• Title/Summary/Keyword: SiInZnO

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Investigating InSnZnO as an Active Layer for Non-volatile Memory Devices and Increasing Memory Window by Utilizing Silicon-rich SiOx for Charge Storage Layer

  • Park, Heejun;Nguyen, Cam Phu Thi;Raja, Jayapal;Jang, Kyungsoo;Jung, Junhee;Yi, Junsin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.324-326
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    • 2016
  • In this study, we have investigated indium tin zinc oxide (ITZO) as an active channel for non-volatile memory (NVM) devices. The electrical and memory characteristics of NVM devices using multi-stack gate insulator SiO2/SiOx/SiOxNy (OOxOy) with Si-rich SiOx for charge storage layer were also reported. The transmittance of ITZO films reached over 85%. Besides, ITZO-based NVM devices showed good electrical properties such as high field effect mobility of 25.8 cm2/V.s, low threshold voltage of 0.75 V, low subthreshold slope of 0.23 V/dec and high on-off current ratio of $1.25{\times}107$. The transmission Fourier Transform Infrared spectroscopy of SiOx charge storage layer with the richest silicon content showed an assignment at peaks around 2000-2300 cm-1. It indicates that many silicon phases and defect sources exist in the matrix of the SiOx films. In addition, the characteristics of NVM device showed a retention exceeding 97% of threshold voltage shift after 104 s and greater than 94% after 10 years with low operating voltage of +11 V at only 1 ms programming duration time. Therefore, the NVM fabricated by high transparent ITZO active layer and OOxOy memory stack has been applied for the flexible memory system.

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Evaluation of Groundwater Quality Using Factor Aanlyses and Agrochemicals in an Agricultural Area (요인분석과 농약성분 특성에 의한 농업지역의 지하수 수질 평가)

  • Lee, Jeong-Hwan;Hamm, Se-Yeong;Kim, Kwang-Sung;Cheong, Jae-Yeol;Ryu, Sang-Min;Kim, Deuk-Ho;Kim, Hyun-Ji
    • Economic and Environmental Geology
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    • v.42 no.3
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    • pp.217-234
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    • 2009
  • This study characterized groundwater quality and the influence of agrochemicals in a part of Ilgwang-Myeon agricultural area in Gijang-Gun, Busan Metropolitan City, using factor analyses. From the 1st, 2nd, and 3rd analyses of groundwater samples, the mean concentrations of $Ca^{2+}$, $Na^+$, $Mg^{2+}$, $K^+$, $Zn^{2+}$, $Cu^{2+}$, $Fe^{2+}$, $Al^{3+}$, $NO_3\;^-$, $Cl^-$, $SO_4\;^{2-}$, $F^-$, and $SiO_2$ were higher in the 2nd analysis than the other analyses. Pesticide carbofuran and herbicide alachlor were detected at the wells more than a half of all the wells in the 2nd analysis but not in the 4th analysis. This fact may be explained by that a higher precipitation induced higher infiltration rate of contaminants into groundwater during the 2nd survey. According to R- and Q-mode factor analyses, and chemical composition, inorganic constituents excepting $SiO_2$, $HC0_3\;^-$-, and $F^-$ may be influenced by anthropogenic sources (manures, synthetic fertilizers, and domestic wastes), seawater as well as water-mineral interaction. A typical indicator of groundwater contamination, nitrate, exceeds around 4-5 times over the Korean standard for drinking water. Additionally, the influence of seawater diminishes from the seaside to inland.

Element Dispersion and Wall-rock Alteration from Daebong Gold-silver Deposit, Republic of Korea (대봉 금-은광상의 모암변질과 원소분산 특성 연구)

