• 센서학회지
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• 제15권4호
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• pp.277-283
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• 2006

We presented that fabrication process and characteristics of 3 axes flexible tactile sensor available for normal and shear force fabricated using Si micromachining and packaging technologies. The fabrication processes for 3 axes flexible tactile sensor were classified in the fabrication of sensor chips and their packaging on the flexible PCB. The variation rate of resistance was about 2.1 %/N and 0.5 %/N in applying normal and shear force, respectively. The flexibility of fabricated 3 axes flexible tactile sensor array was good enough to place on the finger-tip.

• 한국기계가공학회지
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• 제18권4호
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• pp.100-108
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• 2019

In this paper, a new stacked element pressure sensor has proposed for heartbeat and respiration measurement. This device can be directly attached to an individual's chest; heartbeat and respiration are detected by the pulsatile vibration and deformation of the chest. A key feature of the device is the simultaneous measurement of heart rate and respiration. The structure of the sensor consists of two stacked elements, in which one element includes one polyvinylidene fluoride (PVDF) thin film bonded on polydimethylsiloxane (PDMS) substrate. In addition, for the measurement and signal processing, the electric circuit and the filter are simply constructed with an OP-amp, resistance, and a capacitor. One element (element1, PDMS) maximizes the respiration signal; the other (element2, PVDF) is used to measure heartbeat. Element1 and element2 had sensitivity of 0.163V/N and 0.209V/N, respectively, and element2 showed improved characteristics compared with element1 in response to force. Thus, element1 and element2 were optimized for measuring respiration heart rate, respectively. Through mechanical and vivo human tests, this sensor shows the great potential to optimize the signals of heartbeat and respiration compared with commercial devices. Moreover, the proposed sensor is flexible, light weight, and low cost. All of these characteristics illustrate an effective piezoelectric pressure sensor for heartbeat and respiration measurements.

• 센서학회지
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• 제30권3호
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• pp.175-180
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• 2021

In this paper, methods for improving the sensitivity of gas sensors to NO₂ gas are presented. A gas sensor was fabricated based on an SnO₂ nanowire network using the vapor-phase-growth method. In the gas sensor, the Au electrode was replaced with a fluorinedoped tin oxide (FTO) electrode, to achieve high sensitivity at low temperatures and concentrations. The gas sensor with the FTO electrode was more sensitive to NO₂ gas than the sensor with the Au electrode: notably, both sensors were based on typical SnO₂ nanowire network. When the Au electrode was replaced by the FTO electrode, the sensitivity improved, as the contact resistance decreased and the surface-to-volume ratio increased. The morphological features of the fabricated gas sensor were characterized in detail via field-emission scanning electron microscopy and X-ray diffraction analysis.

• 센서학회지
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• 제7권5호
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• pp.356-363
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• 1998

유한요소법을 이용한 수치해석의 결과를 바탕으로 실리콘기판위에 스트레스균형이 이루어진 $Si_3N_4$(150 nm)/$SiO_2$(300 nm)/$Si_3N_4$(150 nm) 다이아프램을 증착한 후, 히터의 물질로 Pt를 사용하고, 마이크로머시닝 기술로 뒷면의 실리콘기판을 식각하여 열손실이 개선된 마이크로히터를 제작하였다. 또한, 히터의 온도를 측정하기 위해서 온도센서를 내장하였다. 온도에 따른 온도센서의 저항 값 및 히터의 소비전력을 측정 계산하고, IR thermoviewer로 다이아프램의 열분포를 측정하여, 유한요소법으로 수치해석한 온도분포특성과 비교 분석하였다. 히터의 저항온도계수는 약 $0.00379/^{\circ}C$였고, 약 $300^{\circ}C$의 온도에서 51 mW정도의 전력이 소모되었으며, 히터위의 $SiO_2$층에서의 온도분포는 비교적 균일하였다.

• 한국전기전자재료학회논문지
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• 제26권9호
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• pp.707-711
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• 2013

Carbon nanotubes(CNT) has strength and chemical stability, greatly conductivity characteristics. In particular, MWCNT (multi-walled carbon nanotubes) show rapidly resistance sensitive for changes in the ambient gas, and therefore they are ideal materials to gas sensor. So, we fabricated NOx gas sensors structured MOS-FET using MWCNT (multi-walled carbon nanotubes) material. We investigate the change resistance of NOx gas sensors based on MOS-FET with ultra lean NOx gas concentrations absorption. And NOx gas sensors show sensitivity on the change of gate-source voltage ($V_{gs}=0[V]$ or $V_{gs}=3.5[V]$). The gas sensors show the increase of sensitivity with increasing the temperature (largest value at $40^{\circ}C$). On the other hand, the sensitivity of sensors decreased with increasing of NOx gas concentration. In addition, We obtained the adsorption energy($U_a$), $U_a$ = 0.06714[eV] at the NOx gas concentration of 8[ppm], $U_a$ = 0.06769[eV] at 16[ppm], $U_a$ = 0.06847[eV] at 24[ppm] and $U_a$ = 0.06842[eV] at 32[ppm], of NOx gas molecules concentration on the MWCNT gas sensors surface with using the Arrhenius plots. As a result, the saturation phenomena is occurred by NOx gas injection of concentration for 32[ppm].

