• 반도체디스플레이기술학회지
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• 제3권2호
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• pp.11-15
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• 2004

Scales, accumulated on some parts of semiconductor equipments such as sputters and CVD during the device fabrication processes, often lower the lifetime of the equipments and production yields. Thus, many equipment parts have be cleaned regularly. In this study, an attempt to establish an effective process to remove scales on the sidewall of collimators located inside the chamber of the sputter was made. The EDX analysis revealed that the scales were composed of Ti and TiN with the columnar structure. Through the trial-and-error experiments, it was found that the etching in the $HNO_3$:$H_2SO_4$:$H_2O$=4:2:4 solution for 5.5 hrs at $67^{\circ}C$, after the oxide removal in the HF solution, and the heat-treatment at $700^{\circ}C$ for 1 min., was the most effective process for the scale removal.

• Advances in pediatric surgery
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• 제13권2호
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• pp.112-118
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• 2007

Ingested foreign bodies are common occurrences in the pediatric population. From October 2002 to April 2006, eight patients (6 male, mean age: $30.9{\pm}14.4$ months, range: 7~45 months) who had ingested metallic foreign bodies, such as bar magnets, coin-type magnets, screws, metal beads, and disk batteries, were selected for foreign body removal using a magnetic device under floroscopic control. A 1-cm-long cylindrical magnet (6 mm in diameter) was placed at the end of a 150-cm-long plastic tube from an IV set. The magnet was passed through the mouth into the stomach. Under fluoroscopic control, the magnet was maneuvered so that it attached to the metallic foreign bodies. The forgeign body was then easily removed by retracting the magnet with the metallic object attached. This procedure was successful in six patients of 8 patients. This procedure is a minimally-invasive and may avoid the use of anesthesics, endoscopy or surgery.

• 해양환경안전학회지
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• 제3권2호
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• pp.77-84
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• 1997

For the effective treatment of shipboard sewage continuously, a non-diaphragm electrolytic treatment device using DSA type insoluble electrode, Ti/IrO2, anode and H-C metal cathode, was studied. The most effective electrolytic conditions were obtained when cell clearance, 6mm, pH 5-6 and the concentration of seawater, more than 20% as batch test results. The COD removal rate was varied in logarithmic function, showed as C=Coe-KE and the required current was E = A/QCo [A.min/mgCOD]. When the COD removal effeciency was more than 90%, the electrolytic reaction constant was 0.02.

• 한국정밀공학회지
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• 제13권11호
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• pp.46-56
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• 1996

Planarization technique is rapidly recognized as a critical step in chip fabrication due to the increase in wiring density and the trend towards a three dimensional structure. Global planarity requires the preferential removal of the projecting features. Also, the several materials i.e. Si semiconductor, oxide dielectric and sluminum interconnect on the chip, should be removed simultaneously in order to produce a planar surface. This research has investihgated the development of the chemical mechanical polishing(CMP) machine with uniform pressure and velocity mechanism, and the pad insensitive to pattern topography named hard grooved(HG) pad for global planarization. Finally, a successful result of uniformity less than 5% standard deviation in residual oxide film and planarity less than 15nm in residual step height of 4 inch device wafer, is achieved.

• 생태와환경
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• 제47권3호
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• pp.214-218
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• 2014

본 연구노트는 K-water가 고안하여 개발한 녹조수상 콤바인 장치에 대하여 소개하고자 하였다. 녹조제거장치는 본체와 부력재, 이송호퍼, 스크린 컨베이어, 슬러지 제거기 및 수거물질 분리대 등 총 5개 모듈로 구성되어 있다. 그리고 스컴성 녹조현상 이하일 때 녹조제거제를 전처리할 수 있는 살포기가 별도로 장착되어 있다. 전반적으로 본 장치의 모듈 시스템은 매우 간단하다. 2014년 5월부터 7월까지 낙동강 및 대청호 현장에서 테스트 운영한 결과, 1일 처리할 수 있는 수표면적은 $500,000m^2day^{-1}$에 해당하였다. 그리고 장치 적용 전후 처리효율은 90%를 상회하였고, 수처리량은 수질 상태에 따라 차이가 있지만 $500,000m^3day^{-1}$은 가능하였다. 또한 장치의 운영기간은 3월~11월(9개월) 동안으로써 기존 계획보다 연장될 수 있었다. 본 장치 및 기술을 통해 상수원과 공공수역의 녹조현상 및 사회문제로 확대된 파급 영향을 해결하는 데 기여할 수 있는 신기술로서 활용되기를 기대한다.

