• Title/Summary/Keyword: SEM study

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A Study on the Surfaces Machining Characteristics of Ultra-precision through SEM Measurement (SEM 측정법에 의한 초정밀 표면가공 특성연구)

  • 강순준;오상록;이갑조;김종관
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2004.04a
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    • pp.34-41
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    • 2004
  • The purpose of this paper is to look at the characteristics of surface finishing which is one of the form accuracies and to obtain the fundamental technical data from the process of machining with diamond tool through experiment and theoretical analysis. The experiments were conducted with domestic made ultra-precision machine and MCD.PCD tool, with aluminum alloyed material and brass being used for the work pieces. The goal of the size accuracy was set to 100nm. The most suitable tool nose radius and machining conditions were selected, and the variations of the surface roughness were observed using SEM method while machining the distance of up to 500km. These data were evaluated and they examined the variation of the machined surfaces while cutting up to 500km of machining distance. At the same time, the state for the wear of diamond tool nose was analyzed and carefully examined through the newest measuring device. Additionally, the characteristics of ultra-precision machining technology were studied through visual analysis.

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Structure of a Plasma Ion Source for a Cross-Section SEM Sample (SEM 단면 시료 제작을 위한 플라즈마 이온원의 구조)

  • Won, Jong-Han;Jang, Dong-Young;Park, Man-Jin
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.24 no.4
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    • pp.400-406
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    • 2015
  • This study researched the structure of the source of an ion milling machine used to fabricate a scanning electron microscope (SEM) sample. An ion source is used to mill out samples of over 1 mm dimension using a broad ion beam to generate plasma between the anode and cathode using a permanent magnet. To mill the sample in the vacuum chamber, the ion source should be greater than 6 kV for a positive ion current over $200{\mu}A$. To discover the optimum operating conditions for the ion miller, the diameter of the extractor, anode shape, and strength of the permanent magnet were varied in the experiments. A silicon wafer was used as the sample. The sputter yield was measured on the milled surface, which was analyzed using the SEM. The wafer was milled by injecting 1 sccm of argon gas into the 0.5 mTorr vacuum chamber.

Micro-cutting of Cemented Carbides with SEM (초경합금재의 전자현미경(SEM)내 마이크로 절삭)

  • 허성중
    • Journal of the Korean Society for Precision Engineering
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    • v.20 no.9
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    • pp.55-62
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    • 2003
  • This paper investigates the micro-cutting of cemented carbides using PCD (polycrystalline diamond) and PCBN (polycrystalline cubic boron nitride) cutting tools are performed with SEM direct observation method. The purpose of this study is to make clear the cutting mechanism of cemented carbides and the fracture of WC particles at the plastic deformation zone in orthogonal micro-cutting. And also to achieve systematic understanding, the effect of machining parameter on chip formation and machined surface was studied, including cutting speed, depth of cut and various tool rake angle. Summary of the results are shown below. (1) Three type of chip formation process have been proposed by the results of the direct observation in orthogonal micro-cutting of cemented carbide materials. (2) From the whole observation of chip formation, primary WC particles are crushed and/or fine grained in the shearing deformation zone. A part of them are observed to collide directly with a cutting edge of tool by following the micro-cutting. (3) Surface finish, surface morphology and surface integrity is good to obtain by cutting with PCD cutting tool compared with PCBN. (4) The machined surface has the best quality near the low cutting speed of 10${\mu}m$/sec with a cutting depth of 10 ${\mu}m$ using 0$^\circ$ rake angle and 3$^\circ$ flank angle in this condition, but it was found that excessively low speed, for example the extent of 1 ${\mu}m$/sec, is not good enough to select for various reason.

