• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.773-777
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• 2002

In this study, we analyzed the LPG and LNG sensitivity measurement and voltage variation using catalytic type gas sensor characteristics in catalytic combustion type gas detecter sensors. gas detector shall operate as intended when exposed for 24 hours to air having a relative humidity of 0~85 percent at a temperature of $20[{\mu}m]$ and humidity of 45 percent at a temperature of $-10{\sim}40[^{\circ}C]$ the gas detecter sensors are to be subjected to operation for 210 days in an area that has been detemined to be equivalent to a typical residential atmosphere with an air velocity of 50 [cm/sec]. The source of energy for a gas detector sensors employing a supplementary basic circuit is energized from a separate source of supply direct applied voltage 2.1[V], 2.2[V], 2.3[V]. As a result, it was confirmed that the relative humidity and temperature by regression each analysis, compared to the LPG characteristic graph and methane characteristics graph by a relative humidity of 0 ~ 85 [%] at a temperature range of $-10{\sim}40[^{\circ}C]$ show a similar linear pattern on the whore.

• 센서학회지
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• 제1권2호
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• pp.125-130
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• 1992

습도감지물질로서 PMMA박막을 사용하여 저항형 습도감지소자를 제조하고 그 특성을 조사하였다. PMMA에 DVB를 첨가하여 가교결합을 일으키고 여기에 PVA를 섞어 제조된 습도센서는 상대습도의 증가에 따라 저항의 변화를 나타내었으며, 흡착에 비해 탈착 시 약 3% 미만의 히스테리시스 특성을 나타내었다. 또한 제조된 소자는 좋은 장기안정도를 보였으며, 응답시간은 흡착시에는 약 7분, 탈착시에는 약 5분이었다.

• 센서학회지
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• 제19권5호
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• pp.337-341
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• 2010

In this work, the nanocrystalline ZnO/polycrystalline(poly) aluminum nitride(AlN)/ Si-layered structure was fabricated for humidity sensor applications based on surface acoustic wave(SAW). The ZnO film was used as a sensitive material layer. The ZnO and AlN(0002) were deposited by a sol-gel process and a pulse reactive magnetron sputtering, respectively. The ZnO sensitive films coated on AlN have a hexagonal wurtzite structure after the thin films annealed at $400^{\circ}C$, $500^{\circ}C$ and $600^{\circ}C$. The surface of the film exhibits sponginess and a nanometer particle size(below 50 nm). The largest shift in the frequency response was at approximately 200 kHz(the relative humidity: 10 %~90 %) for the structure annealed at $400^{\circ}C$. The effect of the change in the environmental temperature on the frequency response of the SAW humidity sensor was also investigated.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.247-248
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• 2006

Carbon nitride films were evaluated that they had many advantages for miniature micro-humidity-sensors using the standard CMOS technology humidity sensing properties and CV characteristics of the carbon nitride films have been investigated for fabricating one chip HUSFET(Humidity Sensitive Field Effect Transistor) humidity sensors Carbon nitride films were deposited on silicon substrate with meshed electrodes by reactive RF magnetron sputtering system. The capacitor-type humidity sensor revealed good humidity-impedance characteristics with a wide range of relative humidity changes, decreasing $254k{\Omega}$ to $16k{\Omega}$ according to increase of relative humidity between 5% ~ 95% and the films were very stable on the Si wafer. These results reveal that $CN_x$ thin films can be used for Si based or HUSFET structure one chip micro-humidity sensors.

• Macromolecular Research
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• 제17권4호
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• pp.227-231
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• 2009

New polyelectrolytes derived from poly(amide-sulfone)s and 1,5-dibromopentane were simultaneously fabricated on the electrode by the crosslinking reaction. The substrate was pretreated with a bromoalkyl-containing, silane-coupling agent to anchor the humidity-sensitive membrane to the substrate through the covalent bond. When the resistance dependence on the relative humidity of the crosslinked poly(amide-sulfone)s was measured, the resistance varied by three orders of magnitude between 20%RH and 90%RH, which was the required RH range for a humidity sensor operating at ambient humidity. Their water durability, long-term stabilities under various environments, hysteresis and response and recovery times were measured and evaluated as a humidity-sensing membrane.

• 센서학회지
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• 제23권1호
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• pp.42-45
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• 2014

Recently, tremendous application utilizing electrospun nanofibers have been actively reported due to its several advantages, such as high surface to volume ratio, simple fabrication and high-throughput manufacturing. In this paper, we developed highly sensitive and consistent nanofiber humidity sensor by electrospinning. The humidity sensor was fabricated by rapid electrospinning (~2 sec) $TiO_2$/PVP/LiCl mixed solution on the micro-interdigitated electrode. In order to evaluate the humidity sensing performances, we measured current response using DC bias voltage under various relative humidity levels. The results show fast response / recovery time and marginal hysteresis as well as long-term stability. In addition, with the aid of micro-interdigitated electrode, we can reduce a total resistance of the sensor and increase the total reaction area of nanofibers across the electrodes resulting in high sensitivity and enhanced current level. Therefore, we expect that the electrospun nanofiber array for humidity sensor can be feasible and promising for diverse humidity sensing application.

