• Title/Summary/Keyword: Sensor technology

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Wet Etch Process for the Fabrication of Al Electrodes and Al Microstructures in Surface Micromachining (표면 미세가공에서 Al 전극 및 Al 미세 구조물 제작을 위한 습식 식각 공정)

  • Kim, Sung-Un;Paik, Seung-Joon;Lee, Seung-Ki;Cho, Dong-Il
    • Journal of Sensor Science and Technology
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    • v.9 no.3
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    • pp.224-232
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    • 2000
  • Aluminum metal process in surface micromachining enables to fabricate Al electrodes or Al structures, which improve electrical characteristics by reducing contact- and line-resistance or makes the whole process to be simple by using oxide as sacrificial layer. However, it is not possible to use conventional sacrificial layer etching process, because HF solution attacks aluminum as well as sacrificial oxide. The mixed solution of BHF and glycerine as an alternative shows the adequate properties to meet with this end. The exact etching properties, however, are sensitively depends on the geometry of the released structure, because the most etching process of sacrificial layer proceeds to the lateral direction in narrow space. Also, the surface roughness of aluminum affects to the etching characteristics. This paper reports experimental results on the effect of microstructure and surface roughness of aluminum to the etching properties. Considering these effects, we propose the optimized etching condition, which can be used practically for the fabrication of aluminum electrodes and microstructures by using standard surface micromachining process without modification or additional process.

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Crystalline structures and electrical properties of $Pb[(Zr,Sn)Ti]NbO_3$ Thin Films deposited using RF Magnetron Sputtering Method (RF 마그네트론 스퍼터링 방법으로 제작된 $Pb[(Zr,Sn)Ti]NbO_3$ 박막의 결정구조와 전기적 특성)

  • Choi, Woo-Chang;Choi, Yong-Jung;Choi, Hyek-Hwan;Lee, Myoung-Kyo;Kwon, Tae-Ha
    • Journal of Sensor Science and Technology
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    • v.9 no.3
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    • pp.242-247
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    • 2000
  • $Pb_{0.99}[(Zr_{0.6}Sn_{0.4})_{0.9}Ti_{0.1}]_{0.98}Nb_{0.02}O_3(PNZST)$ thin films were deposited by RF magnetron sputtering on $(La_{0.5}Sr_{0.5})CoO_3(LSCO)/Pt/Ti/SiO_2/Si$ substrate using a PNZST target with excess PbO of 10 mole%. The thin films deposited at substrate temperature of $500^{\circ}C$, and at RF power of 80W were crystallized to a perovskite phase after rapid thermal annealing(RTA). The thin films annealed at $650^{\circ}C$ for 10 seconds in air exhibited the good structures and electrical properties. The fabricated PNZST capacitor had a remanent polarization value of about $20\;{\mu}C/cm^2$ and coercive field of about 50 kV/cm. The reduction of the polarization after $2.2{\times}10^9$ switching cycles was less than 10%.

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Scintillation Characteristics of CsI:X(X=Li+,K+,Rb+ Single Crystals (CsI:X(X=Li+,K+,Rb+단결정의 섬광특성)

  • Gang, Gap-Jung;Doh, Sih-Hong;Lee, Woo-Gyo;Oh, Moon-Young
    • Journal of Sensor Science and Technology
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    • v.12 no.1
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    • pp.1-9
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    • 2003
  • CsI single crystals doped with lithium, potassium or rubidium were grown by using Czochralski method at Ar gas atmosphere. The energy resolutions of CsI(Li:0.2 mole%), CsI(K:0.5 mole%) and CsI(Rb:1.5 mole%) scintillators were 14.5%, 15.9% and 17.0% for $^{137}Cs$(0.662 MeV), respectively. The energy calibration curves of CsI(Li), CsI(K) and CsI(Rb) scintillators were linear for $\gamma$-ray energy. The time resolutions of CsI(Li:0.2 mole%), CsI(K:0.5 mole%) and CsI(Rb:1.5 mole%) scintillators measured by CFT(constant-fraction timing method) were 9.0 ns, 14.7 ns and 9.7 ns, respectively. The fluorescence decay times of CsI(Li:0.2 mole%) scintillator had a fast component and slow one of ${\tau}_1=41.2\;ns$ and ${\tau}_2=483\;ns$, respectively. The fluorescence decay times of CsI(K:0.5 mole%) scintillator were ${\tau}_1=47.2\;ns$ and ${\tau}_2=417\;ns$. And the fluorescence decay times of CsI(Rb:1.5 mole%) scintillator were ${\tau}_1=41.3\;ns$ and ${\tau}_2=553\;ns$. The phosphorescence decay times of CsI(Li:0.2 mole%), CsI(K:0.5 mole%) and CsI(Rb:1.5 mole%) scintillators were 0.51 s, 0.57 s and 0.56 s, respectively.