• 한국식품조리과학회지
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• 제14권5호
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• pp.547-552
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• 1998

신선한 섬쑥부쟁이의 휘발성 향미성분을 분석하여 31가지의 peak를 확인하였다. 확인된 휘발성 향미성분은 탄화수소류가 17종으로 peak area 58.90%이었으며, 알코올류 7종 8.51%, 에스테르류 3종 2.1%, 옥사이드류 1종 2.10%, 산류 1종 1.65% 및 알데히드류 1종 0.48%로 나타났다. 섬쑥부쟁이의 주요 휘발성 향미성분은 $\alpha$-pinene, limonene, $\delta$-elemene, $\beta$-pinene, cis-3-hexenol 및 myrcene으로 사료된다. 신선한 섬쑥부쟁이를 전자코로 분석한 결과 알코올과 같은 극성화합물을 민감하게 감지하는 PA2 sensor의 저항값이 가장 높게 나타났다. 건조된 섬쑥부쟁이의 휘발성 향미성분의 패턴은 신선한 시료와 동일하였으나, 6개의 metal oxide sensor의 저항값은 신선한 시료 보다 모두 크게 나타났다. 또한 전자코에 의한 신선한 시료와 건조된 시료의 향미성분의 강도 비교는 관능검사와 일치하였다.

• 센서학회지
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• 제20권1호
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• pp.1-7
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• 2011

Undoped and Sb-doped $SnO_2$ nanofibers were prepared by electrospinning and their responses to $H_2$, CO, $CH_4$, $C_3H_8$, and $C_2H_5OH$ were measured. In the undoped $SnO_2$ nanofibers, the gas response ($R_a/R_g$, $R_a$: resistance in air, $R_g$: resistance in gas) to 100 ppm $C_2H_5OH$ was very high(33.9), while that to the other gases ranged from 1.6 to 2.2. By doping with 2.65 wt% Sb, the response to 100 ppm $C_2H_5OH$ was decreased to 4.5, whereas the response to $H_2$ was increased to 3.0. This demonstrates the possibility of detecting a high $H_2$ concentration with minimum interference from $C_2H_5OH$ and the potential to control the gas selectivity by Sb doping.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2006년도 추계학술대회 논문집 전기물성,응용부문
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• pp.109-110
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• 2006

In bio applications, high temperature coefficient of resistance (TCR) at $30^{\circ}C{\sim}40^{\circ}C$ is especially important for a temperature sensor. In this work, single phase-vanadium dioxide ($VO_2$) thin films for temperature sensor were fabricated by reactive DC magnetron sputtering and post-annealing method. VOx thin films deposited by reactive sputtering in a controlled $Ar/O_2$ atmosphere can be transformed into single phase-$VO_2$ films by post-annealing in $N_2$ atmosphere. The grown $VO_2$ thin films have a moderate resistance at room temperature and very high TCR at room temperature and transition temperature, respectively 2.88%/K and 15.8%/K. A detailed structural characterization is performed by SEM, XRD and RBS. SEM morphology image indicates that grains of fabricated $VO_2$films are homogeneous and ball-like in shape. A fact that the films contain only single phase-$VO_2$ is obtained by XRD and RBS analysis. After deposition, the sensors were fabricated by micromachining technology. Silicon nitride membrane and black nickel were used for a thermal isolation structure and absorption layer. In the vicinity of room temperature, the TCR of sensors was enough high to apply for bio sensors.

• 폴리머
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• 제33권4호
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• pp.326-332
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• 2009

새로운 감습성 단량체인 N-methacryloyl-N'-ethyl-N'-propyl piperazinium bromide(MANEPPB)를 N-methacryloyl-N'-ethyl piperazine(MANEP)와 1-bromopropane의 4차염화 반응에 의하여 합성하였다. MANEPPB/MMA/AA=60/35/5, 70/25/5, 80/15/5, 90/5/5 및 95/0/5 조성의 전해질 공중합체를 감습막으로 사용하기 위하여 제조하였다. 상기 감습액에 아지리딘 가교제인 trimethylolpropane tris(2-methyl-1-aziridinopropionate)(TTAP)를 혼합하여 금 전극 위에 침적법에 의하여 도포하고 가교반응을 진행하여 습도센서를 제조 하였다. 상대습도에 대한 습도센서의 저항을 측정하였을 때, $20{\sim}90%RH$ 상대습도 영역에서 $10^3$의 저항 값이 변화하였으며, 이것은 상용 습도센서로서 대기의 습도를 측정하는데 요구되는 특성을 보여주었다. 그 밖에 온도 의존성, 주파수 의존성, 히스테리시스, 응답 및 회복 속도 그리고 내수성을 측정하여 습도센서로서 특성을 평가하였다.

• 전기학회논문지
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• 제67권3호
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• pp.352-357
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• 2018

In this paper, the improvement of the conductor temperature calculation algorithm is studied. The allowable current of the underground transmission line is determined by the conductor temperature limit. Usually to calculate the allowable current limit, the conductor temperature is assumed in the most worst environment condition. It is possible to increase the transmission capacity if the actual burial environment is considered. Therefore, in this paper an algorithm is proposed to calculate the conductor temperature by distinguishing two area of a underground transmission line condition - the manhole where the temperature sensor can be installed and the underground transmission line in which the temperature sensor can not be installed easily. When calculating the conductor temperature by the underground line in the pipeline, the existing standard describes each environment as a single soil heat resistance and one ambient temperature. In order to compensate this situation, thermal resistance model that can take into consideration the ground surface temperature and under ground temperature is proposed. It is shown that the accuracy of the proposed model is increased compared with the existing standard calculation result.