• Transactions of Materials Processing
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• v.15 no.1 s.82
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• pp.3-8
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• 2006

The demand fer small and high-capacity optical data storage devices has rapidly increased. The areal density of optical disk is increased by using higher numerical aperture objective lens and shorter wavelength source. A wafer-scale stacked micro objective lens with a numerical aperture of 0.85 and a focal length of 0.467mm for the 405nm blue- violet laser was designed and fabricated. A diffractive optical element (DOE) was used to compensate the spherical aberration of the objective lens. Among the various fabrication methods for micro DOE, the UV-replication process is more suitable fur mass-production. In this study, an 8-stepped DOE pattern as a master was fabricated by photolithography and reactive ion etching process. A flexible mold was fabricated for improving the releasing properties and shape accuracy in UV-replication process. In the replication process, the effects of exposing time and applied pressure on the replication quality were analyzed. Finally, the surface profiles of master, mold and molded pattern were measured by optical scanning profiler. The geometrical deviation between the master and the molded DOE was less than $0.1{\mu}m$. The diffraction efficiency of the molded DOE was measured by DOE efficiency measurement system which consists of laser source, sample holder, aperture and optical power meter, and the measured value was $84.5\%$.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.7 no.2
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• pp.216-223
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• 1997

By using aluminum iso - propoxide($Al(OC_3H_7)_3$, AIP), $Al_2O_3$thin films were deposited on (100) single crystal silicon wafer by MOCVD method. The compositions of deposited films were analysed by electron spectroscopy for chemical analyse(ESCA). The morphology and thickness of the deposited films were characterized by scanning electron microscopy. The refractive index and C-V propertied were studied by using ellipsometery and HP4192A, respectively. From the results of ESCA and SEM analysis at low pressure, more uniform and stable stoichiometric film can be obtained compared with that of atmospheric pressure. For optical film usage, required refractive index can be obtained by heat treatment of deposited film. To improve C -V characteristics in NMOS device, it is requred to control OH-which is mobile charge in oxide, to form $SiO_2$ layer between $Al_2O_3$ and Si by heat treatment.

• Transactions of the Korean hydrogen and new energy society
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• v.26 no.2
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• pp.120-126
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• 2015

Recently, the ever-increasing use of fossil fuels for rapid industrial development and population significantly caused an environment pollution and global warming such as climate change. So research and development of sustainable and eco-friendly energy have been performed. Especially the interest in nuclear fusion fuel was significantly increased from the developed countries. The system of fusion energy production was tritium separation, storage and delivery, and purification. Republic of Korea is in charge of Storage and Delivery System (SDS) in the International Thermonuclear Experimental Reactor (ITER). Welding part of the SDS bottles for storing the tritium is known to be susceptible to hydrogen embrittlement. In this study, conducted a study for the relaxation of the stability and hydrogen embrittlement of the weld area. The hydrogen heat treatment was processed through the Pressure-Composition-Temperature (PCT) device according to the time variation. Also mechanical properties such as impact test and hardness test according to using the alkaline cleaning liquid for hydrogen embrittlement relief and the fracture was observed by scanning electron microscopy (SEM) after the mechanical properties evaluation.

• Transactions of the Korean hydrogen and new energy society
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• v.26 no.2
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• pp.114-119
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• 2015

Nowdays, fossil fuels have been used as an important resource in development of industry. But it is limited and caused climate change such as pollution and global warming. So nuclear fusion research is being issued with tritium to develop eco-friendly and sustainable energy. Republic of Korea is in charge of Storage and Delivery System (SDS) in the International Thermonuclear Experimental Reactor (ITER), weld present in the SDS bottles are easily exposed to the hydrogen embrittlement of special characteristics of the hydrogen in hydrogen atmosphere, When the hydrogen embrittlement is rapidly progresses, the cracking is generated in the weld zone. Due to this cracking, the risk of leakage of tritium into the atmosphere occurs. In this study, hydrogen heat treatment was processed through the Pressure-Composition-Temperature (PCT) device according to the time variation. Also mechanical properties such as rupture strength test, three point bend test and hardness test in accordance with the respective time have been conducted and the fracture was observed by scanning electron microscopy(SEM) after the mechanical properties evaluation.

• International Journal of Internet, Broadcasting and Communication
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• v.9 no.3
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• pp.1-8
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• 2017

Recently, the development of the head mounted display (HMD) device has attracted a great deal of attention to the actual contents. Especially, Augmented Reality (AR), which is a mixture of actual information and virtual world information, is focused on. AR HMD is able to interact by arranging virtual objects in real space through spatial recognition using depth camera. In order to naturally mix virtual space with real space, it is necessary to develop a technology for realizing spatial mapping information with high accuracy. The purpose of this paper is to evaluate the optimal configuration of augmented reality application program by realizing accurate spatial mapping information when mapping a real space and an object placement environment using HoloLens. To do this, we changed the spatial mapping information in real space to three levels, which are the number of meshes used in cubic meters to scan step by step. After that, it was compared with the 3D model obtained by changing the actual space and mesh number. Experimental result shows that the higher the number of meshes used in cubic meters, the higher the accuracy between real space and spatial mapping. This paper is expected to be applied to augmented reality application programs that require scanning of highly mapped spatial mapping information.

