• 제목/요약/키워드: Selective area crystallization

검색결과 8건 처리시간 0.024초

New Solid-phase Crystallization of Amorphous Silicon by Selective Area Heating

  • Kim, Do-Kyung;Jeong, Woong-Hee;Bae, Jung-Hyeon;Kim, Hyun-Jae
    • Journal of Information Display
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    • 제10권3호
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    • pp.117-120
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    • 2009
  • A new crystallization method for amorphous silicon, called selective area heating (SAH), was proposed. The purpose of SAH is to improve the reliability of amorphous silicon films with extremely low thermal budgets to the glass substrate. The crystallization time shortened from that of the conventional solid-phase crystallization method. An isolated thin heater for SAH was fabricated on a quartz substrate with a Pt layer. To investigate the crystalline properties, Raman scattering spectra were used. The crystalline transverse optic phonon peak was at about 519 $cm^{-1}$, which shows that the films were crystallized. The effect of the crystallization time on the varying thickness of the $SiO_2$ films was investigated. The crystallization area in the 400nm-thick $SiO_2$ film was larger than those of the $SiO_2$ films with other thicknesses after SAH at 16 W for 2 min. The results show that a $SiO_2$ capping layer acts as storage layer for thermal energy. SAH is thus suggested as a new crystallization method for large-area electronic device applications.

Thermite Reaction Between CuO Nanowires and Al for the Crystallization of a-Si

  • Kim, Do-Kyung;Bae, Jung-Hyeon;Kim, Hyun-Jae;Kang, Myung-Koo
    • Transactions on Electrical and Electronic Materials
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    • 제11권5호
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    • pp.234-237
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    • 2010
  • Nanoenergetic materials were synthesized and the thermite reaction between the CuO nanowires and the deposited nano-Al by Joule heating was studied. CuO nanowires were grown by thermal annealing on a glass substrate. To produce nanoenergetic materials, nano-Al was deposited on the top surface of CuO nanowires. The temperature of the first exothermic reaction peak occurred at approximately $600^{\circ}C$. The released heat energy calculated from the first exothermic reaction peak in differential scanning calorimetry, was approximately 1,178 J/g. The combustion of the nanoenergetic materials resulted in a bright flash of light with an adiabatic frame temperature potentially greater than $2,000^{\circ}C$. This thermite reaction might be utilized to achieve a highly reliable selective area crystallization of amorphous silicon films.

Production of Porous Metallic Glass Granule by Optimizing Chemical Processing

  • Kim, Song-Yi;Guem, Bo-Kyung;Lee, Min-Ha;Kim, Taek-Soo;Eckert, Jurgen;Kim, Bum-Sung
    • 한국분말재료학회지
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    • 제21권4호
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    • pp.251-255
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    • 2014
  • In this study, we optimized dissolution the dissolution conditions of porous amorphous powder to have high specific surface area. Porous metallic glass(MG) granules were fabricated by selective phase dissolution, in which brass is removed from a composite powder consisting of MG and 40 vol.% brass. Dissolution was achieved through various concentrations of $H_2SO_4$ and $HNO_3$, with $HNO_3$ proving to have the faster reaction kinetics. Porous powders were analyzed by differential scanning calorimetry to observe crystallization behavior. The Microstructure of milled powder and dissolved powder was analyzed by scanning electron microscope. To check for residual in the dissolved powder after dissolution, energy dispersive X-ray spectroscory and elemental mapping was conducted. It was confirmed that the MG/brass composite powder dissolved in 10% $HNO_3$ produced a porous MG granule with a relatively high specific surface area of $19.60m^2/g$. This proved to be the optimum dissolution condition in which both a porous internal granule structure and amorphous phase were maintained. Consequently, porous MG granules were effectively fabricated and applications of such structures can be expanded.

박막히터를 사용한 비정질 실리콘의 고상결정화 (A New process for the Solid phase Crystallization of a-Si by the thin film heaters)

  • 김병동;정인영;송남규;주승기
    • 한국진공학회지
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    • 제12권3호
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    • pp.168-173
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    • 2003
  • 유리 기판 위에 증착된 비정질 실리콘 박막의 고상 결정화에 대한 새로운 방법을 제시하였다. 비정질 실리콘 박막의 하부에 패턴 된 다양한 크기의 $TiSi_2$ 박막을 전기저항 가열 방식으로 가열함으로서 비정질 실리콘이 고상 결정화 되도록 하였다. 박막히터를 이용한 열처리는 매우 빠른 열처리 공정으로써, 일반적인 로에 의한 열처리에 비해 매우 낮은 thermal budget을 가지므로, 유리기판 위에서도 고온 열처리가 가능하다는 장점을 가진다. 본 연구에서는 500 $\AA$의 비정질 실리콘 박막을 약 $850^{\circ}C$ 이상의 높은 온도에서 수 초 내에 결정화 할 수 있음을 보였으며, 열처리 조건의 변화에 따른 영향과 지역선택성의 장점을 보였다.

