• 제목/요약/키워드: Resistive Pressure Sensor

검색결과 25건 처리시간 0.025초

가열 전극 통합 채널 공진기의 진공 환경 구동에 의한 열물성 측정의 민감도 향상 (Sensitivity Enhancement for Thermophysical Properties Measurements via the Vacuum Operation of Heater-integrated Fluidic Resonators)

  • 고주희;이정철
    • 센서학회지
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    • 제32권1호
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    • pp.39-43
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    • 2023
  • Microscale thermophysical property measurements of liquids have been developed considering the increasing interest in the thermal management of cooling systems and energy storage/transportation systems. To accurately predict the heat transfer performance, information on the thermal conductivity, heat capacity, and density is required. However, a simultaneous analysis of the thermophysical properties of small-volume liquids has rarely been considered. Recently, we proposed a new methodology to simultaneously analyze the aforementioned three intrinsic properties using heater-integrated fluidic resonators (HFRs) in an atmospheric pressure environment comprising a microchannel, resistive heater/thermometer, and mechanical resonator. Typically, the thermal conductivity and volumetric heat capacity are measured based on a temperature response resulting from heating using a resistive thermometer, and the specific heat capacity can be obtained from the volumetric heat capacity by using a resonance densitometer. In this study, we analyze methods to improve the thermophysical property measurement performance using HFRs, focusing on the effect of the ambience around the sensor. The analytical method is validated using a numerical analysis, whose results agree well with preliminary experimental results. In a vacuum environment, the thermal conductivity measurement performance is enhanced, except for the thermal conductivity range of most gases, and the sensitivity of the specific heat capacity measurement is enhanced owing to an increase in the time constant.

Structural and temperature coefficient of resistance characteristics of colossal magnetoresistance Mn oxides prepared by RF sputtering

  • Choi, Sun-Gyu;Ha, Tae-Jung;Reddy, A.Sivasankar;Yu, Byoung-Gon;Park, Hyung-Ho
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.361-361
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    • 2007
  • A lot of efforts have been paid to develop infrared imaging systems in last decades. Bolometer has a wide range of applications from military to commercial, such as military night vision, medical imaging system and so on. Bolometer is a resistive sensor that detects temperature changes through resistance change. To improve detecting ability, bolometer should have a good resistive film which has high temperature coefficient of resistance (TCR) value. Colossal magnetoresistance (CMR) $L_{1-x}A_xMnO_3$ (where L and A are trivalent rare-earth ions and divalent alkaline earth ions, respectively.) are received attention to apply bolometer resistive film because it has a high TCR property which was discovered in the metal to semiconductor phase transition temperature region. In this work, CMR films were deposited on various substrates in relative low substrate temperature by RF magnetron sputtering. The influence of deposition parameters such as substrate temperature, gas partial pressure, and so on have been studied. The structural and TCR properties of the films were also investigated for applying to microbolometer.

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한방용(韓方用) 맥파 검출시스템 (Radial Pulse Wave Detection system for the Korean Medicine)

  • 이호재;김진우;김흥오;박영배;허웅
    • 대한의용생체공학회:학술대회논문집
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    • 대한의용생체공학회 1991년도 추계학술대회
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    • pp.66-69
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    • 1991
  • This paper describes a design of transducer for non-invasively detecting pressure radial pulse wave in aterial system and a recording system that for the studing the aterial pulse diagnosis of korean traditional medicine. The mechanism of transducer is composed of sensing mechanism, pressure sensor, conditioning amplifier. The variation of radial pulse pressure in the sensing mechanism is converted to the electric signal by piezo-resistive pressure sensor and it converted to the digital signal after preprocessing via A/D converter. The converted signals inputed to the computer as data files and then it display to the monitor for waveform watching and this datas can be used as the aterial pulse diagnosis data. This system effectively detect non-differential radial pulse wave and we conside that if analizing the recorded radial pulse wave, compared each other, it can be helpful in quantify radial pulse wave diagonosis of the Korean traditional medicine.