Analysis on the Noise Factors of Static Induction Photo-Transistor (SIPT) (1) - The SIPT's Equivalent Circuits for the Analysis on the Noise Factors - (정전유도(靜電誘導) 포토 트랜지스터의 잡음(雜音) 원인(原因) 분석(分析) (1) - 잡음(雜音) 원인(原因) 분석(分析)을 위한 SIPT 등가회로(等價回路) -)

  • Kim, Jong-Hwa
    • Journal of Sensor Science and Technology
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    • v.4 no.4
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    • pp.29-40
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    • 1995
  • In this paper, the noise equivalent cicuits that is necessary to the formulation of D.C. and noise characteristics, residual component and input capacitance so as to analyze on the noise factors of the SIT is proposed. The simplest noise equivalent circuit is the model representing the mechanism of the SIT and the measured values in this model were found as small as the values of the shot-noise. In the source resistance inserted equivalent circuit is conformed that the shot-noise will be reduced by the negative-feedback effect of the source resistance. In oder to analyze the correct noise reduction factor, I proposed the equivalent circuit which the formulas of the source and drain resistance was induced. In the experiment which affirm the equivalent circuits, the influence of the signal source resistance and output load resistance on the residual component is small and the residual component can be expressed by the equivalent input noise resistance. Moreover, the input capacitance is 13.6 pF when the load resistance is $0{\Omega}$ and the capacitance which does not concern with the SIT operation directly, that is, gate wire etc, is 10pF or so.

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The three dimensional measuring system for ELF magnetic fields with the multiturn loop-type sensors (멀티턴 루우프형 센서를 이용한 3차원 ELF 자장측정계)

  • Lee, Bok-Hee;Lee, Jeong-Gee;Kil, Gyung-Suk;Ahn, Chang-Hwan;Park, Dong-Hwa
    • Journal of Sensor Science and Technology
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    • v.5 no.2
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    • pp.29-36
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    • 1996
  • With the three dimensional magnetic field measuring system dealt with in this paper, accurate measurements and analyses of extremely low frequency(ELF) magnetic fields caused by starting and/or operating electric devices and power installations can be conducted. To obtain high performance for lower frequency and spatial components without any distortion, the measuring system is designed as three dimensionally including the multiturn loop-type magnetic field sensors, differential amplifiers and active integrators. As the results of calibration experiments, the frequency response characteristics of the measuring system range from 8[Hz] to about 53[kHz] for each direction of x, y, z axes, and the response sensitivities are 9.54, 9.21, $10.89[mV/{\mu}T]$, respectively. The actual survey experiments by using an oscillating impulse current generator confirm a reliability of the proposed measuring system. Also, through the other experiments by using small-sized induction motors, the magnetic field intensities when starting and steady-state operating mark 15.8, $8.61[{\mu}T]$ as maximum value, respectively. And those intensities decrease steeply according as the measuring distance increases.

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Characteristics of the Heteroepitaxial $Si_{1-x}Ge_{x}$ Films Grown by RTCVD Method (RTCVD 법으로 성장한 $Si_{1-x}Ge_{x}$ 에피막의 특성)

  • Chung, W.J.;Kwon, Y.K.;Bae, Y.H.;Kim, K.I.;Kang, B.K.;Sohn, B.K.
    • Journal of Sensor Science and Technology
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    • v.5 no.2
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    • pp.61-67
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    • 1996
  • The growth and characterization of heteroepitaxial $Si_{1-x}Ge_{x}$ films grown by the RTCVD (Rapid Thermal Chemical Vapor Deposition) method were described. For the growth of $Si_{1-x}Ge_{x}$ heteroepitaxial layers, $SiH_{4}$ / $GeH_{4}$ / $H_{2}$ gas mixtures were used. The growth conditions were varied to investigate their effects on the Si / Ge composition ratios, the interface abruptness and crystalline properties. The experimental data shows that the misfit threading dislocation in $Si_{1-x}Ge_{x}$ / Si heteroepitaxial film of about $400\;{\AA}$ thickness was not observed at the growth temperature of as low as $650^{\circ}C$, and the composition ratios of Si / Ge changed linearly with $SiH_{4}$ / $GeH_{4}$ gas mixing ratios in our experimental ranges. In the in-situ boron doping experiments, the doping abruptness would be controlled within several hundreds ${\AA}$/decade.

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Calculation of Gamma-ray Energy Spectrum for Spherical BGO Scintillation Detector (구형 BGO 섬광 검출기에 대한 감마선 에너지 스펙트럼 계산)

  • Doh, Sih-Hong;Kim, Jong-Il;Park, Hung-Ki;Chu, Min-Cheal;Jeong, Jung-Hyun;Kim, Gi-Dong;Lee, Dae-Won
    • Journal of Sensor Science and Technology
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    • v.4 no.4
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    • pp.1-9
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    • 1995
  • The ${\gamma}$-ray deposition spectra were calculated by Monte Calro method to obtain the scintillation characteristics of the ${\gamma}$-ray for BGO scintillation detector with the spherical shape of 1.25 cm radius. The code used in calculating the ${\gamma}$-ray deposition spectra was made for personal computer with qbasic language. Also the ${\gamma}$-ray energy spectra of $^{22}Na$, $^{137}Cs$ and $^{207}Bi$ were measured with the detector. The energy dependent resolution below 2000 keV for the detector was determined by estimating the standard deviation of the photopeak fitted with gaussian function, and $X^{2}$ fitting using Nardi's empirical formula. The measured spectra of $^{22}Na$ and $^{137}Cs$ were compared with the broadened spectra which were obtained by broadening the calculated ${\gamma}$-ray deposition spectra with the energy dependent resolution. The absolute efficiency and the intrinsic peak efficiency of the detector were obtained by calculating the ${\gamma}$-ray deposition spectrum with the code.