• 대한의용생체공학회:의공학회지
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• 제38권2호
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• pp.62-73
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• 2017

To identify a solution for the restricted availability of healthy lungs and the high risk of immune rejections following organ transplantation, tissue engineering techniques for culturing lungs have been studied by many research groups. The most promising method for culturing lungs is the utilization of a bio-scaffold that was prepared using harvested organs from human donors or other animals by removing their original cells. In this study, a pulsatile perfusion pump was used to alleviate the cell removal effect with the high fluid-dynamic power of the perfusion stream during the decellularization process, while other conventional studies focused on chemical methods to identify efficient detergents. The purpose of this study was to analyze the developed device by using energy equivalent pressure (EEP), which is an indicator of pulsatility, to understand the characteristics of pulsatile energy transmitted according to the load size by using the artificial model and compare it with the measured EEP. The pulsatility of the device can be estimated with the concept of fluid-dynamic energy during a particular constant time period or fluid-dynamic power represented as EEP and EEP increment. Because the measured EEP of perfusion flow during decellularization can be changed by the amount of fluid leakage and the degree of clogging in the capillary vessels, EEP should be measured to determine whether the decellularization is progressing without problems. The decrement of EEP caused by the high perfusion resistance was observed from some experimental results that were obtained with artificial models. EEP can be used to monitor the decellularization process after analyzing the varying EEP according to the amount of load. It was confirmed that the EEP was maintained at a high level in the experiment using the harvested lungs from 12-13-week-old rats. In addition, it was confirmed that the cell removal time was faster than when continuous perfusion was performed. In this study, pulsatile power delivered to the lungs was measured to monitor the process of cell removal, and it serve as the evidence for efficient decellularization.

• Korean Chemical Engineering Research
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• 제55권6호
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• pp.816-821
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• 2017

하수 및 폐수 내 고농도의 인 및 부유물질 제어를 위해 개발한 일체형 완속교반/침전 그물망 압착식 섬유여과시스템을 이용하여 하수처리장의 반류수 내 부유성 고형물 및 인 처리에 적용했을 경우에 따른 성능을 검토하고자 하였다. 6가지 Mode로 실험을 하였으며, 16.7, 33.3, 41.7 및 50.0 ton/day 유량과 Al/P 몰비 2~4의 조건에서 실험을 행하였다. 응집제를 주입하였을 경우에 모두 높은 총인(T-P) 제거 효율을 보였지만 연속운전시간이 7.8 min~11.4 min으로 짧아지는 단점이 생겼다. 이를 극복하기 위해 일체형 완속교반/침전 그물망 압착식 섬유여과시스템을 응집/급속교반/공기주입/완속교반/침전공정 및 여과공정으로 진행 시 연속운전시간이 88.2 min으로 다른 모드로 운전한 결과에 비해 8~11.3배 정도 증가하였다. 역세수량율도 5.4%로 매우 낮게 나타남에 따라 이 공정이 가장 효율적인 처리방안으로 평가되었다.

