• Title/Summary/Keyword: Se Deposition

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Single layer antireflection coating on PET substrates for display applications

  • Gowtham, M.;Mangalaraj, D.;Seo, Chang-Ki;Shim, Myung-Suk;Hwang, Sun-Woo;Yi, Jun-Sin
    • 한국정보디스플레이학회:학술대회논문집
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    • 2004.08a
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    • pp.988-991
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    • 2004
  • In the present investigation, we tried AR coating simulation by using the "Essential Macleod optical coating design and analysis" program. After various run of the program we selected appropriate materials which have specific refractive indices and for that thickness was optimized to get the low reflectance. By comparing the simulated results for the different materials,we found that $SiO_2$ and TiN are the appropriate materials for this Flat panel device (FPD) application. Thin films of these materials were deposited using RF magnetron sputtering and Inductively Coupled Plasma Chemical Vapour Deposition (ICPCVD) methods on Polyethyleneterephthalate (PET) substrates. Spectroscopic ellipsometer (SE MF-1000) and UV-Vis spectrophotometer (SCINCO) were used for the optical characterization. The obtained experimental results are in good agreement with the simulation results.

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Fabrication of engineered tunnel-barrier memory with $SiO_2/HfO_2/Al_2O_3$ tunnel layer ($SiO_2/HfO_2/Al_2O_3$ 적층구조 터널링 절연막을 적용한 차세대 비휘발성 메모리의 제작)

  • Oh, Se-Man;Park, Gun-Ho;Kim, Kwan-Su;Jung, Jong-Wan;Jeong, Hong-Bae;Cho, Won-Ju
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.129-130
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    • 2009
  • The P/E characteristics of $HfO_2$ CTF memory capacitor with $SiO_2/HfO_2/Al_2O_3$(OHA) engineered tunnel barrier were investigated. After a growth of thermal oxide with a thickness of 2 nm, 1 nm $HfO_2$ and 3 $Al_2O_3$ layers were deposited by atomic layer deposition (ALD) system. The band offset was calculated by analysis of conduction mechanisms through Fowler-Nordheim (FN) plot and Direct Tunneling (DT) plot. Moreover the PIE characteristics of $HfO_2$ CTF memory capacitor with OHA tunnel barrier was presented.

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A Study on the MDTF for Uncooled Infrared Ray Thermal Image Sensors with High Thermal Coefficient of Resistance (높은 열저항 계수를 가지는 비냉각형 적외선 열영상 이미지 센서용 MDTF(Metal-dielectric Thin Film)에 관한 연구)

  • Jung, Eun-Sik;Jeong, Se-Jin;Kang, Ey-Goo;Sung, Man-Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.5
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    • pp.366-371
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    • 2012
  • In this paper, fabricated by MEMS uncooled micro-bolometer detector for the study in the infrared sensitivity enhancement. Absorption layer SiOx-Metal series MDTF (metal-dielectric thin film) by high absorption rate and has a high thermal coefficient of resistance, low noise characteristics were implemented. Then MDTF were made in a vacuum deposition method. And MDTF for the analysis of the physical properties of silicon wafers were fabricated, TCR (temperature coefficient of resistance) value was made in order to measure the glass wafer and FT-IR (Fourier Transform Infrared spectroscopy) values were made in order to measure the germanium window. The analyzed results of MDTF -3 [%/K] has more characteristics of the TCR. And 8~12 um wavelength region close to 70% in the absorption characteristic.

A study of rear surface passivation by $Al_2O_3$ thin film for ultra thin silicon solar cells (초박형 태양전지를 위한 후면 패시베이션 막의 특성 연구)

  • Park, Sung-Eun;Kim, Young-Do;Tark, Sung-Ju;Kang, Min-Gu;Kwon, Soon-Woo;Yoon, Se-Wang;Kim, Dong-Hwan
    • 한국신재생에너지학회:학술대회논문집
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    • 2009.06a
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    • pp.94-94
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    • 2009
  • 최근 실리콘 태양전지는 점점 얇아 지는 추세에 있다. 실리콘 태양전지에 있어 실리콘의 두께를 감소시키는 것은 실리콘 소모량을 줄이는데 있어 필수적인 조건이 되었다. 이에 따라 실리콘 표면의 passivation도 더욱 중요하게 여겨지고 있다. 실리콘 태양전지의 passivation막의 한 종류인 $Al_2O_3$는 다른 산화막 물질들과는 달리 negative fixed charge를 가지고 있고 charge의 양이 다른 산화막의 density보다 높아 p-type 실리콘의 경우 후면 passivation막으로 이용이 고려되고 있다. 본 연구에서는 atomic layer deposition으로 $Al_2O_3$막을 실리콘 위에 증착하여 열처리에 따른 그 특성을 비교하고 태양전지를 제작하였다. $Al_2O_3$막을 rapid thermal annealing을 통해 서로 다른 분위기에서 열처리 한 결과를 capacitance-voltage를 통해 측정하여 비교, 분석하였고 ellipsomety 분석을 통해 광학적 특성을 비교하였다. 또한 열처리 온도의 변화에 따른 $Al_2O_3$내에 charge에 변화가 있다는 것을 관찰하였다. 이러한 charge의 변화가 태양전지의 passivation에 영향을 주는지 관찰하기 위해 Quasi-steady state photoconductace를 통해 lifetime의 변화를 관찰 하였다. 이러한 실험결과로부터 열처리 분위기와 온도를 최적화 하여 태양전지 passivation 특성을 증가시킬 수 있었다.