Identification Factor Development of Particulate Matters Emitted from Coal-fired Power Plant by FE-SEM/EDX Analysis (FE-SEM/EDX 분석법을 이용한 석탄화력발전소에서 배출되는 입자상물질의 확인자 개발)

  • Park, Jeong-Ho
    • Journal of Environmental Science International
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    • v.26 no.12
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    • pp.1333-1339
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    • 2017
  • Coal-fired power plants emit various Particulate Matter(PM) at coal storage pile and ash landfill as well as the stack, and affect the surrounding environment. Field Emission Scanning Electron Microscopy and Energy Dispersive X-ray analyzer(FE-SEM/EDX) were used to develop identification factor and the physico-chemical analysis of PM emitted from a power plant. In this study, three samples of pulverized coal, bottom ash, and fly ash were analyzed. The pulverized coal was spherical particles in shape and the chemical composition of C-O-Si-Al and C/Si and C/Al ratios were 200~300 on average. The bottom ash was spherical or non-spherical particles in shape, chemical composition was O-C-Si-Al-Fe-Ca and C/Si and C/Al ratios were $4.3{\pm}4.6$ and $8.8{\pm}10.0$. The fly ash was spherical particles in shape, chemical composition was O-Si-Ai-C-Fe-Ca and C/Si and C/Al ratios were $0.5{\pm}0.2$ and $0.8{\pm}0.5$.

A Study on the Optimum Design of the Condenser Lens of a Compact Electrostatic-Type SEM (전기장형 소형 주사전자현미경의 집속렌즈의 최적 설계에 대한 연구)

  • Kim, Ki-Hwan;Jang, Dong-Young;Park, Man-Jin
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.24 no.3
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    • pp.270-277
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    • 2015
  • In this paper, we describe the production of a specific electrostatic-type scanning electron microscope based on miniaturization for application in other types of vacuum equipment. The initial configuration of the SEM starts with a minimal configuration that allows people to view sample images. After improving the stability of the SEM operation and resolution, we conducted experiments on identifying the characteristics and development of an einzel-type condenser lens with reference to the demagnification lens system of an SEM. The experiments were conducted at an acceleration voltage of 5 kV and we found the shape of the lens to be more reliable than a conventional lens. The lens was then added to improve the resolution in the nanometer region. The current measured on the sample was approximately 40 pA and its magnification was 4,000 times.

Microstructural Changes of Mayonnaise during Storage (마요네즈 저장 중 미세구조의 변화)

  • Song, Young-Sun
    • Korean Journal of Food Science and Technology
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    • v.22 no.3
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    • pp.300-306
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    • 1990
  • The microstrutural changes of mayonnaise during storage were examined by light microscopy (LM) and scanning electron microscopy (SEM). Fresh mayonnaise was composed of heterogenous population of dispersed spherical oil droplets and droplet size was normally distributed with one mode. During storage at $60^{\circ}C\;and\;-10^{\circ}C$, a shift in droplet size distribution toward larger droplets was observed, as a result of coalescence of lipid droplets. Turbidimetric study also confirmed that coalescence was occurring during this accelerated aging treatments. Measurements obtained from SEM microgrphs provided better determination of smaller droplets and resulted in lower mean diameter of droplets than those obtained from LM. From these results, SEM was found to be an advantageous method of examining emulsion products as compared to LM, providing a better resolution of small droplets and a more representative view of droplet distribution, as dilution of the sample was avoided.

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The chemical composition and shape of inclusion of amethyst (자수정 내포물의 형상과 화학조성에 관한 연구)

  • Yoon, Si-Nae;Song, Young-Jun;Yon, Seog-Joo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.20 no.5
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    • pp.207-215
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    • 2010
  • This study was carried out for the purpose of obtaining the basic data for identifying the origin of amethyst. For this, the three dimensional shapes of inclusions contained in various amethyst were observed with Stereo Zoom microscope. The shape and chemical composition of cross section of solid inclusion and the chemical composition of evaporite were investigated by SEM-EDS. The evaporite is made from evaporating of liquid inclusion which is flowed out of amethyst sample by decompressing. Lastly, The trace mineral composition of amethyst was investigated by ICP-AES after digesting the amethyst sample with HF-$H_2SO_4$ solution.