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Mining Frequent Trajectory Patterns in RFID Data Streams (RFID 데이터 스트림에서 이동궤적 패턴의 탐사)

  • Seo, Sung-Bo;Lee, Yong-Mi;Lee, Jun-Wook;Nam, Kwang-Woo;Ryu, Keun-Ho;Park, Jin-Soo
    • Journal of Korea Spatial Information System Society
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    • v.11 no.1
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    • pp.127-136
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    • 2009
  • This paper proposes an on-line mining algorithm of moving trajectory patterns in RFID data streams considering changing characteristics over time and constraints of single-pass data scan. Since RFID, sensor, and mobile network technology have been rapidly developed, many researchers have been recently focused on the study of real-time data gathering from real-world and mining the useful patterns from them. Previous researches for sequential patterns or moving trajectory patterns based on stream data have an extremely time-consum ing problem because of multi-pass database scan and tree traversal, and they also did not consider the time-changing characteristics of stream data. The proposed method preserves the sequential strength of 2-lengths frequent patterns in binary relationship table using the time-evolving graph to exactly reflect changes of RFID data stream from time to time. In addition, in order to solve the problem of the repetitive data scans, the proposed algorithm infers candidate k-lengths moving trajectory patterns beforehand at a time point t, and then extracts the patterns after screening the candidate patterns by only one-pass at a time point t+1. Through the experiment, the proposed method shows the superior performance in respect of time and space complexity than the Apriori-like method according as the reduction ratio of candidate sets is about 7 percent.

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Images Grouping Technology based on Camera Sensors for Efficient Stitching of Multiple Images (다수의 영상간 효율적인 스티칭을 위한 카메라 센서 정보 기반 영상 그룹핑 기술)

  • Im, Jiheon;Lee, Euisang;Kim, Hoejung;Kim, Kyuheon
    • Journal of Broadcast Engineering
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    • v.22 no.6
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    • pp.713-723
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    • 2017
  • Since the panoramic image can overcome the limitation of the viewing angle of the camera and have a wide field of view, it has been studied effectively in the fields of computer vision and stereo camera. In order to generate a panoramic image, stitching images taken by a plurality of general cameras instead of using a wide-angle camera, which is distorted, is widely used because it can reduce image distortion. The image stitching technique creates descriptors of feature points extracted from multiple images, compares the similarities of feature points, and links them together into one image. Each feature point has several hundreds of dimensions of information, and data processing time increases as more images are stitched. In particular, when a panorama is generated on the basis of an image photographed by a plurality of unspecified cameras with respect to an object, the extraction processing time of the overlapping feature points for similar images becomes longer. In this paper, we propose a preprocessing process to efficiently process stitching based on an image obtained from a number of unspecified cameras for one object or environment. In this way, the data processing time can be reduced by pre-grouping images based on camera sensor information and reducing the number of images to be stitched at one time. Later, stitching is done hierarchically to create one large panorama. Through the grouping preprocessing proposed in this paper, we confirmed that the stitching time for a large number of images is greatly reduced by experimental results.

Automated Improvement of RapidEye 1-B Geo-referencing Accuracy Using 1:25,000 Digital Maps (1:25,000 수치지도를 이용한 RapidEye 위성영상의 좌표등록 정확도 자동 향상)

  • Oh, Jae Hong;Lee, Chang No
    • Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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    • v.32 no.5
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    • pp.505-513
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    • 2014
  • The RapidEye can acquire the 6.5m spatial resolution satellite imagery with the high temporal resolution on each day, based on its constellation of five satellites. The image products are available in two processing levels of Basic 1B and Ortho 3A. The Basic 1B image have radiometric and sensor corrections and include RPCs (Rational Polynomial Coefficients) data. In Korea, the geometric accuracy of RapidEye imagery can be improved, based on the scaled national digital maps that had been built. In this paper, we present the fully automated procedures to georegister the 1B data using 1:25,000 digital maps. Those layers of map are selected if the layers appear well in the RapidEye image, and then the selected layers are RPCs-projected into the RapidEye 1B space for generating vector images. The automated edge-based matching between the vector image and RapidEye improves the accuracy of RPCs. The experimental results showed the accuracy improvement from 2.8 to 0.8 pixels in RMSE when compared to the maps.