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RTD 및 피에조 센서를 활용하는 풍향/풍속 측정장치 개발 (The Developement of a Wind Direction/Speed Measurement Equipment Using RTD or Piezo Sensors)

  • 주재훈;김동현;공병권;이진호;최중경
    • 한국정보통신학회:학술대회논문집
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    • 한국해양정보통신학회 2011년도 춘계학술대회
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    • pp.827-830
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    • 2011
  • 본 논문에서는 풍향 풍속 계측모듈 및 DSP 센서인터페이스 회로시스템을 제안한다. 이 DSP 시스템은 풍향 풍속모듈, 대기압센서, 대기 온도 센서의 정보를 받아들이고, 빠르게 처리하여 PC 모니터링 시스템에 전달한다. 특히 풍향 풍속 모듈과 DSP 하드웨어는 직접 설계하여 적용한다. 풍향 풍속 모듈은 바람에 관한 벡터적 정보를 얻기 위해 4개의 박막형 RTD(Resistive Temperature Detectors) 또는 박박형 피에조센서를 원기둥 모양의 지지표면에 벡터적으로 배치하는 구조를 채택한다. 이 구조를 채택한 계측 모듈은 진동, 습기, 부식 등에 강인하면서 정확한 계측을 가능케 한다. 센서 신호처리 회로는 TI 사의 고속 DSP인 TMS320F2812 를 사용한다.

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연하장애 환자의 혀 운동 및 측정 도구에 대한 고찰 (A Literature Review of Tongue Movement and Measurement Tools for Dysphagia)

  • 김진영;손영수;홍덕기
    • 재활치료과학
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    • 제11권4호
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    • pp.55-68
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    • 2022
  • 서론 : 본 연구는 연하장애 환자의 혀 운동 및 측정 도구들에 대한 고찰을 통해 도구의 원리와 특징을 확인하여 임상 적용을 위한 정보를 제공하고자 하였다. 본론 : 연하재활 분야에서 혀 운동 및 측정 도구로 활용되고 있는 15개의 도구를 확인하였고, 원리에 따라 벌브 센서 원리, 저항 센서 시트 원리, 마우스피스형 센서, 기타 기술의 도구로 분류하였다. 벌브 센서는 IOPI, KSA, TPM-01이 있었으며, 사용방법이 다소 간편하지만 혀의 압력 측정 시 위치 고정에 대한 제한점이 있었다. 저항 센서 시트는 I-SCAN, KEI, IPMD, PRESLA가 있었고, 모두 입천장에 고정이 가능하여 벌브 센서 원리에 비해 안정적인 위치에서 혀 압력 측정이 가능하다. 하지만 제작과정이 복잡하고, 많은 비용이 소모된다는 단점이 있었다. 마우스피스형 원리는 MOST, T-Station, SwallowSTRONG, LFDS가 있었으며, 도구의 특성상 개인의 구강에 맞게 제작되어 혀 압력 측정 시 고정이 가능하고, 안정적인 측정이 가능하다. 하지만 제작 과정에서 많은 비용이 발생하며, 세밀한 움직임의 측정과 내구성에 제한점이 있었다. 기타 도구로는 OPG, TTS, OroPress, TPWA가 있으며, 빛 감지의 원리와 무선 측정이 가능하다는 장점이 있다. 하지만 신뢰도와 타당도가 입증되지 않아 추후 연구가 필요한 실정이다. 결론 : 본 연구는 1990년대부터 현재까지 개발된 혀 운동 및 측정 도구들의 분석을 통해 연하재활 분야에서 활용할 수 있는 정보를 제시하였다. 이에 임상에서 도구의 선택 과정에 도움이 될 것으로 판단된다. 향후에는 기존 도구들의 장단점들을 고려하여 임상뿐만 아니라 가정에서도 활용 가능한 혀 운동 및 측정 도구 개발이 필요하다.

다결정 실리콘 카바이드를 이용한 마이크로 유량센서 (Micro flow sensor using polycrystalline silicon carbide)

  • 이지공;;이성필
    • 센서학회지
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    • 제18권2호
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    • pp.147-153
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    • 2009
  • A thermal flow sensor has been fabricated and characterized, consisting of a center resistive heater surrounded by two upstream and one downstream temperature sensing resistors. The heater and temperature sensing resistors are fabricated from nitrogen-doped(n-type) polycrystalline silicon carbide(poly-SiC) deposited by LPCVD(low pressure chemical vapor deposition) on LPCVD silicon nitride films on a Si substrate. Cavities were etched into the Si substrate from the front side to create suspended silicon nitride membranes carrying the poly-SiC elements. One upstream sensor is located $50{\mu}m$ from the heater and has a sensitivity of $0.73{\Omega}$/sccm with ${\sim}15\;ms$ rise time in a dynamic range of 1000 sccm. N-type poly-SiC has a linear negative temperature coefficient and a TCR(temperature coefficient of resistance) of $-1.24{\times}10^{-3}/^{\circ}C$ from room temperature to $100^{\circ}C$.