• Journal of Korean Society of Transportation
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• v.20 no.5
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• pp.163-174
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• 2002

Speeding has been reported as one of the major causes for fatal traffic accidents in Korea. The resolution against this dangerous speeding comes to make the automated speed enforcement system an enforcement tool. The speed detection device, which measures speeds of each incoming vehicles using double loop sensors, requires high accuracy. The object of this study is to develop an accurate speed measurement algorithm using double loop detectors. Some important findings are summarized as follows: 1) It was found that speed measurement errors are caused by scanning rate, distance of two loops, irregular vehicle trajectories, multiple vehicles in detection zone. 2) A proposed algorithm using two signal set proved to reduce variance as well as mean of speed measurement. 3) A proposed filtering algorithm was effective to filter irregular driving vehicles and multiple vehicles in detection zone. A comprehensive field test of developed algorithm resulted in significant improvement of speed measurement accuracy.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.429.2-429.2
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• 2014

ZnO nanowire is known as synthesizable and good mechanical properties. And, stimuli-responsive polymer is widely used in the application of tunable sensing device. So, we combined these characteristics to make precise tunable sensing devise. In this work, we investigate the dependence of ZnO nanowire alignment and morphology on si substrate using nanosphere template with various conditions via hydrothermal process. Also, pH-temperature dependant tuning ability of nanostructure was studied. The brief experimental scheme is as follow. First, Zno seed layer was coated on a si wafer ($20{\times}20mm$) by spin coater. And then $1.15{\mu}m$ sized close-packed PS nanospheres were formed on a cleaned si substrate by using gas-liquid-solid interfacial self-assembly method. After that, zinc oxide nanowires were synthesized using hydrothermal method. Before the wire growth, to specify the growth site, heat treatment was performed. Finally, NIPAM(N-Isopropylacrylamide) was coated onto as-fabricated nanostructure and irradiated by UV light to form the PNIPAM network. The morphology, structures and optical properties are investigated by FE-SEM(Field Emission Scanning electron Microscopy), XRD(X-ray diffraction), OM(Optical microscopy), and WCA(water contact angle).

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.489.2-489.2
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• 2014

The planar type flexible piezoelectric energy harvesters (PEH) based on PbZr0.52Ti0.48O3 (PZT) thin films on the flexible substrates are demonstrated to convert mechanical energy to electrical energy. The planar type energy harvesters have been realized, which have an electrode pair on the PZT thin films. The PZT thin films were deposited on double side polished sapphire substrates using conventional RF-magnetron sputtering. The PZT thin films on the sapphire substrates were transferred by PDMS stamp with laser lift-off (LLO) process. KrF excimer laser (wavelength: 248nm) were used for the LLO process. The PDMS stamp was attached to the top of the PZT thin films and the excimer laser induced onto back side of the sapphire substrate to detach the thin films. The detached thin films on the PDMS stamp transferred to adhesive layer coated on the flexible polyimide substrate. Structural properties of the PZT thin films were characterized using X-ray diffraction (XRD) and scanning electron microscopy (SEM). To measure piezoelectric power generation characteristics, Au/Cr inter digital electrode (IDE) was formed on the PZT thin films using the e-beam evaporation. The ferroelectric and piezoelectric properties were measured by a ferroelectric test system (Precision Premier-II) and piezoelectric force microscopy (PFM), respectively. The output signals of the flexible PEHs were evaluated by electrometer (6517A, Keithley). In the result, the transferred PZT thin films showed the ferroelectric and piezoelectric characteristics without electrical degradation and the fabricated flexible PEHs generated an AC-type output power electrical energy during periodically bending and releasing motion. We expect that the flexible PEHs based on laser transferred PZT thin film is able to be applied on self-powered electronic devices in wireless sensor networks technologies. Also, it has a lot of potential for high performance flexible piezoelectric energy harvester.

• Korean Journal of Materials Research
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• v.23 no.6
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• pp.299-303
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• 2013

In this study, a micro gas sensor for $NO_x$ was fabricated using a microelectromechanical system (MEMS) technology and sol-gel process. The membrane and micro heater of the sensor platform were fabricated by a standard MEMS and CMOS technology with minor changes. The sensing electrode and micro heater were designed to have a co-planar structure with a Pt thin film layer. The size of the gas sensor device was about $2mm{\times}2mm$. Indium oxide as a sensing material for the $NO_x$ gas was synthesized by a sol-gel process. The particle size of synthesized $In_2O_3$ was identified as about 50 nm by field emission scanning electron microscopy (FE-SEM). The maximum gas sensitivity of indium oxide, as measured in terms of the relative resistance ($R_s=R_{gas}/R_{air}$), occurred at $300^{\circ}C$ with a value of 8.0 at 1 ppm $NO_2$ gas. The response and recovery times were within 60 seconds and 2 min, respectively. The sensing properties of the $NO_2$ gas showed good linear behavior with an increase of gas concentration. This study confirms that a MEMS-based gas sensor is a potential candidate as an automobile gas sensor with many advantages: small dimension, high sensitivity, short response time and low power consumption.

• Journal of Powder Materials
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• v.17 no.4
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• pp.319-325
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• 2010

Electrical discharge machining (EDM) is an attractive machining technique but it requires electrically conductive ceramic materials. In this study, Alumina matrix composites reinforced with CNTs were fabricated through CNT purification, mixing, compaction and spark plasma sintering (SPS) processes. $Al_2O_3$ nanocomposites with the different CNT concentrations were synthesized. The mechanical and electrical characteristics of $Al_2O_3$/CNTs composites were examined in order to apply the materials to the EDM process. In addition, micro-EDM using wire electrical discharge grinding (WEDG) was conducted under the various EDM parameters to investigate the machining characteristics of machined hole by Field Emission Scanning Electron Microscope (FE-SEM). The results show that $Al_2O_3$/CNTs 10%Vol. was more suitable than the other materials because high conductivity and large discharge energy caused violent sparks resulting in bad machining accuracy and surface quality.