• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.1045-1048
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• 2003

In this paper, we studied plasma damage of MIS capacitor with $Al_2$O$_3$ dielectric film. Using capacitor pattern with the same area but different perimeters, we tried to separate etching damage mechanism and to optimize the dry etching process. After etching both metal and dielectric layer by the same condition, leakage current and C-V measurements were carried out for Pt/A1$_2$O$_3$/Si structures. The flatband voltage shift was appeared in the C-V plot, and it was caused by the variation of the fixed interface charge and the interface trapped charge. From I-V measurement, it was found the leakage current along the periphery could not be ignored. Finally, we established the process condition of RF power 300W, 100mTorr, Ar/Cl$_2$ gas 60sccm as an optimal etching condition.

• Journal of the Korean Institute of Telematics and Electronics B
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• v.32B no.3
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• pp.66-76
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• 1995

In this research, a mesh connected VLSI structure is proposed for the real time computation of the generalized Hough transform(GHT). The purpose of the research is to design a generalized Hough transformer that can be realized as a single chip processor. The GHT has been modified to yield a highly parallel structure consisting of simple processing elements(PEs) and communication networks. In the proposed structure, the GHT can be computed by first assigning an image pixel to a PE and performing shift and add operations. The result of the CAD circuit simulation shows that it can be computed in the time proportional to the number of pixels in the pattern. In addition to the Hough transformer, the peak detector has been designed to reduce 1)the number of the I/O operations between the transformer and the host computer and 2) the host computer's burden for peak detection by transmitting only the local peaks detected from the transformed accumulator. It is expected that the proposed single chip Hough transformer with peak detector makes a fast and inexpensive edge based object recognition systems possible for many industrial and military applications.

• Korean Journal of Optics and Photonics
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• v.5 no.2
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• pp.191-197
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• 1994

We investigated the properties of various methods of 3 dimensional profilometry to choose the phase shifting technique for the reconstruction of the shape of a given specimen. The pattern was generated by a Twyman-Green interferometer and a PZT was used to shift the fringes on the target surface. The shape was calculated with Hariharan algorithm within the uncertainty of a scaling factor. The optical noise inherent in the laser source was observed to influence the final outcome to a great extent and the need for an exact calibration was noted. noted.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.19 no.1
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• pp.34-39
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• 2005

We presented the method to obtain four speckle patterns with relative phase shift of ${\pi}/2$ by passive devices such as wave plate and polarizer, and calculate the phase at each point of the speckle pattern in shearography using Wollaston prism. And, we analyzed the phase error caused by wave plates used in the proposed method by Jones matrix.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.12
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• pp.1145-1151
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• 2007

In this paper, vibration sources of an electric forklift are identified and the forklift vibrations are reduced by structural modification. For vibration identification, vibration signals are measured by an accelerometer when the forklift is moving. These signals are presented in a waterfall plot in order to find the dependency of frequency components on the forklift speed. It is found that main vibration source is tire pattern excitation. From some experiments and finite element analyses, it is also found that resonances occur because the natural frequencies of the forklift exist in usual driving speed range. To shift the natural frequencies outside the driving speed range, the connection parts between main body and loader are modified to increase stiffness. It is verified that considerable amount of vibration are reduced by the structural modification.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.128-131
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• 2002

Three Dimensional measuring system using optical interference is greatly needed for semiconductor surface or optical surface. The application of this system are : MEMS product, semiconductor surfaces, optical components, precise machined surface, etc. In this paper, Interferometry based measurement system is introduced, which is nondestructive and noncontact inspection system. This system have relatively many advantage, compared with AFM/STM, SEM, Stylus, etc. The developed system can measure the surface topography with high precision and resolution, and with few seconds. And the associated software algorithm is also developed for the ultra precision 3D measuring surface. Various samples that is measured using this system is showed in the latter of this paper.

• 한국정보디스플레이학회:학술대회논문집
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• 2005.07a
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• pp.393-395
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• 2005

Super In Plane Switching (S-IPS) technology is applied for large TFT-LCD panels used in TV applications. It has a lot of advantages in comparison to the alternative, VA technology. S-IPS shows excellent viewing angle properties and fast response time between intermediate gray levels. If the performance parameters which describe the actual visual performance are considered, S-IPS is much more $advantageous.^{1)}$ However, it shows relatively low contrast ratio in diagonal direction compared to viewing angle characteristic in upper/down direction in S-IPS. In order to compensate the relatively low diagonal contrast ratio, Super-IPS applying for optical film developed, but Super-IPS still has the problem of color shift in black $pattern.^{2)}$ So we improved this problem by developing Enhanced Super-IPS.

• Proceedings of the KSR Conference
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• 2004.10a
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• pp.1341-1346
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• 2004

Basic design for single-phase active power filter, which aims at railway applications provided with PWM-controlled converters, is comprehensively studided and its performance is presented in this paper, Active power filters are used to compensate railway signaling and public telecommunication interference due to the high-order harmonic currents generated in railway traction locomotives. A type of hybrid digital filter which is composed of low pass filter and high pass filter is proposed so that the desired harmonic reference current with accurate magnitude and phase shift can be extracted from catenary line current. A design criteria to determine input inductor L and output capacitor C is also described, considering voltage, current. PWM pattern, and switching frequency of the main converters, Finally, computer simulation and DSP-based experiments resulted from laboratory test are presented.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.30A no.3
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• pp.43-51
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• 1993

Effects of incident beam position and intensity on self-pumped optical phase conjugation are presented using barium titanate as an optical phase conjugator. Depending on the position of incident beam, the crystal used consists of four major operating regions: irregular pulsing, regular pulsing, stable phase conjugation, and unstable oscillating regions. In the second region, the pulsing frequency and amplitude of phase conjugate beam are proportional to I$_{in}$ and I$_{in}^{0.85}$, respectively, where I$_{in}$ is the incident beam intensity. In the fouth region, the rising time and intensity of the first-generated pulse are proportional to I$_{in}^{0.92}$ and I$_{in}^{0.81}$, respectively. A frequency shift by beam fanning is also discussed by observing interference pattern from an interferometer.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1920-1922
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• 2003

We have fabricated the pyrex glass microlens using thermal reflow process. Fabricated microlens is the plano convex refractive type and was fabricated with pyrex glass-Si anodic bonding wafer. The etched circle or cylindrical pyrex glass pattern was melted in a furnace $800^{\circ}C$ to $900^{\circ}C$ for about 15min. The surface roughness of the microlenses was measured by the AFM and average surface roughness of the microlenses was below 15min. The radius of curvature of the microlens was measured with phase shift interferometer.