• Membrane Journal
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• v.9 no.1
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• pp.36-42
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• 1999

Permeation behavior of the semiconductor rinsing wastewater contammg Si particles was examined by ultrafiltration using the polyolefin tubular membrane. Flux decline with time was due to the growth of Si cake deposited on the membrane surface and the pore plugging by Si particles. Cake filtration from the cross flow application is compared to the combination of pore blocking and cake filtration from the dead-end application. The cake resistance is 3.16 x $10^{12}$ -4.34 X $\times$$10^{12}$ $m^{-1}$ for the cross flow and 6.6 x $\times$$10^{12}$ -12.19 X $\times$$10^{12}$ $\times$$m^{-1}$for the dead-end flow, respectively. At the initial stage of operation, permeation flux of cross flow type was 1.7 time higher than that of the dead end flow type. Permeation flux of cross flow was about 42 e 1m2 hr and the rejection rate of Si particles was about 96 %. The average particle size of Si particle in the permeate was 20 nm.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.56-56
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• 2003

최근 정보통신 분야의 급격한 발달로 인하여 무선통신에 사용되는 주파수 영역 또한 계속 높아짐에 따라 대역통과 필터 소자의 삽입 손실, 소비 전력, 크기, MMIC화에 대한 많은 연구가 진행되고 있다 압전 현상을 이용한 박막형 공진기가 이러한 요구를 충족시키고, 현재의 SAW filter를 대체할 소자로 떠오르고 있다. 본 실험에서는 단결정 미세 구조를 만들 수 있고, 압전 효과 또한 우수하며, Surface Micromachining보다 비교적 제조 공정이 간단하고 선택적 에칭이 가능한 Bulk Micromachining을 이용하여 Si$_3$N$_4$ Membrane을 이용한 중심주파수 5.2GHz인 두께 진동모드 Film Bulk Acoustic Wave Resonator(FBAR)를 제작하고 공진기의 고주파 특성을 평가하였다. Membrane구조 형성을 위해 Backside면인 Si$_3$N$_4$, Si은 RIE(Reactive Ion Etching)와 선택적 에칭용액인 KOH로 각각 에칭하여 Membrane을 갖는 구조로 중심주파수 5.2GHz인 두께 진동모드 FBAR를 설계 및 제조하였다. 체적 탄성파 공진 현상은 r.f Magnetron Sputtering법으로 증착한 AIN 압전박막과 Mo전극으로부터 발생 가능하였다. 본 연구에서는 0.9$\mu\textrm{m}$-Si$_3$N$_4$ Membrane을 이용해 FBAR를 제작/평가하고, RIE을 통해 Membrane을 제거해 가면서 공진기의 특성 즉, Quality factor와 유효전기기계결합계수(K$_{eff}$) 및 S parameter특성을 비교 측정해 보았다. 측정해본 결과 Membrane Free일때가 훨씬더 공진 특성이 우수함을 볼 수 있다

• Proceedings of the Materials Research Society of Korea Conference
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• 2008.11a
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• pp.35.1-35.1
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• 2008

• Proceedings of the Korean Ceranic Society Conference
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• 2004.04b
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• pp.50.3-50.3
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• 2004

• Journal of the Korean Ceramic Society
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• v.32 no.1
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• pp.63-70
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• 1995

A crack-free ceramic composite membrane with micropores has been synthesized by the pressurized sol-gel coating technique using the mixed Al2O3-SiO2 sols. The mixed sols were prepared by mixing nanoparticulate SiO2 and boehmite sols. These sols were more stable at lower pH, but very unstable when their copositions were in the range of 50~75mol% of SiO2 at the same pH. The mixed Al2O3-SiO2 membrane prepared from the mixed sol (0.2mol/$\ell$ of solid content and pH=2) containing 40mol% of SiO2 had the mean pore radius of 0.80nm and the specific surface area of 280$m^2$/g. The nitrogen permeability through the coated Al2O3-SiO2 layer was 42$\times$107mol/$m^2$.s.Pa. It was found that the thermal stability of aluminosilicate membranes, even through similar to that of SiO2 membranes, was much improved in comparison with ${\gamma}$-alumina membranes.

