• 제목/요약/키워드: Si-Si coupling

검색결과 229건 처리시간 0.029초

Bottom형 IrMn 스핀밸브 박막의 열적안정성과 높은 교환결합력 (Thermal Stability and High Exchange Coupling Field of Bottom Type IrMn-Pinned Spin Valve)

  • 황재연;김미양;이장로
    • 한국자기학회지
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    • 제12권2호
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    • pp.64-67
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    • 2002
  • 속박층 (pinning layer) IrMn를 사용한 Ta/NiFe/IrMn/CoFe/Cu/CoFe/NiFe/Ta 구조의 스핀밸브 박막 (SV; spin valve)을 산화층이 코팅된 Si(111) 기판에 dc 마그네트론 스퍼터링 방법으로 상온에서 제작하였다. 이 SV에 대하여 교환결합자기장 (H$_{ex}$; exchange coupling field), 자기저항 (MR; magnetoresistance)비 및 보자력 (H$_{c}$ coercivity)의 열처리 순환수와 온도 의존성을 조사하였다. 증착조건과 후열처리 조건을 최적화 함으로써 MR비 3.6%, 피속박층의 H$_{ex}$ 11800 Oe을 얻었다. H$_{ex}$는 열처리 순환횟수가 2 이후에 일정한 값을 유지하여 열적으로 안정성을 갖는 것을 확인하였다. H$_{ex}$는 24$0^{\circ}C$ 까지는 600 Oe를 유지하다가 점점 감소하여 27$0^{\circ}C$에 0이 되었다.

Silane Coupling제를 이용한 면직물의 황토염색 (Loess Dyeing on Cotton Fabrics using Silane Coupling Agent)

  • 김성우;남성우;김인회
    • 한국염색가공학회지
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    • 제13권5호
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    • pp.48-48
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    • 2001
  • The effects of silane coupling agent on the performance properties of cotton fabrics treated with loess and its washing durability were investigated. Mean average diameter of loess was 17.88㎛ and main components were SiO₂, Al₂O₃ and Fe₂O₃. By using the cationic agent, the dyeability of cotton fabrics was improved. The washing durability, antibacterial property and deodorization rate were improved and very good emissivities of far infra-red rays were obtained by using the silane coupling agent. And also the mechanical properties of cotton fabrics, such as primary hand values, were improved.

Silane Coupling제를 이용한 면직물의 황토염색 (Loess Dyeing on Cotton Fabrics using Silane Coupling Agent)

  • 김성우;남성우;김인회
    • 한국염색가공학회지
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    • 제13권5호
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    • pp.336-345
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    • 2001
  • The effects of silane coupling agent on the performance properties of cotton fabrics treated with loess and its washing durability were investigated. Mean average diameter of loess was $17.88\mu{m}$ and main components were $SiO_2,\;Al_2O_3\;and\;Fe_2O_3$. By using the cationic agent, the dyeability of cotton fabrics was improved. The washing durability, antibacterial property and deodorization rate were improved and very good emissivities of far infra-red rays were obtained by using the silane coupling agent. And also the mechanical properties of cotton fabrics, such as primary hand values, were improved.

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단일층 다결정 실리콘 Flash EEPROM 소자의 제작과 특성 분석 (Fabrication and Characteristic Analysis of Single Poly-Si flash EEPROM)

  • 권영준;정정민;박근형
    • 한국전기전자재료학회논문지
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    • 제19권7호
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    • pp.601-604
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    • 2006
  • In this paper, we propose the single poly-Si Flash EEPROM device with a new structure which does not need the high voltage switching circuits. The device was designed, fabricated and characterized. From the measurement results, it was found that the program, the erase and the read operations worked properly. The threshold voltage was 3.1 V after the program in which the control gate and the drain were biased with 12 V and 7 V for $100{\mu}S$, respectively. And it was 0.4 V after the erase in which the control gate was grounded and the drain were biased with 11 V for $200{\mu}S$. On the other hand, it was found that the program and the erase speeds were significantly dependent on the capacitive coupling ratio between the control gate and the floating gate. The larger the capacitive coupling ratio, the higher the speeds, but the target the area per cell. The optimum structure of the cell should be chosen with the consideration of the trade-offs.

평면 광스플리터와 리본형 광파이버의 정밀 결합을 위한 V-groove연결소자의 제작 (Fabrication of V-groove Device for Precision Coupling of Planar Optical Splitter and Ribbon Optical Fiber)

  • 정석희;서화일;오현철;김영철
    • 반도체디스플레이기술학회지
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    • 제6권3호
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    • pp.61-64
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    • 2007
  • V-groove device was fabricated for precision coupling of planar optical splitter and optical fibers. V-groove was made through select wet etching of Si wafer by using KOH solution. Etching rate and surface roughness were checked, changing KOH composition(10, 20, 30, 33, 40 wt.%) and etching temperature (50, 60, 70, $80^{\circ}C$) to fabricate V-groove device effectively. Etching rate was the fastest as $1.84\;{\mu}m/min$ in case of etching by 20 wt.% KOH on $80^{\circ}C$, surface roughness was the best in case of etching by 33 wt. % KOH on $80^{\circ}C$.

