• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.188-188
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• 2000

DLC (Diamond-Like Carbon) 박막은 높은 경도와 가시광선 및 적외선 영역에서의 광 투과도, 전기적 절연성, 화학적 안정성 및 저마찰.내마모 특성 등의 우수한 물리.화학적인 물성을 갖고 있기 때문에 여러 분야의 응용연구가 이루어지고 있다. 이러한 DLC 박막을 제작하는 과정에는 여러 가지가 있으나, 본 연구에서는 ECR-PECVD electron cyclotron resonance plasma enhanced chemical vapor deposition) 방법을 사용하였다. 이것은 최근에 많이 이용되고 있는 방법으로, 이온화률이 높을뿐만 아니라 상온에서도 성막이 가능하고 넓은 진공도 영역에서 플라즈마 공정이 가능한 장점이 있다. 기판으로는 4" 크기의 S(100)를 사용하였고, 박막을 제작하기 전에 진공 중에서 플라즈마 전처리를 하였다. 플라즈마 전처리는 Ar 가스를 150SCCM 주입시켜 5$\times$10-1 torr 의 진공도를 유지시키면서, ECR power를 700W로 고정하고, 기판 bias 전압을 -300 V로 하여 5분 동안 기판을 청정하였다. DLC 박막은 ECR power를 700W. 가스혼합비와 유량을 CH4/H2 : 10/100 SCCM, 증착시간을 2시간으로 고정하고, 기판 bias 전압을 0, -50, -75, -100, -150, -200V로 변화시켜가면서 제작하였다. 이때 ECR 소스로부터 기판까지의 거리는 150mm로 하였고, 진공도는 2$\times$10-2torr 였으며, 기판 bias 전압은 기판에 13.56 MHz의 RF power를 연결하여 RF power에 의해서 유도되는 negative DC self bias 전압을 이용하였다. 제작된 박막을 Auger electron spectroscopy, elastic recoil detection, Rutherford backscattering spectroscopy, X-ray diffraction, secondary electron microscopy, atomic force microscoy, $\alpha$-step, Raman scattering spectroscopu, Fourier transform infrared spectroscopy 및 micro hardness tester를 이용하여 기판 bias 전압이 DLC 박막의 특성에 미치는 영향을 조사하였다. 분석결과 본 연구에서 제작된 DLC 박막은 탄소와 수소만으로 구성되어 있으며, 비정질 상태임을 알 수 있었다. 기판 bias 전압의 증가에 따라 박막의 두께가 감소됨을 알 수 있었고, -150V에서는 박막이 거의 만들어지지 않았으며, -200V에서는 기판 표면이 식각되었다. 이것은 기판 bias 전압과 ECR 플라즈마에 의한 이온충돌 효과 때문으로 판단되며, 150V 이하에서는 증착되는 양보다 re-sputtering 되는 양이 더 많을 것으로 생각된다. 기판 bias 전압을 증가시킬수록 플라즈마에 의한 이온충돌 현상이 두드러져 탄소와 결합하고 있던 수소원자들이 떨어져 나가는 탈수소화 (dehydrogenation) 현상을 확인할 수 있었으며, 이것은 C-H 결합에너지가 C-C 결합이나 C=C 결합보다 약하여 수소 원자가 비교적 해리가 잘되므로 이러한 현상이 일어난다고 판단된다. 결합이 끊어진 탄소 원자들은 다른 탄소원자들과 결합하여 3차원적 cross-link를 형성시켜 나가면서 내부 압축응력을 증가시키는 것으로 알려져 있으며, hardness 시험 결과로 이것을 확인할 수 있었다. 그리고 표면거칠기는 기판 bias 전압을 증가시킬수록 더 smooth 해짐을 확인하였다.인하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.195-195
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• 2000

