• Title/Summary/Keyword: Si tip

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Characterizations of Diamond-Like Carbon Films Prepared by the Plasma Enhanced Chemical Vapor Deposition Method (플라즈마 화학 기상 증착법으로 제작된 Diamond-Like Carbon 박막의 특성)

  • 김종탁
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.6
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    • pp.465-471
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    • 1998
  • Diamond-like carbon (DLC) films have been prepared by means of the plasma enhanced chemical vapor deposition (PECVD) method using vertical-capacitor electrodes. The deposition rata in our experiment is relatively small compared with that in the conventional PECVD methods, which implies that the accumulation of the neutral $CH_n$ radicals on the substrates due to the gravitational movement may not contribute to the deposition of DLC films. The hardness and the transparency were measured as a function of the ratio of the partial pressure of $CH_4-H_2$ mixtures or the hydrogen contents of specimens. The coefficients of friction between DLC films and a $Si_3N_4$ tip measured by using a lateral force microscope are in the range of 0.024 to 0.033 which depend on the hydrogen contents in DLC, and the surface roughness depends mainly on the deposition rate. The optical gaps increase with increasing the hydrogen contents. DCL films deposited on Pt-coated Si wafers show the stable emission characteristics, and the turn-on fields are in the range of 11 to 20 $V/\mu$m.

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Comparison on Spray Characteristics of Diesel HEV Injectors for 3-different Driving Type (SI, PI, DPI) (3개 구동방식(SI, PI, DPI)별 디젤HEV용 인젝터의 분무 특성 비교)

  • Chung, M.C.;Sung, G.S.;Kim, S.M.;Lee, J.W.
    • Journal of ILASS-Korea
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    • v.19 no.1
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    • pp.9-14
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    • 2014
  • Performance of DI diesel engine with high-pressure fuel injection equipment is directly related to its emission characteristics and fuel consumption. So, the electro-hydraulic injector for the common-rail injection system should be designed to meet the precise high fuel delivery control capability. Currently, most high pressure injector in use has a needle driven by the solenoid coil energy or the piezo actuator controlled by charge-discharge of output pulse current. In this study, macroscopic spray approaching method was applied under constant volume chamber to research the performance of three different injectors : solenoid, indirect-acting piezo and direct-acting piezo type for CR direct-injection. LED back illumination for Mie scattering was applied on the liquid spray visible of direct-acting piezo injector, including hydraulic-servo type solenoid and piezo-driven injectors. As main results, we found that a direct-acting piezo injector had better a spray tip penetration than hydraulic-servo injectors in spray visualization.

Growth Characteristics of Amorphous Silicon Oxide Nanowires Synthesized via Annealing of Ni/SiO2/Si Substrates

  • Cho, Kwon-Koo;Ha, Jong-Keun;Kim, Ki-Won;Ryu, Kwang-Sun;Kim, Hye-Sung
    • Bulletin of the Korean Chemical Society
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    • v.32 no.12
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    • pp.4371-4376
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    • 2011
  • In this work, we investigate the growth behavior of silicon oxide nanowires via a solid-liquid-solid process. Silicon oxide nanowires were synthesized at $1000^{\circ}C$ in an Ar and $H_2$ mixed gas. A pre-oxidized silicon wafer and a nickel film are used as the substrate and catalyst, respectively. We propose two distinctive growth modes for the silicon oxide nanowires that both act as a unique solid-liquid-solid growth process. We named the two growth mechanisms "grounded-growth" and "branched-growth" modes to characterize their unique solid-liquid-solid growth behavior. The two growth modes were classified by the generation site of the nanowires. The grounded-growth mode in which the grown nanowires are generated from the substrate and the branchedgrowth mode where the nanowires are grown from the side of the previously grown nanowires or at the metal catalyst drop attached at the tip of the nanowire stem.