  • Yoo, Bong-Chul;Chi, Se-Jung;Lee, Gil-Jae;Lee, Jong-Kil;Lee, Hyun-Koo
    • Economic and Environmental Geology
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    • v.40 no.6
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    • pp.713-726
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    • 2007
  • The Daebong deposit consists of gold-silver-bearing mesothermal massive quartz veins which fill fractures along fault zones($N10{\sim}20^{\circ}W,\;40{\sim}60^{\circ}SW$) within banded gneiss or granitic gneiss of Precambrian Gyeonggi massif. Ore mineralization of the deposit is composed of massive white quartz vein(stage I) which was formed in the same stage by multiple episodes of fracturing and healing and transparent quartz vein(stage II) which is separated by a major faulting event. The hydrothermal alteration of stage I is sericitization, chloritization, carbonitization, pyritization, silicification and argillization. Sericitic zone occurs near and at quartz vein and includes mainly sericite, quartz, and minor illite, carbonates and epidote. Chloritic zone occurs far from quartz vein and is composed of mainly chlorite, quartz and minor sericite, carbonates and epidote. Fe/(Fe+Mg) ratios of sericite and chlorite range 0.36 to 0.59($0.51{\pm}0.10$) and 0.66 to 0.73($0.70{\pm}0.02$), and belong to muscovite-petzite series and brunsvigite, respectively. Calculated $Al_{IV}-Fe/(Fe+Mg)$ diagrams of sericite and chlorite suggest that this can be a reliable indicator of alteration temperature in Au-Ag deposits. Calculated activities of chlorite end member are $a3(Fe_5Al_2Si_3O_{10}(OH){_6}=0.00964{\sim}0.0291,\;a2(Mg_5Al_2Si_3O_{10}(OH){_6}= 9.99E-07{\sim}1.87E-05,\;a1(Mg_6Si_4O_{10}(OH){_6}=5.61E-07{\sim}1.79E-05$. It suggest that chlorite from the Daebong deposit is iron-rich chlorite formed due to decreasing temperature from $T>450^{\circ}C$. Calculated $log\;{\alpha}K^+/{\alpha}H^+,\;log\;{\alpha}Na^+/{\alpha}H^+,\;log\;{\alpha}Ca^{2+}/{\alpha}^2H^+$ and pH values during wall-rock alteration are $4.6(400^{\circ}C),\;4.1(350^{\circ}C),\;4.0(400^{\circ}C),\;4.2(350^{\circ}C),\;1.8(400^{\circ}C),\;4.5(350^{\circ}C),\;5.4{\sim}6.5(400^{\circ}C)\;and\;5.1{\sim}5.5(350^{\circ}C)$, respectively. Gain elements (enrichment elements) during wallrock alteration are $K_2O,\;P_2O_5,\;Na2O$, Ba, Sr, Cr, Sc, V, Pb, Zn, Be, Ag, As, Ta and Sb. Elements(Sr, V, Pb, Zn, As, Sb) represent a potentially tools for exploration in mesothermal and epithermal gold-silver deposits.

The Role of Heme Oxygenase-1 in Lung Cancer Cells (폐암세포주에서 Heme Oxygenase-1의 역할)

  • Jung, Jong-Hoon;Kim, Hak-Ryul;Kim, Eun-Jung;Hwang, Ki-Eun;Kim, So-Young;Park, Jung-Hyun;Kim, Hwi-Jung;Yang, Sei-Hoon;Jeong, Eun-Taek
    • Tuberculosis and Respiratory Diseases
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    • v.60 no.3
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    • pp.304-313
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    • 2006
  • Background : Heme oxygenase-1 (HO-1) is an inducible enzyme that catalyzes the oxidative degradation of heme to form biliverdin, carbon monoxide (CO), and free iron. The current evidence has indicated a critical role of HO-1 in cytoprotection and also in other, more diverse biological functions. It is known that the high expression of HO-1 occurs in various tumors, and that HO-1 has an important role in rapid tumor growth because of its antioxidative and antiapoptotic effects. Therefore, the role of HO-1 was analyzed in human lung cancer cell lines, and especially in the A549 cell line. Material and Methods : Human lung cancer cell lines, i.e., A549, NCI-H23, NCI-H157 and NCI-H460, were used for this study. The expression of HO-1 in the untreated state was defined by Western blotting. ZnPP, which is the specific HO inhibitor we used, and the viability of cells were tested for by conducting MTT assaysy. The HO enzymatic activity, as determined via the bilirubin level, was also indirectly measured. Moreover, the generation of intracellular hydrogen peroxide (H2O2) was monitored fluorimetrically with using a scopoletin-horse radish peroxidase (HRP) assay and 2',7'-dichlorofluorescein diacetate (DCFH-DA). We have also transfected small HO-1 interfering RNA (siRNA) into A549 cells, and the apoptotic effects were evaluated by flow cytometric analysis and Western blotting. Results : The A549 cells had a greater expression of HO-1 than the other cell lines, whereas ZnPP significantly decreased the viability of the A549 cells more than the viability of the other lung cancer cells in a dose-dependant fashion. Consistent with the viability, the HO enzymatic activity also was decreased. Moreover, intracellular H2O2 generation via ZnPP was induced in a dose-dependent manner. Apoptotic events were, then induced in the HO-1 siRNA transfected A549 cells. Conclusion : HO-1 provides new important insights into the possible molecular mechanism of the antitumor therapy in lung cancer.

