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SEM 내부에 설치된 트라이보 시험기를 통한 금속 코팅의 실시간 마찰/마모 특성 분석

Real Time Analysis of Friction/Wear Characteristics of Metal Coatings with a Tribo-tester Installed in an SEM

  • 김해진 (경상대학교 기계항공공학부) ;
  • 김대은 (연세대학교 기계공학과) ;
  • 김창래 (조선대학교 기계공학과)
  • Kim, Hae-Jin (School of Mechanical and Aerospace Engineering, Gyeongsang National University) ;
  • Kim, Dae-Eun (Department of Mechanical Engineering, Yonsei University) ;
  • Kim, Chang-Lae (Department of Mechanical Engineering, Chosun University)
  • 투고 : 2018.10.06
  • 심사 : 2018.11.30
  • 발행 : 2018.12.31

초록

This study aims to visualize the friction and wear behaviors of metal coatings in real time. The main mechanism of wear is identified by observing all the processes in which wear occurs. The friction coefficients of the moments are monitored to confirm the relationship between the friction and wear characteristics of the coating. Thin Ag coatings, which are several hundred nanometers in thickness, are prepared by depositing Ag atoms on silicon substrates through a sputtering method. A pin-on-disk-type tribo-tester is installed inside a scanning electron microscope (SEM) to evaluate the friction and wear characteristics of the Ag coating. A fine diamond pin is brought into contact with the Ag coating surface, and a load of 20 mN is applied. The contact pressure is calculated to be approximately 15 GPa. The moments of wear caused by the sliding motion are visualized, and the changes in the friction characteristics according to each step of wear generation are monitored. The Ag coating can be confirmed to exhibit a wear phenomenon by gradually peeling off the surface of the coating on observing the friction and wear characteristics of the coating in real time inside the SEM. This can be explained by a typical plowing-type wear mechanism.

키워드

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Fig. 1. Experimental set-up. (a) Photo image of Tribotester installed inside an SEM and (b,c) SEM images of (b) a diamond pin and (c) contact point between Ag coating and the pin.

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Fig. 1. Experimental set-up. (a) Photo image of Tribotester installed inside an SEM and (b,c) SEM images of (b) a diamond pin and (c) contact point between Ag coating and the pin.

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Fig. 2. SEM images of wear track according to the sliding cycles. (a) From an initial contact point to 5 cycles (1st step), (b) movement of contact point (1st step - 2nd step), (c) from 1 cycle to 15 cycles (2nd step) [Red arrows indicate the width of the wear track].

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Fig. 2. SEM images of wear track according to the sliding cycles. (a) From an initial contact point to 5 cycles (1st step), (b) movement of contact point (1st step - 2nd step), (c) from 1 cycle to 15 cycles (2nd step) [Red arrows indicate the width of the wear track].

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Fig. 3. Friction coefficient during the total sliding cycles [1st step : 1-1~1-5, 2nd Step : 2-1~2-15].

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Fig. 3. Friction coefficient during the total sliding cycles [1st step : 1-1~1-5, 2nd Step : 2-1~2-15].

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Fig. 4. Relationship between friction coefficient and wear track generation according to the sliding cycles. (a) From 1-1 to 1-5, (b) from 1-5 to 2-4, (c) from 2-5 to 2-9, (d) from 2-10 to 2-15 [Inset graph: friction coefficient of Si wafer during 3 cycles].

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Fig. 4. Relationship between friction coefficient and wear track generation according to the sliding cycles. (a) From 1-1 to 1-5, (b) from 1-5 to 2-4, (c) from 2-5 to 2-9, (d) from 2-10 to 2-15 [Inset graph: friction coefficient of Si wafer during 3 cycles].

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Fig. 5. EDS analysis of wear track after the total sliding cycles. Two parts(EDS 1 and EDS 2) of 2nd wear track were analyzed.

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Fig. 5. EDS analysis of wear track after the total sliding cycles. Two parts(EDS 1 and EDS 2) of 2nd wear track were analyzed.

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Fig. 6. Schematic design of wear mechanism of silver coating.

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Fig. 6. Schematic design of wear mechanism of silver coating.

Table 1. Material properties and experimental conditions[13-18]

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Table 1. Material properties and experimental conditions[13-18]

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피인용 문헌

  1. 대기압/진공 조건의 트라이보 시험기를 이용한 박막 코팅의 마찰/마모 특성 비교 vol.35, pp.6, 2018, https://doi.org/10.9725/kts.2019.35.6.389