• Proceedings of the KIEE Conference
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• 1994.07a
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• pp.72-75
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• 1994

In this paper, a novel method to figure out the relative residual stress distribution along the depth of silicon diaphragms is presented Cantilevers with various thickness are fabricated by the time controlled etching method using EPW as an etchant. The boron concentration along the depth of the cantilevers is obtained by the TSUPREM IV simulation, and the etching time to get the proper thickness is calculated. By measuring deflections of the p+ silicon cantilevers the stress profile along the depth of diaphragm is calculated. The obtained stress profile is reasonable and useful to expect the deflection of cantilevers and the buckling of diaphragms.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.303.2-303.2
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• 2014

The oxides of group IV transition metals such as titanium, zirconium, hafnium have many important current and future application, including protective coatings, sensors and dielectric layers in thin film electroluminescent (TFEL) devices. Recently, group IV transition metal oxide films have been intensively investigated as replacements for SiO2. Due to high permittivities (k~14-25) compared with SiO2 (k~3.9), large band-gaps, large band offsets and high thermodynamic stability on silicon. Herein, we report the synthesis of new group IV transition metal complexes as useful precursors to deposit their oxide thin films using chemical vapor deposition technique. The complexes were characterized by FT-IR, 1H NMR, 13C NMR and thermogravimetric analysis (TGA). Newly synthesised compounds show high volatility and thermal stability, so we are trying to deposit metal oxide thin films using the complexes by Atomic Layer Deposition (ALD).

• Journal of the Korean Chemical Society
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• v.41 no.10
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• pp.541-546
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• 1997

Manganese dioxide may react with silicon tetrachloride to form manganese(Ⅳ) oxodichloride which reacts subsequently with another molecule of silicon tetrachloride leading to manganese tetrachloride eventually in chlorinated solvents. This in situ generated manganese(Ⅳ) oxodichloride or manganese tetrachloride were found to be very effective for the chlorination of a wide variety of alcohols to the corresponding chlorides. Primary, secondary and benzylic alcohols were converted into corresponding chlorides when treated with silicon tetrachloride in the presence of manganese dioxide at room temperature.

• Current Photovoltaic Research
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• v.4 no.4
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• pp.145-149
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• 2016

Characteristic of aluminum-silicon alloy paste which is applied on the rear side of PERC cell was investigated. The paste was made by aluminum-silicon alloy with eutectic composition to avoid the formation of void which is responsible for the degradation of the open-circuit voltage. Also, the glass frit component of the paste was changed to improve the adhesion of aluminum-silicon paste. We observed the formation of void and local back surface field between aluminum electrode and silicon base by SEM. The light IV, quantum efficiency and reflectance of the solar cells were characterized and compared for each paste.

• Transactions on Electrical and Electronic Materials
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• v.12 no.1
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• pp.7-10
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• 2011

High voltage (HV) integrated circuits are viable alternatives to discrete circuits in a wide variety of applications. A HV device generally used in these circuits is a lateral double diffused metal oxide semiconductor (LDMOS) transistor. Attempts to model LDMOS devices are complicated by the existence of the lightly doped drain and by the extension of the poly-silicon and the gate oxide. Several physically based investigations of the bias-dependent drift resistance of HV devices have been conducted, but a complete physical model has not been reported. We propose a new technique to model HV devices using both the BSIM3 SPICE model and a bias dependent resistor model (sub-circuit macro model).

• Journal of the Korean Ceramic Society
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• v.47 no.3
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• pp.205-209
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• 2010

In the last (fourth) section, the discussion will entail a silicon-nitride/silicon-carbide nanocomposite, produced by pyrolysis of liquid polymer precursors, demonstrating one of the lowest creep rates reported so far in ceramics at the comparable temperature of $1400^{\circ}C$. This was first achieved by avoiding the oxynitride glass phase at the intergrain boundaries. One important factor in the processing of these nanocomposites was the use of the electrical field assisted sintering method.

