• 제목/요약/키워드: Si nanorod

검색결과 47건 처리시간 0.025초

테트라메틸사일렌을 이용한 탄화규소 나노로드의 성장 (Growth of SiC Nanorod Using Tetramethylsilane)

  • 노대호;김재수;변동진;양재웅;김나리
    • 한국재료학회지
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    • 제13권6호
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    • pp.404-408
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    • 2003
  • SiC nanorods have been grown on Si (100) substrate directly. Tetramethylsilane and Ni were used for SiC nanorod growth. After 3minute, SiC nanorod had grown by CVD. Growth regions ware divided by two regions with diameter. The First region consisted of thin SiC nanorods having below 10 nm diameter, but second region's diameter was 10∼50 nm. This appearance shows by reduction of growth rate. The effect of temperature and growth time was investigated by scanning electron microscopy. Growth temperature and time affected nanorod's diameter and morphology. With increasing growth time, nanorod's diameter increased because of the deactivation effect. But growth temperatures affected little. By TEM characterization, grown SiC nanorods consisted of the polycrystalline grain.

Fe와 Hexamethyldisilabutane를 이용한 SiC 나노로드의 성장 (Growth of SiC Nanorods Using Fe and Hexamethyldisilabutane)

  • 노대호;김재수;변동진;양재웅;김나리
    • 한국표면공학회지
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    • 제36권3호
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    • pp.234-241
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    • 2003
  • SiC nanorod was synthesized directly on Si substrate using hexamethyldisilabutane and Fe catalyst with (111) direction. Fe acted a liquid catalyst at growth condition. Grown SiC nanorod has about 30nm diameter and $5{\mu}m$ length. SiC nanorod growth was divided by trro regions with diameter distribution. This diameter distribution were occurred by surface deposition at as - grown nanorod's surface by limitation of growth rate. At higher temperature, these division not occurred. Growth temperature and flow rates affected diameter and morphology of nanorods. With increasing flow rate of source gas, nanorod's diameter increased because of deactivation effect. Case of the increasing temperature, growth rate increased so deactivation did not occurred.

Fabrication and Characterization of Cr-Si Schottky Nanodiodes Utilizing AAO Templates

  • 권남용;성시현;정일섭
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.600-600
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    • 2013
  • We have fabricated Cr nanodot Schottky diodes utilizing AAO templates formed on n-Si substrates. Three different sizes of Cr nanodots (about 75.0, 57.6, and 35.8 nm) were obtained by controlling the height of the AAO template. Cr nanodot Schottky diodes showed a rectifying behavior with low SBHs of 0.17~0.20 eV and high ideality factors of 5.6~9.2 compared to those for the bulk diode. Also, Cr nanodot Schottky diodes with smaller diameters yield higher current densities than those with larger diameters. These electrical behaviors can be explained by both Schottky barrier height (SBH) lowering effects and enhanced tunneling current due to the nanoscale size of the Schottky contact. Also, we have fabricated Cr-Si nanorod Schottky diodes with three different lengths (130, 220, and 330 nm) by dry etching of n-Si substrate. Cr-Si nanorod Schottky diodes with longer nanorods yield higher reverse current than those with shorter nanorods due to the enhanced electric field, which is attributed to a high aspect ratio of Si nanorod.

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광전자 소자 응용을 위한 수직 정렬된 ZnO Nanorod Array를 이용한 계층 나노구조

