• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2003년도 하계종합학술대회 논문집 II
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• pp.1033-1036
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• 2003

In this paper, Si anisotropic etching characteristics of tetramethylammonium hydroxide (TMAH)/ ammonium persulfate (AP) solutions were investigated to realize the optimum structure of a diaphragm for the piezoresistive pressure sensor application. Due to its low toxicity and its high compatibility with the CMOS processing, TMAH was used as Si anisotropic etchants. The variations of Si etch rate on the etching temperature, TMAH concentration, and etching time were obtained. With increasing the etching temperature and decreasing TMAH concentrations, the Si etch rate is increased while a significant non-uniformity exists on the etched surface because of formation of hillocks on the <100> surface. With the addition of AP to TMAH solution, the Si etch rate is increased and an improvement in flatness on the etching front is observed. The Si etch rate is also maximized with increasing the number of addition of AP to TMAH solution per one hour. The Si square diaphragms of 20${\mu}{\textrm}{m}$ thickness and 100~400${\mu}{\textrm}{m}$ one-side length were fabricated successfully by applying optimum Si etching conditions of TMAH/AP solutions.

• 한국세라믹학회지
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• 제50권6호
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• pp.372-377
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• 2013

Machinable SiC ceramics are prepared with the addition of $Al_2TiO_5$. Ready-to-press SiC and $Al_2TiO_5$ powders are mixed and pressureless sintered at $1750^{\circ}C$ and $1850^{\circ}C$ for 1 h. The weight ratios of the SiC and $Al_2TiO_5$ powders are 100 : 0, 100 : 10, and 100 : 20. After sintering, only SiC peaks are detected in the X-ray diffraction analyses. The density, strength, and grain size of the SiC increase with increases in the $Al_2TiO_5$ content and sintering temperature. The $Al_2TiO_5$-doped specimens are easy to micro-hole machine. Based on the density and strength data, the ceramics sintered at $1850^{\circ}C$ can be used as machinable ceramics.

• 한국전기전자재료학회논문지
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• 제17권7호
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• pp.724-728
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• 2004

This paper describes on RIE(Reactive Ion Etching) characteristics of 3C-SiC(Silicon Carbide) grown on Si(100) wafers. In this work, CHF$_3$ gas was used to form the polymer as a function of a side-wall for excellent anisotropy etching during the RIE process. The ranges of the etch rate were obtained from 60 $\AA$/min to 980 $\AA$/min according to the conditions such as working gas pressure, RF power, distance between electrodes and the $O_2$ addition ratio in working gas pressure. Under the condition such as 100 mTorr of working gas pressure, 200 W of RF power and 30 mm of the distance between electrodes, mesa structures with about 40 of the etch angle were formed, and the vertical structures could be improved with 50 % of $O_2$ addition ratio in reactive gas during the RIE process. As a result of the investigation, we know that it is possible to apply the RIE process of 3C-SiC using CHF$_3$ for the development of electronic parts and MEMS applications in harsh environments.

• 대한금속재료학회지
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• 제50권11호
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• pp.839-845
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• 2012

The effect of an AlN additive on the thermoelectric properties of SiC ceramics was studied. Porous SiC ceramics with 48-54% relative density were fabricated by sintering the pressed ${\alpha}-SiC$ powder compacts with AlN at $2100-2200^{\circ}C$ for 3 h in an Ar atmosphere. In the undoped specimens, the Seebeck coefficients were positive (p-type semiconducting) possibly due to a dominant effect of the acceptor impurities (Al, Fe) contained in the starting powder. With AlN addition, the reverse phase transformation of 6H-SiC to 4H-SiC was observed during the sintering process. The electrical conductivity of the AlN doped specimen was larger than that of the undoped specimen under the same conditions, which might be due to a reverse phase trans-formation. The Seebeck coefficient of the AlN doped specimen was also larger than that of the undoped specimen. The density of specimen and the amount of addition had significant effects on the thermoelectric properties.

