• Journal of Sensor Science and Technology
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• v.26 no.6
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• pp.397-401
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• 2017

A DC resistance type humidity sensor using conductive carbon ink was fabricated and its performance was evaluated. The humidity sensor was fabricated using a screen printing technique and have a structure that does not require additional metal electrodes to measure resistance change. To evaluate the performance of the humidity sensor, we measured the DC resistance change under various relative humidity levels. The fabricated humidity sensor showed a resistance change of about $2.5{\sim}50k{\Omega}$ in 11 ~ 95% RH environment. It also shows a linear relationship in the relative humidity versus log DC resistance graph. In comparison with commercial humidity sensor under real environment, it can be confirmed that the resistance of the humidity sensor changes to almost the same level as the measured humidity. These results show that the resistance type humidity sensor can be operated stably in actual environment.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.24 no.3
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• pp.224-228
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• 2011

This research, integratable capacitive relative humidity sensor was produced using polyimide on glass substrate. Also, at the time of upper electrode formation, upper electrode grain size was affected by giving changes to sputtering condition. Through this analyzing electrical characteristics affect from capacitive relative humidity sensor was possible. Capacitance of capacitive relative humidity sensor was 330 pF, linearity of 0.6%FS and it showed less than 3% of low hysterisis. Specially, hysterisis was affected more from interface than interstitial. Also was affected by the grain size which is one of the formation condition of upper electrode.

• Transactions of the Korean hydrogen and new energy society
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• v.25 no.5
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• pp.491-499
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• 2014

It is important to accurately measure and control the relative humidity of humidified gas entering a PEM (polymer electrolyte membrane) fuel cell stack because the level of humidification strongly affects the performance and durability of the stack. Humidity measurement devices can be used to directly measure the relative humidity, but they cost much to be equipped and occupy spaces in a fuel cell system. We present soft sensors for predicting the relative humidity without actual humidity measuring devices. By combining FIR (finite impulse response) model with PLS (partial least square) and SVM (support vector machine) regression models, DPLS (dynamic PLS) and DSVM (dynamic SVM) soft sensors were developed to correctly estimate the relative humidity of humidified gases exiting a planar-type membrane humidifier. The DSVM soft sensor showed a better prediction performance than the DPLS one because it is able to capture nonlinear correlations between the relative humidity and the input data of the soft sensors. Without actual humidity sensors, the soft sensors presented in this work can be used to monitor and control the humidity in operation of PEM fuel cell systems.

• Proceedings of the KIEE Conference
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• 1994.07b
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• pp.1388-1390
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• 1994

A polyimide-based capacitive humidity sensor has been designed and fabricated using silicon integrated-circuit technology, and its performance measured. The sensor showed excellent linearity, low temperature coefficient, and low hysteresis over a wide range of relative humidity and temperature. The signal conditioning circuits for detecting relative humidity and converting it to voltage have been developed based on a charge redistribution between capacitors using switched -capacitors.

• Journal of the Korean Ceramic Society
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• v.37 no.6
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• pp.537-544
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• 2000

Thin-film humidity sensor which TiO2, ZrO2, or CeO2 was added to MgCr2O4-based materials, respectively, were fabricated on the alumina substrate by using a resistant-heating evaporator. Thin films were approximately 2${\mu}{\textrm}{m}$ in grain size and shwoed porous microstructures. The resistance of the sensor decreased with increasing the relative humidity and the MgCr2O4-TiO2 sensor had the best humidity-sensing characteristics (linearity in relative humidity versus resistance).

• Journal of Sensor Science and Technology
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• v.21 no.6
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• pp.420-424
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• 2012

We have investigated temperature dependence and long-term change of humidity measurement from 32 relative humidity sensors. The readings of the humidity sensors depended not only the reference humidity, but also temperature of the chamber. Approximately, the temperature dependence of the humidity sensor in average was 0.05 %R.H./$^{\circ}C$ in the temperature range from $5^{\circ}C$ to $55^{\circ}C$. For humidity sensors that have an internal temperature compensation circuit, the resulting temperature dependence was weaker by 20%. It should be also noted that for the humidity sensors used in this work underwent ${\pm}3$ %R.H. change per year for level of confidence of 95%. The users of relative humidity sensors may refer this value as a minimum change when they set the calibration interval of the humidity sensors.

• Journal of Mechanical Science and Technology
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• v.20 no.4
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• pp.505-512
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• 2006

This paper presents an integrated multifunctional sensor based on MEMS technology, which can be used or embedded in mobile devices for environmental monitoring. An absolute pressure sensor, a temperature sensor and a humidity sensor are integrated in one silicon chip of which the size is $5mm\times5mm$. The pressure sensor uses a bulk-micromachined diaphragm structure with the piezoresistors. For temperature sensing, a silicon temperature sensor based on the spreading-resistance principle is designed and fabricated. The humidity sensor is a capacitive humidity sensor which has the polyimide film and interdigitated capacitance electrodes. The different piezoresistive orientation is used for the pressure and temperature sensor to avoid the interference between sensors. Each sensor shows good sensor characteristics except for the humidity sensor. However, the linearity and hysteresis of the humidity sensor can be improved by selecting the proper polymer materials and structures.

• Transactions of the Korean hydrogen and new energy society
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• v.33 no.4
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• pp.353-362
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• 2022

In this study, water diffusion in proton exchange membrane fuel cell at open circuit voltage (OCV) was analyzed through experiment. First, the reliability of the micro-sensor (SHT31) was verified. It was concluded the micro-sensor has an excellent reliability at 60℃ and 70℃. After the sensor reliability test, the temperature and relative humidity measurement in bipolar-plate was conducted at OCV. To analyze water distribution and water flux, the temperature and relative humidity was converted into dew point. To the end, it was found water concentration affects water diffusion.

• Journal of Sensor Science and Technology
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• v.21 no.2
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• pp.83-89
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• 2012

A simple array of metal-insulator-metal capacitive elements was proposed for a potential application in humidity sensing platforms. We fabricated meso-scale sensors with different sizes(large-size: $2.7{\times}2.7mm^2$ ; mid-size: $1.5{\times}1.5mm^2$ ; small-size: $0.7{\times}0.7mm^2$) and characterized the performance of each design. Polyimide films were utilized as a humidity-sensitive layer. Capacitance changes of the polyimide layer were measured with respect to water absorption. The device showed sensitivity in the full range of relative humidity (RH) with excellent linearity(correlation coefficient > 0.994). This array structure exhibits unique advantages including easy fabrication process, high batch productivity, and high structural compatibility with various substrate materials. It is anticipated that this device structure will be potentially useful in unique applications including mapping spatial humidity variations over a meso-scale area and implementing flexible humidity sensing element arrays.

• Journal of Sensor Science and Technology
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• v.32 no.1
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• pp.51-54
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• 2023

We investigated a humidity sensor based on a polyimide-coated side-polished optical fiber. The polyimide film absorbed moisture, causing the resonant wavelength of the sensor to shift to a longer wavelength owing to the changes in the optical properties of the film. The experimental results showed that the resonant wavelength of the device shifted by 17-18 nm when relative humidity changed from 30% to 90%.