• Korean Journal of Materials Research
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• v.34 no.6
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• pp.283-290
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• 2024

The aggressive scaling of dynamic random-access memory capacitors has increased the need to maintain high capacitance despite the limited physical thickness of electrodes and dielectrics. This makes it essential to use high-k dielectric materials. TiO₂ has a large dielectric constant, ranging from 30~75 in the anatase phase to 90~170 in rutile phase. However, it has significant leakage current due to low energy barriers for electron conduction, which is a critical drawback. Suppressing the leakage current while scaling to achieve an equivalent oxide thickness (EOT) below 0.5 nm is necessary to control the influence of interlayers on capacitor performance. For this, Pt and Ru, with their high work function, can be used instead of a conventional TiN substrate to increase the Schottky barrier height. Additionally, forming rutile-TiO₂ on RuO₂ with excellent lattice compatibility by epitaxial growth can minimize leakage current. Furthermore, plasma-enhanced atomic layer deposition (PEALD) can be used to deposit a uniform thin film with high density and low defects at low temperatures, to reduce the impact of interfacial reactions on electrical properties at high temperatures. In this study, TiO₂ was deposited using PEALD, using substrates of Pt and Ru treated with rapid thermal annealing at 500 and 600 ℃, to compare structural, chemical, and electrical characteristics with reference to a TiN substrate. As a result, leakage current was suppressed to around 10^-6 A/cm² at 1 V, and an EOT at the 0.5 nm level was achieved.

• Clean Technology
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• v.27 no.2
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• pp.190-197
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• 2021

Kraft lignin is a by-product of the pulp and paper industry, obtained as a black liquor after the extraction of cellulose from wood through the Kraft pulping process. Right now, kraft lignin is utilized as a low-grade boiler fuel to provide heat and power but can be converted into high-calorific biofuels or high-value chemicals once the efficient catalytic depolymerization process is developed. In this work, the multi-functional catalyst of Ru-Mg-Al-oxide, which contains hydrogenation metals, acid, and base sites for the effective depolymerization of kraft lignin are prepared, and its lignin depolymerization efficiency is evaluated. In order to understand the role of different active sites in the lignin depolymerization, the three different catalysts of MgO, Mg-Al-oxide, and Ru-Mg-Al-oxide were synthesized, and their lignin depolymerization activity was compared in terms of the yield and the average molecular weight of bio-oil, as well as the yield of phenolic monomers contained in the bio-oil. Among the catalysts tested, the Ru-Mg-Al-oxide catalyst exhibited the highest yield of bio-oil and phenolic monomers due to the synergy between active sites. Furthermore, in order to maximize the extent of lignin depolymerization over the Ru-Mg-Al-oxide, the effects of reaction conditions (i.e., temperature, time, and catalyst loading amount) on the lignin depolymerization were investigated. Overall, the highest bio-oil yield of 72% and the 3.5 times higher yield of phenolic monomers than that without a catalyst were successfully achieved at 350 ℃ and 10% catalyst loading after 4 h reaction time.

• Clean Technology
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• v.23 no.3
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• pp.314-324
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• 2017

To verify the viability of Co, Ru and Zr-based catalyst for $CO_2$ (dry) reforming reaction, catalysts were fabricated using cordierite, silicon carbide and rota monolithic substrates, and they were compared with the conventional $Co-Ru-Zr/SiO_2$ catalyst in terms of performance and durability. Cordierite monolith was showed high activity with the least amount of active component. In addition, when Cordierite monolith was coated with Co-Ru-Zr in various ways, most excellent performance was showed at a precursor solution coating method. In particular, when 0.9 wt% Co-Ru-Zr/Cordierite was used for reaction, it was observed that 95% $CO_2$ conversion was maintained for 300 h at $900^{\circ}C$.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 2006.05a
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• pp.198-201
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• 2006

• BMB Reports
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• v.34 no.6
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• pp.551-558
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• 2001

