• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.461-464
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• 1999

Planar type thin film inductors have a potential for the application of miniaturized DC-DC converters. For those high current applications, the magnetic film with high current capability is required. The current capability of magnetic films is mainly determined from high saturation magnetization (4$\piM_s$) as well as large anisotropy field $(H_k)$. We fabricated a double rectangular spiral thin film inductor which consist of magnetic layer, coil and insulator. Highest inductance values as well as best frequency characteristics can be obtained from 5 MHz and quality factor exhibit about 7.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.272-273
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• 2007

This paper presents the characteristic of rectangular and octagonal spiral inductor using PGS(Patterned Ground Shield). We investigated variation of inductance and Q-factor with changing of turn number at fixed width, spacing and inner diameter. We confirmed that characteristic of inductance and Q-factor be appled PGS in rectangular and octagonal types spiral inductor by EM simulation tool. Inductance decreased irrespective of structure but Q-factor increased. When PGS not exist, Q-factor of Inductor is analogous at classification frequency but, rectangular is a few larger then octagonal in small turn number. The other side, When PGS is inserted, we confirmed that octagonal lager then rectangular in many turn number. Q-factor is improved in case of octagonal structure and small turn number by PGS effect.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.10 no.5
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• pp.402-408
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• 2017

In this paper, we analyzed the frequency characteristics of hexagonal spiral thin-film inductor based on non-contact AC coupling for wireless signal transmission. We compared and analyzed the frequency characteristics of the rectangular spiral inductor and the hexagonal spiral inductor according to the number of turns, the line width and the line spacing of the conductor. Hexagonal spiral inductor has more number of turns to has the same inductance as rectangular spiral inductor, but the overall length of the conductors is shortened. This reduces the self inductance and increases the mutual inductance so that the overall inductance can have the same value. Also, since the overall length of the conductor is shortened and the magnetic resistance is reduced, the quality factor and the self-resonant frequency performance can be secured. The proposed hexagonal spiral thin-film inductor has the inductance of 3.54nH at 2GHz, the quality factor of max 14.00 at 5.0GHz and the self-resonant frequency at about 11.3GHz.

• 한국정보통신설비학회:학술대회논문집
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• 2006.08a
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• pp.153-157
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• 2006

본 논문에서는 SoC 공정에 적용 가능한 spiral 인덕터의 특성에 대해 다루었다. 일정한 크기의 인덕터에서 턴 수의 변화에 따른 인덕턴스와 Q-factor의 변화를 보았다. HFSS 프로그램을 사용하여 턴 수와 선로의 폭이 같은 조건하에서 사각형 구조와 팔각형 구조를 갖는 인덕터의 인덕턴스와 Q-factor의 ?냅? 계산하였다. 사각형 구조와 팔각형 구조 모두 선로 폭 보다는 턴 수가 증가할수록 인덕턴스가 증가하였다. 턴 수가 증가할수록 Q-factor의 값은 사각형 구조는 감소한 반면 팔각형 구조는 증가하였다. spiral과 실리콘 사이에 PGS(Patterned Ground Shield)를 삽입하여 인덕턴스 및 Q-factor의 변화를 비교 분석하였다. 그 결과 PGS의 사용으로 사각형 구조와 팔각형 구조에서 턴 수에 따라 Q-factor의 값이 구조에 따라 서로 다른 방향으로 증감하는 것을 확인할 수 있었다.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.41 no.12
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• pp.125-130
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• 2004

The characteristics of on-chip spiral rectangular inductors in CMOS process are investigated through the simulation and experiment. The ADS-momentum is used for EM simulation, and the spiral inductors are fabricated with Hynix 0.35㎛ CMOS process. This research mainly concerned the effects of the geometric change in terms of the number of turns and the width of micro strip line. The measured and simulated results show that the Hynix 0.35㎛ process could support a top metal spiral inductor of 1nH to 6nH with Q-factor less than 5.

• Proceedings of the KIPE Conference
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• 2017.11a
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• pp.135-136
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• 2017

In this paper, a spiral inductor is designed and its inductance is calculated by the expended Grover method. To verify this, a rectangular planar inductor is printed by inkjet printer using conductive ink and the calculated inductance value is compared with its measured value.

• 한국정보통신설비학회:학술대회논문집
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• 2007.08a
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• pp.436-439
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• 2007

This paper describes the optimization of PGS(Patterned Ground Shield) of 5.5 turns rectangular spiral inductor using Taguchi's method. PGS is decrease method of parasite component by silicon substrate among dielectric loss reduction method. By using the taguchi's method, each parameter is fixed upon that PGS high poison(A), slot spacing(B), strip width(C) and overlap turn number(D) of PGS design parameter. Then we verified that percentage contribution and design sensitivity analysis of each parameter and level by signal to noise ratio of larger-the-better type. We consider percentage contribution and design sensitivity of each parameter and level, and then verify that model of optimization for PGS is lower inductance decreasing ratio and higher Q-factor increasing ratio by EM simulation.

• Proceedings of the KIEE Conference
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• 2005.07b
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• pp.1435-1437
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• 2005

An integrated inductor using the low temperature cofiring ceramics(LTCC) NiZnAg was fabricated. The inductor has a sandwitch structure, which consists of 18 turns-and-thin Ag rectangular spiral coils in 2-layers(10-turn & 8-turn in each layer). The two layers of Ag coils are among three thick Ni-Zn ferrite so the inductor has a dimension of 12.70mm$\times$12.70mm and 0.32mm thick. For the fabricated inductor, calculation method of inductance was given and it is confirmed that the calculated value is very close to the measured one. Finally as an application of the LTCC integrated inductor for low power electronic circuits, a LTCC boost DC/DC converter with 1W output power and 500KHz switching frequency using the inductor fabricated was developed. For the converter the maximum efficiency of about 87% was obtained.

• Journal of Magnetics
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• v.6 no.2
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• pp.73-76
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• 2001

A double rectangular spiral type inductor has been fabricated by using FeTaN films. The inductor is composed of internal coils sandwiched by magnetic layers. Characteristics of inductor performance are investigated with an emphasis on planarization of magnetic films. In the absence of the planarization process, the grating topology of the upper magnetic films over the coil arrays degrades the soft magnetic properties and the inductor performance. It also induces a longitudinal magnetic anisotropy with the easy axis aligned to the magnetic flux direction. This alignment prevents the upper magnetic films from contributing to the total induction. Glass bonding is a viable method for achieving a completely planar inductor structure. The planar inductor with glass bonding shows excellent performance: inductance of 1.1 $\mu H$, Q factor of 7 (at 5 MHz), and the current capability up to 100 mA.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.1776-1778
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• 2000

The demands placed on portable wireless communication equipment include low cost, low supply voltage, low power, dissipation, low noise, high frequency of operation, and low distortion. These design requirements cannot be met satisfactorily in many cases without the use of RF inductors. However, implementing the inductor on-chip has been regarded as an impractical task because of excessive substrate capacitance and substantial resistive losses due to metallization and the conductive silicon substrate. Hence, there is a great incentive to design, optimize, and model spiral inductors on Si substrate. So, we analyzed a chip inductors using electromagnetic analysis and established a set of design rules for rectangular spiral inductors.