Ce 담지 NaZSM-5의 이산화타소 흡착 특성 ($CO_2$ adsorption on ceria impregnated)

  • 푸시파라지 헤마라다;마니 기니쉬;말간단 바기아락스미;팽 메이메이;장현태
    • 한국산학기술학회:학술대회논문집
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    • 한국산학기술학회 2010년도 추계학술발표논문집 1부
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    • pp.318-322
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    • 2010
  • NaZSM 5 was synthesized in an alkaline medium and impregnated with cerium oxide by wet method using cerium nitrate as the source for cerium. There TGA results shows decomposition of nitrate at $200^{\circ}C$. The ceria impregnated ZSM 5 materials were designated as NaZSM 5 (X) where X is the percent ceria impregnated (3, 5, 7, 11, 19%). They were characterized by XRD, SEM, EDAX, BET techniques. XRD analysis showed decrease in intensity of the patterns with the increase in the ceria loading but crystallization of ceria to larger size is evident for 11 and 19% loading. The surface area and pore volume decreased with increase in ceria loading. The maximum adsorption capacity of NaZSM 5 (5%) is 100.2 mg/g of sorbent. The ceria impregnated NaZSM 5's were found to be regenerable, selective and recyclable.

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$CaO-TiO_2-P_2O_5$계 다공질 결정화 유리의 물성에 미치는 알카리 금속 산화물의 첨가효과 (Addition Effects of Alkali Metal Oxide on Some Properties of Porous Glass-Ceramics in the $CaO-TiO_2-P_2O_5$ System)

  • 장순규;최세영
    • 한국세라믹학회지
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    • 제31권11호
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    • pp.1337-1345
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    • 1994
  • Glasses in the system of 45CaO-25TiO2-30P2O5 containing 1 mole% of M2O(M=Li, Na, K) were melted and crystallized. And their crystal phases were Ca3(PO4)2, CaTi4(PO4)6, and TiO2. Porous glass-ceramics with skeleton of two crystal phase CaTi4(PO4)6 and TiO2 were prepared by selective leaching of Ca3(PO4)2 with 0.1 N-HCl. Glass transition temperature(Tg) and crystallization temperature(Tc) were decreased by addition of 1 mole% alkali metal oxide. Pore size of porous glass-ceramics was increased with increasing heat treatment temperature and its dependence on heat treatment temperature was decreased with addition of Na2O and K2O. It was found that porous glass-ceramics of parent glass and containing 1mole% M2O(M=Li, Na, K) composition had maximum specific surface area, porosity and maximum of crystallzed phase by heat treatment at 80$0^{\circ}C$, 76$0^{\circ}C$, 78$0^{\circ}C$, 80$0^{\circ}C$ respectively.

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Phosphoric Acid Modified Nb2O5: A Selective and Reusable Catalyst for Dehydration of Sorbitol to Isosorbide

  • Tang, Zhen-Chen;Yu, Ding-Hua;Sun, Peng;Li, Heng;Huang, He
    • Bulletin of the Korean Chemical Society
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    • 제31권12호
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    • pp.3679-3683
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    • 2010
  • Niobium oxide ($Nb_2O_5$) and phosphated $Nb_2O_5$ were synthesized and used as catalysts for sorbitol dehydration to isosorbide. The characterization results of $N_2$ adsorption, XRD and $NH_3$-TPD revealed that the phosphoric acid modification could well prevent the crystallization of $Nb_2O_5$. And the amorphous phosphated $Nb_2O_5$ catalysts kept the relatively large surface area and stable acidity at high calcination temperature. The catalytic results showed that the selectivity to isosorbide could be dramatically enhanced over phosphated $Nb_2O_5$. The excellent catalytic performance with 100.0% sorbitol conversion and 62.5% isosorbide selectivity were obtained over the 0.8P/NBO-400 catalyst. Comparing with $Nb_2O_5$ catalysts, phosphated $Nb_2O_5$ catalysts regenerated through a simple calcination process showed no significant activity loss after recycling three runs.

12-몰리브도 인산 동염 촉매상에서 아크롤레인의 선택 산화반응 (Selective Oxidation of Acrolein over Cupric Salt of 12-Molybdophosphoric Acid)

  • 김경훈;나석은;박대원
    • 공업화학
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    • 제4권4호
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    • pp.721-730
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    • 1993
  • $Cu_xH_3-2_xPMo_{12}O_{40}{\cdot}_nH_2O$에서 구리의 치환양 x를 변화시켜 여러 가지의 헤테로폴리산 동염 촉매를 제조하고, 열분석, X-선 회절분석, 적외선 분광분석, 비표면적 측정, 전자현미경 분석, 암모니아의 승온탈착법 등으로 촉매의 특성을 조사하였다. 아크롤레인의 산화반응에 대한 이 촉매계의 반응특성은 고정층 연속반응기에서 조사하였다. 이 촉매들은 $200^{\circ}C$ 근처에서 결정수의 탈리가 일어났고 구리의 치환에 따른 구조수의 탈리는 $300{\sim}400^{\circ}C$ 사이에서 관찰되었다. 이들 촉매는 Keggin 구조를 가짐을 확인할 수 있었고, 구리의 치환양이 증가함에 따라 Keggin 음이온인 $(PMo_{12}O_{40})^{3-}$의 분해 정도가 증가하였으며, 이때 분해 생성물로 소량의 $MoO_3$$P_2O_5$가 관찰되었다. x가 증가할수록 아크롤레인의 전화율이 감소하였는데 이것은 비표면적과 전체 산점의 양이 감소하였기 때문인 것으로 판단된다. 그러나 단위면적당 반응속도와 아크릴산의 선택도는 x=1.0에서 가장 높게 나타났으며 이 촉매는 독특한 산점분포를 나타내었다.

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