TFT-LCD의 제조공정은 박막층의 식각 공정에 대해 기존의 습식 공정을 대치하는 건식식각이 선호되고 있다. 건식 식각 공정은 반도체 공저에 응용되면서 소자의 최소 선폰(CD)이 감소함에 따라 유도결합셩 프라즈마를 비롯한 고밀도 플라즈마 이용한 플라즈마 장비 사용이 증가하는 추세이다. 여기에 평판디스플레이의 공정을 위해서는 대면적과 사각형 기판에 대한 균일도를 보장할 수 있는 고밀도의 균일한 플라즈마 유지가 중요하다. 본 실험에서는 자장강화된 유도결합형 플라즈마의 플라즈마 밀도 및 균일도를 살펴보고 TFT-LCD에 gate 전극으로 사용되는 Al-Nd 박막의 식각을 통하여 식각균일도와 식각속도 및 식각 선택도 등의 건식 식각 특성을 보고자 한다. 영구자석 및 전자석의 설치는 사각형의 유도결합형 플라즈마는 소형 영구자석을 배열하여 부착하였으며, 외부에는 chamber와 같이 사각형태의 전자석을 500mm$\times$500mm의 크기를 갖는 z축 방향의 Helmholtz형으로 제작하였다. 더. 영구자석 배열에 대해서는 자석간의 거리와 세기 변화를 조합하여 magnetic cusping의 변화를 주었으며 전자석의 세기는 전류값을 기준으로 변화시켜 보았다. 실험을 통하여 플라즈마 균일도를 5% 이하로 개선하고 이러한 균일도를 유지하며 플라즈마 밀도를 높일 수 있는 조건을 찾을 수 있었다. 이러한 적합화된 조건에서 저장강화된 유도결합형 프라즈마를 Al-Nd 박막 식각에 응용한 결과, Al-Nd의 식각속도 및 식각 선택도는 유도결합형 프라즈마에 비해 크게 증가하였으며, 식각균일도가 개선되는 것을 관찰하였다. 또한 electrostatic probe(Hiden, Analytical)를 이용하여 Al-Nd 식각에 사용된 반응성 식각가스에 대한 저장강화된 유도결합형 플라즈마의 특성 분석을 수행하였다.c recoil detection, Rutherford backscattering spectroscopy, X-ray diffraction, secondary electron microscopy, atomic force microscoy, $\alpha$-step, Raman scattering spectroscopu, Fourier transform infrared spectroscopy 및 micro hardness tester를 이용하여 기판 bias 전압이 DLC 박막의 특성에 미치는 영향을 조사하였다. 분석결과 본 연구에서 제작된 DLC 박막은 탄소와 수소만으로 구성되어 있으며, 비정질 상태임을 알 수 있었다. 기판 bias 전압의 증가에 따라 박막의 두께가 감소됨을 알 수 있었고, -150V에서는 박막이 거의 만들어지지 않았으며, -200V에서는 기판 표면이 식각되었다. 이것은 기판 bias 전압과 ECR 플라즈마에 의한 이온충돌 효과 때문으로 판단되며, 150V 이하에서는 증착되는 양보다 re-sputtering 되는 양이 더 많을 것으로 생각된다. 기판 bias 전압을 증가시킬수록 플라즈마에 의한 이온충돌 현상이 두드러져 탄소와 결합하고 있던 수소원자들이 떨어져 나가는 탈수소화 (dehydrogenation) 현상을 확인할 수 있었으며, 이것은 C-H 결합에너지가 C-C 결합이나 C=C 결합보다 약하여 수소 원자가 비교적 해리가 잘되므로 이러한 현상이 일어난다고 판단된다. 결합이 끊어진 탄소 원자들은 다른 탄소원자들과 결합하여 3차원적 cross-link를 형성시켜 나가면서 내부 압축응력을 증가시키는 것으로 알려져 있으며, hardness 시험 결과로 이것을 확인할 수 있었다. 그리고 표면거칠기는 기판 bias 전압을 증가시킬수록 더 smooth 해짐을 확인하였다.인하였다.을 알 수 있