• 센서학회지
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• 제30권4호
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• pp.243-249
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• 2021

Humidity is an important physical quantity that is closely related with the quality of everyday life as well as the quality control of products in various industries. Here, we have developed a divided-flow type humidity generator of which humidity generation is faster than the saturator-based humidity generator in ppm level. The operation principle of the divided-flow humidity generator is first introduced. Then, the performance of the divided-flow humidity generator is verified by testing the radiosonde humidity sensor at low temperature. As a result, the humidity generated from the divided-flow humidity generator is consistent with the saturator-based precision humidity generator within 1.6% relative humidity in the range from 10% to 40% at -45 ℃. It is also found that the radiosonde humidity sensor shows measurement errors by 3% - 5% at -45 ℃ when it is only calibrated at room temperature. The response times of radiosonde humidity sensor using the divided-flow humidity generator are between about 2 and 9 minutes, whereas those by the saturator-based humidity generator are about 20 minutes. In this regard, the divided-flow humidity generator has a merit in terms of fast humidity changes for the calibration of radiosonde humidity sensors at low-temperatures.

• 한국항행학회논문지
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• 제27권1호
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• pp.71-76
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• 2023

본 논문에서는 마이크로스트립 패치 안테나와 폴리비닐알코올(PVA; polyvinyl alcohol)을 이용한 습도 센서에 대하여 연구하였다. PVA는 습도에 따라 유전율이 변하는 고분자 물질이며, 전계 변화에 민감한 마이크로스트립 패치 안테나의 방사면에 직사각형 슬롯을 추가하여 비유전율 변화에 대한 감도를 높였다. 0.76 mm 두께의 RF-35 기판에 제작된 안테나의 직사각형 슬롯이 추가된 방사면 주변을 PVA로 얇게 코팅한 후, 온습도 챔버를 사용하여 25도에서 상대습도를 40%에서 80%까지 10% 간격으로 증가시켜 안테나 입력 반사 계수의 공진 주파수와 크기의 변화를 측정하였다. 실험 결과, 상대습도가 40%에서 80%로 증가할 때 안테나 입력 반사 계수의 공진 주파수는 2.447 GHz에서 2.418 GHz로 감소하였고, 입력 반사 계수의 크기는 -7.112 dB에서 -3.428 dB로 증가하였다.

• 한국세라믹학회지
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• 제27권4호
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• pp.529-535
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• 1990

This paper describes the factors which control the impedance-relative humidity characteristics of the TiO2-V2O5 humidity sensor. To obtain the quantitative relationships between impedance and many manufacturing parameters such as V2O5mol%, the sintering time and temperature, various sets of samples are preared and tested. With changing relative hymidity from 20% to 80%, it is measrued that the corresponding capacitance and impedance from the semicircles which complex impedance plots make. As a result we found that the impedance-relative humidity characteristics are mainly controlled by the doping amount of V2O5 total pore volume and bulk resistence of the elements. We can assume the equivalent circuits of each samples and finally control the sintering time to get a linear humidity impedance response curve which plays an important role in device making. 4mol% V2O5-TiO2 specimen sintered at 90$0^{\circ}C$ for 10min. show liear log(Z) vs. RH characteristics and 10mol% V2O5-TiO2 specimen sintered at the same temp. for 20min. show linear (Z) vs. RH.

• Macromolecular Research
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• 제13권3호
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• pp.265-272
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• 2005

Polyelectrolyte membranes for humidity-sensing were fabricated using a layer-by-layer adsorption process based on the spontaneous self-assembly of alternating layers of cationic and anionic polymers on a silanized ITO patterned glass substrate. The substrate is dipped successively into dilute solutions of a polyanion and a polycation. The homopolymers and copoymers of diallyldimethylammonium chloride (DDA), allylamine hydrochloride (AA), 2-[(methacryloyloxy)ethyl]trimethyl ammonium chloride (METAC) and vinylbenzyl tributyl phosphonium chloride(VTBPC) were used as the polycations. In this experiment, it was found that the resistance varied according to the chemical structure of the polycation. The resistance varied from $10^7$ to $10^5$ $\Omega$, as the humidity was increased from 60 (relative humidity) to $95\%$RH, which is the range of RH values required for a dew sensor operating at high humidity.