Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2003.07c
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- Pages.1920-1922
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- 2003
Fabrication of Glass Microlens using Thermal Reflow Methods
열처리에 의한 유리 마이크로 렌즈 제작
- Park, Kwang-Bum (KETI Nano Mechatronics Research Center) ;
- Kim, Seon-Ju (U-il Opticom Co., Ltd)
- Published : 2003.07.21
Abstract
We have fabricated the pyrex glass microlens using thermal reflow process. Fabricated microlens is the plano convex refractive type and was fabricated with pyrex glass-Si anodic bonding wafer. The etched circle or cylindrical pyrex glass pattern was melted in a furnace
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