Status and Changes in Chemical Properties of Paddy Soil in Gangwon Province

  • Yoon, Byeong-Sung;Choi, Seung-Chul;Lim, Soo-Jeoung;Heo, Su-Jeong;Kim, In-Jong;Kang, Seong-Soo
    • Korean Journal of Soil Science and Fertilizer
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    • v.49 no.4
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    • pp.293-299
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    • 2016
  • The chemical properties of paddy fields in Gangwon province were monitored every 4 years from 2003 to 2015 in order to provide basic information for soil fertility management of paddy fields. In 2015, the soil chemical properties of paddy fields were 5.9 in pH, $22g\;kg^{-1}$ in organic matter (OM), and $123mg\;kg^{-1}$ in available (Avail.) phosphate $P_2O_5$. Exchangeable (Exch.) potassium (K), calcium (Ca) and magnesium (Mg) were 0.39, 4.8 and $0.9cmolc\;kg^{-1}$, respectively, and Avail. $SiO_2$ was $170mg\;kg^{-1}$. In the long-term analysis, the contents of Avail. $SiO_2$, Exch. K and pH of paddy soils showed increasing tendency. However, Avail. $P_2O_5$, Exch. Ca and Mg tended to decrease, and there were no significant changes in the contents of OM. Soil OM, Avail. $P_2O_5$ and $SiO_2$ were not different among the different topographical sampling sites. However, the mean value of Exch. K and Ca were different among the different topographical sampling sites, and exceeded optimal values in the fluvio-marine plains. Different soil texture resulted in different soil pH, while no difference for OM, Avail. $P_2O_5$ and $SiO_2$. Paddy soil samples within appropriate pH range increased from 65% in 2003 to 77% in 2007, 68% in 2011, and 71% in 2015. In case of Avail. $SiO_2$, soil samples within appropriate range increased from 20% in 2003, to 37% in 2007, 29% in 2011, and 45% in 2015. Meanwhile, Cd and Pb were distributed to less than 5% of soil pollution standards. Cu, As and Zn were distributed to less than 10%, 15% and 20%, respectively. Therefore, paddy soil in Gangwon Province was judged to be safe. As a result, paddy fields with more or less in nutrient level need to be fertilized based on the soil analysis. And the application of silicate fertilizer is strongly recommended to those of paddy fields in need. In addition, soil management including the cultivation of green manure crop or application of rice straw is necessary to increase the organic matter content of paddy soil.

Interface Functional Materials for Improving the Performance and Stability of Organic Solar Cell (유기태양전지의 효율 및 수명 향상을 위한 기능성 계면 소재 연구)

  • Hong, Kihyon;Park, Sun-Young;Lim, Dong Chan
    • Applied Chemistry for Engineering
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    • v.25 no.5
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    • pp.447-454
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    • 2014
  • Organic solar cells (OSCs) have intensively studied in recent years due to their advantages such as cost effectiveness and possibility of applications in flexible devices. In spite of the high power conversion efficiency (PCE) of 10 %, the OSCs still have a draw back of their low environmental stability due to the oxidization of aluminum cathode and etching of transparent conducting oxide as electrode. To solve these problems, the inverted structured OSCs (I-OSCs) having greatest potential for achieving an improvement of device performances are suggested. Therefore, there are a lot of studies to develope of interface layer based on organic/inorganic materials for the electron transport layer (ETL) and passivation layer, significant advancements in I-OSCs have driven the development of interface functional materials including electron transport layer. Recent efforts to employing 2D/3D zinc oxide (ZnO) based ETL into I-OSCs have produced OSCs with a power conversion efficiency level that matches the efficiency of ~9 %. In this review, the technical issues and recent progress of ZnO based ETL in I-OSCs to enhancement of device efficiency and stability in terms of materials, process and characterization have summarized.

