Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Development of silicon based flexible tactile sensor array mounted on flexible PCB

연성회로기판에 실장된 실리콘 기반의 유연 촉각센서 어레이 제작 및 평가

  • Kim, K.N. (Nano Mechatronics Research Center, Korea Electronics Technology Institute) ;
  • Kim, Y.K. (Dept. of Electronics and Computer Engineering, Korea University) ;
  • Lee, K.R. (Nano Mechatronics Research Center, Korea Electronics Technology Institute) ;
  • Cho, W.S. (Dept. of Electronics and Computer Engineering, Korea University) ;
  • Lee, D.S. (Nano Mechatronics Research Center, Korea Electronics Technology Institute) ;
  • Cho, N.K. (Nano Mechatronics Research Center, Korea Electronics Technology Institute) ;
  • Kim, W.H. (Nano Mechatronics Research Center, Korea Electronics Technology Institute) ;
  • Park, J.H. (School of Electrical Engineering, Korea University) ;
  • Kim, S.W. (Dept. of Electronics and Computer Engineering, Korea University) ;
  • Ju, B.K. (School of Electrical Engineering, Korea University)
  • 김건년 (전자부품연구원 나노메카트로닉스 연구센터) ;
  • 김용국 (고려대학교 전자공학과) ;
  • 이강열 (전자부품연구원 나노메카트로닉스 연구센터) ;
  • 조우성 (고려대학교 전자공학과) ;
  • 이대성 (전자부품연구원 나노메카트로닉스 연구센터) ;
  • 조남규 (전자부품연구원 나노메카트로닉스 연구센터) ;
  • 김원효 (전자부품연구원 나노메카트로닉스 연구센터) ;
  • 박정호 (고려대학교 전기전자전파공학부) ;
  • 김수원 (고려대학교 전자공학과) ;
  • 주병권 (고려대학교 전기전자전파공학부)
  • Published : 2006.07.30
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Abstract

We presented that fabrication process and characteristics of 3 axes flexible tactile sensor available for normal and shear force fabricated using Si micromachining and packaging technologies. The fabrication processes for 3 axes flexible tactile sensor were classified in the fabrication of sensor chips and their packaging on the flexible PCB. The variation rate of resistance was about 2.1 %/N and 0.5 %/N in applying normal and shear force, respectively. The flexibility of fabricated 3 axes flexible tactile sensor array was good enough to place on the finger-tip.

Keywords

References

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