We extended the measurable time scale of DNA dynamics to submicrosecond using a long-lifetime metal-ligand complex, $[Ru(phen)_2(dppz)]^{2+}$ (phen=1,10-phenanthroline, dppz=dipyrido[3,2-a:2',3'-c]phenazine) (RuPD), which displays a mean lifetime near 350 ns. We partially characterized the fluorescence resonance energy transfer (FRET) in calf thymus DNA from RuPD to nile blue (NB) using frequency-domain fluorometry with a high-intensity, blue light-emitting diode (LED) as the modulated light source. There was a significant overlap of the emission spectrum of the donor RuPD with the absorption spectrum of the acceptor NB. The F$\ddot{o}$rster distance ($R_0$) that was calculated from the spectral overlap was $33.4\;{\AA}$. We observed dramatic decreases in the steady-state fluorescence intensities of RuPD when the NB concentration was increased. The intensity decays of RuPD were matched the closest by a triple exponential decay. The mean decay time of RuPD in the absence of the acceptor NB was 350.7 ns. In a concentration-dependent manner, RuPD showed rapid intensity decay times upon adding NB. The mean decay time decreased to 184.6 ns at $100\;{\mu}M$ NB. The FRET efficiency values that are calculated from the mean decay times increased from 0.107 at $20\;{\mu}M$ NB to 0.474 at $100\;{\mu}M$ NB concentration. The use of FRET with a long-lifetime metal-ligand complex donor is expected to offer the opportunity to increase the information about the structure and dynamics of nucleic acids.

• Journal of the Korean Magnetics Society
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• v.16 no.6
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• pp.276-278
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• 2006

The switching characteristics of magnetic tunnel junctions (MTJs) comprising amorphous ferromagnetic CoFeSiB free layer have been investigated. CoFeSiB was used for the free layer to enhance the switching characteristics. The typical junction structure was $Si/SiO_{2}/Ta$ 45/Ru 9.5/IrMn 10/CoFe $7/AlO_{x}/CoFeSiB\;(t)/Ru\;60\;(in\;nm)$. CoFeSiB has low saturation magnetization ($M_{s}$) of $560\;emu/cm^{3}$ and high anisotropy constant ($K_{u}$) of $2800\;erg/cm^{3}$. These properties caused low coercivity ($H_{c}$) and high sensitivity in MTJs, and it also confirmed in submicrometer-sized elements by micromagnetic simulation based on the Landau-Lisfschitz-Gilbert equation. By increasing CoFeSiB free layer thickness, the switching characteristics became worse due to increase of the demagnetization field.

• Journal of Environmental Science International
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• v.21 no.7
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• pp.787-795
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• 2012

The purpose of this study is to synthesize transition metal doped mesoporous silica catalyst and to characterize its surface in an attempt to decomposition of $N_2O$. Transition metal used to surface modification were Ru, Pd, Cu and Fe concentration was adjusted to 0.05 M. The prepared mesoporous silica catalysts were characterized by X-ray diffraction, BET surface area, BJH pore size, Scanning Electron Microscopy and X-ray fluorescence. The results of XRD for mesoporous silica catalysts showed typical the hexagonal pore system. BET results showed the mesoporous silica catalysts to have a surface area of 537~973 $m^2/g$ and pore size of 2~4 nm. The well-dispersed particle of mesoporous silica catalysts were observed by SEM, the presence and quantity of transition metal loading to mesoporous surface were detected by XRF. The $N_2O$ decomposition efficiency on mesoporous silica catalysts were as follow: Ru>Pd>Cu>Fe. The results suggest that transition metal doped mesoporous silica is effective catalyst for decomposition of $N_2O$.