• Advanced Composite Materials
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• 제18권4호
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• pp.351-364
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• 2009

The thermal stability and elevated temperature mechanical properties of $SiC_P$/Al-11.7Fe-1.3V-1.7Si (Al-11.7Fe-1.3V-1.7Si reinforced with SiC particulates) composites sheets prepared by spray deposition (SD) $\rightarrow$ hot pressing $\rightarrow$ rolling process were investigated. The experimental results showed that the composite possessed high ${\sigma}_b$ (elevated temperature tensile strength), for instance, ${\sigma}_b$ was 315.8 MPa, which was tested at $315^{\circ}C$, meanwhile the figure was 232.6 MPa tested at $400^{\circ}C$, and the elongations were 2.5% and 1.4%, respectively. Furthermore, the composite sheets exhibited excellent thermal stability: the hardness showed no significant decline after annealing at $550^{\circ}C$ for 200 h or at $600^{\circ}C$ for 10 h. The good elevated temperature mechanical properties and excellent thermal stability should mainly be attributed to the formation of spherical ${\alpha}-Al_{12}(Fe,\;V)_3Si$ dispersed phase particulates in the aluminum matrix. Furthermore, the addition of SiC particles into the alloy is another important factor, which the following properties are responsible for. The resultant Si of the reaction between Al matrix and SiC particles diffused into Al matrix can stabilize ${\alpha}-Al_{12}(Fe,\;V)_3Si$ dispersed phase; in addition, the interface (Si layer) improved the wettability of Al/$SiC_P$, hence, elevated the bonding between them. Furthermore, the fine $Al_4C_3$ phase also strengthened the matrix as a dispersion-strengthened phase. Meanwhile, load is transferred from Al matrix to SiC particles, which increased the cooling rate of the melt droplets and improved the solution strengthening and dispersion strengthening.

• The Korean Journal of Ceramics
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• 제1권2호
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• pp.101-105
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• 1995

Electrical discharge machinable $Si_3N_4$ was fabricated with the addtion of 20-60 vol% TiN by gas pressure sintering. Their sinterability, microstructure, mechanical and electrical properties were characterized as a function of the TiN content. The addition of TiN up to 20 vol% increased the flexural strength and fracture toughness as compared with those of the monolithic Si3N4. For the TiN content higher than 40 vol%, the electrical resistivity was lower than $1062\Omega$.cm. The $Si_3N_4$ with the addition of 40 vol% of TiN appears to have the optimum considerable sinterability, mechanical and electrical properties, and machinability. A microstructural analysis showed that the enhanced toughening was due to the crack deflection.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 D
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• pp.1522-1524
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• 1998

Experimental results on the effect of $SiO_2$ addition to Bi based ZnO varistor show that secondary phases in microstructure and nonlinear coefficient are increased, and that leakage current is decreased with $SiO_2$ additive content. The varistor with 0.1 mol%-$SiO_2$ additive exhibits lower resistive current than other specimen at ($E_{1mA}$ x 0.6) applied voltage and temperature of $115^{\circ}C$ for 350h.

• 대한전자공학회논문지
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• 제27권6호
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• pp.886-894
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• 1990

Sinterbility, microstructure, mechenical and electrical properties of yttriastabilized zirkconiz (92 mole % ZrO2 + 8 mole % Y2O3) doped with 0.5 mole % SiO2 and 0-2.O mole% Al2O3 were studied as a functin of Al2O3 addition. Sintered density increased with increasing Al2O3 addition up to o.5 mole%but decreased up to 1.0mole% Al2O3. Vickers hardness is proportional to sintered density. The specimen added 0.5mole% Al2O3 and 0.5mole% SiO2 exhibited a maximum conductivity. And the specimen added 0.5 mole % Al2O3 and 0.5 mole% SiO2 was measured a maximum electromotive force for a characteristics of oxyzen partial pressure.

• 한국주조공학회지
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• 제30권6호
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• pp.205-209
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• 2010

This study evaluates the influence of strontium addition and holding time on mechanical properties for Al-10.5wt%Si-2wt%Cu secondary die-casting alloy and the measured electrical conductivity of modified alloys. A general improvement in the mechanical properties of the alloy was observed after adding the strontium. Ultimate tensile strength, elongation and electrical conductivity of modified alloys were improved by increasing strontium content and holding time. From these results, the optimal strontium content and holding time were identified on the mechanical properties of Al-10.5wt%Si-2wt%Cu secondary die-casting alloys.

• 한국세라믹학회지
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• 제32권12호
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• pp.1417-1423
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• 1995

α/β sialon based composites containing silicon nitride whisker and silicon carbide platelet were fabricated by hot pressing. Effect of the reinforcing agents on the α to β phase transformation of the sialon as well as on the mechanical properties was investigated. Silicon nitride whisker and silicon carbide platelet promoted the phse transformation. TEM/EDS analysis revealed that the grain containing the whisker had 'core-rim' structure; core being high purity Si3N4 whisker and rim being β-sialon. Flexural strength of the composite decreased with the reinforcement addition which, on the other hand, improved fracture toughness of it. High temperature strength was measured at 1300℃ to be about 130 MPa lower than that measured at RT for the whisker reinforced composites.