• Journal of the Korean Society of Visualization
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• v.21 no.3
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• pp.93-100
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• 2023

The yeast Saccharomyces cerevisiae (S. cerevisiae) is considered an ideal eukaryotic model and has long been recognized for its pivotal role in numerous industrial production processes. Depending on the cell cycle phases, microenvironment, and species, S. cerevisiae varies in shape and has different sizes of each shape such as singlets, doublets, and clusters. Obtaining high-purity populations of uniformly shaped S. cerevisiae cells is crucial in fundamental biological research and industrial operations. In this study, we propose an acoustofluidic method for separating S. cerevisiae cells based on their size using surface acoustic wave (SAW)-induced acoustic radiation force (ARF). The SAW-induced ARF increased with cell diameter, which enabled a successful size-based separation of S. cerevisiae cells using an acoustofluidics device. We anticipate that the proposed acoustofluidics approach for yeast cell separation will provide new opportunities in industrial applications.

• Journal of Sensor Science and Technology
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• v.17 no.4
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• pp.289-294
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• 2008

The purpose of this study is to materialize the viscosity sensor by using the SH-SAW sensor of which the center frequency is operated at higher than 50 MHz. In order to measure the viscosity, SAW sensor of which the center frequency is operated at 100 MHz is developed. By using the developed sensor, phase shift, delay time, insertion loss, and frequency variation are measured at different viscosity. The result shows that the phase shift difference between the viscosity variations is such that the difference between the distilled water and the 100 % glycerol solution is approximately $45^{\circ}$, the change of the insertion loss is approximately 9 dB, and the difference of frequency variation is approximately 5.9 MHz. Therefore, it is shown that viscosity of unknown solution can be measured with the surface acoustic wave sensor.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.59 no.2
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• pp.390-396
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• 2010

An 80MHz surface acoustic wave (SAW)-based gyroscope utilizing a progressive wave was developed on a piezoelectric substrate. The developed sensor consists of two SAW oscillators in which one is used for sensing element and has metallic dots in the cavity between input and output IDTs. The other is used for a reference element. Coupling of mode (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. According to the simulation results, the device was fabricated and then measured on a rate table. When the device was subjected to an angular rotation, oscillation frequency differences between the two oscillators were observed because of the Coriolis force acting on the metallic dots. Depending on the angular rate, the difference of the oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 Hz/deg.s within the angular rate range of 0~1000 deg/s. The performances of devices with three IDT structures for two kinds of piezoelectric substrates were characterized. Good thermal stability was also observed during the evaluation process.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.10a
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• pp.537-537
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• 2010

High precision sensing is very important in various technologies. Especially, it is more important when it were applied to nano/micro meter level's sensing like AFM, storage, etc. And capacitive sensing is widely used method. To improve the measurement efficiency, many signal conditioners were studied and one of them was surface acoustic wave (SAW) device. SAW device is very widely used as a high frequency bandwidth filter. Due to the reflective characteristic of high frequency, the response of SAW device contains both propagative and reflective signal at the external impedance. In this paper, we used SAW device as signal conditioner of capacitive sensor. And high precision gap measurement was executed using capacitive load. Reference signal was reflective SAW response and the magnitude at the center frequency of SAW device by the change of impedance was checked. Finally, the attainable gap resolution was determined.

• Journal of the Korean Society of Visualization
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• v.22 no.2
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• pp.35-43
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• 2024

Microparticle separation has demonstrated significant potential for biological, chemical, and medical applications. We introduce a surface acoustic wave (SAW)-based microfluidic device for separation of elastic and rigid microspheres based on their property and size. By tuning the SAWs to match the resonant frequencies of certain microspheres, those particles could be selectively separated from the other microspheres. When microspheres are exposed to an acoustic field, they experience the SAW-induced acoustic radiation force (ARF), whose magnitude is dependent on the microparticle size and properties. We modeled the SAW-induced ARF based on elastic sphere theory and conducted a series of experiments to separate elastic and rigid microspheres. We further utilized the acoustofluidic method for the separation of Thalassiosira Eccentrica microalgae based on the differences in their sizes with purity exceeding 90%. We anticipate that our technique will open up new possibilities for sample preparation, detection, and diagnosis in various emerging biological and medical analyses.