Electrical characteristics of lateral poly0silicon field emission triode using LOCOS process

  • Lee, Jae-Hoon;Lee, Myoung-Bok;Park, Dong-Il;Ham, Sung-Ho;Lee, Jong-Hyun;Lee, Jung-Hee
    • Journal of Korean Vacuum Science & Technology
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    • v.3 no.1
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    • pp.38-42
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    • 1999
  • Using the LOCOS process, we have fabricated the lateral type polysilicon field emission triodes with poly-Si/oxide/Si structure and investigated their current-voltage characteristics for three biasing modes of operation. The fabricated devices exhibit excellent electrical performances such as a relatively low turn-on anode voltage of 14 V at VGC = 0V, a stable and high emission current of 92${\mu}$A/triode over 90 hours, a small gate leakage current of 0.23 ${\mu}$A/triode and an outstanding transconductance of 57${\mu}$S/5triodes at VGC = 5V and VAC = 26V. these superior electrical operation is believed to be due to a large field enhancement effect, which is related to the sharp cathode tips produced by the LOCOS process as well as the high aspect ratio (height /radius ) of the cathode tip end.

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Maskless Pattern Fabrication on Si (100) Surface by Using Nano Indenter with KOH Wet Etching (나노인덴터와 KOH 습식 식각 기술을 병용한 Si(100) 표면의 마스크리스 패턴 제작 기술)

  • 윤성원;신용래;강충길
    • Transactions of Materials Processing
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    • v.12 no.7
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    • pp.640-646
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    • 2003
  • The nanoprobe based on lithography, mainly represented by SPM based technologies, has been recognized as potential application to fabricate the surface nanostructures because of its operational versatility and simplicity. The objective of the work is to suggest new mastless pattern fabrication technique using the combination of machining by nanoindenter and KOH wet etching. The scratch option of the nanoindenter is a very promising method for obtaining nanometer scale features on a large size specimen because it has a very wide working area and load range. Sample line patterns were machined on a silicon surface, which has a native oxide on it, by constant load scratch (CLS) of the Nanoindenter with a Berkovich diamond tip, and they were etched in KOH solutions to investigate chemical characteristics of the machined silicon surface. After the etching process, the convex structure was made because of masking effect of the affected layer generated by nano-scratch. On the basis of this fact, some line patterns with convex structures were fabricated. Achieved patterns can be used as a mold that will be used for mass production processes such as nanoimprint or PDMS molding process. All morphological data of scratch traces were scanned using atomic force microscope (AFM).

The Effect of Velocity Control Method on the Part Characteristic in Semi-Solid Die Casting (반용융 다이캐스팅 공정에 있어서 속도제어방법이 제품의 특성에 미치는 영향)

  • Seo, Pan-Ki;Kang, Chung-Gil;Son, Young-Ik
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.26 no.10
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    • pp.2034-2043
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    • 2002
  • The process design to produce a near net shape home-appliance compressor component using semi-solid die casting process is performed. In order to obtain a good component without defects such as liquid segregation and porosity, the relationship between pressure and time, and plunger tip displacement and injection velocity are proposed with repeated trial and error. The effect of the velocity variation in the process parameters on liquid segregation and extraction is investigated to produce the aluminum frame part(a kind of compressor part) with good mechanical properties. The mechanical characteristic of semi-solid die casting formed parts for AlSi7Mg0.65r(A357) and AlSi17Cu4Mg(A390) are investigated with a view to minimizing the occurrence of defects. To investigate of application possibility at industry field, A380 aluminum alloy with 8∼9% silicon contents used for the squeeze casting process. The obtained mechanical properties is compared with semi-solid die casting.

New Record for Alien Plant, Kickxia elatine (L.) Dumort. (Plantaginaceae) in Korea (한반도 미기록 외래식물: 해란초아재비)

  • Kim, Jung-Hyun;Nam, Myoung Ja;Lim, Chae Eun;Kim, Jin-Seok
    • Korean Journal of Plant Resources
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    • v.34 no.1
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    • pp.98-102
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    • 2021
  • An alien plant of unrecoreded Kickxia (Plantaginaceae) was found in Korea. K. eltine (L.) Dumort. was distirbuted in Yangju-si, Gyoenggi-do and Yeongcheon-si, Gyeongsangbuk-do. This species can be distinguished from the other related genera by having stems that trail along the groud without putting down roots, and the leaves are sagittate, or shaped like arrowheads with longer, narrower, pointed lobes opposite the shorter tip. The new Korean names is given, as 'Hae-ran-cho-a-jae-bi' to Kickxia elatine (L.) Dumort. Here, we provide precise description, illustrations, photographs and taxonomic key to related genera and species.