• Journal of the Korea Convergence Society
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• v.10 no.2
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• pp.89-103
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• 2019

This study was conducted with the aim of exploring methods of fostering professional human resources of the "department of support for the individuals with developmental disabilities in graduate school" based on the convergence of special education and connection between local relevant institutions. To this end, research methods were constructed that combine literature exploration and expert meetings. First, the system for fostering professionals in the "department of support for the individuals with developmental disabilities in graduate school" based on the convergence of special education programs was presented interlinked with the system for fostering professional human resources in the organizational and academic categories. Next, the link operation plans between relevant local institutions under the "department of support for the individuals with developmental disabilities in graduate school" based on the convergence of special education programs were presented interlinked with core management measures for curriculum education and cooperative support. In order to conclude the preconditions for the realization of the above research results, we presented leadership of special education convergence on the support system for lifelong education for adults with developmental disabilities.

• Journal of Practical Engineering Education
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• v.14 no.2
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• pp.387-392
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• 2022

To participate in global carbon neutrality, the Korean government is also planning to carry out zero-energy building certification for all buildings by 2030 through the enforcement decree of the 'Green Building Support Act'. Accordingly, the government is providing various projects related to solar power generation, which are relatively close to life. In particular, roof-mounted photovoltaic power generation systems are attracting attention in terms of using unused space to produce energy without destroying the environment, but low power generation efficiency compared to other photovoltaic power generation facilities is pointed out as a disadvantage. Therefore, in this paper, to solve this problem, we propose an efficient solar panel angle variable system through research on the solar panel structure for single-axial solar tracking, and also consider the application environment of the roof-mounted solar power generation system. Suggests measures to prevent damage and secondary damage. In addition, it is judged that it is possible to control the solar panel based on ICT convergence and configure the accident prediction safety system to link the project-based education program.

• Journal of The Geomorphological Association of Korea
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• v.17 no.2
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• pp.1-13
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• 2010

The technique of mountain ordering developed by Yamada(1999) has been tested to two small islands (Namhaedo: 301km², Geojedo: 378km²). The results and experiences above were extended and applied to the whole area of the southern part of Korean Peninsula. Three areas such as Seorak-Taebaek Mountains, Jiri-Deogyu Mountains, and Youngnam Alps are identified as the highest, 5th order mountains. 10 areas are classified as the 4th order and 87 areas as the 3rd order. It is suggested that the 5th order mountains are related to the axis of uplift and the 4th and 3rd order mountains have the same direction (NE-SW) as that of the secondary mountain systems in the Korean Peninsula. The logarithmic values of number, area, and relative altitude of the ordered mountains have the linear relationship with the order, as the laws of stream order. The several mountains which are not included in the existing mountain systems could be identified among the ordered mountains, and those mountains could be used as the basis to understand the geological structure of the Korean Peninsula. Most of the National Parks and the Provincial Parks are distributed on the 3rd, 4th, 5th order mountains. It is especially confirmed that the Songnisan National Park take a role to link the Seorak-Taebaek Mountains and Jiri-Deogyu Mountains as a important ecological axis. Therefore, it would be validated that the technique of mountain ordering has the practical values as well as the geomorphological significances.

• Journal of Life Science
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• v.33 no.12
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• pp.978-986
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• 2023