Synthesis Characteristics of ZnO Powder from Precursors Composed of Nitrate-Citrate Compounds (Nitrate-Citrate 혼합 전구체로부터 ZnO 입자의 합성반응 특성)

  • Yang, Si Woo;Lee, Seung Ho;Lim, Dae Ho;Yoo, Dong Jun;Kang, Yong
    • Korean Chemical Engineering Research
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    • v.54 no.3
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    • pp.299-304
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    • 2016
  • Characteristics of self-propagating reaction for the preparation of ZnO powder from precursors composed of nitrate and citrate compounds were examined. The ratio of C/N was maintained in range of 0.7~0.8 to initiate the self-propagating reaction between the reducing citrate and oxidizing nitrate groups. The samples were decomposed thermally by using TGA. The sudden decomposition occurred in the range of X > 0.5 in a very short time with a very sharp decrease of mass, indicating that the self-propagating reaction would occur. Friedman, Ozawa-Flynn-Wall and Vyazovkin methods were employed to predict the activation energy, reaction order and frequency factor of the reaction rate in the rate determining step of X < 0.5 range. The activation energy increased with increasing fractional conversion in the range of 46~130 (kJ/min). The reaction order decreased in the range of 2.9~0.9, while the frequency factor increased in the range of 85~278 ($min^{-1}$), respectively, with increasing the rate of temperature increase.

Design of a new barrier rib with low dielectric constant and thermal stability

  • Lee, Chung-Yong;Hwang, Seong-Jin;You, Young-Jin;Lee, Sang-Ho;Kim, Hyung-Sun
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.725-727
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    • 2009
  • Lowering the dielectric constant is one of the important issues for the efficiency and the power consumption in the plasma display panel (PDP) industry. This study examined the effect of the addition of ceramic filler (up to 10% of crystalline and amorphous silica, respectively) to a $B_2O_3$-ZnO- $P_2O_5$ glass matrix on the dielectric, coefficient of thermal expansion, etching behaviors and residual stress for the barrier ribs in plasma display panels. The dielectric constant of barrier ribs is affected by containing two types of $SiO_2$ filler for the barrier rib composition in PDP.

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Investigation charge trapping properties of an amorphous In-Ga-Zn-O thin-film transistor with high-k dielectrics using atomic layer deposition

