Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Fabrication of V-groove Device for Precision Coupling of Planar Optical Splitter and Ribbon Optical Fiber

평면 광스플리터와 리본형 광파이버의 정밀 결합을 위한 V-groove연결소자의 제작

  • Jeong, Seok-Hee (Dept. Of Electrical and Electronic Engineering, Korea University of Technology and education) ;
  • Seo, Hwa-Il (Dept. Of Electrical and Electronic Engineering, Korea University of Technology and education) ;
  • O, Hyun-Cheol (Dept. of Material Engineering, Korea University of Technology and education) ;
  • Kim, Young-Cheol (Dept. of Material Engineering, Korea University of Technology and education)
  • 정석희 (한국기술교육대학교 전기전자공학과) ;
  • 서화일 (한국기술교육대학교 전기전자공학과) ;
  • 오현철 (한국기술교육대학교 신소재공학과) ;
  • 김영철 (한국기술교육대학교 신소재공학과)
  • Published : 2007.09.30
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Abstract

V-groove device was fabricated for precision coupling of planar optical splitter and optical fibers. V-groove was made through select wet etching of Si wafer by using KOH solution. Etching rate and surface roughness were checked, changing KOH composition(10, 20, 30, 33, 40 wt.%) and etching temperature (50, 60, 70, $80^{\circ}C$) to fabricate V-groove device effectively. Etching rate was the fastest as $1.84\;{\mu}m/min$ in case of etching by 20 wt.% KOH on $80^{\circ}C$, surface roughness was the best in case of etching by 33 wt. % KOH on $80^{\circ}C$.

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