Thermoelectric Properties of Co1-xFexSb3 Prepared by Encapsulated Induction Melting (밀폐유도용해로 제조된 Co1-xFexSb3의 열전특성)

  • Park, Kwan-Ho;Koh, Dong-Wook;Ur, Soon-Chul;Kim, Il-Ho
    • Korean Journal of Materials Research
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    • v.16 no.6
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    • pp.351-354
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    • 2006
  • [ $Co_{1-x}Fe_xSb_3$ ] skutterudites were synthesized by encapsulated induction melting and their thermoelectric properties were investigated. Single phase ${\delta}-CoSb_3$ was successfully obtained by the subsequent heat treatment at 773 K for 24 hours in vacuum. However, ${\delta}-CoSb_3$ was decomposed to FeSb2 and Sb when $x{\leq}0.3$, which means that the solubility limit of Fe to Co is x<0.3. The positive signs of Seebeck coefficients for all Fe-doped specimens revealed that Fe atoms acted as p-type dopants by substituting Co atoms. Thermoelectric properties were remarkably enhanced by Fe doping and optimum composition was found to be $Co_{0.7}Fe_{0.3}Sb_3$ in this study.

Real Time Analysis of Friction/Wear Characteristics of Metal Coatings with a Tribo-tester Installed in an SEM (SEM 내부에 설치된 트라이보 시험기를 통한 금속 코팅의 실시간 마찰/마모 특성 분석)

  • Kim, Hae-Jin;Kim, Dae-Eun;Kim, Chang-Lae
    • Tribology and Lubricants
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    • v.34 no.6
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    • pp.318-324
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    • 2018
  • This study aims to visualize the friction and wear behaviors of metal coatings in real time. The main mechanism of wear is identified by observing all the processes in which wear occurs. The friction coefficients of the moments are monitored to confirm the relationship between the friction and wear characteristics of the coating. Thin Ag coatings, which are several hundred nanometers in thickness, are prepared by depositing Ag atoms on silicon substrates through a sputtering method. A pin-on-disk-type tribo-tester is installed inside a scanning electron microscope (SEM) to evaluate the friction and wear characteristics of the Ag coating. A fine diamond pin is brought into contact with the Ag coating surface, and a load of 20 mN is applied. The contact pressure is calculated to be approximately 15 GPa. The moments of wear caused by the sliding motion are visualized, and the changes in the friction characteristics according to each step of wear generation are monitored. The Ag coating can be confirmed to exhibit a wear phenomenon by gradually peeling off the surface of the coating on observing the friction and wear characteristics of the coating in real time inside the SEM. This can be explained by a typical plowing-type wear mechanism.

A Study on Environmentally Friendly Soil Pavement Materials Using Weathered Soil and Inorganic Binder (화강풍화토와 무기질 결합재를 활용한 친환경 흙포장에 관한 연구)

  • Jung, Hyuksang;Jang, Cheolho;An, Byungjae;Chun, Byungsik
    • Journal of the Korean GEO-environmental Society
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    • v.10 no.4
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    • pp.25-31
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    • 2009
  • In this study, the problem of existing soil pavement is a long-term durability lack and crack occurrence. It complements in order to develop the environmental soil pavement material which composites readily blended mineral binder of liquid and decomposed granite soils. It was estimated optimal mixture proportion for unconfined compressive strength, permeability, $Cr^{6+}$detection test, SEM test with age, freezing and thawing test. It resulted mixture proportion of powder types mineral binder for rates of cement : fly ash : plaster was optimal rates of 50 : 33 : 7, and $Cr^{6+}$detection test as a result was a slight production. SEM test with 3days as a result was made Ettringite. It was found that this material was early development of early-strength for chemical. This study indicated that it will execute field appliciability Evaluation test, examination of soil pavement method with decomposed granite soils and mineral binder.

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