  • Kim, Seung-Tae;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.264-264
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    • 2016
  • 최근에 charge trap flash (CTF) 기술은 절연막에 전하를 트랩과 디트랩 시킬 때 인접한 셀 간의 간섭현상을 최소화하여 오동작을 줄일 수 있으며 낸드 플래시 메모리 소자에 적용되고 있다. 낸드 플래시 메모리는 고집적화, 대용량화와 비휘발성 등의 장점으로 인해 핸드폰, USB, MP3와 컴퓨터 등에 이용되고 있다. 기존의 실리콘 기반의 플래시 메모리 소자는 좁은 밴드갭으로 인해 투명하지 않고 고온에서의 공정이 요구되는 문제점이 있다. 따라서, 이러한 문제점을 개선하기 위해 실리콘의 대체 물질로 산화물 반도체 기반의 플래시 메모리 소자들이 연구되고 있다. 산화물 반도체 기반의 플래시 메모리 소자는 넓은 밴드갭으로 인한 투명성을 가지고 있으며 저온에서 공정이 가능하여 투명하고 유연한 기판에 적용이 가능하다. 다양한 산화물 반도체 중에서 비정질 In-Ga-Zn-O (a-IGZO)는 비정질임에도 불구하고 우수한 전기적인 특성과 화학적 안정성을 갖기 때문에 많은 관심을 받고 있다. 플래시 메모리의 고집적화가 요구되면서 절연막에 high-k 물질을 atomic layer deposition (ALD) 방법으로 적용하고 있다. ALD 방법을 이용하면 우수한 계면 흡착력과 균일도를 가지는 박막을 정확한 두께로 형성할 수 있는 장점이 있다. 또한, high-k 물질을 절연막에 적용하면 높은 유전율로 인해 equivalent oxide thickness (EOT)를 줄일 수 있다. 특히, HfOx와 AlOx가 각각 trap layer와 blocking layer로 적용되면 program/erase 동작 속도를 증가시킬 수 있으며 넓은 밴드갭으로 인해 전하손실을 크게 줄일 수 있다. 따라서 본 연구에서는 ALD 방법으로 AlOx와 HfOx를 게이트 절연막으로 적용한 a-IGZO 기반의 thin-film transistor (TFT) 플래시 메모리 소자를 제작하여 메모리 특성을 평가하였다. 제작 방법으로는, p-Si 기판 위에 열성장을 통한 100 nm 두께의 SiO2를 형성한 뒤, 채널 형성을 위해 RF sputter를 이용하여 70 nm 두께의 a-IGZO를 증착하였다. 이후에 소스와 드레인 전극에는 150 nm 두께의 In-Sn-O (ITO)를 RF sputter를 이용하여 증착하였고, ALD 방법을 이용하여 tunnel layer에 AlOx 5 nm, trap layer에 HfOx 20 nm, blocking layer에 AlOx 30 nm를 증착하였다. 최종적으로, 상부 게이트 전극을 형성하기 위해 electron beam evaporator를 이용하여 platinum (Pt) 150 nm를 증착하였고, 계면 결함을 최소화하기 위해 퍼니스에서 질소 가스 분위기, $400^{\circ}C$, 30 분의 조건으로 열처리를 했다. 측정 결과, 103 번의 program/erase를 반복한 endurance와 104 초 동안의 retention 측정으로부터 큰 열화 없이 메모리 특성이 유지되는 것을 확인하였다. 결과적으로, high-k 물질과 산화물 반도체는 고성능과 고집적화가 요구되는 향후 플래시 메모리의 핵심적인 물질이 될 것으로 기대된다.

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The Effect of Metallic Oxides on the Formation Rates and Rigidities of the Elastic Sodium Alginate-$CaSO_4{\cdot}1/2H_2O$ Gel. (Sodium Alginate-$CaSO_4{\cdot}1/2H_2O$ 彈性體의 生成速度 및 彈性에 미치는 金屬酸化物의 影響)

  • Shin, Hong-Dae;Huh, Yeonn;Kim, Uun-Sik
    • Journal of the Korean Chemical Society
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    • v.9 no.1
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    • pp.16-22
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    • 1965
  • The time-lag-effect of alkali salts on the gelation of sodium alginate-$CaSO_4{\cdot}$1/2 $H_2O$ is compared with Miyake's data, and then the formation rate of the elastics measured by the continuous method (an improved Schwedoff's method) and the change of rigidity with metallic oxides are studied as follows: (1) The gelation processes of sodium alginate and $CaSO_4{\cdot}$1/2 $H_2O$-aqueous sol are studied by measuring, continuously the increases of tensions ofsamples. (2) The time-lag-effect of $Na_3PO_4$ on the formation rate of the elastic gel is larger than that of $Na_2CO_3$, but the difference between the effects of the two alkali salts on the rate is found not so greater than predicted in Miyake's data. (3) Any regularities of the effect on the rate by metallic oxides are not observed. The increasing effects of the rates of $SiO_2$ and MgO are relatively large, and that of ZnO is relatively small. However, $Al_2O_3$, $Sb_2O_3$ and $TiO_2$show some decreasing effects. As a result it is noted that the regularities do not depend on the effect of oxide species and their amounts. (4) It is not found proportionality between the rigidity and the gelation rate. However, the increasing effect of the rigidity with the addition of metallic oxides can be observed. The rigidity increasing rate of MgO is the largest of them.

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