• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.7-12
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• 2023

The edge ring placed on the outside of the electrostatic chuck (ESC) is a key component for protecting the ESC and controlling the etching uniformity of the edge of the wafer. Therefore, it is very important to understand the etching phenomenon of edge rings for edge ring management and equipment homeostasis. In this study, a specimen with SiO₂ hard mask and underlying Si mold was installed on the edge ring surface and the etching results were measured by varying the edge ring 2MHz RF power. By developing PI-VM model with high prediction accuracy and analyzing the roles of key parameters in the model, we were able to evaluate the effect of plasma and sheath characteristics around the edge ring on edge ring erosion. This analysis method provided information necessary for edge ring maintenance and operation.

• Tunnel and Underground Space
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• v.7 no.3
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• pp.221-229
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• 1997

Disc-type and ring-type specimens of four different materials were tested to investigate the tensile characteristics and their brief results are presented. Materials tested were marble, granite, cement mortar and plaster. Unizxial tensile strengths are compared with Brazilian and ring test strengths. It was found that Brazilian strengths were usually greater than uniaxial tensile strengths and affected by loading rates. In the ring tests, tensile strengths were generally found to be decreased as relative hole radius being increased. Ring test strengths, however, converged to some value in r$\geq$0.45 of marble, r$\geqq$0.29 of cement mortar and r$\leq$0.5 of plaster specimens. In such range of r, furthermore, transverse cracking of specimens were observed.

• Proceedings of the Korea Concrete Institute Conference
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• 1999.04a
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• pp.313-318
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• 1999

This study is aim to evaluate of the flexure toughness of fiber reinforced concrete with ring type steel fiber. The experiment proceeding ASTM C 78 is performed to make a comparision between the ring type flber and the double-hook type fiber which is recently come in to use. The size of the test specimen is 10$\times$10$\times$35mm and the flexture test is proceeded by third-point loading method. The test lasts until 2mm deflection and the loading speed is 0.01mm/min by deflection control. From the experimental results, the specimens with ring type fiber of 30kg/㎥ and 30mm diameter of ring circle show much higher toughness indices than those of the double-hook type fiber of 30kg/㎥ and 30mm long.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.22 no.3
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• pp.483-492
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• 1998

An inverse analysis been applied to obtain the flow stress of the material. In this method, a ring-shaped specimen is compressed between two flat tools. This procedure employs, as the object function of inverse analysis, the balance of measured loads and reaction forces calculated by using rigid-plastic finite element method. The balance is explicit scalar function of flow stress which is a function of some unknown constants. For minimizing the balance, Newton-Raphon scheme is used. The friction factor, m, between flat tools and the specimen is determined by using friction area-divided method. The proposed method allows an accurate identification by avoiding the usual assumptions made in order to convert experimental measures into stress-strain relation. In this paper, the proposed method is numerically tested. A commercial pure aluminum was selected, as an example, to apply the method and the results are compared with stress-strain relation obtained by experiments.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.482-483
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• 2007

For measurement of dielectric constants, the commercial parallel plate electrodes system with guard-ring electrode have been widely used up to now. The capacitance derived from the parallel plate electrodes capacitor with guard-ring electrode is calculated by the equation of ($C={\epsilon}\;{\cdot}\;\frac{area\;of\;electrod}{distance\;between\;electrodes}$). Therefore, in parallel plate electrode capacitor, the diameter of the guarded electrode, the gap size between guarded electrode and guard ring, and distance between two active electrode should be measured precisely to calculate dielectric constants from the measured capacitance. Consequently their mechanical measurement uncertainties are directly contributed. Especially the air-gap between the electrodes and dielectric specimen at the system must be existed and the measurement error derived from the air-gap is impossible to evaluate as measurement uncertainties. In this study, we analyze the uncertainty of the commercial dielectric constant test cell using 3 kinds CRMs.

• International Journal of Precision Engineering and Manufacturing
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• v.4 no.1
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• pp.30-36
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• 2003

Brittle materials such as glasses and ceramics, which are very weak under impact loading, show fragile failure mode due to their low fracture toughness and crack sensitivity. When brittle materials are subjected to impact by small spheres, high contact pressure occurs at the impacted surface causing local damage on the specimen. This damage is a dangerous factor in causing the final fracture of structures. In this research, the crack propagation process of soda-lime glass by the impact of small spheres is explained and the effects of several constraint conditions for impact damage were studied by using soda-lime glass; that is, the effects for the materials and sizes of impact ball, thickness of specimen and residual strength were evaluated. Especially, this research has focused on the damage behavior of ring cracks, cone cracks and several other kinds of cracks.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2017.05a
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• pp.224-225
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• 2017

Ultra-high-strength concrete exposed to high temperature is likely to cause spalling. Spalling is caused by the vapor pressure of the concrete, and the vapor pressure may be different depending on the heating conditions of the concrete. Therefore, in this study, a ring-type restrained specimen was fabricated using ultra-high-strength concrete and the vapor pressure generated in the concrete by heating condition(rapid and slow heating) was evaluated.

• Journal of Ocean Engineering and Technology
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• v.13 no.2 s.32
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• pp.159-167
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• 1999

For exisiting $K_0$-oedometer, the lateral wall of the ring is cut thinly to make space and by filling the space with space with water or mercuty to keep the balance to the lateral pressure of a specimen, the pressure of the fluid is checked for the pressure of the specimen. But the devices to keep the balance to the lateral pressure of a specimen are complicated, difficult to manufacture and expensive. As newly developed $K_0$-oedometer is equipped with the load cell which can resist higher pressute than the lateral pressure of the specimen, there is nearly no deformation due to the lateral pressure of the specimen. And the measuting is cheap and easy as there are fewer accessories.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.34 no.9
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• pp.25-32
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• 2006

In this study, the characteristics of filament wound composite/aluminum ring specimens were investigated at cryogenic temperature. The ring specimens were manufactured using carbon fibre and Type B epoxy resin which had been developed for cryogenic use. As a result of measuring thermal strains at -150℃, it was found that compressive thermal stress was induced in composite part on the contrary, tensile thermal stress in aluminum part which was about 32% of yield stress and in turn, caused aluminum to be yielded at lower load level. In addition, Thermal strains which resulted from finite element analysis showed good agreement with those of the experiment. After 6 mechanical loading cycles had been applied to the ring specimen at -150℃, tensile tests were performed at -150℃ using a split disk fixture. As a result, it was shown that composite strength in a liner-composite tank structure which is for the use of cryogenic propellant tank would be decreased by auto-frettage pressure which is applied to it.

• Proceedings of the Korean Geotechical Society Conference
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• 2008.03a
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• pp.1-6
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• 2008

When a saturated clay is sampled in an undisturbed manner from a bore hole, the sample extends vertically and shrinks horizontally under undrained conditions due to stress release. The conventional consolidation test specimen is trimmed from the expanded sample so that its diameter is equal to the inner diameter of the consolidation test ring, this test procedure does not reproduce the actual consolidation behavior. The measurement of sample extension was conducted by means of overcoring method found that the extension strains were 1 to 2%. To simulate the in-situ consolidation behavior, the consolidation test method that uses a specimen with a slightly smaller diameter than the inside diameter of consolidometer so that the specimen expands laterally to the inside of the ring.