Inflammation by the innate immune system is a protective mechanism of the organism against infection-mediated environmental factors. It is also responsible for the pathogenesis of various human diseases, including the progression of cancer. Lichens are receiving increasing attention as a source of bioactive molecules with therapeutic potential for a variety of diseases. Additionally, the antioxidant, anti-inflammatory, and anticancer potential of lichen and its secondary metabolites have been widely reported. However, the underlying mechanism is still unknown. In the present study, to investigate molecular mechanisms of anti-inflammation and anti-cancer activity in the Antarctic lichen, Usnea aurantiaco-atra, methanol extract of Usnea aurantiaco-atra (MEUS) was used in vitro assays in RAW 264.7 macrophages cell and HCT116 colon cancer cells. Based on our data, MEUS had the anti-inflammatory activity through the modulation of main inflammatory indicators such as COX-2, IL-6, iNOS, TNF-α and NO production in a concentration-dependent manner. In addition, we observed that MEUS had cytotoxic activity against HCT116 colon cancer cells in a concentration-dependent manner, leading to a significantly reduced proliferation of the cancer cells through apoptotic induction by activating caspase-3. Taken together, this work firstly reported the anti-inflammatory and anti-cancer activities of an Antarctic lichen, Usnea aurantiaco-atra, and MEUS may provide a new insight into the molecular mechanisms underlying a link between inflammation and cancer.

• Korean Journal of Environmental Biology
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• v.40 no.2
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• pp.172-186
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• 2022

Benthic macroinvertebrates are important ecological and environmental indicators as primary or secondary consumers, and therefore are widely used in the evaluation of aquatic environments. However, there are no comprehensive river ecosystem monitoring surveys that link the major physicochemical water quality items with benthic macroinvertebrates in urban streams. Therefore, this study investigated the distribution characteristics of benthic macroinvertebrates and physicochemical water quality items (17 items) in Yangjaecheon and Yeouicheon from 2019 to 2020. At the same time, by applying Spearman's rank correlation analysis and nonmetric multidimensional scaling (nMDS) analysis in the water quality data and biotic index, we tried to provide basic data for diagnosing the current status of river ecosystems in major urban rivers in Seoul. Based on the study results, a total of 39 species and 3,787 individuals were identified in Yangjaecheon, the water quality(based on BOD, TOC, and TP) of Yangjaecheon was higher than Grade Ib(good), and the BMI using benthic macroinvertebrates appeared as Grade C(normal) at all the sites. In Yeouicheon, a total of 51 species and 4,199 individuals were identified, the water quality(based on BOD, TOC, TP) was higher than Grade Ib(good) similar to Yangjaecheon, and the BMI of both Upstream and Saewon bridge was Grade B(good), while Yeoui bridge was Grade C(normal). Overall, analysis results for the distribution of benthic macroinvertebrates by a nonmetric multidimensional scaling method showed no significant difference between the two streams (p=0.1491). Also, significant environmental variables related to benthic macroinvertebrates distribution were determined as water temperature and DO. On the other hand, the results of the correlation analysis between biotic index and major water quality items confirmed that R1 and BMI could be used for on-site urban river water quality evaluation.

• Korean Journal of Mineralogy and Petrology
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• v.36 no.4
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• pp.323-336
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• 2023

We investigated the nickel potential and genesis of ultramafic rocks in the Yugu area to secure nickel resources in South Korea. The Yugu ultramafic rocks, located in the southwest of the Gyeonggi Massif, are characterized by spinel peridotite and exhibit strong serpentinization along their boundaries. The serpentinization is observed as olivine transformed to antigorite and chrysotile, while pentlandite, the nickel sulfide mineral, altered into millerite and awaruite. Serpentine displays distinct foliation, aligning subparallel to the ultramafic rock boundaries and foliation of Yugu gneiss. This suggests that the uplift of ultramafic rocks resulted in hydrothermal infiltration likely sourced from the Yugu gneiss metamorphism. The Yugu ultramafic rocks are residues after 5~18% partial melting of abyssal peridotite. Enriched light rare earth elements and Eu imply secondary metasomatism. Geochemistry suggests a link between the formation of Yugu ultramafic rock and the Triassic collision of the North and South China continents. The nickel content is around 0.17~0.21%, mainly contained in olivine and serpentine. Hence, in addition to the mineral processing study on the sulfide minerals, focused studies on oxide minerals for enhanced nickel recovery within the Yugu ultramafic rock are strongly suggested.