• JSTS:Journal of Semiconductor Technology and Science
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• v.7 no.2
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• pp.110-119
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• 2007

A new two-dimensional analytical model for dual-material double-gate fully-depleted SOI MOSFET with Pearson-IV type Doping Distribution is presented. An investigation of electrical MOSFET parameters i.e. drain current, transconductance, channel resistance and device capacitance in DM DG FD SOI MOSFET is carried out with Pearson-IV type doping distribution as it is essential to establish proper profiles to get the optimum performance of the device. These parameters are categorically derived keeping view of potential at the center (${\phi}_c$) of the double gate SOI MOSFET as it is more sensitive than the potential at the surface (${\phi}_s$). The proposed structure is such that the work function of the gate material (both sides) near the source is higher than the one near the drain. This work demonstrates the benefits of high performance proposed structure over their single material gate counterparts. The results predicted by the model are compared with those obtained by 2D device simulator ATLAS to verify the accuracy of the proposed model.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2010.05a
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• pp.792-794
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• 2010

본 연구는 PC1D를 이용하여 태양전지 전류전압 특성곡선및 효율을 분석한 연구이다. 태양전지 전류전압 특성곡선에서 제4상한부분의 면적은 태양전지의 효율을 나타낸다. 곡선인자(Fill Factor)는 개방전압과 단락 전류의 곱에 대한 최대 출력전압과 최대 출력전류의 곱한 값의 비율이다. 본 논문은 태양전지의 최대 효율을 얻기 위해서 도핑 농도를 $1{\times}10^{14}cm^{-3}$부터 $1{\times}10^{17}cm^{-3}$까지 변화시키면서 태양전지의 전류전압 특성곡선 및 최대효율을 분석하였다.

• Journal of the Korean Ceramic Society
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• v.46 no.3
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• pp.225-228
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• 2009

The processing and characterization of ceramic nanocomposites, which produce bulk nanostructures with attractive mechanical properties, have been emphasized and introduced at Prof. Mukherjee's Lab at UC Davis. The following subjects will be introduced in detail in Part II, III, and IV. In Part II, the paper will describe a three-phase alumina-based nanoceramic composite demonstrating superplasticity at a surprisingly lower temperature and higher strain rate. The next part will show that an alumina-carbon nanotube-niobium nanocomposite produced fracture toughness values that are three times higher than that of pure nanocrystalline alumina. It was possible to take advantage of both fiber-toughening and ductile-metal toughening in this investigation. In the fourth section, discussed will be a silicon-nitride/silicon-carbide nanocomposite, produced by pyrolysis of liquid polymer precursors, demonstrating one of the lowest creep rates reported so far in ceramics at the comparable temperature of $1400^{\circ}C$. This was first achieved by avoiding the oxynitride glass phase at the intergrain boundaries. One important factor in the processing of these nanocomposites was the use of the electrical field assisted sintering method. This allowed the sintering to be completed at significantly lower temperatures and during much shorter times. These improvements in mechanical properties will be discussed in the context of the results from the microstructural investigations.

• 한국신재생에너지학회:학술대회논문집
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• 2010.11a
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• pp.58.1-58.1
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• 2010

Stainless Steel의 유연한 기판을 사용하여 ZnO:Al/Ag의 후면전극에서 Ag 증착 실험조건 변화를 통해서 light trapping을 개선한 n-i-p 구조의 플렉서블 미세결정질 실리콘 박막 태양전지를 제작하였다. 실험 방법으로 마그네트론 스퍼터를 사용하여 Stainless Steel 기판 위에 ZnO:Al/Ag를 증착하여 후면전극으로 사용되는 back reflector를 제작하였으며 그 위에 미세결정질 실리콘 박막을 증착하였다. Back reflector에서 Ag 박막의 증착 온도가 증가할수록 표면결정 성장으로 roughness가 증가하여 반사도를 증가하였다. 또한, Ag 박막 증착 두께와 압력 변화에 따른 광학적 특성변화를 Atomic Force Microscope(AFM), Scanning Electron Microscopy(SEM),UV-visible-nIR spectrometry로 조사하여 최적의 조건을 찾았으며 개선된 back reflector의 특성이 n-i-p 구조의 플렉서블 미세결정질 실리콘 박막 태양전지에 적용하여 light trapping의 증가가 태양전지에서 광학적인 특성 변화 및 효율 향상에 영향을 주는지 Photo IV와 EQE(External Quantum Efficiency)를 통하여 조사하였다.