  • 고영환;유재수
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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    • pp.126-126
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    • 2011
  • 수직으로 정렬된 1차원 ZnO nanorod arrays (NRAs)는 효율적인 반사방지 특성의 기하학적 구조를 갖고 있어, 크기와 모양 그리고 정렬형태의 다양한 설계를 통해 빛의 흡수율과 광 추출효율을 증가시켜 광전소자 및 태양광 소자의 성능을 향상시킬 수 있으며, 최근 이러한 연구에 대한 관심이 집중되고 있다. 본 연구에서는 ZnO NRAs의 넓은 표면적과 불연속적인 독특한 표면을 활용하여 광학적 특성을 효과적으로 개선하였다. 실험을 위해, thermal evaporator를 사용하여 Au와 Ag 그리고 e-beam evaporator를 사용하여 $SiO_2$를 ZnO NRAs 표면에 여러 가지 조건으로 증착하여, 독특한 계층 나노구조의 형성과 광학적 특성을 관찰하였다. 표면 roughness가 큰 FTO/glass 위에 수열합성법을 통해 끝이 뾰족하고, 비스듬히 정렬된 ZnO nano-tip array에 Au를 증착할 경우 ZnO/Au core/shell 구조가 형성되며, Au의 광 흡수율이 매우 크게 증가함을 관찰할 수 있었다. 반면 flat한 표면위에 빽빽하게 수직으로 정렬된 ZnO NRAs를 성장시켜 그 위에 Ag를 증착할 경우, evaporated Ag flux가 ZnO nanorod의 사이에 scattered 되어 ZnO nanorod 기둥의 측면에 직경이 50 nm 이하인 nanoparticles이 decorated 되어 국소표면플라즈몬 현상이 관찰되었으며, 이러한 효과를 통해 입사되는 빛의 흡수율을 효과적으로 증가시킬 수 있었다. 또한, ZnO NRAs의 표면에 $SiO_2$를 e-beam evaporator를 이용하여 증착할 경우, 자연적으로 vapor flux와 ZnO nanorod 사이에 oblique angle이 $80^{\circ}$ 이상으로 증가하여 $SiO_2$ nanorods가 자발적으로 형성되어 ZnO/$SiO_2$ branch 계층형태의 나노구조를 제작할 수 있었다. 이러한 구조는 유효 graded refractive index profile로 인해 기존의 ZnO NRAs보다 개선된 반사방지 특성을 나타냈다. 이러한 계층 나노구조의 광학적 특성을 시뮬레이션을 통해 이론적으로 분석을 통해 광전자 소자의 성능의 개선에 대한 적용 가능성을 조사하였다.

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ZnO Nanorod UV Sensor Graphene Using Hydrothermal

  • 김정혁;박준서;김은겸;한일기;고형덕
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.638-638
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    • 2013
  • ZnO는 넓은 밴드갭(3.37 eV)를 가지기 때문에 UV detector로 유용하게 쓰일 수 있다. 본 연구에서는 Graphene 위에 ZnO nanorod를 hydrothermal 방법을 사용하여 성장한 후 Graphene 위에 전극을 형성한 후 UV 센서를 제작하였다. Si의 기판위에 SiO2의 막을 증착을 하고 그 위에 Graphene을 전도시킨다. Graphene위에 ZnO nanorod의 성장을 위해서 ZnO seed layer를 sputtering 방법으로 얇게 증착을 시킨다. ZnO nanorod의 성장은 hydrothermal의 방법으로 Zinc nitrate hexahydrate와 암모니아를 수용액에 넣은 후 $80^{\circ}C$에서 성장하였다. Graphene 위에 ZnO가 없는 부분에 전극을 형성하여 UV의 세기에 따른 IV 전기적 특성의 변화를 관측한다.

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Development of Two-Component Nanorod Complex for Dual-Fluorescence Imaging and siRNA Delivery

  • Choi, Jin-Ha;Oh, Byung-Keun
    • Journal of Microbiology and Biotechnology
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    • 제24권9호
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    • pp.1291-1299
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    • 2014
  • Recently, multifunctional nanomaterials have been developed as nanotherapeutic agents for cellular imaging and targeted cancer treatment because of their ease of synthesis and low cytotoxicity. In this study, we developed a multifunctional, two-component nanorod consisting of gold (Au) and nickel (Ni) blocks that enables dual-fluorescence imaging and the targeted delivery of small interfering RNA (siRNA) to improve cancer treatment. Fluorescein isothiocyanate-labeled luteinizing hormone-releasing hormone (LHRH) peptides were attached to the surface of a Ni block via a histidine-tagged LHRH interaction to specifically bind to a breast cancer cell line, MCF-7. The Au block was modified with TAMRA-labeled thiolated siRNA in order to knock down the vascular endothelial growth factor protein to inhibit cancer growth. These two-component nanorods actively targeted and internalized into MCF-7 cells to induce apoptosis through RNA interference. This study demonstrates the feasibility of using two-component nanorods as a potential theranostic in breast cancer treatment, with capabilities in dual imaging and targeted gene delivery.

