• 한국가스학회:학술대회논문집
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• 한국가스학회 1997년도 추계학술발표회 논문집
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• pp.260-265
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• 1997

가스분석에서의 극미량 성분분석은 반도체산업의 발달과 더불어 매우 중요하다. 이 실험에서는 가스분석에서 범용으로 사용되는 열전도도 검출기를 장착한 가스크로마토그라피와 액체질소트랩을 이용하여 헬륨과 수소중의 일산화탄소와 메탄성분을 분석하였다. 농축법으로 결정된 미지 시료의 농도를 다른 종류의 검출기와 비교분석하였다. 이 방법에 의해서 결정된 농도는 허용된 오차 범위에서 만족할 만한 결과를 보여 주었다.

• 대한산업공학회지
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• 제25권1호
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• pp.35-46
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• 1999

The introduction of general purpose machining centers and the information system based on computer network has added a new control problem to the classical job shop control problems: a routing problem. A routing problem is to determine the machine on which a part will be processed. The modern manufacturing systems are given much system status information including the arrival time of the future parts via the computer network for automation. This paper presents and tests the performance of a routing procedure, LARP(Look-Ahead Routing Procedure) which uses look-ahead information on the future arrival of parts in the system. The manufacturing system considered in this paper has multi-stations which consists of general purpose machines and processes parts of different types. The application of LARP under many operating conditions shows that the reduction of part flow time and tardiness from the cases without using this information is up to 8% for flow time and 21% for tardiness. The procedure introduced here can be used for many highly automated systems such as an FMS and a semi-conductor fabrication system for routing where the arrivals of parts in the near future are known.

• 한국안전학회지
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• 제33권2호
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• pp.28-31
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• 2018

In display and semi-conductor manufacturing process, there are numerous unstable factors such as particle concentration, minimal vibration, changes in magnetic field, or electrostatic that becomes an issue to be managed and controlled. In the recent, X-ray ionization is widely used that is neutralized by separating air or gas molecules in the area where the static must be resolved. The mono-type of X-ray ionizer was not capable to be used in $8^{th}$ generation panels manufacturing plant due to its insufficient ionizing coverage since the panel itself is approximately in $2m{\times}3m$. To resolve the current problem, the development of new type called, "Multi-type X-ray ionizer" has resulted in covering enough ionizing space in $8^{th}$ generation panels industry. Comparing mono and multi types with MCNPX code simulation, the multi one indicates more X-ray flux, efficiency, and ionization performance in comparison with either a mono-type or multi-type in array format. In addition, the ionizing efficiency of overlapping area with multi-type showed 30% higher effectiveness rate as to the ordinary mono-type.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2003년도 춘계종합학술대회
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• pp.674-677
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• 2003

현대사회는 전자, 통신, 컴퓨터, 반도체 기술들의 비약적인 발전에 따른 고도의 정보통신과 정보처리에 기반을 둔 정보화 사회로 모든 업무가 컴퓨터에 의존하고 있는 실정이다. 또한 컴퓨터 네트워크와 데이터베이스의 이용 및 기술의 괄목할 만한 발전에 따라 수많은 사용자가 컴퓨터를 이용하여 동시에 자료를 수집, 검색, 처리, 전송, 저장할 수 있게 되었다. 그러나 컴퓨터를 이용한 정보의 처리 및 사용이 편리해진 반면에 자료의 노출이 상대적으로 심해져, 비밀을 요하는 자료의 보안 문제가 대두되었다. 이에 따라 자료의 보안을 위하여 컴퓨터가 나오기 전의 방법과는 다른 컴퓨터를 이용한 새로운 암호 방법들이 제시되어 계속적으로 발전되고 있다. 이에 본 논문에서는 향후 연구에 사용할 암호 알고리즘을 선택하기 위하여 관용 암호 알고리즘 중에서 DES와 3DES, 공개키 암호 알고리즘 중 RSA, 타원곡선 암호 알고리즘에 관하여 연구하였다.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2000년도 제21회 KOSCO SYMPOSIUM 논문집
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• pp.168-174
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• 2000

A diode laser sensor system based on absorption spectroscopy techniques has been developed to measure $CO_2$ concentration and temperature non-intrusively in high temperature combustion environments using a 2.0 ${\mu}m$ DFB(Distributed Feedback) laser. Two optics was fabricated in pig-tail fashion and all optical components were implemented in a single box. The evolution of measurement sensitivity was done using test cell by changing sweep frequency and $CO_2$ concentration. Gas temperature was determined from the ratio of integrated line strengths. Species concentration was determined from the integrated line intensity and the measured temperature. The result show that the system has 2% error in wide operation frequency range and accuracy of $CO_2$ concentration was about 3%. The system was applied to measure temperature and concentration in the combustion region of a premixed $CH_4$ +air triangular flame. The measurement results of gas temperature agreed well with thermocouple results. Many considerations were taken into account to reduce optical noise, etalon effect, beam steering and base line matching problem. The evaluations results and actual combustion measurement demonstrate the practical and applicability for in-situ and real time combustion monitoring in a practical system.

