한국정보디스플레이학회:학술대회논문집

The Korean Infomation Display Society (한국정보디스플레이학회)
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Characteristics of Laser Direct Patterned Indium Tin Oxide Layer by Overlapping Rates of Laser Beam

  • Li, Zhao-Hui (Depart. of Electronics Engineering, Kyungwon University) ;
  • Ahn, Min-Hyung (Depart. of Electronics Engineering, Kyungwon University) ;
  • Choi, Kyung-Min (Depart. of Electronics Engineering, Kyungwon University) ;
  • Im, Seung-Hyeok (Depart. of Electronics Engineering, Kyungwon University) ;
  • Jung, Kyung-Seo (Depart. of Electronics Engineering, Kyungwon University) ;
  • Cho, Eou-Sik (Depart. of Electronics Engineering, Kyungwon University) ;
  • Kwon, Sang-Jik (Depart. of Electronics Engineering, Kyungwon University)
  • Published : 2009.10.12
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Abstract

A diode-pumped Nd:$YVO_4$ laser was used to obtain indium tin oxide (ITO) patterns on glass substrate with various overlapping rates. The results showed that the overlapping rate of laser beam influences on the edge structure of ITO pattern and the surface roughness of ablated groove bottom. At a laser repetition rate of 40 kHz, the optimized condition of overlapping rate was 75 %.

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