• Title/Summary/Keyword: Signal effect

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OES based PECVD Process Monitoring Accuracy Improvement by IR Background Signal Subtraction from Emission Signal (적외선 배경신호 처리를 통한 OES 기반 PECVD공정 모니터링 정확도 개선)

  • Lee, Jin Young;Seo, Seok Jun;Kim, Dae-Woong;Hur, Min;Lee, Jae-Ok;Kang, Woo Seok
    • Journal of the Semiconductor & Display Technology
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    • v.18 no.1
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    • pp.5-9
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    • 2019
  • Optical emission spectroscopy is used to identify chemical species and monitor the changes of process results during the plasma process. However, plasma process monitoring or fault detection by using emission signal variation monitoring is vulnerable to background signal fluctuations. IR heaters are used in semiconductor manufacturing chambers where high temperature uniformity and fast response are required. During the process, the IR lamp output fluctuates to maintain a stable process temperature. This IR signal fluctuation reacts as a background signal fluctuation to the spectrometer. In this research, we evaluate the effect of infrared background signal fluctuation on plasma process monitoring and improve the plasma process monitoring accuracy by using simple infrared background signal subtraction method. The effect of infrared background signal fluctuation on plasma process monitoring was evaluated on $SiO_2$ PECVD process. Comparing the $SiO_2$ film thickness and the measured emission line intensity from the by-product molecules, the effect of infrared background signal on plasma process monitoring and the necessity of background signal subtraction method were confirmed.

A Novel Synthesis Method of Underwater Target Reflected Signal (수중 표적 반사신호의 새로운 합성방법)

  • 김부일;김우현;박철우;박명호;권우현
    • Journal of the Korea Institute of Military Science and Technology
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    • v.2 no.2
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    • pp.30-39
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    • 1999
  • In this paper, we have proposed a novel method which can compose a reflected signal of the underwater target. The synthesis of the reflected signal in the target, the synthesized signal being similar to the characteristics of the reflected signal in the real target, is used the highlight model at the specific points of the target. We suggest the synthesis method of the reflected signal of the target using the pulsewidth variation and each other doppler effect at the highlight point, and compare the composed signal by the proposed method with that by conventional one. Simulation results show that the composed signal using the proposed method and the reflected signal of the real target is similar to the spectral characteristics.

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A New Diversity Combining Scheme Based on Interleaving Method for Time-of-arrival Estimation of Chirp Signal

  • Jang, Seong-Hyun;Chong, Jong-Wha
    • Journal of IKEEE
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    • v.16 no.2
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    • pp.153-158
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    • 2012
  • A new diversity combining scheme is proposed for time-of-arrival (TOA) estimation of chirp signal in dense multipath channel. In the multipath channel, the performance of TOA estimation using conventional correlation matrix-based diversity combining scheme is degraded due to the lack of de-correlation effect. To increase the de-correlation effect, the proposed diversity scheme employs interleaving method based on the property of de-chirped signal. As a result, the proposed scheme increases de-correlation effect and also reduces the noise of TOA estimation. Finally, the diversity achieved from the proposed scheme improves TOA estimation performance. The de-correlation effect is analyzed mathematically. The estimation accuracy of the proposed diversity scheme is superior to that of conventional diversity scheme in multipath channel.

Design of a Bias Circuit for Reducing Memory Effects (Memory Effect를 줄이기 위한 바이어스 회로의 설계)

  • Kang, Sanggee
    • Journal of Satellite, Information and Communications
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    • v.12 no.4
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    • pp.115-119
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    • 2017
  • Intermodulation distortion degrades the S/N(signal-to-noise) of the original signal and also affects the adjacent channels. Intermodulation distortion is mainly caused by the nonlinear characteristics of the power amplifier. If the power amplifier with nonlinear characteristics has a memory effect, the intermodulation distortions occurred in the power amplifier are generated in various and complex forms. The predistorter is used as a way to improve intermodulation distortions. In order to efficiently utilize the performance of the predistorter, the memory effect of the power amplifier must be reduced. In this paper, we describe the design method of bias circuit to reduce the memory effect in power amplifiers. To reduce the memory effect, the bias circuit must have a high impedance for the signal and a low impedance for the envelope(modulating signal) and the second harmonic component of the signal. To verify the performance of the bias circuit designed considering the memory effect, a power amplifier operating at 170 ~ 220MHz was designed and implemented. The designed bias circuit has a large impedance in the operating frequency band and low impedance in the envelope signal and the second harmonic of the signal. As a result of the performance measurement, it was found that the asymmetric intermodulation distortion component is improved by 3.7dB.

Enhancement of Magneto-optical Kerr Effect Signal from the Nanostructure by Employing Anti-reflection Coated Substrate

  • Kim, D.H.;You, Chun-Yeol
    • Journal of Magnetics
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    • v.13 no.2
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    • pp.70-75
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    • 2008
  • In this study, a MOKE (Magneto-optical Kerr effect) measurement method for magnetic nanostructures is proposed. Theoretically, the MOKE signal enhancement can be predicted and confirmed when an anti-reflection coated substrate is used. Since MOKE is a ratio of reflectivity and the difference between the reflectivities for two magnetic states, when the reflectivity of the substrate part is reduced by employing an anti-reflection coated substrate, MOKE signal enhancement can be achieved. The enhancement is confirmed by simple numerical MOKE calculations. When the reflectivity of an anti-reflection coated substrate is 0.7%, the calculated MOKE signal is about 79% of its bulk values for the 100-nm wide Fe nanowire with a 1500-nm radius laser beam. It was found that, for various numerical calculations, a larger MOKE signal is obtained relative to a smaller substrate reflectivity.

