Surface analysis of a-$Si_xC_{1x}:H$ deposited by RF plasma-enhanced CVD
(RF plasma-enhancd CVD 법에 의해 증착된 a-$Si_xC_{1x}:H$ 의 표면분석)
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- Proceedings of the Korea Association of Crystal Growth Conference
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- 1999.06a
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- pp.285-303
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- 1999