• Journal of information and communication convergence engineering
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• v.6 no.1
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• pp.38-42
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• 2008

Highly sensitive and mechanically stable gas sensors have been fabricated using the microfabrication and micromachining techniques. The sensing materials used to detect the offensive $CH_3SH$ and $(CH_3)_3N$ gases are 1 wt% Pd-doped $SnO_2$ and 6 wt% $Al_2O_3$-doped ZnO, respectively. The optimum operating temperatures of the devices are $250^{\circ}C$ and $350^{\circ}C$ for $CH_3SH$ and $(CH_3)_3N$, respectively and the corresponding heater power is, respectively, about 55mW and 85mW. Excellent thermal insulation is achieved by the use of a double-layer membrane: i.e. $0.2{\mu}m$-thick silicon nitride and $1.4{\mu}m$-thick phosphosilicate glass. The sensors are mechanically stable enough to endure the heat cycles between room temperature and $350^{\circ}C$, at least for 30 days.

• Transactions on Electrical and Electronic Materials
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• v.1 no.1
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• pp.40-44
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• 2000

Metal-ferroelectric-insulator-semoiconductor field effect transistor (MFISFETs) were fabricated using CMOS processes. The Pt/SBT/NO combined layers were etched for forming a conformal gate by using Ti/Cr metal masks and a two step etching method, By the method, we were able to fabricate a small-sized gate with the dimension of $16/4{\mu}textrm{m}$ in the width/length of gate. It has been chosen the non-self aligned source and drain implantation process, We have deposited inter-layer dielectrics(ILD) by low pressure chemical vapor deposition(LPCVD) at $380^{circ}C$ after etching the gate structure and the threshold voltage of p-channel MFISFETs were about 1.0 and -2.1V, respectively. It was also observed that the current difference between the $I_{ON}$(on current) and $I_{OFF}$(off current) that is very important in sensing margin, is more that 100 times in $I_{D}-V_{G}$ hysteresis curve.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.03b
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• pp.13-13
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• 2010

Piezoelectric sensors are extensively used to measure force because of their high sensitivity and low cost. however, the development of device with reduced size but with improved sensitivity is highly important. Low-temperature co-fired ceramic (LTCC) is one of promising materials for this application than a silicon substrate because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of $400\;{\mu}m$ were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of PZT thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.54-54
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• 2010

This article reports a spontaneous method for controlling the growth mode from vertically arrayed ultra-slim MgZnO nanowires to nanowalls through the Zn random motion of seeds formed by surface phase separation by Mg injection near an evaporation temperature of Zn. The random motion of single crystal MgZnO seeds with relative Zn rich phase played a vital role in the growth of the MgZnO nanowalls. The seeds were networked with increasing Zn flux compared with Mg flux and closing to the evaporation temperature of Zn on phase separation layers. We achieved fabrication of MgZnO nanowalls on various non- and conducting substrates by this advanced growth method. The MgZnO nanowalls hydrogen sensor showed an improved sensing performance compared to the MgZnO nanowires grown under the similar conditions. Based on the microstructural characterizations, the growth procedure and models for the evolution of the structure transition from MgZnO nanowires to nanowalls on the Si substrates are proposed for phased growth times.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.4
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• pp.533-542
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• 2000

Analytical experiments to determine the line-of-sight temperature distribution is conducted by using spectral radiation intensities. For this study, fourteen narrow bands of $25cm^{-1}$ interval in $CO_2\;4.3{\mu}m$ band ($2,050cm^{-1}$ to $2375cm^{-1}$) are selected. The applied system is a one-dimensional gas slab filled with 100% $CO_2$ gas at 1 atm. Two types of temperature profile are tested; parabolic and boundary layer types. Three kinds of radiation calculation are used in the iteration procedure for the temperature inversion; LBL(Line by Line), SNB(Statistical Narrow Band) and WNB(WSGGM. based Narrow Band) models. The LBL solution shows perfect agreement while some error of temperature prediction is caused by radiation modeling error when using SNB and WNB models. The inversion result shows that the WNB model may be used more accurately in spectral remote sensing techniques than the traditional SNB model.

• Journal of Institute of Control, Robotics and Systems
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• v.13 no.7
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• pp.616-623
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• 2007

A dual micro gas sensor array was fabricated using nano sized $SnO_2$ thin films which had good sensitivities to CO and combustible gases, or $H_2S$ gas for air quality sensors in automobile. The already existed air quality sensor detects oxidizing gases and reducing gases, the air quality sensor(AQS), located near the fresh air inlet detected the harmful gases, the fresh air inlet door/ventilation flap was closed to reduce the amount of pollution entering the vehicle cabin through HVAC(heating, ventilating, and air conditioning) system. In this study, to make $SnO_2$ thin film AQS sensor, thin tin metal layer between 1000 and $2000{\AA}$ thick was oxidized between 600 and $800^{\circ}C$ by thermal oxidation. The gas sensing layers such as $SnO_2$, $SnO_2$(pt) and $SnO_2$(+CuO) were patterned by metal shadow mask for simple fabrication process on the silicon substrate. The micro gas sensors with $SnO_2$(+Pt) and $SnO_2$(CuO) showed good selectivity to CO gas among reducing gases and good sensitivity to $H_2S$ that is main component of bad odor, separately.

