• Title/Summary/Keyword: Roughness pattern

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Chemo-Mechanical Polishing Process of Sapphire Wafers for GaN Semiconductor Thin Film Growth (사파이어 웨이퍼의 기계-화학적인 연마 가공특성에 관한 연구)

  • 신귀수;황성원;서남섭;김근주
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.28 no.1
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    • pp.85-91
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    • 2004
  • The sapphire wafers for blue light emitting devices were manufactured by the implementation of the surface machining technology based on micro-tribology. This process has been performed by chemical and mechanical polishing process. The sapphire crystalline wafers were characterized by double crystal X-ray diffraction. The sample quality of sapphire crystalline wafer at surfaces has a full width at half maximum of 89 arcsec. The surfaces of sapphire wafer were mechanically affected by residual stress during the polishing process. The wave pattern of optical interference of sapphire wafer implies higher abrasion rate in the edge of the wafer than its center from the Newton's ring.

Insulation Coating for non-oriented Silicon Steel Sheerts (무방향성 전기강판의 절연피막 코팅재)

  • 조남웅;장세기
    • Journal of the Korean institute of surface engineering
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    • v.30 no.6
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    • pp.382-390
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    • 1997
  • Good appearance of insulation coating is required for non-oriented silicon steel sheets, The property is influenced by both the chemical composition of coating solution and the species of resin. The composition of inorganic-organic coating was studied to obtain good surface quality for non-oriented silicon steel. The greenish degree of coating surface depended on $Cr^{3+}$ content in the coating layer, which was satisfied when chromate content was more than 54.60 wt. %, in the coating solution. The homogeneous pattern and roughness of the coating surface depended on spreading property of the resin. Surface appearance of the coating could be improved by using resin with good spreading property at the chemical composition of chromate 59.00 wt.%.. resin 34.23wt.%, and etyhylene glycol 6.67 wt.% without colloidal sillica.

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Characteristics of Laser Direct Patterned Indium Tin Oxide Layer by Overlapping Rates of Laser Beam

  • Li, Zhao-Hui;Ahn, Min-Hyung;Choi, Kyung-Min;Im, Seung-Hyeok;Jung, Kyung-Seo;Cho, Eou-Sik;Kwon, Sang-Jik
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.1496-1499
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    • 2009
  • A diode-pumped Nd:$YVO_4$ laser was used to obtain indium tin oxide (ITO) patterns on glass substrate with various overlapping rates. The results showed that the overlapping rate of laser beam influences on the edge structure of ITO pattern and the surface roughness of ablated groove bottom. At a laser repetition rate of 40 kHz, the optimized condition of overlapping rate was 75 %.

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Effect of Current Density and Solution pH on Properties of Electrodeposited Cu Thin Films from Sulfate Baths for FCCL Applications (Sulfate 용액을 이용하여 전기도금 한 FCCL용 Cu 필름의 특성에 미치는 전류밀도와 pH의 영향)

  • Shin, Dong-Yul;Park, Doek-Yong;Koo, Bon-Keup
    • Journal of the Korean institute of surface engineering
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    • v.42 no.4
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    • pp.145-151
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    • 2009
  • Nanocrystalline Cu thin films for FCCL were electrodeposited from sulfate baths to investigate systematically the influences of current density, solution pH on current efficiency, residual stress, surface morphology, and microstructure of thin Cu films. Current efficiencies were measured to be approximately 100%, irrespective of the applied current density and solution pH. But these influenced residual stress, surface morphology, XRD pattern, and grain size of electrodeposited Cu thin film. The residual stress decreased with decreasing the surface roughness, but increased with increasing the fcc(111) peak strength of XRD patterns.

The study of ZnO crystalline improvement of FBAR (DC sputter로 증착한 ZnO 박막의 결정성 향상에 관한 연구)

  • Lee, Kyu-Il;Kim, Eung-Kwon;Lee, Tae-Yong;Hwang, Hyun-Suk;Song, Joon-Tae
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.322-323
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    • 2005
  • We deposited Zinc oxide (ZnO) thin films on Ru buffer layer in order to protect the amorphous layer between ZnO and Al interface. In X-ray diffraction (XRD) pattern, it was observed that increase of (002)-orientation by the variation of annealing treatment temperature. Also, surface roughness and specific resistance were increased by annealing treatment but full width at half maximum (FWHM) was decreased. In film bulk acoustic resonators (FBARs) fabricated from these results, we finally confirmed that the resonant frequency of 0.89 GHz without its shift was measured.

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Tungsten CMP in Fixed Abrasive Pad using Hydrophilic Polymer (친수성 고분자를 이용한 고정입자패드의 텅스텐 CMP)

  • 박범영;김호윤;김형재;김구연;정해도
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.7
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    • pp.22-29
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    • 2004
  • As a result of high integration of semiconductor device, the global planarization of multi-layer structures is necessary. So the chemical mechanical polishing(CMP) is widely applied to manufacturing the dielectric layer and metal line in the semiconductor device. CMP process is under influence of polisher, pad, slurry, and process itself, etc. In comparison with the general CMP which uses the slurry including abrasives, fixed abrasive pad takes advantage of planarity, resulting from decreasing pattern selectivity and defects such as dishing & erosion due to the reduction of abrasive concentration especially. This paper introduces the manufacturing technique of fixed abrasive pad using hydrophilic polymers with swelling characteristic in water and explains the self-conditioning phenomenon. And the tungsten CMP using fixed abrasive pad achieved the good conclusion in terms of the removal rate, non-uniformity, surface roughness, material selectivity, micro-scratch free contemporary with the pad life-time.