• 한국경영과학회지
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• 제22권2호
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• pp.79-97
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• 1997

Many dispatching rules have been developed for the on-line control of product flow in a job shop. The introduction of a flexible manufacturing system (FMS) has added a new requirement to classical job shop control problem : the selection of machines by parts of different types. An FMS can keep a great deal of information on the status of the system, such as information on what is scheduled in the near future, with great accuracy. For example, the knowledge of the time when the next part will arrive at each machine can be neneficial for the routing. This paper tests the effects of the use of this knowledge for part routing on the parts flow time (sum of the time for waiting and service) under a simple routing procedure- a look-ahead routing procedure. A test under many operating conditions shows that the reduction of part flow time from the cases without using this information is between 1% and 11%, which justifies more study on this routing procedure at real production sites when machine capacity is a critical issue. The test results of this paper are also valid for other highly automated systems such as the semi-conductor fabrication plants for routing when the arrivals of parts in the near future are known.

• 한국산학기술학회논문지
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• 제13권3호
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• pp.1002-1007
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• 2012

Pillar의 제조 방법은 진공유리 및 반도체 디스플레이 분야에서 사용되는 핵심공정 중 하나이다. Pillar는 스크린 인쇄 방식을 통하여 배치할 수 있으나 시료의 성분에 따라 메탈마스크의 패턴을 전부 통과하지 못하거나 점도에 따라 통과된 혼합물이 본래의 형상을 유지 못하는 경우가 발생한다. 본 연구에서는 알루미나와 실리카 기반의 무기화합물을 이용하여 스크린 인쇄를 통해 pillar를 배치하였다. 실험계획법의 하나인 혼합물 설계를 이용함으로써 실험횟수를 줄이고 진공유리 pillar의 조성을 설계할 수 있는 방법을 제시하고자 한다.

• 산업기술연구
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• 제24권A호
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• pp.17-22
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• 2004

In the study, we have developed a straightening system for 304 micro wires that are normally used in the medical and semi-conductor fields. To apply heat to the micro wires, we introduced the direct wire heating method which generates the thermal energy by the electrical resistance of the wire itself. To avoid the deterioration of the wire surface by the environment, such as the oxidation or the hydration, the $N_2$ gas was filled in the glass pipe in which the straightening process was being performed. A precision tension meter was also attached to control the tension of the wire during the heating and straightening process. In order to control the straightening process, several experimental investigations with varying the tension, the feeding velocity and the temperature (current) was carried out. As a result of experiments, we obtained the optimal processing conditions satisfying the straightness requirement of the micro wires.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.123-127
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• 1997

Recently, it is gradually raised necessity that interface is measured accurately and managed in industrial circles and medical world, An Ultrasonic wave transmitted from a focused beam transducer is being expected as a powerful tool for NDE of micro-defect. The ultrasonic NDE of the defect is based on the form of the wave reflected form the interface In this study, regarding to the thickness of film which is in opaque object and thickness measurement was done by MEM-cepstrum analysis of received ultrasonic wave. In measument results, film thickness which is beyond distance resolution capacity was measured accurately. Also, automatically repeated discrimination analysis method can be decided in the category of all kinds of defects on semiconductor package.

• 한국세라믹학회지
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• 제54권4호
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• pp.331-339
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• 2017

Porous alumina-based ceramics are of special interest due to their outstanding mechanical properties and their thermal and chemical stability. Nevertheless, the high electrical resistance of alumina-based ceramics, due to the generation of static electricity, leads to difficulty in applying a vacuum chuck in the semi-conductor process. Therefore, development of alumina-based ceramics for applications with vacuum chucks aims to have primary properties of low electrical resistance and high air permeability. In this study, we tailored the electrical resistance of porous alumina-based ceramics by adjusting the amount of $MnO_2$ (with $TiO_2$ fixed at an amount of 2 wt%) and by using coarse alumina powder for high air permeability. The characteristics of the specimens were studied using scanning electron microscopy, mercury porosimeter, capillary flow porosimetry, universal testing machine, X-ray diffraction and high-resistance meter.