Thermal evaporation을 이용해 성장 온도에 따른 ZnO nanorod의 특성

  • 이혜지;김동영;김지환;김해진;손선영;김종재;김화민
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 추계학술대회 논문집
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    • pp.25-25
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    • 2009
  • Zinc Oxide (ZnO) nanorod were grown on Si wafer by a thermal evaporation method at various temperatures. And their structure and optical properties were measured using Photoluminescence(PL), Scanning electron microscopy(SEM), and X-ray diffraction(XRD) analysis.

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Fabrication of Diameter-tunable Well-aligned ZnO Nanorod Arrays via a Sonochemical Route

  • Jung, Seung-Ho;Oh, Eu-Gene;Lee, Kun-Hong;Jeong, Soo-Hwan;Yang, Yo-Sep;Park, Chan-Gyung
    • Bulletin of the Korean Chemical Society
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    • 제28권9호
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    • pp.1457-1462
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    • 2007
  • A simple and facile sonochemical route was described for the fabrication of diameter-controlled ZnO nanorod arrays on Si wafers. The diameter of ZnO nanorods was controlled by the concentration of zinc cations and hydroxyl anions in aqueous precursor solution. At high concentration of the precursor solution, thick ZnO nanorod arrays were formed. On the contrary, thin ZnO nanorod arrays were formed at low concentration of the precursor solution. The average diameter of ZnO nanorods varies from 40 to 200 nm. ZnO nanorod arrays with sharp tip were also fabricated by the step-by-step decrease in precursor solution concentration. The crystal structure and optical characteristics of ZnO nanorods were investigated by transmission electron microscopy, X-ray diffraction, and photoluminescence spectroscopy. Growth mechanism of ZnO nanorod arrays was also proposed.

Thermal evaporation에 의해 성장된 ZnO nanorod의 합성 온도에 따른 특성 평가

  • 안철현;한원석;강시우;김영이;최미경;공보현;김동찬;조형균
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.62-62
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    • 2007
  • ZnO 박막이 성장된 Si기판을 이용하여 Thermal evaporation을 사용하여 온도에 따라 합성된 1-D의 구조의 ZnO nanorods의 형상과 특성에 대하여 연구를 하였다. 합성온도는 $700^{\circ}C{\sim}900^{\circ}C$를 사용하였고 온도가 낮아짐에 따라 Vertical한 1-D ZnO가 합성이 되는 것을 알 수 있었다. 특히, $700^{\circ}C$에서 합성된 1-D ZnO는 ~100nm의 폭을 가지고 800nm의 길이의 Nanorods로 성장이 되는 것을 알 수 있었고, 상온 PL측정을 통해 온도가 증가함에 따라 O 결핍 또는 Zn의 과잉에 의한 Deep level emission이 증가하는 것을 알 수 있었다.

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수열합성법으로 합성된 산화구리 나노막대의 일산화질소 가스 감지 특성 (Nitrogen Monoxide Gas Sensing Properties of CuO Nanorods Synthesized by a Hydrothermal Method)

  • 박수정;김효진;김도진
    • 한국재료학회지
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    • 제24권1호
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    • pp.19-24
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    • 2014
  • We report the nitrogen monoxide (NO) gas sensing properties of p-type CuO-nanorod-based gas sensors. We synthesized the p-type CuO nanorods with breadth of about 30 nm and length of about 330 nm by a hydrothermal method using an as-deposited CuO seed layer prepared on a $Si/SiO_2$ substrate by the sputtering method. We fabricated polycrystalline CuO nanorod arrays at $80^{\circ}C$ under the hydrothermal condition of 1:1 morality ratio between copper nitrate trihydrate [$Cu(NO_2)_2{\cdot}3H_2O$] and hexamethylenetetramine ($C_6H_{12}N_4$). Structural characterizations revealed that we prepared the pure CuO nanorod array of a monoclinic crystalline structure without any obvious formation of secondary phase. It was found from the gas sensing measurements that the p-type CuO nanorod gas sensors exhibited a maximum sensitivity to NO gas in dry air at an operating temperature as low as $200^{\circ}C$. We also found that these CuO nanorod gas sensors showed reversible and reliable electrical response to NO gas at a range of operating temperatures. These results would indicate some potential applications of the p-type semiconductor CuO nanorods as promising sensing materials for gas sensors, including various types of p-n junction gas sensors.