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Digital X-ray Detector에 적용을 위한 Polycrystalline CdTe 구조에 따른 전기적 신호 연구

  • Kim, Jin-Seon;O, Gyeong-Min;Jo, Gyu-Seok;Song, Yong-Geun;Hong, Ju-Yeon;Heo, Seung-Uk;Nam, Sang-Hui
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.484-484
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    • 2013
  • 기존 진단용 Digital X-ray Detector이 직접방식에서는 a-Se (Amorphous Selenium)이 대중화되었지만 고전압을 인가하여야한다는 점과 그로 인한 물질 자체의 Life time 감소 등 여러 단점들 때문에 기타 후보물질들로 HgI2, PbI2, PbO, CdTe, CdZnTe가 연구 되고 있다. 이러한 후보 물질들 중 본 연구에서는 PVD (Physical Vapor Deposition)방식을 이용하여 Polycrystalline CdTe 박막을 제작하고 특성 향상을 위해 유전물질을 Passive layer와 Protect layer로써 증착하였다. 또한 유전체층의 위치에 따른 특성 분석을 위해 제작된 박막은 FE-SEM (Field Emission Scanning Electron Microscope), XRD (X-ray Diffraction)을 통해 구조적인 특성을 확인하였다. 그리고 입사되는 X-ray 선량에 의해 생성되는 전기적 특성을 분석하였다, 그 결과 박막의 Grain Size는 약 $5{\mu}M$이며 (111)방향의 주 peak를 띄는 Poly CdTe형태로 증착된 것을 확인하였다. 전기적인 신호 결과 Passive layer와 Protect layer를 증착한 박막 모두 Darkcurrent가 감소된 것을 확인하였다. 또한 Sensitivity 측정 결과 Passive layer를 삽입한 경우 신호 값이 감소하였으며 Protect layer를 삽입한 경우 신호 값의 변화가 일어나지 않았다. 그러므로 Protect layer를 등착한 박막의 경우 SNR이 현저히 높아지는 결과를 낳았다.

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Studies on Fluid Inclusion and Stable Isotope of the Namsan Gold-Silver Mine (남산 금-은광산의 유체포유물 및 안정동위원소 연구)

  • Kim, Se-Hyun;Choi, Sang-Hoon
    • Economic and Environmental Geology
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    • v.29 no.2
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    • pp.119-127
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    • 1996
  • Electrum-sulfide minerals of the Namsan Au-Ag mine were deposited in two stages of quartz and calcite veins that fill fault planes in Mesozoic granitic rocks (230~155 Ma). The K/Ar radiometric dating of hydrothermal sericite indicates that mineralization is early Cretaceous age ($127{\pm}3.0Ma$). Mineralogic, fluid inclusion and sulfur isotopic data show that ore minerals were deposited at temperatures between $340^{\circ}C$ and $200^{\circ}C$ from fluid with salinities of 3 to 6 equiv. wt % NaCl. Evidence of fluid boiling (and $CO_2$ effervescence) indicates a maximum pressures of 100 bars. The formation temperature and $fs_2$, of Au-mineralization from the Namsan mines are mainly $280{\sim}230^{\circ}C$ and $10^{-11}{\sim}10^{-13}$ atm, respectively. Au deposition was likely a result of boiling caused to chemical change (pH, $f_{O2}$, ${\Sigma}_{H_2S{\cdot}{\cdot}}$) of ore-fluids. Sulfur isotope composition of sulfide minerals (${\delta}^{34}S=5.1$ to 8.2‰) are consistent with ${\delta}^{34}S_{{\Sigma}{H2S}}$ value of +6 to +7‰, suggesting an igneous source of sulfur partially mixed with wall-rock sulfur.