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실리콘 v-groove를 이용한 광섬유-광검출기 어레이 모듈 제작 (Fabrication of the Optical Fiber-Photodiode Array Module Using Si v-groove)

  • 정종민;지윤규;박찬용;유지범;박경현;김홍만
    • 전자공학회논문지A
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    • 제31A권6호
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    • pp.88-97
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    • 1994
  • We describe the design, fabrication, and performance of the optical fiber-photodiode 1$\times$12 arry module using mesa-type InS10.53T GaS10.47TAS/INP 1$\times$12 PIN photodiode array. We fabricated the PIN PD array for high-speed optical fiber parallel data link optimizing quantum efficiency, operating speed sensitivity from the PIN-FET structure, and electrical AC crosstalk. For each element of the array, the diameter of the photodetective area is 80 $\mu$m, the diameter of the p-metal pad is 90 $\mu$m, and the photodiode seperation is 250 $\mu$m to use Si v-groove. Ground conductor line is placed around diodes and p-metal pads are formed in zigzag to reduce Ac capacitance coupling between array elements. The dark current (IS1dT) is I nA and the capacitance(CS1pDT) is 0.9 pF at -5 V. No signifcant variations of IS1dT and CPD from element to element in the array were observed. We calulated the coupling efficiency for 10/125 SMF and 50/125 GI MMF, and measured the responsivity of the PD array at the wavelength is 1.55 $\mu$ m. Responsivities are 0.93 A/W for SMF and 0.96 A/W for MMF. The optical fiber-PD array module is useful in numerous high speed digital and analog photonic system applications.

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프리즘 커플러를 이용한 도파로형 Au/$SiO_2$ 나노 혼합박막의 광 스위칭 특성 연구 (Study of the optical switching properties in waveguide type Au/$SiO_2$ nanocomposite film using prism coupler)

  • 조성훈;이순일;이택성;김원목;이경석
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.76-76
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    • 2008
  • The resonance properties due to the surface plasmon(SP) excitation of metal nanoparticles make the nanocomposite films promising for various applications such as optical switching devices. In spite of the well-known ultra-sensitive operation of optical switches based on a guided wave, the application of nanocomposite film(NC) has inherent limitation originating from the excessive optical loss related with the surface plasmon resonance(SPR). In this study, we addressed this problem and present the experimental and theoretical analysis on the pump-probe optical switching in prism-coupled Au(1 vol.%):$SiO_2$ nanocomposite waveguide film. The guided mode was successfully generated using a near infrared probe beam of 1550 nm and modulated with an external pump beam of 532 nm close to the SPR wavelength. We extend our approach to ultra-fast operation using a pulsed laser with 5 ns pulse width. To improve the switching speed through the reduction in thermal loading effect accompanied by the resonant absorption of pump beam light, we adopted a metallic film as a coupling layer instead of low-index dielectric layer between the high-index SF10 prism and NC slab waveguide. We observed great enhancement in switching speed for the case of using metallic coupling layer, and founded a distinct difference in origin of optical nonlinearities induced during switching operation using cw and ns laser.

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스핀 밸브 Ta 하지층의 질소함유량 변화와 열처리 온도에 따른 자기적 특성 (Magnetic Properties of Spin Valve Ta Underlayer Depending on N2 Concentration and Annealing Temperature)

  • 최연봉;김지원;조순철;이창우
    • 한국자기학회지
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    • 제15권4호
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    • pp.226-230
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    • 2005
  • 본 연구에서는 스핀밸브 구조에서 하지층으로 많이 사용되고 있는 Ta 층에 질소를 첨가하여 질소량에 따른 자기적 특성과 열처리 결과를 비교 검토하였다. 또한 하지층에 질소를 첨가하여 확산 방지막으로서 역할과 기판과 하지층과의 접착력을 측정하여 비교하였다. 사용된 스핀밸브는 Si($SiO_2$)/Ta(TaN)/NiFe/CoFe/Cu/CoFe/FeMn/Ta 구조이다. Ta 박막에 비해 TaN 박막의 질소량이 증가할수록 증착률은 감소하였고, 비저항과 표면 거칠기는 증가하였다. 고온에서 열처리 후 측정한 XRD 결과를 보면 Si/Ta 박막에서는 규소화합물이 생성된 반면 Si/TaN 박막에서는 규소화합물을 발견할 수 없었다. 자기저항비(MR)와 교환결합자장($H_{ex}$)은 질소량이 4.0 sccm 이상에서는 감소하였다. 열처리 결과 자기저항비는 하지층이 Ta인 시편과 질소량이 4.0 sccm까지 혼합된 TaN 시편은 $200^{\circ}C$까지는 약 $0.5\%$ 정도 증가하다가 감소하였다. 기판과 하지층과의 접착력을 측정한 결과 Ta 박막보다 질소량이 8.0 sccm인 TaN 박막인 경우 약 2배 강한 접착력을 보였다. 본 연구 결과에 의하면 하지층 증착 시 아르곤 가스에 3.0 sccm 정도의 질소 가스를 혼합하여 사용하면 자기적 특성에 크게 영향을 주지 않으면서 확산 방지막, 접착력 향상등의 이점을 얻을 수 있으리라 사료된다.