• Transactions of the Korean hydrogen and new energy society
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• v.17 no.3
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• pp.293-300
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• 2006

KIER has been developing a Ru-based preferential oxidation catalysts and a novel fuel processing system to provide hydrogen rich gas to residential PEMFCs system. The catalytic activity of Ru-based catalysts was investigated at different Ru loading amount and different support structure. The obtained result indicated that 2 wt% loaded Ru-based catalyst supported on ${\alpha}-Al_2O_3$ showed high activity in low temperature range and suppressed the methanation reaction. The developed prototype fuel processor showed thermal efficiency of 78% as a HHV basis with methane conversion of 92%. CO concentration below 10 ppm in the produced gas is achieved with separate preferential oxidation unit under the condition of $[O_2]/[CO]=2.0$. The partial load operation have been carried out to test the performance of fuel processor from 40% to 80% load, showing stable methane conversion and CO concentration below 10 ppm. The durability test for the daily start-stop and 8 h operation procedure is under investigation and shows no deterioration of its performance after 50 start-stop cycles. In addition to the system design and development.

• Korean Chemical Engineering Research
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• v.46 no.3
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• pp.581-584
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• 2008

The catalyst carriers of the mesoporous layer compounds were prepared to carry out the partial oxidation of methane(POM) to hydrogen. The catalytic activities of POM to hydrogen were investigated over Ru(3)/SPK and Ru(3)/SPM catalyst in a fixed bed flow reactor under atmosphere. In addition, the catalysts and carriers were characterized by BET, TEM, TPR. The BET surface areas of the silica-pillared $H^+-kenyaite$(SPK) and the silica-pillared $H^+-magadite$(SPM) were $760m^2/g$ and $810m^2/g$, repectively, and the average pore sizes were 3.0 nm and 2.6 nm, repectively. The nitrogen adsorption isotherms were type IV with developed hysteresis. The TEM showed that the mesoporous layer compounds were formed well. The Ru(3)/SPK and the Ru(3)/SPM catalyst were obtained high hydrogen yields(90%, 87%), and were kept constant high hydrogen yields even about 60 hours at 973 K, $CH_4/O_2=2$, $1.25{\times}10^{-5}g-Cat.hr/ml$. The TPR peaks of Ru(3)/SPK and the Ru(3)/SPM catalyst showed the similar reducibilities around 453 K and 413 K. It could be suggested that SPK and SPM had the physicochemical properties as oxidation catalyst carries from these analysis data.

• Journal of the Korean institute of surface engineering
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• v.51 no.4
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• pp.207-213
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• 2018

Not only efficiency of chlorine evolution reaction (CER) but also durability namely service life is very important property in dimensional stable anode for Ballast Water Management System (BWMS) for marine ships. Many researchers have been focused on improving efficiency of CER by controlling composition, phase and surface area for a long time, but the efforts to increase durability was relatively small. In this study, we have investigated the effect of $TiO_2$ protective interlayers on efficiency and durability of DSA electrodes. $TiO_2$ protective interlayers were prepared by thermal oxidation at 500, 600 and $700^{\circ}C$ on Ti substrate. And then the DSA electrodes consisting of $Ti/RuO_2-PdO-TiO_2$ were prepared by thermal decomposition method on $TiO_2$ interlayers. The efficiencies of CER of DSA electrodes without $TiO_2$ interlayer and with $TiO_2$ interlayer grown at 500, 600 and $700^{\circ}C$ were 94.19, 94.45, 84.60 and 76.75% respectively. On the otherhand, durabilities were 30, 55, 90 and 65 hours respectively. In terms of industrial aspect, the performance of DSA is considered high efficiency and durability which can correspond to total production of chlorine. If we considered the performance index of DSA as the product of efficiency and durability, performance indices could be recalculated as 28.26, 50.85, 76.14 and 49.89 respectively. As the thermal oxidation temperature increasing, life time were increased remarkerbly, while efficiency of CER was decreased slightly. As a result, DSA electrode with $TiO_2$ interlayer grown at $600^{\circ}C$ has shown about 2.7 times performace of original DSA electrode without $TiO_2$ interlayer.