• Transactions on Electrical and Electronic Materials
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• v.7 no.4
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• pp.157-162
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• 2006

Chemical-mechanical polishing (CMP), one of the dominant technology for ULSI planarization, is used to flatten the micro electro-mechanical systems (MEMS) structures. The objective of this paper is to achieve good planarization of the deposited film and to improve deposition efficiency of subsequent layer structures by using surface-micromachining process in MEMS technology. Planarization characteristic of poly-Si film deposited on thin oxide layer with MEMS structures is evaluated with different slurries. Patterns used for this research have shapes of square, density, line, hole, pillar, and micro engine part. Advantages of CMP process for MEMS structures are observed respectively by using the test patterns with structures larger than 1 urn line width. Preliminary tests for material selectivity of poly-Si and oxide are conducted with two types of silica slurries: $ILD1300^{TM}\;and\;Nalco2371^{TM}$. And then, the experiments were conducted based on the pretest. A selectivity and pH adjustment of slurry affected largely step heights of MEMS structures. These results would be anticipated as an important bridge stone to manufacture MEMS CMP slurry.

• Journal of the Korean Ceramic Society
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• v.27 no.5
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• pp.583-588
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• 1990

Glass films in the binary system B2O3-SiO2 and Al2O3-SiO2 were prepared on soda-lime-silica slide glass by the dip-coating technique from TEOS and boric acid or aluminum nitrate. Thickness of the films varying with viscosity and withdrawal speed were measured and effect of composition and firing temperature on the properties such as transmittance and refractive index were investigated. nM2O3.(100-n)SiO2(M=B or Al) films containing up to 20mol% B2O3 and 40mol% Al2O3 were transparent. Maximum transmittance at visible range were obtained for the sample containing 15mol% Ba2O3 and 32.5mol% Al2O3 and heat-treated at 50$0^{\circ}C$, respectively. Refractive index of the film containing 15mol% B2O3 was mininum in the B2O3-SiO2 binary system and minimal refractive index was appeared at the film containing 32.5mol% Al2O3. In IP spectra, addition of B2O3 were increased absorption peak intensity of B-O and Si-O-B bond and addition of Al2O3 were decreased absorption peak intensity of Si-O bond, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.44-44
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• 1998

It was observed that the friction coefficient decreased with increasing Si concentration in the l ilms. Furthermore, the friction behavior became more s때ble even when very small amount of S Si of less than 0.5 at. % was incorporatA:회 By analyzing the composition of the debris f formed, we could show that the low and stabilized friction coefficient is in마nately relatA:었 w with the formation of the Si rich oxide debris. These result supports the mechanism that the h hydrated silica debris is the reason for low friction coefficient in humid environment. Second e evidence of the role of Si rich oxide debris could be found in the triOO-chemical reactions d during initial stage of triho-test. When the Si concen$\sigma$ation was less than 5 at.%, initial t transient period of high friction coefficient was commonly observed. Mter the transient period, m the friction coefficient becomes lower with increasing contact cycles. The initial $\sigma$ansient p peri여 becomes shorter and the starting and maximum friction coefficients in $\sigma$ansient 야,riod d decreased with increasing Si concentration. Composition of the debris on the wear scar s surface was analyzed by Auger spe따'Oscopy at v뼈ous stages in the initial transient period. W We observed that when the friction coefficient increased in earlier stage of the $\sigma$'ansient p period, iron and oxygen was observed in the debris. However, decrease in the 당iction c coefficient in the later stage of the transient period was associated with the formation of s silicon rich oxide debris. This result also supports the friction mechanism of Si-DLC films t that the formation of Si rich oxide debris results in low friction coefficient in ambient a atmosphere. atmosphere.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2459-2464
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• 2007

In present study, a temperature field of specimens which was coated with fluorescence dye such as Rhodamine-B(Rh-B) has been measured, based on the fluorescence intensity. Silica(SiO2) nano porous structure with 1um thickness was constructed on a cover glass, and fluorescence dye was digested into these porous thin films. To optimize manufacturing coating process, various solvents, Rh-B concentration, and other chemical materials were applied to fabricate the specimen and all specimens were measured on the various temperature conditions. For the measurement, a 14 bit cooled CCD camera with 1600 by 1200 spatial resolution is equipped with epifluorescence microscope to obtain only fluorescence intensity from 1.2 mm by 0.9 mm field of view of the illuminated coated specimen.