Crystal Structure and Piezoelectric Properties of Four Component Langasite A3B Ga3Si2O14 (A = Ca or Sr, B = Ta or Nb)

  • Ohsato, Hitoshi;Iwataki, Tsuyoshi;Morikoshi, Hiroki
    • Transactions on Electrical and Electronic Materials
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    • 제13권4호
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    • pp.171-176
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    • 2012
  • As langasite $A_3BC_3D_2O_{14}$ compounds with piezoelectric properties exhibit no phase transition up to the melting point of 1,400-$1,500^{\circ}C$, many high temperature applications are expected for the SAW filter, temperature sensor, pressure sensor, and so on, based on the digital transformation of wider bandwidth and higher-bit rates. It has a larger electromechanical coupling factor compared to quartz and also nearly the same temperature stability as quartz. The $La_3Ga_5SiO_{14}$ (LGS) crystal with the $Ca_3Ga_2Ge_4O_{14}$-type crystal structure was synthesized and the crystal structure was analyzed by Mill et al. It is also an important feature that the growth of the single crystal is easy. In the case of three-element compounds such as $[R_3]_A[Ga]_B[Ga_3]_C[GaSi]_DO_{14}$ (R=La, Pr and Nd), the piezoelectric constant increases with the ionic radius of R. In this study, crystal structures of four-element compounds such as $[A_3]_A[B]_B[Ga_3]_C[Si_2]_DO_{14}$ (A = Ca or Sr, B = Ta or Nb) are analyzed by a single crystal X-ray diffraction, and the mechanism and properties of the piezoelectricity depending on the species of cation was clarified based on the crystal structure.

이차 열처리가 PtMn계 스핀밸브의 거대자기저항 특성에 미치는 영향 (The Second Annealing Effect on Giant Magnetoresistance Properties of PtMn Based Spin Valve)

  • 김광윤;김민정;김희중
    • 한국자기학회지
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    • 제11권2호
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    • pp.72-77
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    • 2001
  • DC 마그네트론 방식으로 제조한 PtMn계 상부층형(top) 스핀밸브 박막을 반강자성층인 PtM의 fcc (111) 구조에서 fat (111)구조 천이를 위하여 27$0^{\circ}C$에서 3 kOe의 외부자장을 가해주면서 일차적인 열처리를 한 후, 이차적으로 무자장 열처리를 하여 상온에서 자기적 특성을 조사하였다. Si/A1$_2$O$_3$ (500$\AA$)/Ta(50$\AA$)NiFe(40$\AA$)/CoFe(17$\AA$)/Cu(28$\AA$)/CoFe (30$\AA$)PtMn(200$\AA$)Ta(50$\AA$) top 스핀밸브 시료에서 자기저항비를 조사한 결과 열처리 온도가 높아질수록 자기저항비가 완만히 감소하나 325 $^{\circ}C$ 이상에서 급격히 감소하여 1 %까지 감소하는 것을 확인하였으며, 이것은 열처리 온도가 높아질수록 반강자성층과 피고정층사이의 교환 결합력이 약해지는 것에 기인하는 것으로 판단하였다. 열처리 온도 증가에 따른 교환 바이어스 자장은 325 $^{\circ}C$ 이상에서 급격히 감소하였고, 고정층과 자유층사이의 상호 결합 세기(interlayer coupling field, $H_{int}$)는 $325^{\circ}C$ 이상에서 크게 증가하였는데, 이것은 열처리 온도가 증가함에 다라 Mn의 상호 확산(inter-diffusion)dl 증가하여 계면에서의 거칠기(roughness)가 커지기 때문이라고 생각하였다. 이와 같은 결과에서 PtMn 스핀밸브의 급격한 자기적 특성변화가 일어나는 열처리 온도가 PtMn계 스핀밸브 박막의 블로킹 온도(blocking temperature, $T_b$)와 잘 일치함을 호가인할 수 있었다.

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