• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.7
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• pp.388-393
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• 2000

Hydrogen-sensing behaviors of Pd- and Pt-SiC Schottky diodes, fabricated on the same SiC substrate, have been systematically compared and analyzed as a function of hydrogen concentration and temperature by I-V and$\DeltaI-t$ methods under steady-state and transient conditions. The effects of hydrogen adsorption on the device parameters such as the barrier height are investigated. The significant differences in their hydrogen sensing characteristics have been examined in terms of sensitivity limit, linearity of response, response rate, and response time. For the investigated temperature range, Pd-SiC Schottky diode shows better performance for H2 detection than Pt-SiC Schottky diode under the same testing conditions. The physical and chemical mechanisms responsible for hydrogen detection are discussed. Analysis of the steady-state reaction kinetics using I-V method confirmed that the atomistic hydrogen process is responsible for the barrier height change in the diodes.

• Journal of Sensor Science and Technology
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• v.13 no.6
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• pp.430-435
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• 2004

The resolution of the accelerometer, fabricated with MEMS technology is mainly affected by mechanical and electrical noise. To reduce mechanical noise, we have to increase mass of the structure part and quality factor related with the degree of vacuum packaging. On the other hand, to increase mass of the structure part, the thickness of the structure must be increased and ICP-RIE is used to fabricate the high aspect ratio structure. At this time, footing effect make the sensitivity of the accelerometer decreasing. This paper presents a hybrid SOG(Silicon On Glass) Process to fabricate a lateral silicon accelerometer with differential capacitance sensing scheme which has been designed and simulated. Using hybrid SOG Process, we could make it a real to increase the structural thickness and to prevent the footing effect by deposition of metal layer at the bottom of the structure. Moreover, we bonded glass wafer to structure wafer anodically, so we could realize the vacuum packaging at wafer level. Through this way, we could have an idea of controlling of quality factor.

• Journal of the Korean Society of Propulsion Engineers
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• v.22 no.3
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• pp.14-20
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• 2018

An estimation law of air mass flow rate for high speed engine control is presented. The variables of mass estimation equations are modified to measurable variables which can be obtained during flight, and the effectiveness of each variable to the estimation accuracy is evaluated. The equation is modified to a simplified form, and the uncertainty is evaluated. In addition, reference data for the selection of estimation methods is suggested by considering the sensitivity analysis of sensor error.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.22 no.10
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• pp.687-696
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• 2010

In this study, FDD algorithm was developed using the normalized distance method and general pattern classifier method that can be applied to constant air volume air handling unit(CAV AHU) system. The simulation model using TRNSYS and EES was developed in order to obtain characteristic data of CAV AHU system under the normal and the faulty operation. Sensitivity analysis of fault detection was carried out with respect to fault progress. When differential pressure of mixed air filter increased by more than about 105 pascal, FDD algorithm was able to detect the fault. The return air temperature is very important measurement parameter controlling cooling capacity. Therefore, it is important to detect measurement error of the return air temperature. Measurement error of the return air temperature sensor can be detected at below $1.2^{\circ}C$ by FDD algorithm. FDD algorithm developed in this study was found to indicate each failure modes accurately.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.495-495
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• 2011

Miniaturized sensors capable of both sensitive and selective real-time monitoring of target analytes are tremendously valuable for various applications ranging from hazard detection to medical diagnostics. The wide-spread use of such sensors is currently limited due to insufficient selectivity for target molecules. We developed selective nanocoatings by combining trinitrotoluene (TNT) receptors bound to conjugated polydiacetylene (PDA) with single-walled carbon nanotube-field effect transistors (SWNT-FET). Selective binding events between TNT molecules and phage display derived TNT receptors were effectively transduced to sensitive SWNT-FET conductance sensors through the PDA coating. The resulting sensors exhibited unprecedented 1 fM sensitivity toward TNT in real time, with excellent selectivity over various similar aromatic compounds. Our biomimetic receptor coating approach may be useful for the development of sensitive and selective micro and nanoelectronic sensor devices for various other target analytes.