• Proceedings of the Korean Fiber Society Conference
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• 2003.04a
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• pp.52-55
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• 2003

Poly (ethylene 2, 6-naphthalate) (PEN) has been used for a high performance engineering plastics such as fiber, film, and packaging, because of excellent physical properties and outstanding gas barrier characteristics [1-2]. However, the application of PEN is limited because PEN exhibits a relatively high melt viscosity. Recently, many researches for organic/inorganic composites by applying nano-particles to the polymer matrix have been carried out [3], and the nano-particles exhibited greatly improved mechanical and rheological properties [4]. (omitted)

• Bulletin of the Korean Chemical Society
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• v.27 no.6
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• pp.808-816
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• 2006

Among the many forms of mesoporous materials, thin films are important for the potential applications of this class of materials. Compared with the powder forms, however, there has been relatively little work done on thin films probably because of the lack of suitable and generalized synthetic mechanisms established. In this account, we will review the issues on mesoporous thin films with emphasis on the necessity of forming films with accessible pores from the film surfaces and on mesoporous thin films with metal oxides other than silica. Various methods that have been tried to utilize mesoporous thin films with accessible pores as templates for the synthesis of nanostructured materials are reviewed with the emphasis on the advantages of the electrochemical deposition technique.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2015.11a
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• pp.179-180
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• 2015

In this study, the experimental study on Insulation performance of insulated forms utilizing NT frame heat insulation at low Temperature. For this study, placing insulated TEGO film plywood based form between two constant temperature and humidity chamber that maintaining 10℃, decrease temperature of one chamber to -10℃ and -20℃. Each of steps, maintaining period of temperature was 1 hour. After placing the insulated form, measure temperature of outside if insulated form. As a result of experiment, temperature difference of Fumed Silica Vacuum insulation was lowest.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.106-106
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• 2003

최근 집적형 광소자, 레이저 재료, 자료 저장 또는 통신 기술부문에서 제어된 광학적 성질을 갖는 유기-무기 나노 복합체를 만드는 연구가 많은 관심과 주목을 받고 있다. 유기물인 PEG는 대다수의 금속염을 고정시키는 용매 역할을 하는 polymer로써 액체와 같은 특징을 나타내며 무기물인 silica의 network는 순수한 PEG 시스템보다 좋은 기계적 물성을 나타내며, 투명한 물질을 얻을 수 있게 해 준다. 이에 본 연구에서는 SiO2-PEG의 matrix에 우수한 광학적 성질을 지닌 europium을 doping하여 유기-무기 나노 복합막을 합성하여 europium의 농도와 PEG 분자량에 따른 구조적 및 광학적 성질을 알아보고자 한다.

• Proceedings of the KIEE Conference
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• 2006.10c
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• pp.211-213
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• 2006

In this study, plasma etching process was modeled by using support vector machine (SVM). The data used in modeling were collected from the etching of silica thin films in inductively coupled plasma. For training and testing neural network, 9 and 6 experiments were used respectively. The performance of SVM was evaluated as a function of kernel type and function type. For the kernel type, Epsilon-SVR and Nu-SVR were included. For the function type, linear, polynomial, and radial basis function (RBF) were included. The performance of SVM was optimized first in terms of kernel type, then as a function of function type. Five film characteristics were modeled by using SVM and the optimized models were compared to statistical regression models. The comparison revealed that statistical regression models yielded better predictions than SVM.

• Proceedings of the PSK Conference
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• 2003.04a
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• pp.137.2-138
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• 2003

The steam distillate obtained from sawdust of Thujopsis dolabrata var. hondai was fractionated by centrifugal thin-film evaporation. and then the fractions were investigated against antiplatelet activity using washed rabbit platelets in vitro. The biologically active constituent of T. dolabrata sawdust was isolated by silica gel column chromatography and HPLC and characterized as carvacrol by various spectral analysis ($^{1}H$, $^{13}C$-NMR and GC/MS studies). (omitted)