인솔형 국부 전단센서의 개발 및 보행 시 발바닥의 국부 전단력 측정 (A Development of an Insole Type Local Shear Measurement Transducer and Measurements of Local Plantar Shear Force During Gait)

  • 정임숙;안승찬;이진복;김한성;김영호
    • 한국정밀공학회지
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    • 제22권6호
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    • pp.213-221
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    • 2005
  • An insole type local shear force measurement system was developed and local shear stresses in the foot were measured during level walking. The shear force transducer based on the magneto-resistive principle, was a rigid 3-layer circular disc. Sensor calibrations with a specially designed calibration device showed that it provided relatively linear sensor outputs. Shear transducers were mounted on the locations of four metatarsal heads and heel in the insole. Sensor outputs were amplified, decorded in the bluetooth transmission part and then transferred to PC. In order to evaluate the developed system, both shear and plantar pressure measurements, synchronized with the three-dimensional motion analysis system, were performed on twelve young healthy male subjects, walking at their comfortable speeds. The maximum peak pressure during gait was 5.00kPa/B.W at the heel. The time when large local shear stresses were acted correlated well with the time of fast COP movements. The anteroposterior shear was dominant near the COP trajectory, but the mediolateral shear was noted away from the COP trajectory. The vector sum of shear stresses revealed a strong correlation with COP movement velocity. The present study will be helpful to select the material and to design of foot orthoses and orthopedic shoes for diabetic neuropathy or Hansen disease.

RF 스퍼터된 바나듐 산화막의 습도 감지 특성 (Humidity-Sensing Properties of RF Sputtered Vanadium Oxide Thin Films)

  • 최복길;최창규;김성진
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제55권10호
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    • pp.475-480
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    • 2006
  • Vanadium oxide thin films (VOx) have been deposited by RF magnetron sputtering from $V_2O_5$ target under different oxygen partial pressure ratios(0%, 10%) and substrate temperatures$(27^{\circ}C,\;400^{\circ}C)$. Crystallographic structure and morphology of the films are studied by XRD and SEM. Humidity-sensing properties of resistive sensors having interdigitated electrode structure are characterized through electrical conduction measurements. The films deposited at room temperature are amorphous whereas the ones deposited above foot are polycrystalline. The sensors show good response to humidity over 20%RH to 80%RH. Vanadium oxide thin films deposited with $0%O_2$ partial pressure at $400^{\circ}C$ exhibit greater sensitivity to humidity change than others.

접촉성 손-위치 반응(Contactual Hand-Orientating Response)이 만성 뇌졸중환자의 일어서기 동작에 미치는 영향 (The Effects of Contact Hand-Orientation Response(CHOR) During Sit-to-stand(STS) in People with Stroke)

  • 서태화;양시은;이홍균
    • 신경치료
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    • 제22권3호
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    • pp.31-36
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    • 2018
  • Purpose The purpose of this study was to investigate the effects of contact handorientation response(CHOR) during sit-to-stand(STS) in people with stroke. Methods The subjects of the study were Thirty hemiplegia participated (Rt. hemiplegia/Lt. hemiplegia: 15/15, mean age: $65.82{\pm}8.53$) in this study. The analysis of muscles activation (rectus femoris, biceps femoris, tibialis anterior, gastrocnemius) distribution was conducted by the EMG, and the analysis of foot pressure distribution was conducted by the resistive pressure sensor. Hemiplegic stroke patients were instructed to perform STS three times with the non-affected side hand and affected side hand on the table. Results There was a significant positive correlation between rectus femoris, tibialis anterior muscle activation and affected side hand contact during STS(p<0.05). The STS correlated with the foot pressure in the affected side hand contact(p<0.05). Conclusion AS a result, CHOR during STS is related to muscle activation and the characteristics of foot pressure. This information was observed in the affected side hand contact on the table, suggestion that rehabilitation programs should be implemented.

Zinc acetate를 precursor로 한 고저항 ZnO막의 제조 및 습도감지 특성 (Fabrication of High-resistive ZnO Films Using Zinc acetate as Precursor and Their Humidity-sensing Properties)

  • 마대영;김상현;김영일
    • 센서학회지
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    • 제5권1호
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    • pp.37-42
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    • 1996
  • 기존의 진공증착 방법으로 $SiO_{2}$ 막이 성장된 Si웨이퍼 위에 ZnO막을 제조하였다. Anhydrous zinc acetate를 자체 제작한 황동보트안에 넣고 가열하여 승화시켰다. 기판온도는 $200^{\circ}C$에서 $600^{\circ}C$까지 변화시켰으며 공정중에 산소를 주입하여 챔버내 산소 분압을 증가시켰다. 증가된 산소분압에 의해 고저항의 ZnO막을 얻을 수 있었다. 제조된 막의 결정성 및 성분을 알기 위해 XRD, EDS 및 RBS 측정을 하였다. 고저항의 ZnO막은 70%이상의 상대습도에 매우 민감한 저항감소를 나타내었다.

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