• Carbon letters
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• v.14 no.3
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• pp.186-189
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• 2013

We report a highly sensitive $NO_2$ gas sensor based on multi-layer graphene (MLG) films synthesized by a chemical vapor deposition method on a microheater-embedded flexible substrate. The MLG could detect low-concentration $NO_2$ even at sub-ppm (<200 ppb) levels. It also exhibited a high resistance change of ~6% when it was exposed to 1 ppm $NO_2$ gas at room temperature for 1 min. The exceptionally high sensitivity could be attributed to the large number of $NO_2$ molecule adsorption sites on the MLG due to its a large surface area and various defect-sites, and to the high mobility of carriers transferred between the MLG films and the adsorbed gas molecules. Although desorption of the $NO_2$ molecules was slow, it could be enhanced by an additional annealing process using an embedded Au microheater. The outstanding mechanical flexibility of the graphene film ensures the stable sensing response of the device under extreme bending stress. Our large-scale and easily reproducible MLG films can provide a proof-of-concept for future flexible $NO_2$ gas sensor devices.

• Journal of Korean Society for Atmospheric Environment
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• v.22 no.2
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• pp.235-247
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• 2006

Aerosol indirect radiative forcing of climate change is considered the most uncertain forcing of climate change over the industrial period, despite numerous studies demonstrating such modification of cloud properties and several studies quantifying resulting changes in shortwave radiative fluxes. Detection of this effect is made difficult by the large inherent variability in cloud liquid water path (LWP): the dominant controlling influence of LWP on optical depth and albedo masks any aerosol influences. Here we have used ground-based remote sensing of cloud optical depth (${\tau}_c$) by narrowband radiometry and LWP by microwave radiometry to determine the dependence of optical depth on LWP, thereby permitting examination of aerosol influence. The method is limited to complete overcast conditions with liquid-phase single layer clouds, as determined mainly by millimeter wave cloud radar. The results demonstrate substantial (factor of 2) day-to-day variation in cloud drop effective radius at the ARM Southern Great Plains site that is weakly associated with variation in aerosol loading as characterized by light-scattering coefficient at the surface. The substantial scatter suggests the importance of meteorological influences on cloud drop size as well, which should be analyzed in the further intensive studies. Meanwhile, it is notable that the decrease in cloud drop effective radius results in marked increase in cloud albedo.

• Atmosphere
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• v.16 no.3
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• pp.235-246
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• 2006

Remote sensing techniques using satellites or the scanning weather radars depend mostly on the presence of clouds or precipitation, and leave the extensive regions of clear air unobserved. But wind profilers provide the most direct measurements of mesoscale vertical air motion in the troposphere, even in the context of heavy precipitation. In this paper, the precipitation events during the Changma period was classified into 4 precipitation types - stratiform, mixed stratiform/ convective, deep convective, and shallow convective. The parameters for the classification of analysis are the vertical structure of reflectivity, Doppler velocity, and spectral width measured with the wind profiler at Haenam for a three-year period (2003-2005). In addition, the synoptic fields and total amount of precipitation were analyzed using the Global Final Analyses (FNL) data and the Global Precipitation Climatology Project (GPCP) data. During the Changma period, the results show that the stratiform type was dominant under the moist-neutral atmosphere in 2003, whereas the deep convective type was under the moist unstable condition in 2004. The stratiform type was no less popular than the deep convective type among four seasons because the moist neutral layer was formed by the convergence between the upper-level jet and the low-level jet, and by the moisture transport along the western rim of the North Pacific subtropical anticyclone.

• Journal of Biosystems Engineering
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• v.34 no.4
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• pp.254-259
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• 2009

Conventional methods for pathogen detection and identification are labor-intensive and take several days to complete. Recently developed biosensors have shown potential for the rapid detection of foodborne pathogens. In this study, an impedimetric biosensor was developed for rapid detection of Salmonella typhimurium. To develop the biosensor, an interdigitated microelectrode (IME) was fabricated by using semiconductor fabrication process. Anti-Salmonella antibodies were immobilized based on either avidin-biotin binding or self assembled monolayer (SAM) on the surface of the IME to form an active sensing layer. To evaluate effect of antibody immobilization methods on sensitivity of the sensor, detection limit of the biosensor was analyzed with Salmonella samples innoculated in phosphate buffered saline (PBS) or food extract. The impedimetric biosensor based on SAM immobilization method produced better detection limit. The biosensor could detect 107 CFU/mL of Salmonella in pork meat extract. This method may provide a simple, rapid, and sensitive method to detect foodborne pathogens.