GaN Nanowire Growth on Si Substrate by Utilizing MOCVD Methods (MOCVD 방법에 의한 Si 기판위 GaN 나노선의 성장)

  • Woo, Shi-Gwan;Shin, Dae-Keun;O, Byung-Sung;Lee, Hyung-Gyoo
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.23 no.11
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    • pp.848-853
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    • 2010
  • We have grown GaN nanowires by the low pressure MOCVD method on Ni deposited oxidized Si surface and have established optimum conditions by observing surface microstructure and its photoluminescence. Optimum growth temperature of $880^{\circ}C$, growth time of 30 min, TMG source flow rate of 10 sccm have resulted in dense nanowires on the surface, however further increase of growth time or TMG flow rate has not increased the length of nanowire but has formed nanocrystals. On the contrary, the increase of ammonia flow has increased the length of nanowires and the coverage of nanowire over the surface. The shape of nanowire is needle-like with a Ni droplet at its tip; the length is tens of micron with more than 40 nm in diameter. Low temperature photoluminescence obtained from the sample at optimum growth condition has revealed several peaks related to exciton decay near band-edge, but does not show any characteristic originated from one dimensional quantum confinement. Strong and broad luminescence at 2.2 eV is observed from dense nanowire samples and this suggests that the broad band is related to e-h recombination at the surface state in a nanowire. The current result is implemented to the nanowire device fabrication by nanowire bridging between micro-patterned neighboring Ni catalysis islands.

Fabrication of silicon nano-ribbon and nano-FETs by using AFM anodic oxidation

  • Hwang, Min-Yeong;Choe, Chang-Yong;Jeong, Ji-Cheol;An, Jeong-Jun;Gu, Sang-Mo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.54-54
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    • 2009
  • AFM anodic oxidation has the capability of patterning complex nano-patterns under relatively high speeds and low voltage. We report the fabrication using a atomic force microscopy (AFM) of silicon nano-ribbon and nano-field effect transistors (FETs). The fabricated nano-patterns have great potential characteristics in various fields due to their interesting electronic, optical and other profiles. The results shows that oxide width and the separation between the oxide patterns can be optimally controlled. The subsequently fabricated silicon nano-ribbon and nano-FET working devices were controled by various tip-sample bias-voltages and scan speed of AFM anodic oxidation. The results may be applied for highly integration circuits and sensitive optical sensor applications.

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물리정수법에 의한 형광 X선분석과 만장굴석주의 연대측정

  • 택훈
    • Proceedings of the Speleological Society Conference
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    • 1993.07a
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    • pp.163-172
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    • 1993
  • Cheju island is situated at about 90km south of southern most tip of the Korean peninsula. Its shape is an ellips with size of 80$\times$40$km^2$, and it is characterized by a symmetrical form whose peak is Mt. Halla (1950m). Major chemical composition of the rock samples from Manjang gul cave is determined by XRF using the fundamental parameter method consisting of fully auto quantitative analysis, semi quantitative analysis (order estimation) and group quantitative analysis. Judging from chemical composition ($SiO_2 = 53.07Wt% Fe_2 O_3=11.34Wt%, MgO=6.48Wt%, Na_2 O=3.07Wt%, K_2 O=1.05Wt%$), this rocks may belong to non alkalic basalt. K-Ar ages of two rocks samples from the Manjang gul cave are also determined. The discrepancy of K-Ar ages is found. They are 0.03Ma and 0.42Ma, respectively. This paper describes some problems experienced in dating young volcanic rocks and then discusses chemical composition, X-ray fluorescence analysis and the age of the formation of a lava tunnel such as Manjang gul cave in cheju Island.

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