Effect of Skinpassing Conditions on the Surface Characteristics of Hot-dip Galvanized Steel Sheets (용융아연도금강판의 표면특성에 미치는 조질압연 조업조건의 영향)

  • 전선호
    • Journal of the Korean institute of surface engineering
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    • v.34 no.4
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    • pp.327-336
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    • 2001
  • The skinpassing conditions such as roll type, roll force and roll roughness of the work roll were evaluated to give the surface properties of the galvanized steel sheets that were required for automotive and to get rid of the surface defects that caused with the bad control of galvanized coating process parameters. The surface defects of the galvanized steel sheets such as the ripple mark and the scratch were completely removed as the roll force of SPM work roll was increased and the amount of the transfer of roll surface texture to the strip was also gained a lot. The image clarity of electro discharge textured (EDT) coated steel sheets before and after painting was higher than that of the bright (BRT) and shot blasted (SBT) coated steel sheets because of higher PPI value, lower waviness and uniform surface pattern. Since micro-craters transferred on the surface of the galvanized steel sheets played a role of nucleation sites of chromate reaction, Increase of micro-craters was bring to better corrosion resistance with the increase of the roll force and the use of EDT roll at the skin pass mill.

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Impact of coffee ring effect on the $Al_2O_3$ thick films by Using Inkjet Printing Process

  • Hwang, Myung-Sung;Jang, Hun-Woo;Kim, Ji-Hoon;Koo, Eun-Hae;Kim, Hyo-Tae;Yoon, Young-Joon;Kim, Jong-Hee
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.171-171
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    • 2009
  • We have investigated the impact of coffee ring effect on the inkjet-printed $Al_2O_3$ thick films. In a single solvent system such as Dimethylformamide, the coffee-ring-pattern has appeared on the edge of sessile drop after evaporation. The peak-to-valley height difference in $Al_2O_3$ coffee ring is over 2um. This non-uniform deposition of $Al_2O_3$ over the surface leads to sever surface roughness of the inkjet-printed films. However, we have manipulated our printing parameters to improve the surface roughness and the packing density of the printed $Al_2O_3$ films. Our inkjet-printed $Al_2O_3$ films show 10 times smoother surface than the initially printed sample's surface. Also the packing density of the printed Ah03 film becomes 70% of high packed $Al_2O_3$. In this presentation, we would like to present the key process parameters of the inkjet printing process to overcome the genetic coffee ring problem.

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Hydrophobic Characteristics of a Silicone Resin Surface Produced by Replicating an Electric Discharge Machined Surface (방전가공면을 복제한 실리콘수지 표면의 발수특성연구)

  • Kim, Y.H.;Hong, S.K.;Lee, S.Y.;Lee, S.H.;Kim, K.H.;Kang, J.J.
    • Transactions of Materials Processing
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    • v.22 no.1
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    • pp.23-29
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    • 2013
  • In this study, a micro/nano-random-pattern-structure surface was machined by electric discharge machining (EDM) followed by replicating the EDM surface with a silicone elastomer having low energy and greater hydrophobicity. The variation of hydrophobicity was of prime interest and was examined as a function of the surface roughness of the replicated silicone elastomer. The hydrophobicity was evaluated by the water contact angle (WCA) measured on the relevant surface. For the experiments, the original surfaces were machined by die sinking electric discharge machining (DS-EDM) and wire cutting electric discharge machining (WC-EDM). The ranges of surface roughness were Ra $0.8{\sim}19{\mu}m$ for the DS-EDM and Ra $0.5{\sim}4.7{\mu}m$ for the WC-EDM. In order to fabricate a hydrophobic surface, the EDM surfaces were directly replicated using a liquid-state silicone elastomer, which was thermally cured. The measured WCA on the replicated surfaces for DS-EDM was in the range of $115{\sim}130^{\circ}$ and for WC-EDM the WCA was in the range of $123{\sim}150^{\circ}$. Additionally, the dynamic hydrophobicity was evaluated by measuring an advancing and a receding WCA on the replicated silicone elastomer surfaces.

A Study of the Printability Coefficients on the Newspaper ( II ) - Limiting printed density ($D_{\infty}$) and printed density smoothness constant m value- (신문용지의 인쇄적성 계수에 관한 연구 ( 제 2 보 ) -최대 잉크 색 농도 ($D_{\infty}$), 색 농도 평활성 계수 ${\ulcorner}m{\lrcorner}$ 값 -)

  • Ha, Young-Baeck;Kim, Chang-Keun;Oh, Sung-Sang;Lee, Yong-Kyu;Youn, Jong-Tae
    • Journal of Korea Technical Association of The Pulp and Paper Industry
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    • v.38 no.2 s.115
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    • pp.16-21
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    • 2006
  • Uneven ink transfer of a print can be traced to several causes such as an incomplete contact between the paper surface and ink film, a coarse pattern of a continuous ink film after transfer, uneven absorption, etc. Uneven ink transfer was studied in this points by the Tollenaar. Uneven distributions of printed density are reflected in low ${\ulcorner}m{\lrcorner}$ values of the print. Tollenaar's smoothness coefficient ${\ulcorner}m{\lrcorner}$ value was important factor that deciding printed quality which was easily obtain by densitometry. Limiting print density $D_{\infty}$ that obtained Tollenaar's formulation working as a influence factor at the printed quality. In this study, we obtained limiting print density $D_{\infty}$ and smoothness coefficient ${\ulcorner}m{\lrcorner}$ value of domestic newspapers and foreign newspapers. And we analyzed about properties of the newspaper. The result of this study, smoothness coefficient ${\ulcorner}m{\lrcorner}$ value and limiting print density $D_{\infty}$ showed the good results in the low porosity and low roughness newspaper. Datum which obtained by this study was used as printability factor for the quality control and improvement of domestic newspaper and wished to apply as a basic data for the domestic newspaper quality.