• Korean Journal of Optics and Photonics
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• v.22 no.1
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• pp.1-4
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• 2011

A new fabrication technique of long-period fiber gratings with periodically surface-etched structures is proposed. Transmission characteristics of the periodically surface-etched long-period fiber gratings are improved by changing strain because of variation of coupling strength between the core and the cladding modes. The sensitivities of the periodically surface-etched long-period fiber gratings to strain, torsion, and ambient refractive index were measured. The strain and the torsion sensitivities were measured to be $-0.033\;dB/\mu\varepsilon$ and -1.30 nm m/rad, respectively. The ambient index sensitivity was measured to be -31.33 nm/RIU from a range from 1.33 to 1.42.

• Korean Journal of Agricultural Science
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• v.40 no.2
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• pp.139-146
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• 2013

This study was performed to develop a rapid test kit for pathogenic Staphylococcus in various samples. The rapid detection kit has been fabricated based on nitrocellulose lateral-flow strip. Colloidal gold and Staphylococcus antibodies were used as a tag and a receptor, respectively. Manually spotted Staphylococcus antibody and anti-mouse antibody on the surface of nitrocellulose membrane were used as test and control lines, respectively. Feasibility of the rapid kit to detect Staphylococcus aureus in samples were evaluated. The intensity of the color of the test line started to increase with the samples in which higher concentration of the cells were contained. The sensitivity of the sensor was $10^6$ cfu/mL Staphylococcus spiked in PBS. Also, the rapid test kit could detect $10^5$ cfu/mL of Staphylococcus in chicken meat extract.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.25 no.12
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• pp.674-678
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• 2013

We present a non-invasive technique to the measure temperature distribution in nano-sized porous thin films by means of the two-color laser-induced fluorescence (2-LIF) of rhodamine B. The fluorescence induced by the green line of a mercury lamp with the makeup of optical filters was measured on two separate color bands. They can be selected for their strong difference in the temperature sensitivity of the fluorescence quantum yield. This technique allows for absolute temperature measurements by determining the relative intensities on two adequate spectral bands of the same dye. To measure temperature fields, Silica (SiO2) nanoporous structure with 1-um thickness was constructed on a cover glass, and fluorescent dye was absorbed into these porous thin films. The calibration curves of the fluorescence intensity versus temperature were measured in a temperature range of $10-60^{\circ}C$, and visualization and measurement of the temperature field were performed by taking the intensity distributions from the specimen for the temperature field.

• JSTS:Journal of Semiconductor Technology and Science
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• v.14 no.6
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• pp.733-740
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• 2014

A resistive micro Pirani gauge using amorphous silicon (a-Si) thin membrane is proposed. The proposed Pirani gauge can be easily integrated with the other process-compatible membrane-type sensors, and can be applicable for in-situ vacuum monitoring inside the vacuum package without an additional process. The vacuum level is measured by the resistance changes of the membrane using the low noise correlated double sampling (CDS) capacitive trans-impedance amplifier (CTIA). The measured vacuum range of the Pirani gauge is 0.1 to 10 Torr. The sensitivity and non-linearity are measured to be 78 mV / Torr and 0.5% in the pressure range of 0.1 to 10 Torr. The output noise level is measured to be $268{\mu}V_{rms}$ in 0.5 Hz to 50 Hz, which is 41.2% smaller than conventional CTIA.

• Journal of the Korea Institute of Military Science and Technology
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• v.12 no.1
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• pp.106-113
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• 2009

This paper presents a surface acoustic wave(SAW) micro-electro-mechanical-systems(MEMS) interdigital transducer (IDT) gyroscope with 80MHz central frequency on a $128^{\circ}\;YX\;LiNbO_3$, which is consisted of a two-port SAW resonator, metallic dots and dual delay lines for the sensor and reference oscillators. Reason for using two delay line oscillators is to extract the gyroscope effect by comparing the resonant frequencies between two oscillators and to compensate the temperature effect. Based on the coupling of modes(COM) simulation, an 80MHz two ports SAW resonator and dual delay line were fabricated and characterized by the network analyzer. Obtained sensitivity was $109Hz/deg{\cdot}s^{-1}$ in the angular rate range of $0{\sim}1000deg/s$. Good Linearity and superior directivity were observed.