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CFD Modeling of Pesticide Flow and Drift from an Orchard Sprayer (과수원용 스프레이어의 농약 살포 및 비산 예측을 위한 전산유체해석)

  • Hong, Se-Woon;Kim, Rack-Woo
    • Journal of The Korean Society of Agricultural Engineers
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    • v.60 no.3
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    • pp.27-36
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    • 2018
  • Effective pesticide applications are needed to assure the quality and economic competitiveness of fruit production and lower the risk of spray drift. Experimental studies have shown that better spray coverage and less driftability require an understanding of the transport of spray droplets within turbulent airflows in the orchard and the interaction between droplet dynamics and tree canopies. This study developed a computational fluid dynamics (CFD) model to predict pesticide flows in the orchard and spray drift discharged from an air-assisted orchard sprayer. The model represented the transport of spray droplets as well as droplets captured by tree canopies, which were modeled as a conical porous model and branched tree model. Validation of the CFD model was accomplished by comparing the CFD results with field measurements. Spray depositions inside tree canopies and at off-target locations were in good agreement with the measurements. The resulting data presented that 38.6%~42.3% of the sprayed droplets were delivered to the tree canopies while 13.6%~20.1% were drifted out of the orchard, part of them reached farther than 200 m from the orchard. The study demonstrates that CFD model can be used to evaluate spray application performance and spray drift potential.

Fabrication and Testing of Glass Bipolar Plates for Application on Micro PEM Fuel Cells (마이크로 연료 전지를 위한 유리 바이폴라 플레이트의 제작 방법 및 성능 평가)

  • Jang, Bo-Sun;Lee, Jong-Kwang;Kwon, Se-Jin
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2009.11a
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    • pp.289-292
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    • 2009
  • The fabrication method of glass bipolar plates for micro PEM fuel cell application has been established and performance evaluation has been carried out. The advantages of glass bipolar plates for micro PEM fuel cells are light weight, high chemical resistivity, and easy manufacture. The MEMS fabrication process of anisotropic wet etching, thermal & UV bonding along with metal layer deposition has been introduced. From performance evaluation, it was shown that the micro fuel cell with a metal layer deposited on the reactive area yielded higher power density than the one without it. But both power densities of the two cases showed out to be adequate with the current status of micro fuel cell technology.

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Liquid Crystal Alignment Effect on Polyimide Surface by Ion-beam Irradiation (이온빔을 이용한 폴리이미드 표면의 액정배향효과)

  • Park, Hong-Gyu;Oh, Byeong-Yun;Kim, Young-Hwan;Kim, Byoung-Yong;Han, Jeong-Min;Seo, Dae-Shik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.330-330
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    • 2008
  • It is widely investigated to liquid crystal (LC) alignment using non-contact alignment method such as ion-beam (IB) irradiation, UV alignment, and oblique deposition. Because conventional rubbing method has some drawbacks. These include defects from dust and electrostatic charges and rubbing scratch during rubbing process. In addition, rubbing method needs additional process to remove these defects. Therefore rubbing-free methods like ion-beam irradiation are strongly required. We studied LC alignment effect on poly imide surface by IB irradiation and electro-optical (EO) characteristics of twisted nematic liquid crystal display (TN-LCD). In this experiment, a good uniform alignment of the nematic liquid crystal (NLC) with the ion-beam exposure on the polyimide (PI) (SE-150 from Nissan Chemical) surface was observed. We also achieved low pretilt angle as a function of ion-beam irradiation intensity. In addition, it can be obtained the good EO properties of the IB-aligned TN-LCD on PI surface. Some other experiments results and discussion will be included in the poster.

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P-type Capacitance Observed in Nitrogen-doped ZnO (ZnO에서 질소 불순물에 의한 p-type Capacitance)

  • Yoo, Hyun-Geun;Kim, Se-Dong;Lee, Dong-Hoon;Kim, Jung-Hwan;Jo, Jung-Yol
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.61 no.6
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    • pp.817-820
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    • 2012
  • We studied p-type capacitance characteristics of ZnO thin-film transistors (TFT's), grown by metal organic chemical vapor deposition (MOCVD). We compared two ZnO TFT's: one grown at $450^{\circ}C$ and the other grown at $350^{\circ}C$. ZnO grown at $450^{\circ}C$ showed smooth capacitance profile with electron density of $1.5{\times}10^{20}cm^{-3}$. In contrast, ZnO grown at $350^{\circ}C$ showed a capacitance jump when gate voltage was changed to negative voltages. Current-voltage characteristics measured in the two samples did not show much difference. We explain that the capacitance jump is related to p-type ZnO layer formed at the $SiO_2$ interface. Current-voltage and capacitance-voltage data support that p-type characteristics are observed only when background electron density is very low.