• The Journal of the Acoustical Society of Korea
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• v.19 no.5
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• pp.41-45
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• 2000

The effective elastic constants of a single-crystal superlattice film have been determined by two methods based on the velocities of surface acoustic waves (SAW). One method uses formulas to calculate the effective elastic constants of a superlattice from the known elastic constants of the constituent layers. The calculated effective elastic constants are tested by comparing the corresponding SAW velocities calculated for thin-film/substrate systems with the corresponding SAW velocities measured by line-focus acoustic microscopy (LFAM). The other method determines the effective elastic constants of the superlattices by inverting the SAW velocity dispersion data measured by LFAM. The results of both methods applied to a TiN/NbN superlattice film are in good agreement.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.251-252
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• 2006

A development of surface acoustic wave gas sensor to detecting volatile gas has been observed by monitoring output signal as function of time onto the network analyzer. The SAW sensor with a center frequency of 200MHz was fabricated on $42^{\circ}$ S-T Quartz substrates. Using the gas chromatography column has been selectivity. Experimental results, which show the phase change of output signal under the absorption of volatile gas onto sensors, were presented. The proposed sensor has the properties of high sensitivity compare to the conventional SAW gas sensor and chemical selectivity. Thus, it is thought these results are applicable for use in sensor array of an high performance electronic nose system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.5
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• pp.437-443
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• 2010

SAW device is widely used as band pass filters, chemical or physical sensors, and actuators. In this paper, we propose the capacitive gap measurement system with high precision using SAW device. The research process is mainly composed of theoretical and experimental part. In the theoretical part, equivalent circuit model was used to predict the SAW response by the change of load impedance. In the experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance to check the feasibility as a sensor unit. After that, experimental setup to measure and adjust the gap was made and the SAW response by the change of gap which caused the capacitance change was measured. Finally, resolution and stroke was decided compared with the signal change and basic measurement noise level.

• Journal of the Korea Institute of Military Science and Technology
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• v.12 no.1
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• pp.106-113
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• 2009

This paper presents a surface acoustic wave(SAW) micro-electro-mechanical-systems(MEMS) interdigital transducer (IDT) gyroscope with 80MHz central frequency on a $128^{\circ}\;YX\;LiNbO_3$, which is consisted of a two-port SAW resonator, metallic dots and dual delay lines for the sensor and reference oscillators. Reason for using two delay line oscillators is to extract the gyroscope effect by comparing the resonant frequencies between two oscillators and to compensate the temperature effect. Based on the coupling of modes(COM) simulation, an 80MHz two ports SAW resonator and dual delay line were fabricated and characterized by the network analyzer. Obtained sensitivity was $109Hz/deg{\cdot}s^{-1}$ in the angular rate range of $0{\sim}1000deg/s$. Good Linearity and superior directivity were observed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.141-144
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• 2003

This study proposes ZnO thin film as a piezoelectric material for SAW (surface acoustic wave) filter. The ZnO thin film with thickness $2.6{\mu}m$ was deposited (0001)-oriented sapphire by RF magnetron sputtering technique. IDTs (inter-digital transducers) electrodes were patterned upon SAW filter mask with solid finger structure unapodized using lift-off method on ZnO piezoelectric thin film. SAW propagation velocity was measured with the center frequency by HP 8753C network analyzer. A fabricated ZnO SAW filter exhibited a high propagation velocity of 5433 $^m/s$ and relatively insertion loss of -53.391dB at $\lambda=80{\mu}m$. The side-lobe attenuation of the center frequency was about 17dB. When the wavelength was $80{\mu}m$ $(\lambda/4=20{\mu}m)$, the center frequency was 67.907 MHz. $k^2$ (electromechanical coupling coefficient) was 15.84 %.