• 해양환경안전학회지
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• 제25권7호
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• pp.927-935
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• 2019

연안 해역에서 소형 선박의 프로펠러 고장으로 인한 사고가 지속적으로 발생하고 있다. 특히, 해상부유물(폐그물 및 로프 등)에 의하여 선박 프로펠러가 감기는 사고가 빈번히 일어나고 있다. 선박 프로펠러 감김 사고는 동력 상실로 인한 선박의 운항 지연 및 표류로 인한 1차 사고와 프로펠러에 감긴 로프을 제거하기 위한 잠수 작업등으로 인한 2차 사고의 우려가 있다. 이러한 빈번한 프로펠러 감김 사고에도 불구하고 문제를 해결할만한 적절한 도구가 없어 선박을 육상으로 인양하여 수리하거나, 잠수부가 직접 선박 아래로 잠수하여 문제를 해결하고 있는 실정이다. 이에 따라, 최근 선박 프로펠러 감김 사고를 예방하기 위해 프로펠러 샤프트에 로프절단장치를 일부 소형선박에 장착하고 있으나 비교적 높은 설치비용 및 시간이 으로 인하여 원활하게 적용되어지지 않는 것으로 판단된다. 본 연구에서는 이러한 문제점을 해결하기 위해 기계톱 원리를 이용한 간단한 구조를 가진 수중절단기 기구 설계 및 제어기 개발을 수행하였다. 수중절단기의 톱날은 직선왕복동작을 위해 유성기어와 크랭크핀을 사용함으로써 긴 행정을 가질 수 있도록 하였다. 또한 수중절단기는 소형 선박에 비치되어있는 배터리를 이용하여 작동시킬 수 있도록 하였다. 또한, 비전문가인 사용자가 보다 편리하고 안전하게 사용할 수 있도록 역전류 방지 및 속도제어회로를 적용하여 편리성 및 안정성을 확보하였다.

• KSII Transactions on Internet and Information Systems (TIIS)
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• 제9권2호
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• pp.483-503
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• 2015

This paper analyzes the optimal user density and power allocation for Device-to-Device (D2D) communication underlaying cellular networks on multiple bands with the target of maximizing the D2D transmission capacity. The entire network is modeled by Poisson point process (PPP) which based on stochastic geometry. Then in order to ensure the outage probabilities of both cellular and D2D communication, a sum capacity optimization problem for D2D system on multiple bands is proposed. Using convex optimization, the optimal D2D density is obtained in closed-form when the D2D transmission power is determined. Next the optimal D2D transmission power is obtained in closed-form when the D2D density is fixed. Based on the former two conclusions, an iterative algorithm for the optimal D2D density and power allocation on multiple bands is proposed. Finally, the simulation results not only demonstrate the D2D performance, density and power on each band are constrained by cellular communication as well as the interference of the entire system, but also verifies the superiority of the proposed algorithm over sorting-based and removal algorithms.

• 한국기후변화학회지
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• 제9권1호
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• pp.75-80
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• 2018

The problem of water shortages and water related disasters caused by climate change has increased the seriousness of water problems and the importance of water treatment technology capable of securing clean water is expanding. In this study, we analyzed not only the water pollutant generated by the filtration system technology of various water treatment technologies but also the indirect greenhouse gas emissions generation, and analyzed the influence on the environment. The subjects of study are Fabric Filter, Reverse Osmosis System and Pressurized Microfiltration Device which are widely used for water treatment and we analyzed the impact on the environment using the Life Cycle Assessment (LCA) method using the electricity amount necessary for use, the water purification efficiency, the throughput per ton and the cost. The amount of greenhouse gas generated when the Pressurized Microfiltration Device operates for 1 year is $2.15E+04kg\;CO_2-eq$., Fabric Filter is $3.29E+04kg\;CO_2-eq$., and Reverse Osmosis System is $1.68E+05kg\;CO_2-eq$. As a result of analyzing the amount of greenhouse gas generated at the time of purifying 1 ton of the Pressurized Microfiltration Device and the conventional filtration system, the Pressurized Microfiltration Device was $20.5g\;CO_2-eq$., Fabric Filter was $34.7g\;CO_2-eq$., and Reverse Osmosis System was $191.7g\;CO_2-eq$. The amount of greenhouse gas generated was calculated to be 41.0% less than that of the Fabric Filter by the Pressurized Microfiltration Device and 89.3% less than the Reverse Osmosis System. From the viewpoint of climate change, it is necessary to select a filtration system that takes climate change into account, not from the viewpoint of water quality removal efficiency and economic efficiency according to future water treatment applications, and it is necessary to select a water treatment filtration system more researches and improvements will be made for.