• Proceedings of the Membrane Society of Korea Conference
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• 1999.07a
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• pp.95-96
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• 1999

The ultrafiltration behavior of dilute colloidal solution containing Si particles has been investigated. The experiments in cross flow mode have been performed at different operating condition by using the membrane with 20 kDa cut-off. The flux decline was due to the development of membrane fouling which was a dynamic process of two distinctive stages. For the high trans-membrane pressure, the pore blocking resistance was dominant at the initial period of filtraion and was followed by the cake resistance. And for the low cross flow velocity, the membrane fouling was governed by the cake filtration model at the initial stage of filtration process. Flux jump was observed temporally during the membrane filtration of mixed feed solution.

• Transactions of the Korean hydrogen and new energy society
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• v.28 no.2
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• pp.144-149
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• 2017

A proton-conducting bisphenylpropaned sulfonated fluorinated blockcopolymer (BPSFBC) was synthesized. Five kinds of polymer electrolyted composite membranes were preparated by incorporating silica ($SiO_2$) with various weight ratio. And their characteristics were investigated by FT-IR (fourier transform infrared), $^1H-NMR$ ($^1H$ nuclear magnetic resonance), TGA (thermogravimetric analysis), water uptake, FE-SEM (field emission scanning electron microscopes), and ion conductivity properties. The water uptake and ion conductivity were increased until 9 wt% $SiO_2$, and then decreased. The maximum proton conductivity equal to $52mScm^{-1}$ was measured for the BPSFBC/$SiO_2$-9 composite membrane at $90^{\circ}C$ and 100% relative humidity. From the measured results, it is distinct that the manufactured composite membrane BPSFBC/$SiO_2$-9 can be considered as a polymer membrane suitable for a fuel cell electrolyte.

• Journal of the Semiconductor & Display Technology
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• v.14 no.3
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• pp.7-11
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• 2015

In order to protect the patterned mask from contamination during lithography process, pellicle has become a critical component for Extreme Ultraviolet (EUV) lithography technology. According to EUV pellicle requirements, the pellicle should have high EUV transmittance and robust mechanical property. In this study, silicon nitride, which is well-known for its remarkable mechanical property, was used as a pellicle membrane material to achieve high EUV transmittance. Since long silicon wet etching process time aggravates notching effect causing stress concentration on the edge or corner of etched structure, the remaining membrane is prone to fracture at the end of etch process. To overcome this notching effect and attain high transmittance, we began preparing a rather thick (200 nm) $SiN_x$ membrane which can be stably manufactured and was thinned into 43 nm thickness with HF wet etching process. The measured EUV transmittance shows similar values to the simulated result. Therefore, the result shows possibilities of HF thinning processes for $SiN_x$ EUV pellicle fabrication.

• 한국신재생에너지학회:학술대회논문집
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• 2010.11a
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• pp.85.2-85.2
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• 2010

There is widespread effort to develop polymer membranes in place of Nafion for high temperature polymer electrolyte membrane fuel cell(PEMFC). In our study, SiO2 membranes are arranged by electrospinning method. For impregnation solution, the modified sulfonated poly(ether ether ketone)(SPEEK) polymer is prepared from sulfonation, sulfochlorination, partial reduction and lithiation reaction. The modified polymer is cross-linked with 1,4-diiodobetane in NMP solvent and then blended with Heteropoly acid(HPA). The characterization of membranes is confimed by FT-IR, Thermogravimetry(TGA), water uptake test and single cell performance test for PEMFC, etc. The composite membrane shows satisfactory thermal and mechanical properties. Beside, The membrane exhibits good ion exchange capacity and high proton conductivity. As a result, The composite membrane is promising as an alternative membrane in high temperature PEMFC.

• Transactions of the Korean hydrogen and new energy society
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• v.26 no.6
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• pp.524-531
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• 2015

To improve the electrochemical and mechanical characteristics, engineering plastic of the sulfonated polyether ether ketone (SPEEK) as polymer matrix was prepared in the sulfonation reaction of polyether ether ketone (PEEK). The SPEEK organic-inorganic blended composite membranes were prepared by sol-gel casting method. It was loaded with the highly dispersed ceria and cesium-substituted molybdosilicic acid (Cs-MoSiA) and 1,4-diiodobutane which was cross-linking agent contents of $10{\mu}L$. Cs-MoSiA was added to increase proton conductivity. Ceria ($CeO_2$) was used as a free radical scavenger which degrade the membrane in polymer electrolyte membrane water elctrolysis (PEMWE). In conclusion, CL-SPEEK/Cs-MoSiA/Ceria 1% composite membrane showed high proton conductivity 0.2104 S/cm at $25^{\circ}C$ which was better than Nafion 117 membrane.