Research on Synthesis of Radiation Noise from Moving Target (이동하는 표적의 방사소음 합성기법 연구)

  • 배재휘
    • Journal of the Korea Institute of Military Science and Technology
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    • v.3 no.1
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    • pp.58-65
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    • 2000
  • A target signal simulation method for passive sonar systems is introduced. The method uses multirate signal processing techniques to simulate moving target signals in the multi-path sound propagation environment by introducing Lloyd's mirror and Doppler effect. Time and frequency variation of target signal due to the target maneuvering is also considered to provide realistic ship signatures in the LOFAR gram so that the simulated target is used for sonar operator training. Synthesized target characteristics is analyzed and compared with real target signal in terms of interference pattern and frequency variation in the LOFAR gram.

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THE EFFECT OF MASKED SIGNAL ON THE PERFORMANCE OF GNSS CODE TRACKING SYSTEM

  • Chang, Chung-Liang;Juang, Jyh-Ching
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • v.2
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    • pp.223-228
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    • 2006
  • The main purpose of this paper is to describe the code tracking performance of a non-coherent digital delay lock loop (DLL) or coherent DLL while tracking GNSS signal in the presence of signal masking. The masking effect is usually caused by buildings that obscure the signal in either a periodic or random manner. In some cases, ideal masking is used to remove random or periodic interference. Three types of the masked signal are considered - no masking, periodic masking, and random masking of the signal input to the receiver. The mean time to lose lock (MTLL) of the code tracking loop are evaluated, and some numerical result and simulation results are reported. Finally, the steadystate tracking errors on the performance of the tracking loop in interference environment are also presented.

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Analysis of Bobbin Probe Signal in Steam Generator Tube with Bulge Defect (증기발생기 세관의 Bulge결함에 대한 보빈프로브 신호해석)

  • Lee, Hyang-Beom
    • Proceedings of the KIEE Conference
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    • 2003.07b
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    • pp.702-704
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    • 2003
  • In this paper, analysis of bobbin probe signal in steam generator tube with bulge defect on CE system 80 nuclear power plant is represented. The CE system 80 steam generator is adopted in ULJIN-4 nuclear power plant. From Maxwell's equation, the electromagnetic governing equation for eddy current problem is derived and by performing the finite element formulation the 3-dimensional finite element code with brick element is developed. For the ease of the comparison the numerical results with experimental ones, the calculated signals are adjusted by using the ASME standard 100[%] through hole signal. For analysis of the effect of variation of the bulge depth on the impedance signal 0.2[mm] and 0.4[mm] depth of bulge defect signals are calculated and analyzed. As the depth of the bulge defect is increased, the magnitude of the signal is increased, too. But the rate of the increment of the signal is less than that of the depth of defect. From the result of this paper, we can obtained the information of the effect of bulge defect on the impedance signal.

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A Study on Multipath Effect Mitigation using Trigger Signal in the 3D TDOA Positioning System (3차원 TDOA 위치인식 시스템에서 트리거 신호를 이용한 다중경로 영향 감소에 관한 연구)

  • Oh, Jongtaek
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.14 no.4
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    • pp.149-155
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    • 2014
  • A study on the indoor positioning system has been active recently, and TDOA technique using acoustic signal has been used generally. The drawback of the TDOA is very weak against signal distortion due to multipath effect. Especially to estimate the smartphone position, the sound distortion is very severe, and the generated radio signal jitter when using WLAN or Bluetooth as a time reference signal makes the receiver difficult to estimate the position. In this paper, acoustic trigger signal for the receiver preparing the positioning signal reception is proposed, and the mitigation of the multipath effect is shown.

A Study on the Oil Inertia Effect and Frequency Response Characteristics of a Servo Valve-Metering Cylinder System (서보밸브-미터링 실린더 시스템의 오일 관성효과와 주파수 응답 특성에 관한 연구)

  • Yun, Hongsik;Kim, SungDong
    • Journal of Drive and Control
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    • v.18 no.2
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    • pp.9-19
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    • 2021
  • The spool displacement signal of a directional control valve, including the servo valve, can be considered as the standard signal to measure dynamic characteristics. When the spool displacement signal is not available, the velocity signal of a metering cylinder piston can be used. In this study, the frequency response characteristics of the metering cylinder are investigated for the spool displacement input. The transfer functions of the servo valve-metering system are derived taking into consideration the oil inertia effect in the transmission lines. The theoretical results of the transfer functions are verified through computer simulations and experiments. The oil inertia effect in the transmission lines was found to have a very significant effect on the bandwidth frequency of the servo valve-metering cylinder system. In order to more precisely measure the dynamic characteristics of a servo valve, the metering cylinder should be set up to minimize the oil inertia effect by increasing the inner diameters of the transmission lines or shortening their lengths.