenic potential of cell suspensions derived from seedling explants of Gentiana kurroo (Royle). Suspension cultures were established with the use of embryogenic callus derived from seedling explants (root, hypocotyl and cotyledons). Proembryogenic mass proliferated in liquid MS medium supplemented with $0.5mg\;l^{-1}$ 2,4-D and $1.0mg\;l^{-1}$ Kin. The highest growth coefficient was achieved for root derived cell suspensions. The microscopic analysis showed differences in aggregate structure depending on their size. To assess the embryogenic capability of the particular culture, 100 mg of cell aggregates was implanted on MS agar medium supplemented with Kin ($0.0-2.0mg\;l^{-1}$), $GA_3$ ($0.0-2.0mg\;l^{-1}$) and AS ($80.0mg\;l^{-1}$). The highest number of somatic embryos was obtained for cotyledon-derived cell suspension on $GA_3$-free medium, but the best morphological quality of embryos was observed in the presence of $0.5-1.0mg\;l^{-1}$ Kin, $0.5mg\;l^{-1}$ $GA_3$ and $80.0mg\;l^{-1}$ AS. The morphogenic competence of cultures also depended on the size of the aggregate fraction and was lower when size of aggregates decreased. Flow cytometry analysis reveled luck of uniformity of regenerants derived from hypocotyl suspension and 100% of uniformity for cotyledon suspension.

• Journal of Microbiology and Biotechnology
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• 제19권7호
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• pp.658-665
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• 2009

Quality control QC for spot-uniformity is a critical point in fabricating an oligonucleotide array, and quantification of targets is very important in array analysis. We developed two new types of QC probes as a means of confirming the quality of the uniformity of attached probes and the quantification of targets. We compared the signal intensities and fluorescent images of the QC and target-specific probes of arrays containing only target-specific probes and those containing both QC and target-specific probes. In a comparison of quality control methods, it was found that the arrays containing QC probes could check spot-uniformity or spot defects during all processes of array fabrication, including after spotting, after washing, and after hybridization. In a comparison of quantification results, the array fabricated by the method using QC probes showed linear and regular results because it was possible to normalize variations in spot size and morphology and amount of attached probe. This method could avoid errors originating in probe concentration and spot morphology because it could be normalized by QC probes. There were significant differences in the signal intensities of all mixtures (P<0.05). This result indicates that the method using QC probes is more useful than the ordinary method for quantification of mixed target. In the quantification of mixed targets, this method could determine a range for mixed targets of various amounts. Our results suggest that methods using QC probes for array fabrication are very useful to the quality control of spots in the fabrication processes of quantitative oligonucleotide arrays.

• 대한기계학회논문집B
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• 제37권7호
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• pp.709-716
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• 2013

팬 필터 유닛 (FFU)은 청정실 천정에 설치되어 정화된 공기를 공급하는 장치이다. FFU가 대형화되면서 출구면에서 속도가 불균일해지고 결과적으로 청정실에서 생산되는 제품의 품질 또는 생산성을 떨어뜨리게 된다. 이러한 문제를 해결하기 위해 가이드 베인이 설치되는데 가이드 베인은 속도를 균일하게 하지만 유동저항을 유발하여 동력이 일정하게 주어진 경우 공급되는 유량을 감소시킨다. 따라서 속도 균일성을 확보하면서 유량 감소를 최소화하는 최적설계가 요구된다. 본 연구에서는 FFU의 외벽과 중앙에 설치된 가이드 베인의 각도와 길이를 변경하면서 수치해석을 수행하여 가이드 베인의 성능 개선 방안을 도출하였다. 외벽에 설치된 가이드 베인의 경우, 형상을 변경하여 유량이 1.5% 감소하는 조건에서 속도 균일도를 3.7% 향상시킬 수 있었다. 중앙 가이드 베인의 경우 유량이 0.7% 감소하는 조건에서 속도 균일도를 2.9% 향상시킬 수 있었다.

• Advances in concrete construction
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• 제17권5호
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• pp.285-292
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• 2024

In order to improve the mixing effect of slurry-foam during the preparation of foam concrete, this study takes an SK static mixer as the mixing device, establishes a three-dimensional physical model and a theoretical calculation model, and numerically simulates the effects of different parameters such as foam inlet angle and pipe inner diameter on the mixing of cement slurry and foam under the given boundary conditions, so as to optimize the structure of this mixing device. The results show that when the pipe diameter of the mixer is larger than 60 mm, the phenomenon of backflow occurs in the pipe, which affects the mixing effect. The smaller the pipe diameter, the shorter the distance required to stabilize the cross-sectional average density and density uniformity index. When the foam inlet angle is different, the average density and density uniformity index of the radial cross-section have the same rule of change along the length of the pipeline, and all of them tend to stabilize gradually. At Y = 0.5 m, the average density basically stabilizes at 964 kg/m³ and remains stable until the outlet. At Y = 0.6 m, the density uniformity index basically stabilizes above 0.995 and remains stable until the outlet. Except for the foam inlet position (Y = 0.04 m), the foam inlet angle has little effect on the cross-sectional average density and density uniformity index. Under the boundary conditions given in this study, a pipe diameter of 40 mm, a foam inlet angle of 90°, and a pipe length of 700 mm are the optimal geometries for the preparation of homogeneous foam concrete with a density of 964 kg/m³ in this static mixer.